200300405 玖、發明說明 【發明所屬之技術領域】 本發明係關於能夠使發熱體之積體性變高、容易進行 高溫化和溫度控制，並且加熱時之變形或短路等之故障少 ，進而能夠以低成本來製造之MoSi2製帶狀發熱體、具備 該發熱體之加熱處理爐以及該發熱體之製造方法。 此外，在本說明書所使用之M〇Si2製帶狀發熱體，係 包含以純M〇Si2或者是在MoSl2含有絕緣性氧化物等來增加 電阻之以MoSijt爲主成分的發熱體。 【先前技術】 由於以二矽化鉬（M〇Si2)作爲主成分之發熱體係具有 良好之抗氧化特性，因此，特別作爲在大氣或氧化性環境 氣氛下所使用之超高溫發熱體，由1950〜1960年左右開始 ，在市面上進行販賣，一直到現在爲止，使用在範圍廣泛 之用途上。該發熱體係含有70wt%以上作爲主成分之 MoSi2 〇 習知’在玻璃工業或陶瓷燒結等許多領域所使用之發 熱體，其發熱部（通常「發熱部」係指在通電時主要進行 發熱之發熱體之直徑較細之部分（除了端子部以外））係 形成爲1個U字形之形狀（2柄型），由爐子之頂部或側 壁，呈懸掛地進行安裝，其爐子之最高使用溫度係達到 1700〜1850〇C。200300405 发明. Description of the invention [Technical field to which the invention belongs] The present invention relates to the ability to increase the integrality of a heating element, to facilitate high temperature and temperature control, and to reduce deformation or short-circuiting during heating. A strip-shaped heating element made of MoSi2 manufactured at low cost, a heat treatment furnace provided with the heating element, and a method for manufacturing the heating element. In addition, the MoSi2 strip-shaped heating element used in the present specification includes a MoSijt-based heating element containing pure MoSi2 or MoSl2 containing an insulating oxide or the like to increase resistance. [Previous technology] Because the heating system with molybdenum disilide (MoSi2) as the main component has good anti-oxidation properties, it is particularly used as an ultra-high temperature heating element used in the atmosphere or oxidizing environment, from 1950 ~ It was sold in the market around 1960 and has been used in a wide range of applications until now. This heating system contains more than 70% by weight of MoSi2 as the main component. ”The heating element used in many fields such as the glass industry or ceramic sintering. The heating part (usually“ heating part ”refers to the heat that is mainly generated when the power is applied) The thinner part of the body (except the terminal part) is formed into a U-shape (2 handle type), which is installed in a suspended manner from the top or side wall of the furnace, and the maximum operating temperature of the furnace reaches 1700 ~ 1850 ° C.
最近’隨著半導體元件之微細化以及元件製造時間之 縮短化和省能源化，以致於在習知使用金屬發熱體之CVD 5 200300405 裝置或擴散爐等之半導體製造裝置，利用以M〇Sl2作爲主 成分之發熱體。 以MoSi2作爲主成分之發熱體係具有良好之耐熱特性 ，能夠達到金屬發熱體之大約10倍之表面負荷，並且，具 有能夠急速加熱升溫之重大特長。 一般在半導體製造裝置所使用之熱處理爐，係要求嚴 密地控制爐內之溫度分布等之非常高精度之溫度特性。 以MoSi2作爲主成分之發熱體，如圖8所示，通常使 用將棒狀之發熱體元件彎曲成爲U字形，而在該發熱部之 兩端熔接端子部而成的U字形發熱體。圖8中之U字形發 熱體11係由：發熱部12、熔接部13、夾（端子）部14、 及電極部15所構成。 但是，該端子部之溫度降低係大於發熱部，因此，在 需要上述這樣之精密溫度控制之爐子，爲了減少端子部， 因此，同樣使用連接許多彎曲棒狀之發熱體素材之U字形 發熱部而成之形狀（多柄）的發熱體。 這樣連接許多發熱體之形狀係減少貫通爐內外之端子 部之數目，因此，可以減少由該端子部所散熱之熱損失， 在爐溫度之均勻化具有一定效果。 最近，要求能夠提高發熱體之積體性並且正確地進行 熱控制的發熱體。但是，彎曲棒狀之發熱體素材之發熱體 或熔接而成之發熱體，係容易發生加熱時之變形，在緊密 地設置彎曲部的情形下，會有所謂短路等之事故發生之問 題。因此，製造提高積體性之高精度的發熱體，會有在事 200300405 實上變得困難之問題產生。 【發明內容】 本發明係提供可以將MoSi2製帶狀發熱體緊密地設置 在加熱爐等之底壁、上壁和側壁等，能夠不發生短路等之 事故，且精度良好地進行加熱，進而使強度變高且低成本 地製造的M〇Si2製帶狀發熱體、具備該發熱體之加熱處理 爐以及該發熱體之製造方法。 爲了解決上述課題，因此，發明者係全心進行硏究， 結果，得到可以藉由使Mo Si2製發熱體成形爲帶狀來提高 積體度，不會有短路等之事故發生，且能正確地進行溫度 控制的見解。 本發明係根據該見解，來提供： 1. 一種MoSi2製帶狀發熱體，其特徵在於：將擠出成爲 帶狀之成形體進行燒結而構成。 2. —種M〇Si2製帶狀發熱體，其特徵在於：在同一平面 上，將擠出成爲帶狀之成形體機械加工成爲圓弧形、波形 、V字形、U字形或矩形中之1種或者連續形狀後，進行燒 結而構成。 3. —種MoSi2製帶狀發熱體，其特徵在於：將擠出成爲 帶狀之成形體進行燒結，在燒結後’於同一平面上’機械 加工成爲圓弧形、波形、V字形、U字形或矩形中之1種或 者連續形狀而構成。 4. 上述第1至3項中任一項之MoSi2製帶狀發熱體，其 係將擠出成爲帶狀之成形體或帶狀之燒結體進行彎曲’形 200300405 成爲環狀或螺旋狀而構成。 5. 上述第4項之M〇Si2製帶狀發熱體，其係具有圓筒型 隔熱材之內壁全周長之1/4〜1/2之弧長。 6. 上述第4或5項之M〇Si2製帶狀發熱體，其係將環狀 或螺旋狀之複數M〇Si2製帶狀發熱體進行熔接而構成。 此外，本發明係提供： 7. —種具備上述第1至6項中任一項之M〇Si2製帶狀發 熱體的加熱處理爐，其特徵在於：將M〇Si2製帶狀發熱體 配置在隔熱材之內壁而構成。 8. —種具備上述第4至7項中任一項之“〇3丨2製帶狀發 熱體的加熱處理爐，其特徵在於：將彎曲成爲環狀之M〇Si2 製帶狀發熱體，呈多段式地配置在隔熱材之內壁而構成。 9. 一種具備上述第7或8項之M〇Si2製帶狀發熱體的加 熱處理爐，其特徵在於：藉由跨越該發熱體之形狀之U字 形插銷，將M〇Si2製帶狀發熱體固定在內壁。 