JP5201630B2 - 水酸化テトラアルキルアンモニウム含有現像廃液の中和方法 - Google Patents

水酸化テトラアルキルアンモニウム含有現像廃液の中和方法 Download PDF

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Publication number
JP5201630B2
JP5201630B2 JP2008543090A JP2008543090A JP5201630B2 JP 5201630 B2 JP5201630 B2 JP 5201630B2 JP 2008543090 A JP2008543090 A JP 2008543090A JP 2008543090 A JP2008543090 A JP 2008543090A JP 5201630 B2 JP5201630 B2 JP 5201630B2
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JP
Japan
Prior art keywords
carbon dioxide
gas
neutralization
tower
taah
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2008543090A
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English (en)
Japanese (ja)
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JPWO2008056672A1 (ja
Inventor
喜文 山下
達也 中本
正晴 山内
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Tokuyama Corp
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Tokuyama Corp
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Publication date
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Priority to JP2008543090A priority Critical patent/JP5201630B2/ja
Publication of JPWO2008056672A1 publication Critical patent/JPWO2008056672A1/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3092—Recovery of material; Waste processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0005—Degasification of liquids with one or more auxiliary substances
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0073—Degasification of liquids by a method not covered by groups B01D19/0005 - B01D19/0042
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/02—Foam dispersion or prevention
    • B01D19/04—Foam dispersion or prevention by addition of chemical substances
    • B01D19/0404—Foam dispersion or prevention by addition of chemical substances characterised by the nature of the chemical substance
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Dispersion Chemistry (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Gas Separation By Absorption (AREA)
JP2008543090A 2006-11-09 2007-11-06 水酸化テトラアルキルアンモニウム含有現像廃液の中和方法 Expired - Fee Related JP5201630B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008543090A JP5201630B2 (ja) 2006-11-09 2007-11-06 水酸化テトラアルキルアンモニウム含有現像廃液の中和方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006304223 2006-11-09
JP2006304223 2006-11-09
PCT/JP2007/071568 WO2008056672A1 (fr) 2006-11-09 2007-11-06 Procédé de neutralisation d'une solution de révélateur épuisée contenant de l'hydroxyde de tétraalkylammonium
JP2008543090A JP5201630B2 (ja) 2006-11-09 2007-11-06 水酸化テトラアルキルアンモニウム含有現像廃液の中和方法

Publications (2)

Publication Number Publication Date
JPWO2008056672A1 JPWO2008056672A1 (ja) 2010-02-25
JP5201630B2 true JP5201630B2 (ja) 2013-06-05

Family

ID=39364487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008543090A Expired - Fee Related JP5201630B2 (ja) 2006-11-09 2007-11-06 水酸化テトラアルキルアンモニウム含有現像廃液の中和方法

Country Status (5)

Country Link
JP (1) JP5201630B2 (fr)
KR (1) KR101193925B1 (fr)
CN (1) CN101558013A (fr)
TW (1) TWI396949B (fr)
WO (1) WO2008056672A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5166337B2 (ja) * 2009-03-30 2013-03-21 メタウォーター株式会社 メタン発酵処理方法及びメタン発酵処理装置
JP6063806B2 (ja) * 2012-08-16 2017-01-18 株式会社Ihi 中和装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190065A (fr) * 1975-02-06 1976-08-06
JPS52142860A (en) * 1976-05-25 1977-11-29 Shimizu Construction Co Ltd Treating method for neutralizing alkalline drainage
JPH02160007A (ja) * 1988-12-13 1990-06-20 Nkk Corp 消泡方法および消泡装置
JPH0517889A (ja) * 1991-07-12 1993-01-26 Chlorine Eng Corp Ltd 水酸化テトラアルキルアンモニウムの再生方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5354434A (en) * 1991-07-12 1994-10-11 Chlorine Engineers Corp. Ltd. Method for regenerating tetraalkylammonium hydroxide

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190065A (fr) * 1975-02-06 1976-08-06
JPS52142860A (en) * 1976-05-25 1977-11-29 Shimizu Construction Co Ltd Treating method for neutralizing alkalline drainage
JPH02160007A (ja) * 1988-12-13 1990-06-20 Nkk Corp 消泡方法および消泡装置
JPH0517889A (ja) * 1991-07-12 1993-01-26 Chlorine Eng Corp Ltd 水酸化テトラアルキルアンモニウムの再生方法

Also Published As

Publication number Publication date
TWI396949B (zh) 2013-05-21
TW200832085A (en) 2008-08-01
WO2008056672A1 (fr) 2008-05-15
JPWO2008056672A1 (ja) 2010-02-25
KR101193925B1 (ko) 2012-10-24
CN101558013A (zh) 2009-10-14
KR20090077932A (ko) 2009-07-16

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