201244865 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種雷射加工驻里&丄 從由对加工裝置等中所使用之用以载置 固定被加工物之台，尤其關於—接 九并關於種可自正反兩面觀察所固 定之被加工物之台。 【先前技術】 /對於在藍寶石等之基板形成有元件圖案者，藉由照射脈 衝雷射而形成用於分割之起點之方法為眾所周知（例如參 照專利文獻1)。 又，於欲利用專利文獻丨中所揭示之裝置將基板於特定 位置分割之情形時等、欲對載置固定於台（亦稱作載物台 等）上之被加工物進行加工之情形時，有時對被加工物欲 自其背面側（與台接觸之側）進行觀察。可自背面側較佳地 觀察吸引固定於載物台上之透明性基板之觀察裝置已為眾 所周知（例如參照專利文獻2)。 [先前技術文獻] [專利文獻] [專利文獻1]國際公開第2006/062017號 [專利文獻2]日本專利特開2009-244549號公報 【發明内容】 [發明所欲解決之問題] 專利文獻2中所揭示之觀察裝置所包含之载物台係以石 英玻璃等透明之構件形成，且於其内部，設置有成為用以 吸引固定被加工物之吸氣路徑之吸引用管。上述载物台係 158360.doc 201244865 :藉由機械加工分別對成為其上半部分之 行錯孔3部分之透明構件之管形成對象位置進 灯鑽孔’其後將兩個構件 定。又，為抑刹-番。 目之鑽孔位置-致之方式固 行將里多耸4 π 、部之吸引用管中之漫反射，亦進 灯將…色·#低壳度色之塗料塗 — u、+. * 上神孓官分之處理。假設不 處理時，會觀察到管本身之像，而對被加工物之 識別性造成影響，因而不佳。 由於以上述製程加以製作’故而專利文獻2中所揭示之 載物台存在需要加工時間且耗費製造成本之問題。 /發明«於上述課題而完成者’其目的在於提供一種 合易進仃加工且可穩定地保持被加工物之雷射加工裝置用 台及其中所使用之玻璃炎具。 [解決問題之技術手段] 為解決上述課題，技術方案丨之發明係一種被加工物載 置固定用台，其特徵在於：其係於雷射加工裝置中載置固 定破加工物之台，且具備：平板狀之玻璃夾具；及保持 框，其自外周保持上述玻璃夾具；於上述玻璃夾具之載置 被加工物之被載置面，以俯視時呈蜂窩狀之配置形成有用 以吸引固定上述被加工物之吸引用槽。 技術方案2之發明係如技術方案1之被加工物載置固定用 台’其中上述玻璃夾具具備與上述吸引用槽連通且到達至 上述玻璃夹具之端部之第2吸引用槽；上述保持框具於一 端部與上述第2吸引用槽連通、且另一端部為與上述台外 之吸引用管之連接部之吸氣路徑。 158360.doc 201244865 技術方案3之發明係如技術方案丨或2之被加工物載置固 定用台，其中上述吸引用槽於上述被載置面之自中央呈十 字狀擴展之十字狀區域以外之區域形成為上述蜂窩狀。 技術方案4之發明係如技術方案丨至3中任一技術方案之 被加工物載置固定用台，其中上述玻璃夾具為透明。 技術方案5之發明係一種被加工物载置固定用玻璃夾 具，其特徵在於··其係雷射加工裝置中之被加工物之載置 固定用之玻璃夾具，且其形成為平板狀；於載置被加工物 之被載置面，以俯視時呈蜂窩狀之配置形成有用以吸引固 定上述被加工物之吸引用槽。 技術方案ό之發明係如技術方案5之被加工物載置固定用 玻璃夾具，其中進而具備第2吸引用槽，該第2吸引用槽與 上述吸引用槽連通，並且到達至上述玻璃夾具之端部而與 設置於上述玻璃夾具之外部之吸氣路徑連通。 技術方案7之發明係如技術方案5或6之被加工物載置固 定用玻璃夾具，其中上述吸引用槽於上述被載置面之自中 央呈十字狀擴展之十字狀區域以外之區域形成為上述蜂寓 狀。 技術方案8之發明係如技術方案5至7中任一技術方案之 被加工物載置固定用玻璃夾具，其中該玻璃夾具為透明。 [發明之效果] 根據技術方案1至技術方案8之發明，可穩定地確保載置 固定被加工物以進行雷射加工時之加工精度。又，由於玻 璃夾具中吸引用槽形成於被載置面，故而可實現製造時間 158360.doc 201244865 之縮短與製造成本之降低。 尤其根據技術方案3及技術方案7之發明，可穩定地確保 載置固定被加工物以進行雷射加工時之加工精度，且加工 時所進行之對準處理之精度亦得以確保。 尤其根據技術方案4及技術方案8之發明，於包含對應之 觀察系統之雷射加工裝置中加以使用時，對被加工物之加 工精度得以穩定地確保’並且被加工物之正反兩面均可進 行觀察。 【實施方式】 <雷射加工裝置> 圖1係概略性地表示包含本發明之實施形態之台7之雷射 加工裝置50之構成之模式圖。再者，雷射加工裝置50之以 下所示之各部分之動作（雷射光之照射、台之移動、照明 光之照射、用以決定加工位置之運算處理等）均由未圖示 之由電腦等所構成之特定之控制機構而控制。 雷射加工裝置5〇主要包含正面觀察部5QA、背面觀察部 湖、及台7,該台7包含例如石英等透明之構件，且於其 上載置貼附有被加工物1〇之保持片材4。再者，之後為易 於說明’有時將貼附有被加工物10之保持片材4載置於台7 上之内容僅表達為載置被加工物10。 正面觀察部50A為對載置於A 7卜夕& 4 , T戟直;σ 7上之被加工物1〇自照射雷 射光之側（將其稱為正面）進行觀家夕迦狡Αγτ ;适仃硯察之觀察部，背面觀察部 5 0Β為對該被加工物1 〇自都 ..... 自載置於台7上之側(將其稱為背面） 隔著上述台7而觀察之觀察部。a 开丨α 7可猎由移動機構7m而於 158360.doc 201244865 2面觀察部50A與背面觀察部遍之間沿水平方向移動。 〇 口主要由玻璃夾具1與保持框2構成（參照圖2),且 可藉由例如吸引泵等吸引機構η吸引固定被加 詳情於之後敘述。 其 -移動機構7m係、於未圖示之驅動機構之作用下使台7於水 面内沿特定之XY兩軸方向移動。藉此，可實現上述正 面觀察部50A與背面觀察部5〇B之間之台7之移動、及於各 觀察。p内之觀察位置之移動或雷射光照射位置之移動。 即’於雷射加工裝置50令，利用移動機構7m使台7移動， 藉此可於利用正面觀察部5〇八之正面側之觀察、與利用背 面觀察部50B之背面側之觀察之間進行切換。藉此，可靈 活且迅速地進行與被加工物1〇之材質或狀態對應之最佳之 觀察。再者，關於移動機構7111，就進行對準等之方面而 °更佳為亦可與水平驅動獨立地進行以特定之旋轉軸為 中心之於水平面内之旋轉旋轉）動作。 於正面觀察部50Α中，自落射照明光源S5發出之落射照 明光L5由設置於未圖示之鏡筒内之半鏡兄反射，（於台7位 於正面觀察部50A之狀態下）照射至被加工物1〇。又，正面 觀察部50A包含正面觀察機構16，該正面觀察機構16包含 5又置於半鏡52之上方（鏡筒之上方）之CCD(Charge c〇upied Device，電荷耦合器件）相機丨6a及與該cCD相機丨6a連接之 監視器16b，於照射落射照明光以之狀態下可實時地進行 被加工物10之明場像之觀察。本實施形態中，上述正面觀 察部50A與台7相當於本發明之觀察裝置之主要構成要素。 158360.doc 201244865 又’正面觀察部50A構成為亦可對载置於台7上之被加工 物1 〇進行雷射光之照射。即，正面觀察部5〇A亦為雷射加 工裝置50令之雷射光之照射部。其例如可藉由將雷射之照 射系統與觀察光學系統構成為同軸而實現。更具體而言， 正面觀察部50A可藉由具有與專利文獻1中所揭示之雷射加 工裝置之基本構成相同之構成而實現。 更詳細而言，於正面觀察部5〇A _，自雷射光源SL發出 雷射光LB，由省略圖示之鏡筒内所具備之半鏡51反射後， 將忒雷射光LB於台7位於正面觀察部5〇A之狀態下以對載 置於台7上之被加工物1〇之被加工部位聚焦之方式藉由聚 光透鏡18聚光，並照射至被加工物1〇，藉此可實現被加工 物10之加工，例如成為分割起點之熔融改質區域之形成或 燒钱（ablation)等。 於根據正面觀察部50Α中所獲得之觀察像決定加工位置 之情形時，繼而，可根據上述決定内容進行利用雷射光Μ 之照射之加工。 再者’加工位置之決定較佳為利用藉由未圖示之控制機 構而實現之GUI(Graphical User Interface’圖形使用者介 面^由雷射加工裝置5〇之操作員一邊目視確認顯示於監 視益16b之由CCD相機i6a所拍攝之圖像—邊決定。即，較 佳為由操作員冑由则施予用以決定加工位置之特定之指 示輸入，使控制機構進行基於上述輸入内容之特定之運: 處理，藉此決定加工位置。 异 背面觀察部50B構成為於台7位於背面觀察部5〇B之狀態 158360.doc 201244865 下，可一邊對於載置於台7上之被加工物ι〇自台7之上方重 疊地進行來自同軸照明光源s〗之同軸透射照明光l丨之照 射、與來自斜光照明光源52之斜光透射照明光[2之照射， 邊自〇 7之下方側藉由背面觀察機構6觀察該被加工物 10 〇 又，於背面觀察部50B中，於台7之下方，更佳為包含背 面觀察機構6,該背面觀察機構6具備設置於後述之半鏡9 之下方（鏡筒之下方）之CCD相機6a及與該CCD相機6a連接 之監視器6b。再者，監視器61)與正面觀察機構職具備之 監視器16b可為共通者。 較佳為正面觀察部50A亦可具備斜光照明光源％，可將 斜光照明光L6對台7上之被加工物1〇照射。於照射斜光照 明光L6之情形時，於正面觀察機構〖6中可獲得觀察對象之 暗場像。根據被加工物1 〇之材質或表面狀態而適當切換落 射照明光L5與斜光照明光L6，或者同時照射落射照明光 L5與斜光照明光L6，藉此不論材質等如何均可獲得較佳之 觀察像。 又，亦可於台7之下方，使自同軸照明光源83發出之同 軸照明光L3由設置於未圖示之鏡筒内之半鏡9反射，並藉 由聚光透鏡8聚光後’經由台7照射至被加工物1〇。更佳為 亦可於台7之下方具備斜光照明光源S4，可將斜光照明光 L4經由台7對被加工物10照射。例如於被加工物1〇之正面 側有不透明之金屬層等 '因而在利用正面觀察部5〇A自正 面側觀察時會自該金屬層產生反射而難以進行觀察之情形 158360.doc •9· 201244865 等時’該等同抽照明光源S3或斜光照明光㈣可較佳地用 於藉由背面觀察部50B觀察被加工物1〇之背面側。 <台之詳細構造> 其次’對本實_態中具特徵性之台7之構造進行詳細 說明。圖2係表示台7之構成之模式剖自圖。如圖2所示， 台7主要具備玻璃夾具1及保持框2。圖3係玻璃& W之俯 視圖。圖4係玻璃夾具〗之局部立體圖。 玻璃夹具1係由石英玻璃等所構成之具有5 mm〜20 _左 右之厚度之構件。如圖3所示，玻璃夾具1A致於俯視時呈 圓板狀，且於其外周端部設置有凸部1&，藉此，如圖2所 示，玻璃夾具1之外周部分具有剖面視時為1^字型之形狀。 玻璃夾具1之直徑可根據作為加1對象之被加工物1〇之尺 寸而適當決定。例如，若要加工具有4英吋〜5英吋左右之 直徑之圓板狀之被加工物1〇，則玻璃夾具丨之直徑為18〇 mm〜200 mm左右即可。 於台7中，玻璃夾具1之表面ls成為實質上之被加工物 之被載置面。即，表面1S構成台7争之被載置面之大部 分。於上述玻璃夾具1之表面ls，如圖3及圖4所示，在除 自中央向十字方向延伸之十字狀區域11?以外之四個扇型區 域lc、Id、le、If内，遍佈被加工物1〇之吸引固定時所使 用之一定寬度之吸引用槽3。 再者，於玻璃夾具1中，十字狀區域^係考慮到下述情 形而設置：例如於以透明之被加工物1〇為對象進行對準之 情形時、或於被加工物10之背面側進行對準之情形時，供 158360.doc •10- 201244865 作配置被加工物1 0之形成有對準標記之部位。於假設對準 標記位於吸引用槽3之正上方之情形時，在進行對準時， 由於在吸引用槽3會發生漫反射，故而有無法準確地特定 對準標記之位置之虞。於本實施形態中，於配置對準標記 之可能性較高之上述十字狀區域11?不形成吸引用槽3，以 可避免此種狀況。惟在本實施形態中，玻璃夾具1具有十 字狀區域lb並非必需之態樣。又，即便形成有十字狀區域 lb ’亦可充分確保台7之吸引固定被加工物1〇之穩定性。 於四個扇型區域lc、ld、le、lfR，均設置有以將多個 吸引用槽3形成為蜂窩狀之方式配置之蜂窩狀槽部3a、吸 引用槽3沿著十字狀區域丨b而配置成直線狀之直線狀槽部 3b、及吸引用槽3沿著玻璃夾具i之外周配置成弧狀之弧狀 槽部3 c。其中’構成各個槽部之吸引用槽3彼此連通。 又，僅形成為直線狀槽部3b之吸引用槽3到達至玻璃夾具j 之外周端部lg。更具體而言，於由相互正交之兩個直線狀 槽部3b與一個弧狀槽部3〇所包圍之扇形之區域内，設置有 蜂窩狀槽部3a。 吸引用槽3為深度及於表面13之寬度為〇 5 爪爪左 右之表面平坦且透明之槽。吸引用槽3具有半圓狀、橢圓 形狀、矩形狀、三角形狀等剖面形狀。又，蜂窩狀槽部& 中之相互平行之吸引用槽3之間距（相當於六角形之對邊之 距離）為3 mm〜10 mm，例如為5 mm。 保持框2係包含例如鋁等金屬而成之構件，且於俯視時 呈圓環狀。保持框2為用以保持玻璃夾具丨之外周部分之構 158360.doc 201244865 件。 保持框2由上部框2&與下部框孔構成。