此外，本發明係提供： 10. —種MoSi2製帶狀發熱體之製造方法，其特徵在於 :將發熱體之原料粉末和結合劑混合在一起，由模具擠出 該混合物而成爲帶狀之成形體，對該成形體進行脫脂及燒 結。 11. 一種M〇Si2製帶狀發熱體之製造方法，其特徵在於 :將發熱體之原料粉末和結合劑混合在一起，由模具擠出 該混合物而成爲帶狀之成形體，進而，在同一平面上，將 該成形體機械加工成爲圓弧形、波形、V字形、U字形或 200300405 矩形中之1種或者連續形狀後，進行脫脂及燒結。 12·—種M〇Si2製帶狀發熱體之製造方法，其特徵在於 :將發熱體之原料粉末和結合劑混合在一起，由模具擠出 g亥混合物而成爲帶狀之成形體後’進fT脫脂及燒結，進而 ，在同一平面上，將該燒結之帶狀體機械加工成爲圓弧形 、波形、V字形、U字形或矩形中之1種或者連續形狀。 13·上述第10至12項中任一項之MoSi2製帶狀發熱體 之製造方法，其係將擠出成爲帶狀之成形體或帶狀之燒結 體進行彎曲，形成爲環狀或螺旋狀。 14·上述第13項之MoSi2製帶狀發熱體之製造方法，其 係具有圓筒型隔熱材之內壁全周長之1/4〜1/2之弧長。 15.上述第13或14項之MoSi2製帶狀發熱體之製造方 法，其係將環狀或螺旋狀之複數MoSi2製帶狀發熱體進行 熔接。 【實施方式】 在製造本發明之MoSi2製帶狀發熱體時，首先將發熱 體之原料粉末和結合劑混合在一起，由模具擠出該混合物 而成爲帶狀之（生胚）成形體。 在同一平面上，對該成形體進行例如雷射加工、噴水 加工、電子束加工、衝壓加工等之機械加工，成形爲既定 形狀（例如圓弧形、波形、V字形、U字形或矩形中之1種 或者連續形狀）。 可以在上述衝壓加工等之前，按照需要來進行加熱而 使其軟化，以便於容易進行加工。接著，可以使該成形之 200300405 材料，經由脫脂、一次燒結及通電燒結或導熱加熱燒結’ 成爲高密度之燒結體，得到具有成爲目的形狀之M〇Si2製 帶狀發熱體。 此外，也可以在使上述成形體經由脫脂、一次燒結及 通電燒結而成爲高密度之燒結體後，對該燒結體藉由雷射 加工、噴水加工、電子束加工和衝壓加工等之機械加工， 來加工成爲既定形狀（例如圓弧形、波形、V字形、U字 形或矩形中之1種或者連續形狀），來得到M〇Si2製帶狀 發熱體。這些係全部具有位於同一平面上之形狀。 “〇312製帶狀發熱體係可以設成爲例如厚度1〜3mm、 寬度8〜40mm、長度600〜1500mm。此外，該尺寸係適當 之一例，本發明係不一定限制在這些尺寸。 在圖1表示MoSi2製帶狀發熱體之代表性形狀之例子 (a)〜（f)。（a)係帶狀發熱體1，（b)係交互地改變 方向連續C字形而成之發熱體2，（c)係連續V字形而成 之發熱體3，（d)係由側邊開始而交互地形成半圓形缺口 之發熱體4，（e)係正弦狀發熱體5，（f)係沿著長邊方 向形成爲U字形之U字形發熱體6。 在上述中，具有單純帶狀之發熱體1以外之特殊形狀 者，係皆切除帶狀發熱體1之一部分所形成者，但是，本 發明係不一定限定於這些，也可以具有其他形狀。 可以藉由上述擠出，來得到成形體。在平坦之帶狀體 的情形下，可以藉由對這樣所得到之成形體，進行脫脂、 一次燒結和通電加熱燒結或導熱加熱燒結，來製造高密度 200300405 且強度高之“〇3丨2製帶狀發熱體。 帶狀發熱體之重大特點，係較棒狀材更能進行面發熱 ，因此，可以更加有效地對被熱處理物進行加熱。此外， 藉此而具有能夠提高均熱性且加速升溫速度等之許多優點 〇 此外，爲了使帶狀體之寬度方向之變形幾乎不存在或 顯著地變小，因此，可以緊密地設置（近接配置）帶狀發 熱體，結果，具有所謂能夠提高發熱體之積體性、容易進 行高溫化和溫度控制，並且還提高爐子等之均熱性的重大 優點。 該MoSi2製帶狀發熱體時，係可以藉由在將成爲發熱 體原料之粉末和結合劑混合在一起，由模具擠出該混合物 而成爲帶狀之成形體後，對該成形體（生胚）進行機械加 工，並且，對其進行脫脂、一次燒結和通電加熱燒結或導 熱加熱燒結，來得到既定形狀之以(^丨2製帶狀發熱體。 具體而言，例如將發熱體之原料粉末和結合劑混合在 一起，由模具擠出該混合物而成爲帶狀之（生胚）成形體 。接著，在這樣狀態下，直接地對該成形體進行雷射加工 或衝壓加工，成形爲既定形狀（例如圓弧形、波形、V字 形、U字形或矩形中之1種或者連續形狀）。 可以在上述衝壓加工等之前，按照需要來進行加熱而 使其軟化，以便於容易進行加工。接著，可以使這樣加工 而成之材料，經由脫脂、一次燒結及通電燒結或導熱加熱 燒結，成爲高密度之燒結體，得到成爲目的之MoSi2製帶 200300405 狀發熱體。 在形成於上述圖1之（e)或（c)之正弦曲線狀發熱 體5或者連續V字形之發熱體3的情形下，如圖2之（a) 和（b)所示，藉由例如衝壓等來切斷除去MoSi2製帶狀發 熱體1之斜線部21、22，以便於進行製作。此外，在形成 於U字形發熱體6的情形下，如圖2 (c)所示，可以藉由 切除所擠出之帶狀體1之符號23之中央部分及符號24之 角部分來製作。 上述這樣所製作之帶狀體，係可以在例如箱型爐隔熱 材之內壁，如圖3 ( a)所示，排列各種帶狀發熱體，以便 於分別進行發熱。此外，在該情形下，也可以彎曲而成爲 L字形。 此外，如圖3 (b)所示，可以由上面吊掛安裝U字形 之發熱體6。在圖3中，爲了避免複雜性，因此，帶狀發熱 體之條數及用以固定該帶狀發熱體之固定插銷皆省略，但 是，在實際之爐子，大致均等地安裝在爐子之側壁整體上 〇 進行這樣形狀變形之MoSi2製帶狀發熱體，係可以按 照加熱爐或熱處理爐之形狀來分別使用。此外，如上述， 沿著長邊方向而形成爲波動波形之各種帶狀發熱體，係具 有能增大加熱面積之優點。 這些波形係不限定於上述之波形’可以成爲各種連續 波形，也可以改變波高。這些係僅改變加工形狀或長度， 本發明之波形等之形狀係包含這些全部。 12 200300405 爲了得到加工成爲圓弧形、波形、v字形、u字形或 矩形中之1種或者連續形狀之MoSi2製帶狀發熱體，因此 ，除上述之外，還可以藉由將成爲發熱體原料之M〇Si2粉 和結合劑混合在一起，由模具擠出該混合物而成爲帶狀之 成形體後，進行脫脂及燒結，對該燒結之帶狀體進行機械 加工來製造。 具體而言，例如將成爲發熱體原料之^1〇3丨2粉和結合 劑混合在一起，由模具擠出該混合物，成爲帶狀之（生胚 )成形體。 接著，使該成形體，經由脫脂、一次燒結及通電燒結 或導熱加熱燒結，成爲高密度之燒結體，對該燒結體藉由 雷射或噴水等之機械加工來加工成爲既定形狀（例如圓弧 形、波形、V字形、U字形或矩形中之1種或者連續形狀） ，得到“〇312製帶狀發熱體。 不論是使用任何一種製造方法，皆可以得到在同一平 面上，加工成爲圓弧形、波形、V字形、U字形或矩形中 之1種或者連續形狀之以(^丨2製帶狀發熱體。 本發明如圖4 ( a)和（b)所示，可以進一步彎曲帶狀 之成形體，使整體形狀成爲環狀或環狀之一部分成爲圓弧 ，或是彎曲成爲螺旋狀。 此外’如圖5所示，也可以形成爲圓筒型隔熱材之內 壁全周長之1/4之弧長且分別獨立地進行通電加熱的構造 。圖5之符號51係表示呈立體地彎曲帶狀成形體而成的 M〇Sl2製帶狀發熱體，符號52係表示圓筒型隔熱材。 13 200300405 在設置於隔熱材內圍的情形下，於MoSi2製帶狀發熱 體之長度並不充分的情形下，可以按照需要來進行熔接。 在該情形下，可以在帶狀體進行熔接成爲長帶後，加工成 爲弧狀。 如圖6 ( a )和（b )所示，也可以在由組合模所構成之 多段式爐之各段爐壁隔熱材61之內圍，分別安裝“〇8丨2製 帶狀發熱體，如圖6 (c)所示，呈分段式地將其堆積成爲 長爐。在圖6 ( a)〜（c)，皆爲了避免煩雜，因此，省略 固定用插銷。 也可以將整體形狀大致彎曲成爲環狀之M〇Si2製帶狀 發熱體，並排在1個加熱爐或1個熱處理爐之內壁，呈多 段式地設置。 此種環狀發熱體，可以藉由提高積體度來達到高溫化 ，並且，還具有能提高均熱性且容易進行加熱之溫度控制 的優點。 此外，MoSi2製帶狀發熱體，係可以藉由跨越該發熱體 之形狀之U字形插銷，來簡單地固定在內壁，藉此，具有 能夠固定發熱體及防止變形之效果。 在圖7(a)和（b)，表示藉由U字形插銷71來固定 於內壁的例子。該U字形插銷71係可以使用與MoSi2製帶 狀發熱體材料相同之材料。在短路之危險性高的情形下， 可以使具有良好之絕緣性和抗氧化性之氧化鋁等之材料， 成形爲C字形或L字形，藉此來固定發熱材料。 此外，如圖7 ( b)所示，可以透過（通過）設置在隔 14 200300405 熱材之壁上之氧化鋁管72，來安裝U字形插銷71。在使用 氧化鋁管72的情形下，具有能以等間隔來配置發熱體，並 且確保上下之發熱體之絕緣，同時防止由於本身重量或電 磁力所造成之變形的效果。 