KR101326398B1 - 피가공물 적재 고정용 테이블 및 피가공물 적재 고정용 글래스 척 - Google Patents

피가공물 적재 고정용 테이블 및 피가공물 적재 고정용 글래스 척 Download PDF

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Publication number
KR101326398B1
KR101326398B1 KR1020110139765A KR20110139765A KR101326398B1 KR 101326398 B1 KR101326398 B1 KR 101326398B1 KR 1020110139765 A KR1020110139765 A KR 1020110139765A KR 20110139765 A KR20110139765 A KR 20110139765A KR 101326398 B1 KR101326398 B1 KR 101326398B1
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KR
South Korea
Prior art keywords
workpiece
groove
glass chuck
suction
glass
Prior art date
Application number
KR1020110139765A
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English (en)
Korean (ko)
Other versions
KR20120086242A (ko
Inventor
야스또모 오까지마
노리유끼 구리야마
이꾸오 도끼모또
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Publication of KR20120086242A publication Critical patent/KR20120086242A/ko
Application granted granted Critical
Publication of KR101326398B1 publication Critical patent/KR101326398B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0823—Devices involving rotation of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/047—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work moving work to adjust its position between soldering, welding or cutting steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54—Glass

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
KR1020110139765A 2011-01-25 2011-12-22 피가공물 적재 고정용 테이블 및 피가공물 적재 고정용 글래스 척 KR101326398B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011013022A JP5240301B2 (ja) 2011-01-25 2011-01-25 被加工物載置固定用テーブルおよび被加工物載置固定用ガラスチャック
JPJP-P-2011-013022 2011-01-25

Publications (2)

Publication Number Publication Date
KR20120086242A KR20120086242A (ko) 2012-08-02
KR101326398B1 true KR101326398B1 (ko) 2013-11-11

Family

ID=46519505

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110139765A KR101326398B1 (ko) 2011-01-25 2011-12-22 피가공물 적재 고정용 테이블 및 피가공물 적재 고정용 글래스 척

Country Status (4)

Country Link
JP (1) JP5240301B2 (zh)
KR (1) KR101326398B1 (zh)
CN (1) CN102601530B (zh)
TW (1) TWI421143B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3046370B1 (fr) * 2015-12-31 2018-02-16 Ecole Centrale De Nantes Procede et systeme pour le reglage d'un dispositif de fabrication additive
CN111148596B (zh) 2017-10-04 2022-09-16 极光先进雷射株式会社 激光加工方法以及激光加工系统
CN109434519B (zh) * 2018-12-24 2024-08-02 天津职业技术师范大学 真空永磁板
KR20220132708A (ko) * 2021-03-23 2022-10-04 삼성디스플레이 주식회사 레이저 가공용 워크 테이블
CN114799689B (zh) * 2022-04-29 2023-02-14 中国科学院西安光学精密机械研究所 一种激光加工用微球吸附定位装置及方法
CN115193823B (zh) * 2022-07-20 2024-04-12 武汉来勒光电科技有限公司 一种激光器的耦合封装设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003164988A (ja) * 2001-11-28 2003-06-10 Toppan Forms Co Ltd レーザ加工システム
JP2006263795A (ja) * 2005-03-25 2006-10-05 Disco Abrasive Syst Ltd レーザ加工装置
JP2010082644A (ja) * 2008-09-30 2010-04-15 Disco Abrasive Syst Ltd 加工装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH034102U (zh) * 1989-06-02 1991-01-16
JPH06326337A (ja) * 1993-04-16 1994-11-25 Mitsubishi Heavy Ind Ltd レーザ加工装置
JP3004102U (ja) * 1994-03-15 1994-11-08 栄治 下永 平板加工用ベッド
JP4342992B2 (ja) * 2004-03-17 2009-10-14 株式会社ディスコ レーザー加工装置のチャックテーブル
JP4018096B2 (ja) * 2004-10-05 2007-12-05 松下電器産業株式会社 半導体ウェハの分割方法、及び半導体素子の製造方法
JP2006205187A (ja) * 2005-01-26 2006-08-10 Disco Abrasive Syst Ltd レーザー加工装置
JP2007307597A (ja) * 2006-05-19 2007-11-29 Disco Abrasive Syst Ltd レーザー加工装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003164988A (ja) * 2001-11-28 2003-06-10 Toppan Forms Co Ltd レーザ加工システム
JP2006263795A (ja) * 2005-03-25 2006-10-05 Disco Abrasive Syst Ltd レーザ加工装置
JP2010082644A (ja) * 2008-09-30 2010-04-15 Disco Abrasive Syst Ltd 加工装置

Also Published As

Publication number Publication date
KR20120086242A (ko) 2012-08-02
JP5240301B2 (ja) 2013-07-17
TW201244865A (en) 2012-11-16
CN102601530B (zh) 2015-08-19
TWI421143B (zh) 2014-01-01
JP2012152774A (ja) 2012-08-16
CN102601530A (zh) 2012-07-25

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