於由上部框以與 下部框2 b夾著設置於玻璃夹具丨之外周部分之凸部〗&之狀 態下，利用固定螺釘2c將上部框2a與下部框2b螺合而成為 一體，藉此實現保持框2對玻璃夾具丨之保持。惟使上部框 2a與下。卩框2b成為一體之形態並不限於此。更具體而言， 將玻璃夾具1之凸部la被夾在由上部框2&與下部框2b形成 之凹部2d中。如上所述，利用保持框2保持有玻璃夾具i之 台7利用未圖示之設置機構而設置成可藉由移動機構了⑺移 動。 於保持框2之表面2s，對應於設置於玻璃夾具丨之表面ls 之直線狀槽部3b，而設置有吸引用槽2e。吸引用槽2e於利 用保持框2保持玻璃夾具1時，設置於與形成為直線狀槽部 3b之吸引用槽3連通之位置上。因此，更詳細而言，上述 保持框2對玻璃夾具1之保持係於實現上述連通狀態之態樣 下進行。 吸引用槽2e於保持框2之表面2s之中途成為終端，自該 終端位置起，連通於吸引用槽2e之吸引孔2f設置成朝向保 持框2之内部開孔。吸引孔2f之另一端部成為與自吸引機 構11配設之吸引用管12之連接部。再者，圖2中，吸引孔 2f到達至下部框2b，但此並非必需之態樣。 於利用雷射加工裝置50進行加工時，於具有此種構成之 台7上載置被加工物1〇。更詳細而言，被加工物1〇係以被 加工物10本身或者貼附有被加工物1〇之保持片材4覆蓋所 158360.doc -12- 201244865 有吸引用槽3、2e之方式载置。於上述狀態下使吸引機構 11進行動作時’則經由吸引用管12及吸引孔對吸引用槽 2e乃至於所有的吸引用槽3賦予負壓。上述負壓作用於所 載置之被加工物10或保持片材4，藉此將被加工物1〇或保 持片材4固定於台7上。 如上所述’本實施形態之特徵在於如下方面：用以吸引 固定被加工物10之吸氣路徑之大部分為設置於玻璃夾具i 之表面Is之吸引用槽3及與該吸引用槽3連通之保持框2之 表面2s之吸引用槽2e，且僅連通於吸引用槽2e之保持框2 之吸引孔2f設置於台7之内部。尤其由於玻璃夾具1係於一 塊玻璃板之表面a又置有吸引用槽3，故而與於内部設置有 吸氣路徑之先前之玻璃製台相比，可縮短製作時間，且降 低製作成本。具體之玻璃夾具之製法於後敘述。 又’本實施形態中’設置於玻璃夾具1之吸引用槽3之大 部分構成蜂窩狀槽部3a之原因在於，確保照射雷射光後之 被加工物10之固定之穩定性。圖5係用以說明上述内容之 表示本實施形態之玻璃夾具1與雷射加工中之加工預定線 P1之關係之圖。圖6係表示關於為進行對比而表示之以形 成為矩形格子之方式配置有吸引用槽1〇〇3之玻璃夾具1〇〇1 之吸引用槽1003與雷射加工中之加工預定線p2之關係之 圖。又，圖7係模式性地表示沿著圖6所示之加工預定線p2 進行加工時之與加工方向垂直之剖面之情況之圖。 雷射加工之加工中主流為如以加工預定線ρι ' p2所示之 直線狀之加工。如圖6所示，於欲使用以形成為矩形之方 158360.doc 13 201244865 式設置有吸引用槽1003之玻璃夾具1〇〇1對被加工物1〇進行 直線狀之加工時，根據加工内容與被加工物1〇之固定態樣 之不同，而如圖6所示，會發生加工預定線p2之位置與吸 引用槽1003之配置位置於水平面内重疊之情形。上述重疊 容易於如下情形時發生：例如以吸引用槽1〇〇3與巧兩軸方 向一致之方式配置台7，且對被加工物丨〇之雷射加工沿著X 軸方向或y軸方向進行。 另一方面，於吸引固定被加工物丨〇之期間，負壓作用於 吸引用槽1003。因此，於保持片材4中位於吸引用槽⑺的 上之部分4a(亦為未與玻璃夾具1〇〇1接觸之部分），如圖7所 示之垂直向下之吸引力F1沿著吸引用槽】〇〇3發生作用。結 果為，如圖7所示，上述部分4a容易自被加工物⑺上剝 離。於此種狀況下，若沿著如圖6所示之與吸引用槽1〇〇3 一致之加工預定線P2進行雷射加工，則由於保持片材4受 到向下之吸引力F1，故而對於被加工物1〇，會如圖7所示 般於加工槽1 〇a之下方作用拉伸應力F2，而視情況產生如 下不良情形：裂縫l〇b自加工槽l〇a之下端部擴展，導致被 加工物1〇斷裂。 或者，於如利用雷射加工完全切斷被加工物1〇之情形 時，為不產生加工位置之偏移，必須將切斷後之單片繼續 由保持片材4保持於與切斷前相同之位置上，但由於保持 片材4受到如圖7所示之吸引力F1，而引起如下不良情形： 該單片產生位置偏移，結果導致加工位置偏移。 又，於如加工間距較吸引用槽1003之寬度小之情形時， 158360.doc -14- 201244865 亦會引起於吸引用槽1003上切出之單w白仅> 早月自保持片材4上剝 離而飛散等不良情形。 即，於使用圖6所示之以形成為矩形格子之方式配置有 吸引用1003之玻璃夾具1001之情形時，拇嫱 f根據加工預定線與 ' 吸引用槽之配置關係之不同’有時無法實現穩定之加工。 . 與此相對，於圖5所示之本實施形態之情形時，構成蜂 窩狀槽部3a之吸引用槽3並非於一方向上連續。藉此，即 便該吸引用槽3之一部分與加工預定線卩丨重疊，於該加工 預定線pi所經過之位置亦必然存在未形成吸引用槽3之部 位。因此，於本實施形態之情形時，保持片材4中3受到如 圖7所示之吸引力F1之部分僅分散地存在，從而吸引用槽〕 處之保持片材4之剝離不會成為問題。 於本實施形態之情形時，於使用台7時，原本便較圖5所 示之情形更難發生加工預定線與吸引用槽3一致之情形， 大多數之加工係於加工預定線不沿著吸引用槽3之狀態下 進行。當然，於此種情形時係於穩定之吸引固定狀態下進 行加工。因此，使用本實施形態之台7之雷射加工裝置5〇 之加工精度得以穩定地確保。 • <玻璃夾具之製法> . 其次，對玻璃夾具1之製法、尤其是吸引用槽3之形成進 打說明。圖8係表示玻璃夾具丨之製造製程之圖。 首先，作為玻璃夾具1之形成素材，準備由石英玻璃等 所形成之圓板狀之玻璃板（步驟STl)。如上所述，玻璃夾 具1具有5 mm〜20 mm左右之厚度，且只要具有對應於被加 I58360.doc •15· 201244865 工物ίο之尺寸之直徑即可，因此玻璃板亦只要準備與此對 應之尺寸之玻璃板即可。又，預先於玻璃板之外周部分形 成有凸部la » 其次，於準備之玻璃板之表面（吸引用槽3之形成對象 面）形成抗蝕膜（步驟ST2)。抗蝕膜之形成可採用公知之方 法》 繼而，對於施有上述抗蝕膜之玻璃板，設置對應於吸引 用槽3之配置圖案之遮罩而進行噴砂處理，於玻璃板表面 之吸引用槽3之形成位置形成深度為〇·5 mm〜丨mm左右之 槽（步驟ST3)。再者，此時所形成之槽為於表面存在凹凸 (起伏）且透明性低之粗糙槽。喷砂處理可採用公知之方 法。 於形成上述粗糙槽之後，進行蝕刻處理，使該粗糙槽之 表面腐蝕，藉此去除起伏而使該粗糙槽變得平滑（步驟 ST4)。藉此，形成表面平坦且透明之（經鏡面精加工之）吸 引用槽3。蝕刻處理可採用公知之方法。若玻璃板包含石 英玻璃’則較佳為使用以例如硝酸鈽銨等為主成分之蝕刻 溶液，且將處理時間設為i小時〜2小時左右。 最後，藉由去除抗蚀膜（步驟ST5)，而獲得包含吸引用 槽3之玻璃夾具1 »藉由將所獲得之玻璃夾具丨由預先製作 之保持框2以上述方式保持，而完成台7。 如上所述’本實施形態中特徵在於如下方面：於玻璃夾 具1形成吸引用槽3時，併用喷砂處理與蝕刻處理。假設僅 利用蝕刻處理形成深度為〇·5 mm左右之槽時，必需6小時 158360.doc 201244865 左右之钱刻時間。而且，由於會產生不僅進行深度方向之 #刻’而且進行朝向抗蝕膜之下方之水平方向之蝕刻之過 度#刻等’故而亦存在難以進行槽形狀之控制之問題。因 此，欲僅以蝕刻處理形成吸引用槽3，就形成時間及槽形 狀之精度之觀點而言不佳。 與此相對，於本實施形態之情形時，只要以喷砂處理於 短時間内形成某種程度之深度之粗糙槽之後，進行短時間 之飯亥丨處理，便可形成特定形狀之吸引用槽3。與僅進行 钱刻處理之情形相比，可縮短—個玻璃板中之槽之形成時 間’且精度亦得以確保。 再者，於噴砂處理之後進行之蝕刻處理雖耗費最初成 本，但關於重複處理之成本較低，因此於重複製作玻璃夹 具之情形時，有助於製作成本之降低。 又於專利文獻2中所揭示之構成之載物台之情形時， 於製作多個時，每一個均需要切削之時間，而於本實施形 態中進行之噴砂處理可同時對多個玻璃板進行，因此本實 形〜、之玻璃夾具之製法於此點上亦可謂提昇了製造效 者。 F哟w射加工裝 置用以載置固定被加工物之台，使用於表面呈蜂寫狀配 置有吸引用槽之台’藉此可穩定地確保雷射加工時之加工 精度。又，由於在構成台之玻璃夾具 x丹上所。又置之吸引用槽 之…，併用嘴砂處理與敍刻處理，故而可實現槽之形 成時間之縮短與形狀精度之確保。即，可實現製造玻璃夾 158360.doc 201244865 具及台時之製造時間之縮短與製造成本之降低。 <變形例> 即便於吸引用槽形成為格子之情形時，亦存在可避免上 述不良情形之情況。圖9係例示上述變形例之玻璃夾具1〇1 之圖。上述玻璃夾具101具有鋸齒配置有吸引用槽1〇3之格 子之構成。此時，亦與圖5所示之玻璃夾具丨同樣地，吸引 用槽103並不於一方向上連續，因此即便該吸引用槽1〇3之 一部分與加工預定線P3重疊，於該加工預定線”所經過之 位置上亦必然存在未形成吸引用槽1〇3之部位。然而，於 如上述實施形態般玻璃夾具丨包含蜂窩狀槽部3a之情形 時，沿著加工預定線P2而存在之吸引用槽3與除此以外之 部分之比率大致為i : 2,與此相對，於如圖9所示之情形 時，沿著加工預定線P3而存在之吸引用槽1〇3與除此以外 之部分之比率大致為1 :卜因此，由於後者之存在吸引用 槽之比率相對較大，故而就穩定地確保加工精度之方面而 言，如上所述般設置蜂寫狀槽部33之一方 【圖式簡單說明】 ' 圖1係概略性地表不包含本發明之實施形態t台7之雷射 加工裝置50之構成的模式圖。 圖2係表示台7之構成之模式剖面圖。 圖3係玻璃夾具1之俯視圖。 圖4係玻璃夹具1之局部立體圖。 圖5係本實施形態之玻璃失具丨與雷射加工中之加工預定 線P1之關係之圖。 158360.doc •18· 201244865 圖6係關於以形成為矩形格子之方式配置有吸Μ 1003之玻璃夾具1001的吸引用槽1003與雷射加工中之加 預定線P2之關係之圖。 圖7係模式性地表示沿著圖6所示之加工預定線p2進行加 ♦ 工時之與加工方向垂直之剖面之情況之圖。 * 圖8係表示玻璃夾具1之製造製程之圖。 圖9係例示變形例之玻璃夾具1 〇丨之圖。 【主要元件符號說明】 1 ' 101 、 1001 玻璃夾具 1 a 凸部 lb 十字狀區域 1 c 、Id、ie、if 扇型區域 ig 玻璃夾具之外周端部 2 保持框 2e 吸引用槽 2f 吸引孔 3、 103 、 1003 (玻璃夾具之）吸引用槽 3a 蜂窩狀槽部 3b 直線狀槽部 3c 弧狀槽部 4 保持片材 7 台 7m 移動機構 10 被加工物 158360.doc 201244865 10a 加工槽 10b 裂縫 11 吸引機構 12 吸引用管 50 雷射加工裝置 50A 正面觀察部 50B 背面觀察部 158360.doc -20-201244865 VI. Description of the Invention: [Technical Field] The present invention relates to a laser processing station & 丄 from the use of a processing device or the like for mounting a fixed workpiece, in particular - In addition, the table of the workpiece to be fixed can be observed from both sides. [Prior Art] A method of forming a starting point for division by irradiating a pulsed laser is known for forming a component pattern on a substrate such as sapphire (for example, refer to Patent Document 1). Further, when the substrate is to be divided at a specific position by using the device disclosed in the patent document, when the workpiece to be processed on a table (also referred to as a stage or the like) is to be processed, Sometimes, the workpiece is to be observed from the back side (the side in contact with the stage). It is known that an