KR101326398B1 - 피가공물 적재 고정용 테이블 및 피가공물 적재 고정용 글래스 척 - Google Patents

피가공물 적재 고정용 테이블 및 피가공물 적재 고정용 글래스 척 Download PDF

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Publication number
KR101326398B1
KR101326398B1 KR1020110139765A KR20110139765A KR101326398B1 KR 101326398 B1 KR101326398 B1 KR 101326398B1 KR 1020110139765 A KR1020110139765 A KR 1020110139765A KR 20110139765 A KR20110139765 A KR 20110139765A KR 101326398 B1 KR101326398 B1 KR 101326398B1
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KR
South Korea
Prior art keywords
workpiece
groove
glass chuck
suction
glass
Prior art date
Application number
KR1020110139765A
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English (en)
Korean (ko)
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KR20120086242A (ko
Inventor
야스또모 오까지마
노리유끼 구리야마
이꾸오 도끼모또
Original Assignee
미쓰보시 다이야몬도 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 미쓰보시 다이야몬도 고교 가부시키가이샤 filed Critical 미쓰보시 다이야몬도 고교 가부시키가이샤
Publication of KR20120086242A publication Critical patent/KR20120086242A/ko
Application granted granted Critical
Publication of KR101326398B1 publication Critical patent/KR101326398B1/ko

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/10Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0823Devices involving rotation of the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/047Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work moving work to adjust its position between soldering, welding or cutting steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06Work-clamping means
    • B23Q3/08Work-clamping means other than mechanically-actuated
    • B23Q3/088Work-clamping means other than mechanically-actuated using vacuum means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54Glass

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
KR1020110139765A 2011-01-25 2011-12-22 피가공물 적재 고정용 테이블 및 피가공물 적재 고정용 글래스 척 KR101326398B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011013022A JP5240301B2 (ja) 2011-01-25 2011-01-25 被加工物載置固定用テーブルおよび被加工物載置固定用ガラスチャック
JPJP-P-2011-013022 2011-01-25

Publications (2)

Publication Number Publication Date
KR20120086242A KR20120086242A (ko) 2012-08-02
KR101326398B1 true KR101326398B1 (ko) 2013-11-11

Family

ID=46519505

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110139765A KR101326398B1 (ko) 2011-01-25 2011-12-22 피가공물 적재 고정용 테이블 및 피가공물 적재 고정용 글래스 척

Country Status (4)

Country Link
JP (1) JP5240301B2 (zh)
KR (1) KR101326398B1 (zh)
CN (1) CN102601530B (zh)
TW (1) TWI421143B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3046370B1 (fr) * 2015-12-31 2018-02-16 Ecole Centrale De Nantes Procede et systeme pour le reglage d'un dispositif de fabrication additive
CN111148596B (zh) 2017-10-04 2022-09-16 极光先进雷射株式会社 激光加工方法以及激光加工系统
CN109434519B (zh) * 2018-12-24 2024-08-02 天津职业技术师范大学 真空永磁板
KR20220132708A (ko) * 2021-03-23 2022-10-04 삼성디스플레이 주식회사 레이저 가공용 워크 테이블
CN114799689B (zh) * 2022-04-29 2023-02-14 中国科学院西安光学精密机械研究所 一种激光加工用微球吸附定位装置及方法
CN115193823B (zh) * 2022-07-20 2024-04-12 武汉来勒光电科技有限公司 一种激光器的耦合封装设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003164988A (ja) * 2001-11-28 2003-06-10 Toppan Forms Co Ltd レーザ加工システム
JP2006263795A (ja) * 2005-03-25 2006-10-05 Disco Abrasive Syst Ltd レーザ加工装置
JP2010082644A (ja) * 2008-09-30 2010-04-15 Disco Abrasive Syst Ltd 加工装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH034102U (zh) * 1989-06-02 1991-01-16
JPH06326337A (ja) * 1993-04-16 1994-11-25 Mitsubishi Heavy Ind Ltd レーザ加工装置
JP3004102U (ja) * 1994-03-15 1994-11-08 栄治 下永 平板加工用ベッド
JP4342992B2 (ja) * 2004-03-17 2009-10-14 株式会社ディスコ レーザー加工装置のチャックテーブル
JP4018096B2 (ja) * 2004-10-05 2007-12-05 松下電器産業株式会社 半導体ウェハの分割方法、及び半導体素子の製造方法
JP2006205187A (ja) * 2005-01-26 2006-08-10 Disco Abrasive Syst Ltd レーザー加工装置
JP2007307597A (ja) * 2006-05-19 2007-11-29 Disco Abrasive Syst Ltd レーザー加工装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003164988A (ja) * 2001-11-28 2003-06-10 Toppan Forms Co Ltd レーザ加工システム
JP2006263795A (ja) * 2005-03-25 2006-10-05 Disco Abrasive Syst Ltd レーザ加工装置
JP2010082644A (ja) * 2008-09-30 2010-04-15 Disco Abrasive Syst Ltd 加工装置

Also Published As

Publication number Publication date
KR20120086242A (ko) 2012-08-02
JP5240301B2 (ja) 2013-07-17
TW201244865A (en) 2012-11-16
CN102601530B (zh) 2015-08-19
TWI421143B (zh) 2014-01-01
JP2012152774A (ja) 2012-08-16
CN102601530A (zh) 2012-07-25

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