WO2009060515A1 - 搬送装置および電子部品ハンドリング装置 - Google Patents

搬送装置および電子部品ハンドリング装置 Download PDF

Info

Publication number
WO2009060515A1
WO2009060515A1 PCT/JP2007/071569 JP2007071569W WO2009060515A1 WO 2009060515 A1 WO2009060515 A1 WO 2009060515A1 JP 2007071569 W JP2007071569 W JP 2007071569W WO 2009060515 A1 WO2009060515 A1 WO 2009060515A1
Authority
WO
WIPO (PCT)
Prior art keywords
kst
arm
sensing plate
electronic component
tray
Prior art date
Application number
PCT/JP2007/071569
Other languages
English (en)
French (fr)
Inventor
Daisuke Takano
Kenichi Takahashi
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to PCT/JP2007/071569 priority Critical patent/WO2009060515A1/ja
Priority to JP2009539900A priority patent/JP5137965B2/ja
Priority to KR1020107009747A priority patent/KR101187306B1/ko
Publication of WO2009060515A1 publication Critical patent/WO2009060515A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Abstract

カスタマトレイＫＳＴを搬送するトレイ搬送アーム２０５であって、アーム基板２と、アーム基板２１の下面の略四隅に設けられた近接センサ２４と、近接センサ２４の下側に位置する検知プレート２７とを備え、アーム基板２１の下側両側部には、ブロック部材２５を介して支持板２６が設けられており、検知プレート２７は、その両側部にて支持板２６に支持されている。かかるトレイ搬送アーム２０５が、収納部２０からＩＣデバイス２がはみ出したカスタマトレイＫＳＴを保持すると、検知プレート２７がＩＣデバイス２に接触してＺ軸上方向に移動し、近接センサ２４がそれを検知する。これにより、ＩＣデバイス２がカスタマトレイＫＳＴの収納部２０からはみ出していることを検出することができ、また、はみ出しているＩＣデバイス２の破損を防止することができる。
PCT/JP2007/071569 2007-11-06 2007-11-06 搬送装置および電子部品ハンドリング装置 WO2009060515A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2007/071569 WO2009060515A1 (ja) 2007-11-06 2007-11-06 搬送装置および電子部品ハンドリング装置
JP2009539900A JP5137965B2 (ja) 2007-11-06 2007-11-06 搬送装置および電子部品ハンドリング装置
KR1020107009747A KR101187306B1 (ko) 2007-11-06 2007-11-06 반송장치 및 전자부품 핸들링 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/071569 WO2009060515A1 (ja) 2007-11-06 2007-11-06 搬送装置および電子部品ハンドリング装置

Publications (1)

Publication Number Publication Date
WO2009060515A1 true WO2009060515A1 (ja) 2009-05-14

Family

ID=40625430

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/071569 WO2009060515A1 (ja) 2007-11-06 2007-11-06 搬送装置および電子部品ハンドリング装置

Country Status (3)

Country Link
JP (1) JP5137965B2 (ja)
KR (1) KR101187306B1 (ja)
WO (1) WO2009060515A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104716079A (zh) * 2013-12-13 2015-06-17 株式会社东芝 半导体制造装置
US11353502B2 (en) 2020-03-12 2022-06-07 Advantest Corporation Electronic component handling apparatus and electronic component testing apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101489372B1 (ko) * 2013-11-04 2015-02-12 주식회사 넥스트솔루션 씨 트레이의 디바이스 안착불량 검출장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6175134U (ja) * 1984-10-19 1986-05-21
JP2001004702A (ja) * 1999-06-22 2001-01-12 Advantest Corp 半導体試験装置のｉｃハンドラ装置
JP2001343424A (ja) * 2000-05-31 2001-12-14 Hioki Ee Corp 基板検査装置における被検査基板の浮き上がり検出機構
JP2003167020A (ja) * 2001-12-03 2003-06-13 Seiko Epson Corp 浮き検出方法、浮き検出装置、ｉｃハンドラ及びｉｃ検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6175134U (ja) * 1984-10-19 1986-05-21
JP2001004702A (ja) * 1999-06-22 2001-01-12 Advantest Corp 半導体試験装置のｉｃハンドラ装置
JP2001343424A (ja) * 2000-05-31 2001-12-14 Hioki Ee Corp 基板検査装置における被検査基板の浮き上がり検出機構
JP2003167020A (ja) * 2001-12-03 2003-06-13 Seiko Epson Corp 浮き検出方法、浮き検出装置、ｉｃハンドラ及びｉｃ検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104716079A (zh) * 2013-12-13 2015-06-17 株式会社东芝 半导体制造装置
JP2015115516A (ja) * 2013-12-13 2015-06-22 株式会社東芝 半導体製造装置
US9824905B2 (en) 2013-12-13 2017-11-21 Toshiba Memory Corporation Semiconductor manufacturing device and semiconductor manufacturing method
US11353502B2 (en) 2020-03-12 2022-06-07 Advantest Corporation Electronic component handling apparatus and electronic component testing apparatus

Also Published As

Publication number Publication date
KR20100074247A (ko) 2010-07-01
KR101187306B1 (ko) 2012-10-05
JP5137965B2 (ja) 2013-02-06
JPWO2009060515A1 (ja) 2011-03-17

Similar Documents

Publication Publication Date Title
WO2007008677A3 (en) Load port module
WO2007087121A3 (en) Arrangements for an integrated sensor
TWI335902B (en) Article placement sensor and article transport device having same
FR2881803B3 (fr) Dispositif a ventouse pour supporter et monter des articles sur une surface
TW200734986A (en) Electro-optical device and electronic equipment
EP1642853A3 (en) Handling robot system
WO2009050675A3 (en) Displacement device with precision position measurement
WO2009069224A1 (ja) 移載装置
EA200801263A1 (ru) Мобильное перевалочное устройство
WO2006009723A3 (en) Substrate processing apparatus with removable component module
TW200630864A (en) Programmable lift response for an optical navigation device
TW200725787A (en) Substrate transportation device, substrate transportation method and coating-developing apparatus
WO2007150039A3 (en) Method and apparatus for transporting substrates
WO2009060515A1 (ja) 搬送装置および電子部品ハンドリング装置
CN104737282A (zh) 工件保持装置以及使用了该装置的工件的横向偏移检测方法
JP2013125496A5 (ja)
US20120098765A1 (en) Image orientation control in a handheld device
CA2580383A1 (en) Weighing apparatus
TW200725137A (en) Image pickup apparatus and data processing apparatus having the same
JP2011066090A5 (ja) 基板接合装置、基板接合方法およびデバイスの製造方法
JP4299104B2 (ja) ウエーハ搬送機構
JP2006273501A (ja) 基板移載装置、基板移載方法、および電気光学装置の製造方法
KR20100044448A (ko) 노광장비의 레티클 이송용 로봇 그리퍼
TW200728173A (en) Apparatus for aligning cassette
CN205833395U (zh) 狭缝式涂布装置及该装置用基板异物检测用异物感测装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07831301

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009539900

Country of ref document: JP

ENP Entry into the national phase

Ref document number: 20107009747

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07831301

Country of ref document: EP

Kind code of ref document: A1