observation device that attracts a transparent substrate fixed to a stage from the back side is known (for example, refer to Patent Document 2). [PRIOR ART DOCUMENT] [Patent Document 1] International Publication No. 2006/062017 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-244549A SUMMARY OF INVENTION [Problems to be Solved by the Invention] Patent Document 2 The stage included in the observation apparatus disclosed in the present invention is formed of a transparent member such as quartz glass, and a suction tube serving as an intake path for attracting and fixing the workpiece is provided inside. The above-mentioned stage system is 158360.doc 201244865: The tube forming target position of the transparent member which is the transparent member of the upper half of the hole is drilled by mechanical processing, and then the two members are fixed. Also, for the suppression of the brakes - Fan. The position of the hole in the hole - the way to solidify will be more than 4 π, the diffuse reflection in the suction tube of the part, also into the light will be ... color · # low shell color coating - u, +. * God's official division. Assuming that the image is not processed, the image of the tube itself is observed, which affects the visibility of the workpiece and is therefore not good. The carrier disclosed in Patent Document 2 has a problem that it takes a processing time and consumes a manufacturing cost because it is produced by the above-described process. Inventive X. The object of the invention is to provide a laser processing apparatus for use in a laser processing apparatus for stably processing a workpiece. [Means for Solving the Problems] In order to solve the above problems, the invention provides a workpiece mounting and fixing table, which is characterized in that a laser processing device is placed on a table on which a fixed workpiece is placed, and a flat glass jig; and a holding frame that holds the glass jig from the outer periphery; and the mounting surface of the workpiece placed on the glass jig is formed in a honeycomb shape in a plan view to attract and fix the above The suction groove for the workpiece. According to a second aspect of the invention, the glass fixture includes a second suction groove that communicates with the suction groove and reaches an end of the glass holder; the holding frame An intake path having a one end portion that communicates with the second suction groove and a other end portion that is a connection portion with the suction tube outside the table. The invention of claim 3, wherein the suction groove is outside the cross-shaped region in which the loading surface is expanded in a cross shape from the center. The area is formed into the above honeycomb shape. The invention of claim 4 is the workpiece mounting and fixing table according to any one of the aspects of the invention, wherein the glass holder is transparent. According to a fifth aspect of the invention, there is provided a glass jig for mounting a fixed object, wherein the glass jig for mounting and fixing the workpiece in the laser processing apparatus is formed into a flat plate shape; The surface to be placed on which the workpiece is placed is placed in a honeycomb shape in a plan view to form a suction groove for attracting and fixing the workpiece. According to a fifth aspect of the invention, in the glass fixture for fixing a workpiece according to claim 5, the second suction groove is further provided, and the second suction groove communicates with the suction groove and reaches the glass holder. The end portion communicates with an intake path provided outside the glass jig. The invention of claim 7 is the glass fixture for mounting a fixed object according to claim 5 or 6, wherein the suction groove is formed in a region other than the cross-shaped region of the mounting surface that extends in a cross shape from the center. The above bee is shaped. The invention of claim 8 is the glass fixture for mounting a fixed object according to any one of claims 5 to 7, wherein the glass holder is transparent. [Effects of the Invention] According to the inventions of the first aspect to the eighth aspect, it is possible to stably ensure the machining accuracy when the workpiece is placed and fixed to perform laser processing. Further, since the suction groove in the glass jig is formed on the surface to be placed, the manufacturing time 158360.doc 201244865 can be shortened and the manufacturing cost can be reduced. In particular, according to the inventions of the third aspect and the seventh aspect, it is possible to stably ensure the machining accuracy when the workpiece is placed and fixed for laser processing, and the precision of the alignment processing performed during the processing is ensured. In particular, according to the inventions of the fourth aspect and the eighth aspect, when the laser processing apparatus including the corresponding observation system is used, the processing accuracy of the workpiece can be stably ensured and the front and back sides of the workpiece can be both Observe. [Embodiment] <Laser processing apparatus> Fig. 1 is a schematic view showing a configuration of a laser processing apparatus 50 including a stage 7 according to an embodiment of the present invention. Further, the operation of each part of the laser processing apparatus 50 (the irradiation of the laser light, the movement of the stage, the illumination of the illumination light, the arithmetic processing for determining