此外，在M〇Si2製帶狀發熱體之發熱中，固定這個 1\/[〇8丨2製帶狀發熱體之U字形插銷71本身，係必須不會由 於本身重量而落下或飛散出去，但是，作爲該對策，係可 以在U字形插銷71之爪前端，塗敷相同於隔熱材之同一系 統材質之黏著材，在隔熱材牢固地固定插銷。 發明之效果 本發明之M〇Si2製帶狀發熱體係較棒狀體，更能進行 面發熱，因此，具有能更加有效地加熱被熱處理物之優異 特徵。又，藉此，還具有能提高均熱性及加速升溫速度等 之許多優點。由於帶狀體之寬度方向之變形小，因此，能 緊密地設置（近接配置）帶狀發熱體，結果，具有能使發 熱體之積體性變高、容易進行高溫化和溫度控制，並且提 高爐等之均熱性之大優點。 【圖式簡單說明】 (一）圖式部分 圖1係由模具將混合物擠出而成爲帶狀之（生胚）成 形體以及進一步在相同於帶狀體之平面上沿著長度方向形 成爲波動之波形（a)〜（f)之圖。 圖2係成爲削除帶狀成形體之一部分之各種波形（a) (c)之說明圖。 15 200300405 圖3係在矩形爐隔熱材之內壁設置各種帶狀發熱體之 例子（a)〜（b )之說明圖。 圖4係表示使平坦之帶狀發熱體成形爲環狀之例子（a )〜（b)之圖。 匱I 5係表示形成爲圓筒型隔熱材之內壁全周長之1/4 弧長且分別獨立地進行通電加熱之構造的例子之說明圖。 匱I 6係在多段式爐之各段爐壁隔熱材之內圍分別安裝 M〇Si2製帶狀發熱體之（a)〜（b)、以及呈分段式地堆積 這些（a)〜（b)而成爲長爐（c)之說明圖。 圖7係表示藉由U字形插銷將帶狀發熱體固定在內壁 上之例子（a)〜（b)之說明圖。 圖8係表示習知之U字形發熱部之圖。 (二）代表元件符號 1 :帶狀發熱體 2 :發熱體 3 :發熱體 4 :發熱體 5:正弦狀發熱體 6 : U字形發熱體 Π : U字形發熱體 12 :發熱部 13 :熔接部 14 :夾（端子）部 15 :電極部 200300405 21、22 :斜線部 23 :中央部分 24 :角部分 51 : M〇Si2製帶狀發熱體 52 :圓筒型隔熱材 71 : U字形插銷 72 :氧化鋁管Recently, with the miniaturization of semiconductor devices, the shortening of device manufacturing time, and the saving of energy, CVD 5 200300405 devices or diffusion furnaces, which are conventionally used for metal heating elements, have been used in semiconductor manufacturing devices such as MoSl2. The main component of the heating element. The heating system with MoSi2 as the main component has good heat resistance characteristics, can reach about 10 times the surface load of metal heating elements, and has the significant feature of rapid heating and temperature rise. Generally, a heat treatment furnace used in a semiconductor manufacturing apparatus requires extremely precise temperature characteristics such as temperature control in the furnace. As shown in FIG. 8, a heating element containing MoSi2 as a main component is generally a U-shaped heating element obtained by bending a rod-shaped heating element into a U-shape and welding terminal portions to both ends of the heating portion. The U-shaped heating element 11 in FIG. 8 is composed of a heat generating portion 12, a welding portion 13, a clip (terminal) portion 14, and an electrode portion 15. However, the temperature drop of the terminal part is larger than that of the heating part. Therefore, in a furnace that requires such precise temperature control as described above, in order to reduce the terminal part, a U-shaped heating part connected to a plurality of curved rod-shaped heating body materials is also used. Formed (multi-stemmed) heating element. The shape that connects many heating elements in this way reduces the number of terminal portions that penetrate through the inside and outside of the furnace. Therefore, it is possible to reduce the heat loss radiated by the terminal portions, and it has a certain effect in uniformizing the temperature of the furnace. Recently, there has been a demand for a heat-generating body capable of improving the integrated properties of the heat-generating body and accurately controlling the heat. However, a heating element made of a bent rod-like heating element or a fusion-producing heating element is liable to be deformed during heating. When a bent portion is closely arranged, there may be a problem such as a short circuit. Therefore, there is a problem that it is actually difficult to manufacture a high-precision heating element that improves the integration. [Summary of the Invention] The present invention provides a belt-shaped heating element made of MoSi2 which can be closely installed on a bottom wall, an upper wall, and a side wall of a heating furnace, etc., so that short-circuit accidents can be prevented, and heating can be performed with high accuracy, so that A strip-shaped heating element made of MoSi2 that