KR101439051B1 - ＭｏＳｉ₂―계 코일 히터 및 그를 포함하는 관형 히터 모듈 - Google Patents

ＭｏＳｉ₂―계 코일 히터 및 그를 포함하는 관형 히터 모듈 Download PDF

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Publication number
KR101439051B1
KR101439051B1 KR1020130100481A KR20130100481A KR101439051B1 KR 101439051 B1 KR101439051 B1 KR 101439051B1 KR 1020130100481 A KR1020130100481 A KR 1020130100481A KR 20130100481 A KR20130100481 A KR 20130100481A KR 101439051 B1 KR101439051 B1 KR 101439051B1
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KR
South Korea
Prior art keywords
heater
coil
mosi
tubular
diameter
Prior art date
Application number
KR1020130100481A
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English (en)
Korean (ko)
Other versions
KR20140026303A (ko
Inventor
토시유키 쿠라토미
타카시 오노
Original Assignee
가부시끼가이샤 리켄
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Application filed by 가부시끼가이샤 리켄 filed Critical 가부시끼가이샤 리켄
Publication of KR20140026303A publication Critical patent/KR20140026303A/ko
Application granted granted Critical
Publication of KR101439051B1 publication Critical patent/KR101439051B1/ko

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • H05B3/64—Heating elements specially adapted for furnaces using ribbon, rod, or wire heater
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/54—Heating elements having the shape of rods or tubes flexible
    • H05B3/56—Heating cables
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/018—Heaters using heating elements comprising mosi2

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Resistance Heating (AREA)
KR1020130100481A 2012-08-23 2013-08-23 ＭｏＳｉ₂―계 코일 히터 및 그를 포함하는 관형 히터 모듈 KR101439051B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-184115 2012-08-23
JP2012184115A JP5508487B2 (ja) 2012-08-23 2012-08-23 管状ヒーターモジュール

Publications (2)

Publication Number Publication Date
KR20140026303A KR20140026303A (ko) 2014-03-05
KR101439051B1 true KR101439051B1 (ko) 2014-09-05

Family

ID=49084955

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130100481A KR101439051B1 (ko) 2012-08-23 2013-08-23 ＭｏＳｉ₂―계 코일 히터 및 그를 포함하는 관형 히터 모듈

Country Status (4)

Country Link
EP (1) EP2701458B1 (fr)
JP (1) JP5508487B2 (fr)
KR (1) KR101439051B1 (fr)
CN (1) CN103634953B (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5763856A (en) 1993-08-11 1998-06-09 Tokyo Electron Limited Heat treatment apparatus and method
WO2008108712A1 (fr) 2007-03-05 2008-09-12 Sandvik Intellectual Property Ab Élément chauffant et insert pour des fours électriques

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3812324A (en) * 1971-07-08 1974-05-21 Itt Glow coil ignitor
JPH08143365A (ja) 1994-11-15 1996-06-04 Riken Corp 二珪化モリブデンヒーター
SE522581C2 (sv) * 2002-02-27 2004-02-17 Sandvik Ab Element av molybdensilicidtyp
US8119954B2 (en) * 2003-01-07 2012-02-21 Micropyretics Heaters International, Inc. Convective heating system for industrial applications
JP2005100695A (ja) * 2003-09-22 2005-04-14 Ngk Insulators Ltd 基板加熱方法、抵抗発熱体付基板及びその製造方法
JP2005175366A (ja) * 2003-12-15 2005-06-30 Seiko Epson Corp ヒータおよびヒータ付き炉
JP2012526355A (ja) * 2009-05-05 2012-10-25 サンドヴィク インテレクチュアル プロパティー アーゲー 発熱体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5763856A (en) 1993-08-11 1998-06-09 Tokyo Electron Limited Heat treatment apparatus and method
WO2008108712A1 (fr) 2007-03-05 2008-09-12 Sandvik Intellectual Property Ab Élément chauffant et insert pour des fours électriques

Also Published As

Publication number Publication date
JP5508487B2 (ja) 2014-05-28
EP2701458B1 (fr) 2016-12-14
KR20140026303A (ko) 2014-03-05
JP2014041784A (ja) 2014-03-06
CN103634953A (zh) 2014-03-12
CN103634953B (zh) 2015-06-10
EP2701458A1 (fr) 2014-02-26

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