the processing position, etc.) are all performed by a computer not shown. It is controlled by a specific control mechanism constituted by the like. The laser processing apparatus 5A mainly includes a front observation portion 5QA, a back surface observation portion lake, and a stage 7, and the table 7 includes a transparent member such as quartz, and a holding sheet to which the workpiece 1 is attached is attached 4. In the following, it is easy to explain that the contents of the holding sheet 4 to which the workpiece 10 is attached are placed on the table 7 in some cases, and only the workpiece 10 is placed. The front observation portion 50A is for viewing the side of the object to be irradiated with laser light (referred to as the front side) on the side of the workpiece 7 placed on A 7 夕 && 4 , T 戟 straight; σ 7 (referred to as the front side). The observation portion suitable for observation, the back observation portion 50 is the object to be processed, and the side to be placed on the table 7 (referred to as the back side) is separated from the table 7 Observed by the observation department. a Opening α 7 can be hunted by the moving mechanism 7m and moved in the horizontal direction between the two-surface observation unit 50A and the back-view portion at 158360.doc 201244865. The mouthpiece is mainly composed of a glass jig 1 and a holding frame 2 (see Fig. 2), and can be suction-fixed by a suction mechanism such as a suction pump. The movement mechanism 7m is driven by a drive mechanism (not shown) to move the stage 7 in the water surface in a specific XY axial direction. Thereby, the movement of the stage 7 between the front surface observation portion 50A and the back surface observation portion 5B can be realized and observed. The movement of the observation position in p or the movement of the laser light irradiation position. In other words, in the laser processing apparatus 50, the stage 7 is moved by the moving mechanism 7m, whereby the observation by the front side of the front observation unit 5 and the observation of the back side of the back surface observation unit 50B can be performed. Switch. Thereby, the best observation corresponding to the material or state of the workpiece 1 can be performed flexibly and quickly. Further, the moving mechanism 7111 is preferably rotated or rotated in a horizontal plane about a specific rotation axis independently of the horizontal drive. In the front observation portion 50A, the epi-illumination light L5 emitted from the epi-illumination light source S5 is reflected by the half-mirror provided in the lens barrel (not shown), and is irradiated to the side (in the state where the stage 7 is located in the front observation portion 50A). The workpiece is 1 〇. Moreover, the front view portion 50A includes a front view mechanism 16 including a CCD (Charge C〇upied Device) camera 6a that is placed above the half mirror 52 (above the lens barrel) and The monitor 16b connected to the cCD camera 6a can observe the bright field image of the workpiece 10 in real time while irradiating the illumination light. In the present embodiment, the front observation unit 50A and the stage 7 correspond to the main components of the observation apparatus of the present invention. 158360.doc 201244865 Further, the front view portion 50A is configured to irradiate the workpiece 1 载 placed on the stage 7 with laser light. That is, the front observation portion 5A is also an irradiation portion for laser light by the laser processing device 50. This can be achieved, for example, by coaxially illuminating the laser illumination system with the viewing optical system. More specifically, the front observation portion 50A can be realized by having the same configuration as that of the laser processing apparatus disclosed in Patent Document 1. More specifically, in the front view portion 5A_, laser light LB is emitted from the laser light source SL, and is reflected by the half mirror 51 provided in the lens barrel (not shown), and the laser light LB is placed on the stage 7 In the state of the front view portion 5A, the condensing lens 18 collects light by focusing on the processed portion of the workpiece 1 placed on the table 7, and irradiates the object to be processed. The processing of the workpiece 10 can be realized, for example, formation of a melt-modified region which is a starting point of division, or ablation. When the processing position is determined based on the observation image obtained in the front observation portion 50A, processing by irradiation with the laser beam can be performed based on the above-described determination content. Further, the determination of the processing position is preferably performed by using a GUI (not shown) (Graphical User Interface' graphical user interface is visually confirmed by the operator of the laser processing apparatus 5 16b is determined by the image captured by the CCD camera i6a. That is, it is preferable that the operator inputs a specific instruction input for determining the processing position, so that the control unit performs the specific content based on the input content. The processing is performed to determine the processing position. The different back surface observation portion 50B is configured such that the stage 7 is placed in the state of the back surface observation portion 5B, 158360.doc 201244865, and the workpiece can be placed on the table 7 The illumination of the coaxial transmission illumination light from the