has high strength and is manufactured at low cost, a heat treatment furnace including the heating element, and a method for manufacturing the heating element. In order to solve the above-mentioned problems, the inventors made thorough investigations, and as a result, it was found that the degree of integration can be improved by forming the heating element made of Mo Si2 into a strip shape, and no accident such as a short circuit can occur, and it can be accurately performed. Insights into temperature control. Based on this knowledge, the present invention provides: 1. A belt-shaped heating element made of MoSi2, which is characterized by being formed by sintering a molded body extruded into a belt shape. 2. A strip-shaped heating element made of M〇Si2, characterized in that: on the same plane, the formed body extruded into a strip shape is machined into one of an arc shape, a wave shape, a V-shape, a U-shape, or a rectangle After being seeded or continuous, it is formed by sintering. 3. A strip-shaped heating element made of MoSi2, which is characterized by sintering a molded body extruded into a strip shape, and machining it into a circular arc shape, a wave shape, a V shape, and a U shape after sintering. Or one of the rectangles or a continuous shape. 4. The MoSi2 strip-shaped heating element according to any one of items 1 to 3 above is formed by bending a strip-shaped formed body or a strip-shaped sintered body into a ring shape or a spiral shape. . 5. The above-mentioned band-shaped heating element made of MoSi2 has the arc length of 1/4 to 1/2 of the entire circumference of the inner wall of the cylindrical heat insulating material. 6. The above-mentioned band heating element made of MoSi2 according to item 4 or 5 above is formed by welding a plurality of band heating elements made of MoSi2 in a ring shape or a spiral shape. In addition, the present invention provides: 7. A heat treatment furnace provided with a MoSi2 belt heating element according to any one of the above items 1 to 6, characterized in that the MoSi2 belt heating element is arranged It is formed on the inner wall of the heat insulating material. 8. A heat treatment furnace provided with the "03-belt-shaped heating element made in any one of the items 4 to 7 above, characterized in that it is bent into a ring-shaped belt-shaped heating element made of MoSi2, The heat treatment furnace is provided in a multi-stage arrangement on the inner wall of the heat-insulating material. 9. A heat treatment furnace provided with the MoSi2 strip-shaped heating element described in item 7 or 8 above, characterized in that The U-shaped pin of the shape fixes the inner wall of the heating element made of MoSi2. In addition, the present invention provides: 10. A method for manufacturing a heating element made of MoSi2, which is characterized by: The powder and the binder are mixed together, and the mixture is extruded from a mold to form a belt-shaped formed body, and the formed body is degreased and sintered. 11. A method for manufacturing a belt-shaped heating body made of MoSi2, which is characterized by: The raw material powder of the heating element and the binding agent are mixed together, and the mixture is extruded from a mold to form a belt-shaped molded body. Further, on the same plane, the molded body is machined into an arc shape, a wave shape, a V shape, U-shape or 200300405 rectangle or After continuous shape, degreasing and sintering are performed. 