KR101407797B1 - 다수의 투영 렌즈를 구비한 투영 조명 장치 - Google Patents

다수의 투영 렌즈를 구비한 투영 조명 장치 Download PDF

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Publication number
KR101407797B1
KR101407797B1 KR1020127008773A KR20127008773A KR101407797B1 KR 101407797 B1 KR101407797 B1 KR 101407797B1 KR 1020127008773 A KR1020127008773 A KR 1020127008773A KR 20127008773 A KR20127008773 A KR 20127008773A KR 101407797 B1 KR101407797 B1 KR 101407797B1
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KR
South Korea
Prior art keywords
projection
projection objective
subsystem
image
objectives
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KR1020127008773A
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English (en)
Korean (ko)
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KR20120040755A (ko
Inventor
아우렐리안 도독
발헬름 울리히
하이코 펠트만
Original Assignee
칼 짜이스 에스엠티 게엠베하
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Publication of KR20120040755A publication Critical patent/KR20120040755A/ko
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Publication of KR101407797B1 publication Critical patent/KR101407797B1/ko

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020127008773A 2005-07-01 2006-06-28 다수의 투영 렌즈를 구비한 투영 조명 장치 KR101407797B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005030839.2 2005-07-01
DE102005030839A DE102005030839A1 (de) 2005-07-01 2005-07-01 Projektionsbelichtungsanlage mit einer Mehrzahl von Projektionsobjektiven
PCT/EP2006/063663 WO2007003563A1 (de) 2005-07-01 2006-06-28 Projektionsbelichtungsanlage mit einer mehrzahl von projektionsobjektiven

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR20077030366A Division KR101478832B1 (ko) 2005-07-01 2006-06-28 다수의 투영 렌즈를 구비한 투영 조명 장치

Publications (2)

Publication Number Publication Date
KR20120040755A KR20120040755A (ko) 2012-04-27
KR101407797B1 true KR101407797B1 (ko) 2014-06-17

Family

ID=36955990

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020127008773A KR101407797B1 (ko) 2005-07-01 2006-06-28 다수의 투영 렌즈를 구비한 투영 조명 장치
KR20077030366A KR101478832B1 (ko) 2005-07-01 2006-06-28 다수의 투영 렌즈를 구비한 투영 조명 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR20077030366A KR101478832B1 (ko) 2005-07-01 2006-06-28 다수의 투영 렌즈를 구비한 투영 조명 장치

Country Status (4)

Country Link
JP (2) JP6116788B2 (ja)
KR (2) KR101407797B1 (ja)
DE (1) DE102005030839A1 (ja)
WO (1) WO2007003563A1 (ja)

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EP3226073A3 (en) 2003-04-09 2017-10-11 Nikon Corporation Exposure method and apparatus, and method for fabricating device
TWI457712B (zh) 2003-10-28 2014-10-21 尼康股份有限公司 照明光學裝置、投影曝光裝置、曝光方法以及元件製造方法
TWI612338B (zh) 2003-11-20 2018-01-21 尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法
TWI494972B (zh) 2004-02-06 2015-08-01 尼康股份有限公司 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法
EP2660852B1 (en) 2005-05-12 2015-09-02 Nikon Corporation Projection optical system, exposure apparatus and exposure method
US8130364B2 (en) 2007-01-04 2012-03-06 Nikon Corporation Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method
US20080165333A1 (en) * 2007-01-04 2008-07-10 Nikon Corporation Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method
US8451427B2 (en) 2007-09-14 2013-05-28 Nikon Corporation Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
KR101562073B1 (ko) 2007-10-16 2015-10-21 가부시키가이샤 니콘 조명 광학 시스템, 노광 장치 및 디바이스 제조 방법
CN101681125B (zh) 2007-10-16 2013-08-21 株式会社尼康 照明光学系统、曝光装置以及元件制造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
DE102007051669A1 (de) * 2007-10-26 2009-04-30 Carl Zeiss Smt Ag Abbildende Optik, Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik sowie Verfahren zur Herstellung eines mikrostrukturierten Bauteils mit einer derartigen Projektionsbelichtungsanlage
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
KR100952158B1 (ko) * 2008-05-20 2010-04-09 진 호 정 마스크 리스 노광장치용 마이크로프리즘 어레이
US8629974B2 (en) 2008-05-20 2014-01-14 Jin Ho Jung Optical component for maskless exposure apparatus
JP5360057B2 (ja) 2008-05-28 2013-12-04 株式会社ニコン 空間光変調器の検査装置および検査方法、照明光学系、照明光学系の調整方法、露光装置、およびデバイス製造方法
JP5782336B2 (ja) 2011-08-24 2015-09-24 キヤノン株式会社 投影光学系、露光装置及びデバイス製造方法
KR101934228B1 (ko) * 2012-12-18 2018-12-31 가부시키가이샤 니콘 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법
JP7018333B2 (ja) 2018-03-08 2022-02-10 大林道路株式会社 複装式カッター