coaxial illumination source s is superimposed on the top of the stage 7 and the oblique transmission of the illumination light from the oblique illumination source 52 [the illumination is performed on the lower side of the 〇7 by the back side The observation mechanism 6 observes the workpiece 10 and further includes a back surface observation mechanism 6 in the back surface observation portion 50B below the stage 7, and the back surface observation mechanism 6 is provided in a half to be described later. Downward (below the lens barrel) of the CCD camera 9 of the monitor 6a and 6B are connected 6a of the CCD camera. Further, the monitor 61) and a front view of the monitor means includes a post 16b may be a common person. Preferably, the front observation portion 50A may be provided with a slanting illumination source %, and the slant illumination light L6 may be irradiated to the workpiece 1 on the stage 7. In the case of illuminating the oblique light, the dark field image of the observation object is obtained in the front observation mechanism [6]. According to the material or surface state of the workpiece 1 , the epi-illumination light L5 and the oblique illumination light L6 are appropriately switched, or the epi-illumination light L5 and the oblique illumination light L6 are simultaneously irradiated, thereby obtaining a better observation image regardless of the material or the like. . Further, the coaxial illumination light L3 emitted from the coaxial illumination light source 83 may be reflected by the half mirror 9 provided in the lens barrel (not shown) under the stage 7, and condensed by the condensing lens 8 to pass through The stage 7 is irradiated to the workpiece 1〇. More preferably, the oblique illumination source S4 is provided below the stage 7, and the oblique illumination light L4 can be irradiated to the workpiece 10 via the stage 7. For example, when the front side of the workpiece 1 has an opaque metal layer or the like, it is reflected from the metal layer when the front observation portion 5A is viewed from the front side, and it is difficult to observe. 158360.doc •9· 201244865 Equivalent "This equivalent illumination source S3 or oblique illumination light (4) can be preferably used to observe the back side of the workpiece 1 by the back view portion 50B. <Detailed structure of the station> Next, the structure of the table 7 having the characteristic state in the actual state will be described in detail. Fig. 2 is a schematic cross-sectional view showing the configuration of the stage 7. As shown in FIG. 2, the table 7 mainly includes a glass jig 1 and a holding frame 2. Figure 3 is a top view of the glass & W. Figure 4 is a partial perspective view of a glass fixture. The glass jig 1 is a member having a thickness of 5 mm to 20 _ left and right composed of quartz glass or the like. As shown in FIG. 3, the glass jig 1A has a disk shape in a plan view, and has a convex portion 1 & at its outer peripheral end portion, whereby the outer peripheral portion of the glass jig 1 has a cross-sectional view as shown in FIG. It is a shape of 1^ shape. The diameter of the glass jig 1 can be appropriately determined according to the size of the workpiece 1 to be added. For example, in order to process a disk-shaped workpiece having a diameter of about 4 inches to 5 inches, the diameter of the glass jig can be about 18 mm to 200 mm. In the stage 7, the surface ls of the glass jig 1 becomes a substantially placed surface on which the workpiece is placed. That is, the surface 1S constitutes a large portion of the stage 7 on which the stage 7 competes. As shown in FIG. 3 and FIG. 4, the surface ls of the glass jig 1 is surrounded by four fan-shaped regions lc, Id, le, and If other than the cross-shaped region 11 extending from the center to the cross direction. The suction groove 3 of a certain width used for the suction of the workpiece is fixed. Further, in the glass jig 1, the cross-shaped area is provided in consideration of, for example, the case where the transparent workpiece 1 is aligned, or the back side of the workpiece 10. For the case of alignment, 158360.doc •10-201244865 is used to configure the part of the workpiece 10 that has the alignment mark. In the case where the alignment mark is located directly above the suction groove 3, when the alignment is performed, diffuse reflection occurs in the suction groove 3, so that the position of the alignment mark cannot be accurately specified. In the present embodiment, the cross-shaped region 11 having a high possibility of arranging the alignment marks is not formed, and the suction groove 3 is not formed, so that such a situation can be avoided. However, in the present embodiment, the glass jig 1 has a polygonal area lb which is not essential. Further, even if the cross-shaped region lb ′ is formed, the stability of the suction and fixation of the workpiece 1 can be sufficiently ensured. The four fan-shaped regions lc, ld, le, and lfR are each provided with a honeycomb-shaped groove portion 3a disposed so as to form a plurality of suction grooves 3 in a honeycomb shape, and a suction groove 3 along the cross-shaped region 丨b The linear groove portion 3b and the suction groove 3 which are arranged in a straight line are arranged in an arc-shaped arcuate groove portion 3c along the outer circumference of the glass jig i. Among them, the suction grooves 3 constituting the respective groove portions communicate with each other. Moreover, only the suction groove 3 