12 · ——A method for manufacturing a belt heating element made of MoSi2, characterized in that the raw material powder of the heating element and the binder are mixed together, and a ghai mixture is extruded from a mold to After being formed into a belt-shaped molded body, degreasing and sintering are performed on the fT, and then the sintered belt-shaped body is machined into one of a circular arc shape, a wave shape, a V-shape, a U-shape, or a rectangle on the same plane or continuously. 13. The method for producing a MoSi2 strip-shaped heating element according to any one of the above-mentioned items 10 to 12, which comprises bending a strip-shaped formed body or a strip-shaped sintered body into a ring shape or Spiral. 14. The method for manufacturing a MoSi2 strip-shaped heating element according to item 13 above, which has an arc length of 1/4 to 1/2 of the entire circumference of the inner wall of the cylindrical heat insulating material. Or the method for manufacturing a MoSi2 strip-shaped heating element according to item 14, which is to weld a plurality of MoSi2 strip-shaped heating elements in a ring shape or a spiral shape. [Embodiment] When manufacturing the MoSi2 strip-shaped heating element of the present invention, First mix the raw material powder of the heating element and the binder in Together, the mixture is extruded from a mold to form a band-shaped (green embryo) shaped body. On the same plane, the shaped body is subjected to mechanical processing such as laser processing, water jet processing, electron beam processing, press processing, and the like. It has a predetermined shape (for example, one of a circular arc shape, a wave shape, a V-shape, a U-shape, or a rectangular shape or a continuous shape). It can be softened by heating as needed before the above-mentioned press processing, etc., to facilitate processing. Then, the formed 200300405 material can be degreased, primary sintered, sintered with electricity, or thermally heated and sintered to become a high-density sintered body to obtain a MoSi2 strip-shaped heating element having a desired shape. In addition, after the above-mentioned molded body is made into a high-density sintered body through degreasing, primary sintering, and electric sintering, the sintered body may be machined by laser processing, water jet processing, electron beam processing, and stamping processing. It is processed into a predetermined shape (for example, one of a circular arc shape, a wave shape, a V-shape, a U-shape, or a rectangular shape, or a continuous shape) to obtain a belt-shaped heating element made of MoSi2. These systems all have shapes lying on the same plane. "The tape-shaped heating system made by 〇312 can be provided with, for example, a thickness of 1 to 3 mm, a width of 8 to 40 mm, and a length of 600 to 1500 mm. In addition, this dimension is an appropriate example, and the present invention is not necessarily limited to these dimensions. Examples of representative shapes of MoSi2 band heating elements (a) to (f). (A) Band heating element 1, (b) Heating element 2 formed by successively changing the C shape alternately, (c ) Is a continuous V-shaped heating element 3, (d) is a heating element 4, which forms a semicircular notch alternately from the side, (e) is a sinusoidal heating element 5, and (f) is along the length The U-shaped heating element 6 formed in a U-shape in the lateral direction. In the above, those having a special shape other than the heating element 1 having a simple band shape are formed by cutting out a part of the heating element 1 having a band shape. However, the present invention It is not necessarily limited to these, and may have other shapes. The formed body can be obtained by the above-mentioned extrusion. In the case of a flat belt-shaped body, the formed body thus obtained can be degreased and sintered once. And