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JPH1064807A (ja) * 1996-08-19 1998-03-06 Nikon Corp 縮小投影走査型露光装置
JP2001305743A (ja) * 2000-04-19 2001-11-02 Nikon Corp 露光装置及びマイクロデバイスの製造方法
JP2005001153A (ja) * 2003-06-10 2005-01-06 Fuji Photo Film Co Ltd 画素位置特定方法、画像ずれ補正方法、および画像形成装置
JP2005037914A (ja) * 2003-07-03 2005-02-10 Fuji Photo Film Co Ltd 画像形成装置

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JP3316710B2 (ja) * 1993-12-22 2002-08-19 株式会社ニコン 露光装置
JPH088169A (ja) * 1994-06-23 1996-01-12 Nikon Corp 露光装置
JP3348467B2 (ja) * 1993-06-30 2002-11-20 株式会社ニコン 露光装置及び方法
KR100381629B1 (ko) * 1994-08-16 2003-08-21 가부시키가이샤 니콘 노광장치
TW448487B (en) * 1997-11-22 2001-08-01 Nippon Kogaku Kk Exposure apparatus, exposure method and manufacturing method of device
JP2001154368A (ja) * 1999-11-29 2001-06-08 Nikon Corp 露光装置及び露光方法
JP2002055059A (ja) * 2000-08-10 2002-02-20 Nikon Corp 異物検査装置、露光装置、及び露光方法
JP2001201688A (ja) * 2000-12-05 2001-07-27 Nikon Corp 露光装置及び方法並びに照明装置及び方法
AU2002360329A1 (en) * 2001-10-30 2003-05-12 Optical Research Associates Structures and methods for reducing aberration in optical systems
AU2002317875A1 (en) * 2001-12-10 2003-06-23 Carl Zeiss Smt Ag Catadioptrical reduction lens
JP2006047670A (ja) * 2004-08-04 2006-02-16 Nikon Corp 露光装置および露光方法

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Publication number Priority date Publication date Assignee Title
JPH1064807A (ja) * 1996-08-19 1998-03-06 Nikon Corp 縮小投影走査型露光装置
JP2001305743A (ja) * 2000-04-19 2001-11-02 Nikon Corp 露光装置及びマイクロデバイスの製造方法
JP2005001153A (ja) * 2003-06-10 2005-01-06 Fuji Photo Film Co Ltd 画素位置特定方法、画像ずれ補正方法、および画像形成装置
JP2005037914A (ja) * 2003-07-03 2005-02-10 Fuji Photo Film Co Ltd 画像形成装置

Also Published As

Publication number Publication date
JP2008545153A (ja) 2008-12-11
JP6063637B2 (ja) 2017-01-18
WO2007003563A1 (de) 2007-01-11
DE102005030839A1 (de) 2007-01-11
KR101478832B1 (ko) 2015-01-02
KR20080022125A (ko) 2008-03-10
JP6116788B2 (ja) 2017-04-19
JP2012168550A (ja) 2012-09-06
KR20120040755A (ko) 2012-04-27

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