KR101193925B1 - 수산화테트라알킬암모늄 함유 현상 폐액의 중화방법 - Google Patents

수산화테트라알킬암모늄 함유 현상 폐액의 중화방법 Download PDF

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Publication number
KR101193925B1
KR101193925B1 KR1020097008688A KR20097008688A KR101193925B1 KR 101193925 B1 KR101193925 B1 KR 101193925B1 KR 1020097008688 A KR1020097008688 A KR 1020097008688A KR 20097008688 A KR20097008688 A KR 20097008688A KR 101193925 B1 KR101193925 B1 KR 101193925B1
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KR
South Korea
Prior art keywords
gas
tower
neutralization
developing waste
carbon dioxide
Prior art date
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KR1020097008688A
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English (en)
Korean (ko)
Other versions
KR20090077932A (ko
Inventor
요시후미 야마시타
타츠야 나카모토
마사하루 야마우치
Original Assignee
가부시키가이샤 도쿠야마
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Application filed by 가부시키가이샤 도쿠야마 filed Critical 가부시키가이샤 도쿠야마
Publication of KR20090077932A publication Critical patent/KR20090077932A/ko
Application granted granted Critical
Publication of KR101193925B1 publication Critical patent/KR101193925B1/ko

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3092—Recovery of material; Waste processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0073—Degasification of liquids by a method not covered by groups B01D19/0005 - B01D19/0042

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Dispersion Chemistry (AREA)
  • Gas Separation By Absorption (AREA)
  • Degasification And Air Bubble Elimination (AREA)
KR1020097008688A 2006-11-09 2007-11-06 수산화테트라알킬암모늄 함유 현상 폐액의 중화방법 KR101193925B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006304223 2006-11-09
JPJP-P-2006-304223 2006-11-09
PCT/JP2007/071568 WO2008056672A1 (fr) 2006-11-09 2007-11-06 Procédé de neutralisation d'une solution de révélateur épuisée contenant de l'hydroxyde de tétraalkylammonium

Publications (2)

Publication Number Publication Date
KR20090077932A KR20090077932A (ko) 2009-07-16
KR101193925B1 true KR101193925B1 (ko) 2012-10-24

Family

ID=39364487

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097008688A KR101193925B1 (ko) 2006-11-09 2007-11-06 수산화테트라알킬암모늄 함유 현상 폐액의 중화방법

Country Status (5)

Country Link
JP (1) JP5201630B2 (fr)
KR (1) KR101193925B1 (fr)
CN (1) CN101558013A (fr)
TW (1) TWI396949B (fr)
WO (1) WO2008056672A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5166337B2 (ja) * 2009-03-30 2013-03-21 メタウォーター株式会社 メタン発酵処理方法及びメタン発酵処理装置
JP6063806B2 (ja) * 2012-08-16 2017-01-18 株式会社Ihi 中和装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190065A (fr) * 1975-02-06 1976-08-06
JPS5922594B2 (ja) * 1976-05-25 1984-05-28 清水建設株式会社 アルカリ性排水の中和処理装置
JPH02160007A (ja) * 1988-12-13 1990-06-20 Nkk Corp 消泡方法および消泡装置
US5354434A (en) * 1991-07-12 1994-10-11 Chlorine Engineers Corp. Ltd. Method for regenerating tetraalkylammonium hydroxide
JPH0517889A (ja) * 1991-07-12 1993-01-26 Chlorine Eng Corp Ltd 水酸化テトラアルキルアンモニウムの再生方法

Also Published As

Publication number Publication date
JPWO2008056672A1 (ja) 2010-02-25
CN101558013A (zh) 2009-10-14
JP5201630B2 (ja) 2013-06-05
TW200832085A (en) 2008-08-01
WO2008056672A1 (fr) 2008-05-15
KR20090077932A (ko) 2009-07-16
TWI396949B (zh) 2013-05-21

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