KR101187306B1 - 반송장치 및 전자부품 핸들링 장치 - Google Patents

반송장치 및 전자부품 핸들링 장치 Download PDF

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Publication number
KR101187306B1
KR101187306B1 KR1020107009747A KR20107009747A KR101187306B1 KR 101187306 B1 KR101187306 B1 KR 101187306B1 KR 1020107009747 A KR1020107009747 A KR 1020107009747A KR 20107009747 A KR20107009747 A KR 20107009747A KR 101187306 B1 KR101187306 B1 KR 101187306B1
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KR
South Korea
Prior art keywords
tray
electronic component
test
axis direction
plate member
Prior art date
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KR1020107009747A
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English (en)
Korean (ko)
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KR20100074247A (ko
Inventor
다이스케 다카노
켄이치 다카하시
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가부시키가이샤 아드반테스트
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Application filed by 가부시키가이샤 아드반테스트 filed Critical 가부시키가이샤 아드반테스트
Publication of KR20100074247A publication Critical patent/KR20100074247A/ko
Application granted granted Critical
Publication of KR101187306B1 publication Critical patent/KR101187306B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
KR1020107009747A 2007-11-06 2007-11-06 반송장치 및 전자부품 핸들링 장치 KR101187306B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/071569 WO2009060515A1 (ja) 2007-11-06 2007-11-06 搬送装置および電子部品ハンドリング装置

Publications (2)

Publication Number Publication Date
KR20100074247A KR20100074247A (ko) 2010-07-01
KR101187306B1 true KR101187306B1 (ko) 2012-10-05

Family

ID=40625430

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107009747A KR101187306B1 (ko) 2007-11-06 2007-11-06 반송장치 및 전자부품 핸들링 장치

Country Status (3)

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JP (1) JP5137965B2 (ja)
KR (1) KR101187306B1 (ja)
WO (1) WO2009060515A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101489372B1 (ko) * 2013-11-04 2015-02-12 주식회사 넥스트솔루션 씨 트레이의 디바이스 안착불량 검출장치
JP6190264B2 (ja) * 2013-12-13 2017-08-30 東芝メモリ株式会社 半導体製造装置
JP3227434U (ja) 2020-03-12 2020-08-27 株式会社アドバンテスト 電子部品ハンドリング装置及び電子部品試験装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001004702A (ja) 1999-06-22 2001-01-12 Advantest Corp 半導体試験装置のｉｃハンドラ装置
JP2001343424A (ja) * 2000-05-31 2001-12-14 Hioki Ee Corp 基板検査装置における被検査基板の浮き上がり検出機構
JP2003167020A (ja) * 2001-12-03 2003-06-13 Seiko Epson Corp 浮き検出方法、浮き検出装置、ｉｃハンドラ及びｉｃ検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6175134U (ja) * 1984-10-19 1986-05-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001004702A (ja) 1999-06-22 2001-01-12 Advantest Corp 半導体試験装置のｉｃハンドラ装置
JP2001343424A (ja) * 2000-05-31 2001-12-14 Hioki Ee Corp 基板検査装置における被検査基板の浮き上がり検出機構
JP2003167020A (ja) * 2001-12-03 2003-06-13 Seiko Epson Corp 浮き検出方法、浮き検出装置、ｉｃハンドラ及びｉｃ検査装置

Also Published As

Publication number Publication date
JP5137965B2 (ja) 2013-02-06
JPWO2009060515A1 (ja) 2011-03-17
KR20100074247A (ko) 2010-07-01
WO2009060515A1 (ja) 2009-05-14

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