formed in the linear groove portion 3b reaches the outer peripheral end portion 1g of the glass jig j. More specifically, a honeycomb-shaped groove portion 3a is provided in a sector-shaped region surrounded by two linear groove portions 3b and one arc-shaped groove portion 3' which are orthogonal to each other. The suction groove 3 is a groove having a depth and a surface of the surface 13 which is a flat and transparent surface of the 〇 5 claw. The suction groove 3 has a cross-sectional shape such as a semicircular shape, an elliptical shape, a rectangular shape, or a triangular shape. Further, the distance between the suction grooves 3 which are parallel to each other in the honeycomb groove portion & (the distance from the opposite side of the hexagonal shape) is 3 mm to 10 mm, for example, 5 mm. The holding frame 2 is a member made of a metal such as aluminum, and has an annular shape in plan view. The holding frame 2 is a structure for holding the outer peripheral portion of the glass jig 158360.doc 201244865. The holding frame 2 is composed of an upper frame 2& and a lower frame hole. The upper frame 2a and the lower frame 2b are screwed together by the fixing screws 2c in a state in which the upper frame is sandwiched between the upper frame 2b and the lower frame 2b. The maintenance of the holding frame 2 to the glass fixture is achieved. Only the upper frame 2a and the bottom. The form in which the frame 2b is integrated is not limited to this. More specifically, the convex portion 1a of the glass jig 1 is sandwiched by the concave portion 2d formed by the upper frame 2& and the lower frame 2b. As described above, the stage 7 holding the glass jig i by the holding frame 2 is provided to be movable by the moving mechanism (7) by an installation mechanism (not shown). On the surface 2s of the holding frame 2, a suction groove 2e is provided corresponding to the linear groove portion 3b provided on the surface ls of the glass jig. When the suction groove 2e holds the glass jig 1 by the holding frame 2, it is provided at a position communicating with the suction groove 3 formed in the linear groove portion 3b. Therefore, in more detail, the holding frame 2 is carried out in a state in which the holding of the glass jig 1 is achieved in the above-described communication state. The suction groove 2e serves as a terminal end in the middle of the surface 2s of the holding frame 2, and the suction hole 2f that communicates with the suction groove 2e is provided so as to open toward the inside of the holding frame 2 from the end position. The other end portion of the suction hole 2f serves as a connection portion with the suction tube 12 disposed from the self-suction mechanism 11. Further, in Fig. 2, the suction hole 2f reaches the lower frame 2b, but this is not essential. When processing is performed by the laser processing apparatus 50, the workpiece 1 is placed on the stage 7 having such a configuration. More specifically, the workpiece 1 is covered with the workpiece 10 itself or the holding sheet 4 to which the workpiece 1 is attached. The 158360.doc -12-201244865 has the suction grooves 3, 2e. Set. When the suction mechanism 11 is operated in the above state, the negative suction pressure is applied to the suction groove 2e or all the suction grooves 3 via the suction pipe 12 and the suction hole. The negative pressure acts on the workpiece 10 or the holding sheet 4 placed thereon, whereby the workpiece 1 or the holding sheet 4 is fixed to the table 7. As described above, the present embodiment is characterized in that most of the intake path for attracting and fixing the workpiece 10 is the suction groove 3 provided on the surface Is of the glass jig i and communicates with the suction groove 3. The suction groove 2e that holds the surface 2s of the frame 2 and the suction hole 2f that communicates only with the holding frame 2 of the suction groove 2e are provided inside the stage 7. In particular, since the glass jig 1 is provided with the suction groove 3 on the surface a of one glass plate, the production time can be shortened and the manufacturing cost can be reduced as compared with the previous glass table in which the intake path is provided. The specific method of manufacturing the glass fixture will be described later. In the present embodiment, the majority of the suction grooves 3 provided in the glass jig 1 constitute the honeycomb groove portion 3a because the stability of the workpiece 10 after the irradiation of the laser light is secured. Fig. 5 is a view for explaining the relationship between the glass jig 1 of the present embodiment and the planned processing line P1 in the laser processing. Fig. 6 is a view showing a suction groove 1003 for a glass jig 1〇〇1 in which a suction groove 1〇〇3 is formed so as to be formed in a rectangular lattice for comparison, and a processing planned line p2 in laser processing. Diagram of the relationship. Moreover, FIG. 7 is a view schematically showing a state in which the cross section perpendicular to the machining direction is processed along the planned line p2 shown in FIG. 6 . The mainstream processing in laser processing is processing such as linear processing as indicated by the processing planned line ρι 'p2. As shown in Fig. 6, when the glass jig 1〇〇1 provided with the suction groove 1003 is formed into a rectangular shape, the glass material jig 1〇〇1 of the suction groove 1003 is linearly processed, according to the processing content. Unlike the fixed state of the workpiece 1, as shown in Fig. 6, the position where the planned line p2 is generated and the position at which the suction groove 1003 is disposed overlap in the horizontal plane. The above-described overlap is likely to occur when the stage 7 is arranged such that the suction groove 1〇〇3 coincides with the direction of the two axes, and the laser processing of the workpiece is performed along the X-axis direction or the y-axis direction. get on. On the other hand, a negative pressure acts on the suction groove 1003 while sucking and fixing the workpiece. Therefore, in the portion 4a of the holding sheet 4 which is located above the suction groove (7) (also the portion which is not in contact with the glass jig 1〇〇1), the vertical downward attraction F1 as shown in Fig. 7 follows the attraction. Use slot] 〇〇3 to take effect. As a result, as shown in Fig. 7, the above portion 4a is easily peeled off from the workpiece (7). In this case, if the laser processing is performed along the planned processing line P2 which coincides with the suction groove 1〇〇3 as shown in FIG. 6, since the holding sheet 4 receives the downward attraction force F1, When the workpiece is 1 〇, the tensile stress F2 acts on the lower side of the processing tank 1 〇a as shown in Fig. 7, and the following disadvantage occurs depending on the case: the crack l〇b expands from the lower end of the processing groove l〇a, This causes the workpiece to break. Alternatively, in the case where the workpiece is completely cut by laser processing, in order not to cause a shift in the processing position, the cut single sheet must be held by the holding sheet 4 in the same manner as before the cutting. In position, but because the holding sheet 4 is subjected to the attractive force F1 as shown in Fig. 7, the following disadvantage occurs: The sheet is displaced in position, resulting in a shift in the processing position. Further, when the processing pitch is smaller than the width of the suction groove 1003, 158360.doc -14-201244865 also causes a single w white cut out on the suction groove 1003 only > early month self-holding sheet 4 Bad situations such as peeling off and scattering. In other words, when the glass jig 1001 for suction 1003 is disposed so as to be formed in a rectangular lattice as shown in FIG. 6, the thumb f may not be different depending on the arrangement relationship between the planned line and the 'suction groove. Achieve stable processing. On the other hand, in the case of the present embodiment shown in Fig. 5, the suction grooves 3 constituting the honeycomb-shaped groove portion 3a are not continuous in one direction. Thereby, even if one portion of the suction groove 3 overlaps with the planned planned line ,, the portion where the processing target line pi passes does not necessarily have a portion where the suction groove 3 is not formed. Therefore, in the case of the present embodiment, the portion of the holding sheet 3 which is subjected to the attraction force F1 as shown in Fig. 7 exists only in a dispersed manner, so that the peeling of the holding sheet 4 at the suction groove is not a problem. . In the case of the present embodiment, when the stage 7 is used, it is more difficult to cause the processing line to coincide with the suction groove 3 as compared with the case shown in Fig. 5. Most of the processing is not along the planned line. The suction tank 3 is in the state of being sucked. Of course, in this case, the processing is performed under a stable suction and fixed state. Therefore, the processing accuracy of the laser processing apparatus 5 using the stage 7 of the present embodiment is stably ensured. • <Manufacturing method of glass jig> Next, the method of manufacturing the glass jig 1, in particular, the formation of the suction groove 3 will be described. Fig. 8 is a view showing the manufacturing process of the glass jig. First, as a material for forming the glass jig 1, a disk-shaped glass plate formed of quartz glass or the like is prepared (step ST1). As described above, the glass jig 1 has a thickness of about 5 mm to 20 mm, and as long as it has a diameter corresponding to the size of the I58360.doc •15·201244865 object ίο, the glass plate is also prepared to correspond to this. The size of the glass plate can be. Further, a convex portion la is formed in advance on the outer peripheral portion of the glass plate. Next, a resist film is formed on the surface of the prepared glass plate (the surface on which the suction groove 3 is formed) (step ST2). A method of forming a resist film can be carried out by a known method. Then, a glass plate to which the resist film is applied is provided with a mask corresponding to the arrangement pattern of the suction grooves 3, and sandblasting is performed on the surface of the glass plate. The formation position of 3 forms a groove having a depth of about 5·5 mm to 丨mm (step ST3). Further, the groove formed at this time is a rough groove having irregularities (undulations) on the surface and low transparency. The blasting treatment can be carried out by a known method. After the rough groove is formed, an etching treatment is performed to etch the surface of the rough groove, thereby removing the undulation and smoothing the rough groove (step ST4). Thereby, a flat (transparently finished) suction groove 3 is formed which is flat and transparent. The etching treatment can be carried out by a known method. When the glass plate contains quartz glass, it is preferable