TW200728173A - Apparatus for aligning cassette - Google Patents

Apparatus for aligning cassette

Info

Publication number
TW200728173A
TW200728173A TW095144546A TW95144546A TW200728173A TW 200728173 A TW200728173 A TW 200728173A TW 095144546 A TW095144546 A TW 095144546A TW 95144546 A TW95144546 A TW 95144546A TW 200728173 A TW200728173 A TW 200728173A
Authority
TW
Taiwan
Prior art keywords
cassette
loaded
substrate
panel
aligning
Prior art date
Application number
TW095144546A
Other languages
Chinese (zh)
Other versions
TWI321545B (en
Inventor
Kyung-Woo Lee
Seong-Rock Jeon
Kyung-An Shin
Youn-Ku Kang
Original Assignee
Top Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Top Eng Co Ltd filed Critical Top Eng Co Ltd
Publication of TW200728173A publication Critical patent/TW200728173A/en
Application granted granted Critical
Publication of TWI321545B publication Critical patent/TWI321545B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

Provided is an apparatus for aligning a cassette capable of automatically aligning the cassette, which is used to convey a substrate or panel during a liquid crystal display manufacturing process, to a proper position. The apparatus includes: a position bar installed at one surface of a port, in which a cassette accommodating a substrate or panel stacked therein is loaded, at a predetermined height; and an alignment part for moving the cassette horizontally and downward onto the position bar when the cassette is loaded. Therefore, it is possible to simultaneously perform loading and alignment of the cassette when the cassette, in which a substrate or panel is accommodated, is loaded to the port, thereby reducing process time.
TW095144546A 2005-12-29 2006-11-30 Apparatus for aligning cassette TWI321545B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20050133772 2005-12-29
KR1020060016957A KR100796020B1 (en) 2005-12-29 2006-02-21 Apparatus for Aligning Cassette

Publications (2)

Publication Number Publication Date
TW200728173A true TW200728173A (en) 2007-08-01
TWI321545B TWI321545B (en) 2010-03-11

Family

ID=38071256

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095144546A TWI321545B (en) 2005-12-29 2006-11-30 Apparatus for aligning cassette

Country Status (3)

Country Link
KR (1) KR100796020B1 (en)
CN (1) CN100529870C (en)
TW (1) TWI321545B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100902003B1 (en) * 2007-08-31 2009-06-11 세메스 주식회사 Substrate processing apparatus including a cassette transfer section
CN101954651B (en) * 2009-07-17 2013-09-18 鸿富锦精密工业（深圳）有限公司 Alignment device
KR101157198B1 (en) 2010-01-14 2012-06-20 주식회사 에스에프에이 Cassette centering apparatus
KR102042445B1 (en) * 2018-05-08 2019-11-08 주식회사 에스에프에이 Returning object centering apparatus
KR102192871B1 (en) 2019-08-23 2020-12-18 주식회사 해동 Cassette transferring apparatus and method of transferring cassette using the same
KR102178615B1 (en) * 2020-03-06 2020-11-13 시너스텍 주식회사 Centering apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100488928B1 (en) * 1997-12-11 2005-10-26 비오이 하이디스 테크놀로지 주식회사 Liquid Crystal Cell and Cassette Aligner

Also Published As

Publication number Publication date
CN100529870C (en) 2009-08-19
CN1959488A (en) 2007-05-09
KR100796020B1 (en) 2008-01-21
KR20070072294A (en) 2007-07-04
TWI321545B (en) 2010-03-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees