TW200728173A - Apparatus for aligning cassette - Google Patents
Apparatus for aligning cassetteInfo
- Publication number
- TW200728173A TW200728173A TW095144546A TW95144546A TW200728173A TW 200728173 A TW200728173 A TW 200728173A TW 095144546 A TW095144546 A TW 095144546A TW 95144546 A TW95144546 A TW 95144546A TW 200728173 A TW200728173 A TW 200728173A
- Authority
- TW
- Taiwan
- Prior art keywords
- cassette
- loaded
- substrate
- panel
- aligning
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
Provided is an apparatus for aligning a cassette capable of automatically aligning the cassette, which is used to convey a substrate or panel during a liquid crystal display manufacturing process, to a proper position. The apparatus includes: a position bar installed at one surface of a port, in which a cassette accommodating a substrate or panel stacked therein is loaded, at a predetermined height; and an alignment part for moving the cassette horizontally and downward onto the position bar when the cassette is loaded. Therefore, it is possible to simultaneously perform loading and alignment of the cassette when the cassette, in which a substrate or panel is accommodated, is loaded to the port, thereby reducing process time.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20050133772 | 2005-12-29 | ||
KR1020060016957A KR100796020B1 (en) | 2005-12-29 | 2006-02-21 | Apparatus for Aligning Cassette |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200728173A true TW200728173A (en) | 2007-08-01 |
TWI321545B TWI321545B (en) | 2010-03-11 |
Family
ID=38071256
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095144546A TWI321545B (en) | 2005-12-29 | 2006-11-30 | Apparatus for aligning cassette |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100796020B1 (en) |
CN (1) | CN100529870C (en) |
TW (1) | TWI321545B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100902003B1 (en) * | 2007-08-31 | 2009-06-11 | 세메스 주식회사 | Substrate processing apparatus including a cassette transfer section |
CN101954651B (en) * | 2009-07-17 | 2013-09-18 | 鸿富锦精密工业(深圳)有限公司 | Alignment device |
KR101157198B1 (en) | 2010-01-14 | 2012-06-20 | 주식회사 에스에프에이 | Cassette centering apparatus |
KR102042445B1 (en) * | 2018-05-08 | 2019-11-08 | 주식회사 에스에프에이 | Returning object centering apparatus |
KR102192871B1 (en) | 2019-08-23 | 2020-12-18 | 주식회사 해동 | Cassette transferring apparatus and method of transferring cassette using the same |
KR102178615B1 (en) * | 2020-03-06 | 2020-11-13 | 시너스텍 주식회사 | Centering apparatus |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100488928B1 (en) * | 1997-12-11 | 2005-10-26 | 비오이 하이디스 테크놀로지 주식회사 | Liquid Crystal Cell and Cassette Aligner |
-
2006
- 2006-02-21 KR KR1020060016957A patent/KR100796020B1/en not_active IP Right Cessation
- 2006-11-30 TW TW095144546A patent/TWI321545B/en not_active IP Right Cessation
- 2006-12-07 CN CNB2006101621851A patent/CN100529870C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN100529870C (en) | 2009-08-19 |
CN1959488A (en) | 2007-05-09 |
KR100796020B1 (en) | 2008-01-21 |
KR20070072294A (en) | 2007-07-04 |
TWI321545B (en) | 2010-03-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |