KR101308505B1 - 도전성 금속산화물 박막 제거방법 및 장치 - Google Patents

도전성 금속산화물 박막 제거방법 및 장치 Download PDF

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Publication number
KR101308505B1
KR101308505B1 KR1020087002739A KR20087002739A KR101308505B1 KR 101308505 B1 KR101308505 B1 KR 101308505B1 KR 1020087002739 A KR1020087002739 A KR 1020087002739A KR 20087002739 A KR20087002739 A KR 20087002739A KR 101308505 B1 KR101308505 B1 KR 101308505B1
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KR
South Korea
Prior art keywords
conductive metal
thin film
electrode
metal oxide
oxide thin
Prior art date
Application number
KR1020087002739A
Other languages
English (en)
Korean (ko)
Other versions
KR20080034140A (ko
Inventor
히로유키 다이쿠
테츠야 이노우에
Original Assignee
히다치 조센 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 히다치 조센 가부시키가이샤 filed Critical 히다치 조센 가부시키가이샤
Publication of KR20080034140A publication Critical patent/KR20080034140A/ko
Application granted granted Critical
Publication of KR101308505B1 publication Critical patent/KR101308505B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/328—Partly or completely removing a coating

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  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Weting (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Surface Treatment Of Glass (AREA)
  • Manufacturing Of Printed Wiring (AREA)
KR1020087002739A 2005-08-01 2006-07-31 도전성 금속산화물 박막 제거방법 및 장치 KR101308505B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005223089 2005-08-01
JPJP-P-2005-00223089 2005-08-01
PCT/JP2006/315135 WO2007015454A1 (ja) 2005-08-01 2006-07-31 導電性金属酸化物薄膜除去方法及び装置

Publications (2)

Publication Number Publication Date
KR20080034140A KR20080034140A (ko) 2008-04-18
KR101308505B1 true KR101308505B1 (ko) 2013-09-17

Family

ID=37708734

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087002739A KR101308505B1 (ko) 2005-08-01 2006-07-31 도전성 금속산화물 박막 제거방법 및 장치

Country Status (5)

Country Link
JP (1) JP5129569B2 (ja)
KR (1) KR101308505B1 (ja)
CN (1) CN101233088B (ja)
TW (1) TW200728520A (ja)
WO (1) WO2007015454A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4966751B2 (ja) * 2007-06-06 2012-07-04 日立造船株式会社 導電性金属酸化物薄膜の除去方法及び装置
DE102010046372A1 (de) * 2010-09-24 2012-03-29 Oerlikon Trading Ag, Trübbach Verfahren zum Entschichten von Werkstücken
KR101769612B1 (ko) 2010-12-10 2017-08-21 삼성디스플레이 주식회사 기판 평탄화 방법
TR201902731A2 (tr) * 2019-02-23 2020-09-21 Aydeşki̇n Mustafa Elektrik iletken kaplamalı low-e camlardan kaplama uzaklaştırma yöntemi

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004531641A (ja) * 2001-03-07 2004-10-14 サン−ゴバン グラス フランス ガラス基材タイプの透明基材上に堆積させた層をエッチングする方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2538500B2 (ja) * 1993-05-17 1996-09-25 西山ステンレスケミカル株式会社 液晶パネル用ガラス板の再生方法
JPH0986968A (ja) * 1995-09-29 1997-03-31 Sumitomo Chem Co Ltd クロム遮光層を有するカラーフィルター用ガラス基板の再生方法
FR2831708B1 (fr) * 2001-10-29 2004-01-30 Thomson Licensing Sa Procede et dispositif pour decaper une couche mince conductrice deposee sur une plaque isolante, de maniere a y former un reseau d'electrodes

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004531641A (ja) * 2001-03-07 2004-10-14 サン−ゴバン グラス フランス ガラス基材タイプの透明基材上に堆積させた層をエッチングする方法

Also Published As

Publication number Publication date
TW200728520A (en) 2007-08-01
JP5129569B2 (ja) 2013-01-30
JPWO2007015454A1 (ja) 2009-02-19
CN101233088A (zh) 2008-07-30
KR20080034140A (ko) 2008-04-18
CN101233088B (zh) 2012-03-28
WO2007015454A1 (ja) 2007-02-08

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