to use an etching solution containing, for example, ammonium cerium nitrate as a main component, and the treatment time is set to about i hours to about 2 hours. Finally, by removing the resist film (step ST5), the glass jig 1 containing the suction groove 3 is obtained by completing the stage 7 by holding the obtained glass jig 丨 from the pre-made holding frame 2 in the above manner. . As described above, the present embodiment is characterized in that, when the suction groove 3 is formed in the glass holder 1, the sandblasting treatment and the etching treatment are used in combination. Assuming that only a groove with a depth of about 〇·5 mm is formed by etching, it is necessary to engrave the time for about 6 hours 158360.doc 201244865. Further, there is a problem in that it is difficult to control the groove shape because not only the etching in the depth direction but also the etching in the horizontal direction below the resist film is performed. Therefore, it is not preferable from the viewpoint of forming the suction groove 3 by etching only in terms of the time and the accuracy of the groove shape. On the other hand, in the case of the present embodiment, a rough groove having a certain depth can be formed in a short time by sand blasting, and then a short-time meal can be processed to form a suction groove of a specific shape. 3. The formation time of the grooves in the glass sheets can be shortened and the precision is ensured as compared with the case where only the money processing is performed. Further, since the etching treatment performed after the blasting treatment consumes the initial cost, the cost of the repetitive treatment is low, so that the production cost is reduced when the glass creel is repeatedly produced. Further, in the case of the stage configured as disclosed in Patent Document 2, when a plurality of sheets are produced, each of them requires a cutting time, and the blasting treatment performed in the present embodiment can simultaneously perform a plurality of glass sheets. Therefore, the method of manufacturing the glass fixture of this real shape can also be said to improve the manufacturing effect at this point. The F 哟 射 射 加工 射 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In addition, it is placed on the glass fixture x Dan, which is the base. Further, the suction groove is used, and the mouth sand treatment and the etch process are used, so that the formation time of the groove and the shape accuracy can be ensured. That is, it is possible to achieve a reduction in manufacturing time and a reduction in manufacturing cost when manufacturing a glass clip 158360.doc 201244865. <Modifications> In the case where the suction groove is formed in a lattice, the above-mentioned problem can be avoided. Fig. 9 is a view showing a glass jig 1〇1 of the above modification. The glass jig 101 has a configuration in which the teeth of the suction grooves 1〇3 are arranged in a zigzag. At this time, similarly to the glass jig 所示 shown in FIG. 5, the suction groove 103 is not continuous in one direction. Therefore, even if one portion of the suction groove 1〇3 overlaps the planned line P3, the processing line is planned. At the position where it passes, there is a certain portion where the suction groove 1〇3 is not formed. However, when the glass holder 丨 includes the honeycomb groove portion 3a as in the above embodiment, it exists along the planned line P2. The ratio of the suction groove 3 to the other portions is substantially i: 2, whereas in the case shown in Fig. 9, the suction groove 1〇3 existing along the planned line P3 is removed. In addition, the ratio of the other portions is substantially 1 : Therefore, since the ratio of the suction grooves is relatively large in the latter case, one of the bee writing groove portions 33 is provided as described above in terms of stably ensuring the machining accuracy. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a configuration of a laser processing apparatus 50 of a stage 7 of an embodiment of the present invention. Fig. 2 is a schematic cross-sectional view showing a configuration of a stage 7. A top view of the glass fixture 1. Fig. 4 is a partial perspective view of the glass jig 1. Fig. 5 is a view showing the relationship between the glass loss yoke of the present embodiment and the planned processing line P1 in the laser processing. 158360.doc • 18· 201244865 Fig. 6 is about forming The relationship between the suction groove 1003 of the glass jig 1001 of the suction 1003 and the predetermined line P2 in the laser processing is arranged in a rectangular lattice manner. Fig. 7 is a schematic view showing the line of processing shown in Fig. 6. Fig. 8 is a view showing a manufacturing process in which the working direction is perpendicular to the machining direction. Fig. 8 is a view showing a manufacturing process of the glass jig 1. Fig. 9 is a view showing a glass jig 1 according to a modification. DESCRIPTION OF SYMBOLS 1 ' 101 , 1001 glass jig 1 a convex part lb cross area 1 c , Id, ie, if sector area ig glass jig outer peripheral end 2 holding frame 2e suction groove 2f suction hole 3, 103 1003 (glass holder) suction groove 3a honeycomb groove portion 3b linear groove portion 3c arcuate groove portion 4 holding sheet 7 table 7m moving mechanism 10 workpiece 158360.doc 201244865 10a processing groove 10b crack 11 Suction mechanism 12 Suction tube 50 Laser processing unit 50A Front observation unit 50B Rear observation unit 158360.doc -20-