KR101365097B1 - 기판검사장치 - Google Patents

기판검사장치 Download PDF

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Publication number
KR101365097B1
KR101365097B1 KR1020120124585A KR20120124585A KR101365097B1 KR 101365097 B1 KR101365097 B1 KR 101365097B1 KR 1020120124585 A KR1020120124585 A KR 1020120124585A KR 20120124585 A KR20120124585 A KR 20120124585A KR 101365097 B1 KR101365097 B1 KR 101365097B1
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KR
South Korea
Prior art keywords
inspection
substrate
conveying
inspected
carrying
Prior art date
Application number
KR1020120124585A
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English (en)
Korean (ko)
Other versions
KR20130050887A (ko
Inventor
요이치 기시다
Original Assignee
니혼덴산리드가부시키가이샤
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Application filed by 니혼덴산리드가부시키가이샤 filed Critical 니혼덴산리드가부시키가이샤
Publication of KR20130050887A publication Critical patent/KR20130050887A/ko
Application granted granted Critical
Publication of KR101365097B1 publication Critical patent/KR101365097B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2896—Testing of IC packages; Test features related to IC packages

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Supply And Installment Of Electrical Components (AREA)
KR1020120124585A 2011-11-08 2012-11-06 기판검사장치 KR101365097B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-244200 2011-11-08
JP2011244200A JP2013101017A (ja) 2011-11-08 2011-11-08 基板検査装置

Publications (2)

Publication Number Publication Date
KR20130050887A KR20130050887A (ko) 2013-05-16
KR101365097B1 true KR101365097B1 (ko) 2014-02-19

Family

ID=48197760

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120124585A KR101365097B1 (ko) 2011-11-08 2012-11-06 기판검사장치

Country Status (4)

Country Link
JP (1) JP2013101017A (zh)
KR (1) KR101365097B1 (zh)
CN (1) CN103084341A (zh)
TW (1) TW201329471A (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6338085B2 (ja) * 2014-03-20 2018-06-06 日本電産リード株式会社 可撓性基板検査装置
CN105021938B (zh) * 2014-04-30 2018-11-09 佰欧特株式会社 检查装置
CN105214966A (zh) * 2015-09-29 2016-01-06 芜湖宏景电子股份有限公司 一种汽车电子板的高效率回收装置
JP6903862B2 (ja) * 2015-12-16 2021-07-14 株式会社リコー シート検査搬送装置及びシート検査・仕分け装置
CN105414043B (zh) * 2016-01-15 2018-12-11 深圳市晶磁材料技术有限公司 一种薄片型磁性材料的分选系统
CN105954672B (zh) * 2016-06-18 2018-07-10 东莞华贝电子科技有限公司 一种主板联测机及其测试方法
CN106964560A (zh) * 2017-04-18 2017-07-21 成都蒲江珂贤科技有限公司 一种聚苯板检料机
JP7280068B2 (ja) * 2019-03-12 2023-05-23 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および検査方法
JP7371885B2 (ja) * 2019-07-08 2023-10-31 ヤマハファインテック株式会社 電気検査装置及び保持ユニット
JP7407629B2 (ja) * 2020-03-16 2024-01-04 東芝Ｉｔコントロールシステム株式会社 非破壊検査装置
CN113319973B (zh) * 2021-06-23 2022-08-30 江苏一言机械科技有限公司 一种高效快速的激光复合封边机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030023214A (ko) * 2001-09-12 2003-03-19 미래산업 주식회사 반도체 소자 테스트용 핸들러
KR20100067844A (ko) * 2008-12-12 2010-06-22 한미반도체 주식회사 반도체 패키지 검사장치
KR20110113554A (ko) * 2010-04-09 2011-10-17 (주)제이티 소자검사장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000147045A (ja) * 1998-11-05 2000-05-26 Kyoei Sangyo Kk プリント配線板検査装置
JP2004191166A (ja) * 2002-12-11 2004-07-08 Toppan Printing Co Ltd 毎葉もしくはテープ状基板の搬送機構及びそれを用いた検査装置
JP2008254883A (ja) * 2007-04-05 2008-10-23 Taiyo Kogyo Kk プリント基板の搬送装置、及び、検査装置
JP4803195B2 (ja) * 2008-03-14 2011-10-26 パナソニック株式会社 基板検査装置及び基板検査方法
JP5461268B2 (ja) * 2010-03-29 2014-04-02 日置電機株式会社 基板検査システム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030023214A (ko) * 2001-09-12 2003-03-19 미래산업 주식회사 반도체 소자 테스트용 핸들러
KR20100067844A (ko) * 2008-12-12 2010-06-22 한미반도체 주식회사 반도체 패키지 검사장치
KR20110113554A (ko) * 2010-04-09 2011-10-17 (주)제이티 소자검사장치

Also Published As

Publication number Publication date
TW201329471A (zh) 2013-07-16
JP2013101017A (ja) 2013-05-23
CN103084341A (zh) 2013-05-08
KR20130050887A (ko) 2013-05-16

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