electric heating sintering or thermal conduction sintering to make high A strip-shaped heating element made of "03 · 2" with a density of 200300405 and high strength. The great feature of the band-shaped heating element is that it can conduct surface heating more than rod-shaped material, so it can heat the object to be heat treated more effectively. In addition, it has many advantages such as improved uniformity and accelerated heating rate. In addition, in order to make the width-like deformation of the band-shaped body almost non-existent or significantly reduced, it can be installed closely (close-up arrangement) As a result, the belt-shaped heating element has the significant advantages of improving the integrality of the heating element, facilitating high temperature and temperature control, and improving the uniformity of the furnace and the like. In the case of the MoSi2 belt-shaped heating element, the powder and the binder which are the raw materials of the heating element are mixed together, and the mixture is extruded from a mold to form a belt-shaped molded body. ) Is mechanically processed, and degreased, primary sintered, and electrically heated sintered or thermally conductive sintered to obtain a belt-shaped heating element of a predetermined shape (2). Specifically, for example, the raw material powder of the heating element is powdered. It is mixed with a binder, and the mixture is extruded from a mold to form a band-shaped (green embryo) shaped body. Then, in this state, the shaped body is directly subjected to laser processing or press processing to be formed into a predetermined shape. (For example, one of an arc shape, a wave shape, a V shape, a U shape, or a rectangular shape, or a continuous shape.) Before the above-mentioned press processing, it can be softened by heating as needed to facilitate processing. Then, The material thus processed can be made into a high-density sintered body through degreasing, primary sintering, electric sintering, or heat conduction sintering. MoSi2 is made into a 200,300,405-shaped heating element. In the case of the sinusoidal heating element 5 or the continuous V-shaped heating element 3 formed in (e) or (c) of FIG. 1, as shown in (a) and ( As shown in b), the oblique portions 21 and 22 of the strip-shaped heating element 1 made of MoSi2 are cut and removed by, for example, punching to facilitate production. In the case of being formed on the U-shaped heating element 6, as shown in FIG. 2 As shown in (c), it can be manufactured by cutting out the central part of the symbol 23 and the corner part of the symbol 24 of the extruded strip-shaped body 1. The strip-shaped body produced as described above can be, for example, a box-shaped furnace compartment. As shown in Fig. 3 (a), the inner wall of the heating material is arranged with various band-shaped heating elements so as to generate heat separately. In addition, in this case, it can also be bent into an L shape. In addition, as shown in Fig. 3 (b) ), U-shaped heating element 6 can be hung from above. In Figure 3, in order to avoid complexity, the number of strip-shaped heating elements and the fixing pins for fixing the strip-shaped heating element are omitted. However, in the actual furnace, it is installed approximately equally on the entire side wall of the furnace. The belt-shaped heating elements made of MoSi2 deformed in this shape can be used separately according to the shape of a heating furnace or a heat treatment furnace. In addition, as described above, various belt-shaped heating elements formed in a wave shape along the longitudinal direction have The advantage of increasing the heating area. These waveforms are not limited to the above-mentioned waveforms. They can be various continuous waveforms, and the wave height can also be changed. These only change the processing shape or length. The waveforms of the present invention include all of these. 