TW200728520A - Method and device for removing conductive metal oxide thin film - Google Patents

Method and device for removing conductive metal oxide thin film

Info

Publication number
TW200728520A
TW200728520A TW095127967A TW95127967A TW200728520A TW 200728520 A TW200728520 A TW 200728520A TW 095127967 A TW095127967 A TW 095127967A TW 95127967 A TW95127967 A TW 95127967A TW 200728520 A TW200728520 A TW 200728520A
Authority
TW
Taiwan
Prior art keywords
metal oxide
conductive metal
thin film
oxide thin
electrode
Prior art date
Application number
TW095127967A
Other languages
Chinese (zh)
Inventor
Hiroyuki Daiku
Tetsuya Inoue
Original Assignee
Hitachi Shipbuilding Eng Co
Hitz Hi Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Shipbuilding Eng Co, Hitz Hi Technology Corp filed Critical Hitachi Shipbuilding Eng Co
Publication of TW200728520A publication Critical patent/TW200728520A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/328—Partly or completely removing a coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Weting (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The invention provides a method and a device for removing conductive metal oxide film without forming a scan or stress deformation. The device comprises a first electrode (18) disposed so as to immerse one end thereof into electrolyte (17), a second electrode (13) disposed so as to immerse one end thereof into electrolyte (17) to allow the one end to face a conductive metal oxide thin film (11) so that the conductive metal oxide thin film (11) of a base material (12) immersed in the electrolyte (17) in a treating bath (16) acts as a cathodes, and a power supply (14) for applying a dc voltage so that the second electrode (13) acts as an anode and the first electrode (18) as a cathode. A dc voltage is applied to the both electrodes (13, 18) to remove the conductive metal oxide thin film (11) by a reduction reaction. A conductive metal oxide thin film can be efficiently removed without causing a scan nor stress deformation, and hence an expensive functional glass substrate or the like can be recycled.
TW095127967A 2005-08-01 2006-07-31 Method and device for removing conductive metal oxide thin film TW200728520A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005223089 2005-08-01

Publications (1)

Publication Number Publication Date
TW200728520A true TW200728520A (en) 2007-08-01

Family

ID=37708734

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095127967A TW200728520A (en) 2005-08-01 2006-07-31 Method and device for removing conductive metal oxide thin film

Country Status (5)

Country Link
JP (1) JP5129569B2 (en)
KR (1) KR101308505B1 (en)
CN (1) CN101233088B (en)
TW (1) TW200728520A (en)
WO (1) WO2007015454A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4966751B2 (en) * 2007-06-06 2012-07-04 日立造船株式会社 Method and apparatus for removing conductive metal oxide thin film
DE102010046372A1 (en) * 2010-09-24 2012-03-29 Oerlikon Trading Ag, Trübbach Method for stripping workpieces
KR101769612B1 (en) 2010-12-10 2017-08-21 삼성디스플레이 주식회사 Flattening method of a substrate
TR201902731A2 (en) * 2019-02-23 2020-09-21 Aydeşki̇n Mustafa Method of coating removal from electrically conductive coated low-e glasses

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2538500B2 (en) * 1993-05-17 1996-09-25 西山ステンレスケミカル株式会社 Recycling method of glass plate for liquid crystal panel
JPH0986968A (en) * 1995-09-29 1997-03-31 Sumitomo Chem Co Ltd Regeneration of glass substrate having light-shutting chromium layer and used for color filter
FR2821862B1 (en) * 2001-03-07 2003-11-14 Saint Gobain METHOD OF ENGRAVING LAYERS DEPOSITED ON TRANSPARENT SUBSTRATES OF THE GLASS SUBSTRATE TYPE
FR2831708B1 (en) * 2001-10-29 2004-01-30 Thomson Licensing Sa METHOD AND DEVICE FOR STRIPPING A CONDUCTIVE THIN FILM DEPOSITED ON AN INSULATING PLATE, TO FORM AN ELECTRODE ARRAY THEREIN

Also Published As

Publication number Publication date
WO2007015454A1 (en) 2007-02-08
KR101308505B1 (en) 2013-09-17
KR20080034140A (en) 2008-04-18
JP5129569B2 (en) 2013-01-30
JPWO2007015454A1 (en) 2009-02-19
CN101233088A (en) 2008-07-30
CN101233088B (en) 2012-03-28

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