12 200300405 In order to obtain a belt-shaped heating element made of MoSi2 that is processed into one of a circular arc shape, a wave shape, a v-shape, a u-shape, or a rectangular shape, in addition to the above, it can also be used as a raw material for the heating body. The MoSi2 powder and the binder are mixed together, and the mixture is extruded from a mold into a belt-shaped molded body, and then degreased and sintered, and the sintered belt-shaped body is manufactured by machining. Specifically, for example, ^ 103 powder, which is a raw material of the heating element, and a binder are mixed together, and the mixture is extruded from a die to form a belt-shaped (green embryo) shaped body. Next, the molded body is sintered by degreasing, primary sintering, electric sintering, or thermal conduction heating to form a high-density sintered body, and the sintered body is processed into a predetermined shape by machining such as laser or water jet (for example, a circular arc). Shape, wave shape, V-shape, U-shape, or rectangular shape or continuous shape) to obtain "° 312-shaped heating element. No matter which manufacturing method is used, it can be obtained on the same plane and processed into an arc. One of the shape, the wave shape, the V shape, the U shape, or the rectangular shape or the continuous shape of the belt-shaped heating element (2). The present invention can further bend the belt shape as shown in FIGS. 4 (a) and (b). The formed body has a ring shape or a portion of the ring shape that is a circular arc or is bent into a spiral shape. In addition, as shown in FIG. 5, it may be formed as one of the entire circumference of the inner wall of the cylindrical heat insulating material. The arc length of / 4 is a structure that is independently heated by electric current. The symbol 51 in FIG. 5 represents a MOS strip heating element made by bending a strip-shaped formed body three-dimensionally, and the symbol 52 represents a cylindrical partition. Hot material. 13 2003004 05 In the case of installing on the inner periphery of a heat insulating material, and if the length of a MoSi2 band-shaped heating element is not sufficient, welding can be performed as required. In this case, the band-shaped object can be welded to become long After belting, it is processed into an arc shape. As shown in Figs. 6 (a) and (b), the inner wall of each section of the wall insulation material 61 of the multi-stage furnace composed of a combination mold can also be installed separately. As shown in Fig. 6 (c), the belt-shaped heating element made of 8 丨 2 is stacked into long furnaces in sections. In Figs. 6 (a) to (c), to avoid complication, the fixing is omitted. It is also possible to bend the overall shape into a ring-shaped belt-shaped heating element made of MoSi2, which is arranged side by side on the inner wall of a heating furnace or a heat treatment furnace in a multi-stage arrangement. The temperature can be increased by increasing the degree of integration, and it also has the advantages of improving the uniformity and easy temperature control. In addition, the strip-shaped heating element made of MoSi2 can span the shape of the heating element. U-shaped bolts to simply fix the inner wall. The effect of fixing the heating element and preventing deformation is shown in Figs. 7 (a) and 7 (b), which shows an example of fixing to the inner wall by a U-shaped pin 71. The U-shaped pin 71 can be used to generate heat in the form of a strip with MoSi2. The same material as the body material. In the case of a high risk of short circuit, a material such as alumina with good insulation and oxidation resistance can be formed into a C shape or an L shape to fix the heating material. As shown in Fig. 7 (b), the U-shaped pin 71 can be installed (through) the alumina tube 72 provided on the wall of the partition 14 200300405 hot material. In the case of using the alumina tube 72, The heating elements are arranged at equal intervals, and the insulation of the upper and lower heating elements is ensured, and at the same time, the effect of preventing deformation due to its weight or electromagnetic force is prevented. In addition, in the heat generation of the belt heating element made of MoSi2, the U-shaped pin 71 itself fixing this 1 // [〇8 丨 2 belt heating element must not fall or fly away due to its own weight. However, as a countermeasure, an adhesive material of the same system material as that of the heat insulating material may be applied to the tip of the claw of the U-shaped bolt 71, and the bolt may be firmly fixed to the heat insulating material. EFFECT OF THE INVENTION The band heating system made of MoSi2 according to the present invention can perform surface heating more than a rod-shaped body, and therefore has an excellent feature of being able to more effectively heat a heat-treated object. In addition, there are many advantages such as improved uniformity and accelerated heating rate. Since the deformation in the width direction of the belt-shaped body is small, the belt-shaped heating body can be closely arranged (closely arranged). The great advantage of the uniformity of the furnace. [Schematic description] (A) Schematic part Figure 1 is a mixture of a mold to extrude the mixture into a strip-shaped (green embryo) shaped body and further formed in the same plane as the strip-shaped body along the length direction to fluctuate. The waveforms (a) to (f). Fig. 2 is an explanatory diagram of various waveforms (a) and (c) which are part of a strip-shaped molded body. 15 200300405 Fig. 3 is an explanatory diagram of examples (a) to (b) of various belt-shaped heating elements provided on the inner wall of a rectangular furnace insulation material. FIG. 4 is a view showing examples (a) to (b) of forming a flat strip-shaped heating element into a ring shape. I5 is an explanatory diagram showing an example of a structure in which the inner wall of a cylindrical heat-insulating material is formed to be 1/4 arc length of the entire circumference of the inner wall and electrically heated by each of them. The I 6 series is equipped with (a) ~ (b) of MoSi2 belt heating elements on the inner periphery of each section of the wall insulation material of the multi-stage furnace, and these (a) ~ are stacked in stages. (B) is an explanatory diagram of the long furnace (c). Fig. 7 is an explanatory view showing examples (a) to (b) of fixing a belt-shaped heating element to an inner wall by a U-shaped pin. Fig. 8 is a view showing a conventional U-shaped heating portion. (II) Representative component symbol 1: Ribbon heating element 2: Heating element 3: Heating element 4: Heating element 5: Sine heating element 6: U-shaped heating element Π: U-shaped heating element 12: Heating portion 13: Welding portion 14: Clip (terminal) section 15: Electrode section 200300405 21, 22: Slanted section 23: Central section 24: Corner section 51: Ribbon heating element made by MoSi2 52: Cylindrical heat insulator 71: U-shaped pin 72 : Alumina tube
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