KR101182940B1 - 비대칭 동공 조명의 보정을 위한 필터 장치 - Google Patents

비대칭 동공 조명의 보정을 위한 필터 장치 Download PDF

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Publication number
KR101182940B1
KR101182940B1 KR1020117015632A KR20117015632A KR101182940B1 KR 101182940 B1 KR101182940 B1 KR 101182940B1 KR 1020117015632 A KR1020117015632 A KR 1020117015632A KR 20117015632 A KR20117015632 A KR 20117015632A KR 101182940 B1 KR101182940 B1 KR 101182940B1
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KR
South Korea
Prior art keywords
filter
illumination
pupil
filter element
filter device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020117015632A
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English (en)
Korean (ko)
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KR20110094121A (ko
Inventor
만프레드 마울
다미안 피올카
Original Assignee
칼 짜이스 에스엠티 게엠베하
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Publication of KR20110094121A publication Critical patent/KR20110094121A/ko
Application granted granted Critical
Publication of KR101182940B1 publication Critical patent/KR101182940B1/ko
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Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
    • G02B26/008—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light in the form of devices for effecting sequential colour changes, e.g. colour wheels
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0933—Systems for active beam shaping by rapid movement of an element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0488—Optical or mechanical part supplementary adjustable parts with spectral filtering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0994—Fibers, light pipes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Astronomy & Astrophysics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Microscoopes, Condenser (AREA)
KR1020117015632A 2004-12-23 2005-08-25 비대칭 동공 조명의 보정을 위한 필터 장치 Expired - Fee Related KR101182940B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102004063314A DE102004063314A1 (de) 2004-12-23 2004-12-23 Filtereinrichtung für die Kompensation einer asymmetrischen Pupillenausleuchtung
DE102004063314.2 2004-12-23
PCT/EP2005/009165 WO2006066638A1 (en) 2004-12-23 2005-08-25 A filter device for the compensation of an asymmetric pupil illumination

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020077013078A Division KR101156369B1 (ko) 2004-12-23 2005-08-25 비대칭 동공 조명의 보정을 위한 필터 장치

Publications (2)

Publication Number Publication Date
KR20110094121A KR20110094121A (ko) 2011-08-19
KR101182940B1 true KR101182940B1 (ko) 2012-09-13

Family

ID=35033385

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020117015632A Expired - Fee Related KR101182940B1 (ko) 2004-12-23 2005-08-25 비대칭 동공 조명의 보정을 위한 필터 장치
KR1020077013078A Expired - Fee Related KR101156369B1 (ko) 2004-12-23 2005-08-25 비대칭 동공 조명의 보정을 위한 필터 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020077013078A Expired - Fee Related KR101156369B1 (ko) 2004-12-23 2005-08-25 비대칭 동공 조명의 보정을 위한 필터 장치

Country Status (8)

Country Link
US (5) US7798676B2 (https=)
EP (2) EP1828844A1 (https=)
JP (1) JP4700697B2 (https=)
KR (2) KR101182940B1 (https=)
CN (1) CN101088049A (https=)
DE (1) DE102004063314A1 (https=)
TW (1) TW200622313A (https=)
WO (1) WO2006066638A1 (https=)

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US7990520B2 (en) 2006-12-18 2011-08-02 Carl Zeiss Smt Gmbh Microlithography illumination systems, components and methods
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WO2010073795A1 (ja) 2008-12-24 2010-07-01 株式会社 ニコン 照明光学系、露光装置及びデバイスの製造方法
DE102010042901B3 (de) * 2010-10-26 2012-04-05 Carl Zeiss Smt Gmbh Polarisationsaktuator
DE102011005940A1 (de) 2011-03-23 2012-09-27 Carl Zeiss Smt Gmbh EUV-Spiegelanordnung, optisches System mit EUV-Spiegelanordnung und Verfahren zum Betreiben eines optischen Systems mit EUV-Spiegelanordnung
WO2012126954A1 (en) 2011-03-23 2012-09-27 Carl Zeiss Smt Gmbh Euv mirror arrangement, optical system comprising euv mirror arrangement and method for operating an optical system comprising an euv mirror arrangement
DE102011077234A1 (de) 2011-06-08 2012-12-13 Carl Zeiss Smt Gmbh EUV-Spiegelanordnung, optisches System mit EUV-Spiegelanordnung und Verfahren zum Betreiben eines optischen Systems mit EUV-Spiegelanordnung
CN102331688B (zh) * 2011-10-25 2013-06-26 中国科学院光电技术研究所 一种光瞳均匀性补偿装置
US8901496B2 (en) * 2012-06-20 2014-12-02 General Electric Company Overhead occupancy sensor
US9261793B2 (en) 2012-09-14 2016-02-16 Globalfoundries Inc. Image optimization using pupil filters in projecting printing systems with fixed or restricted illumination angular distribution
CN104216234B (zh) * 2013-06-05 2016-05-25 中芯国际集成电路制造(上海)有限公司 光刻系统光源对称性的检测方法
DE102013213545A1 (de) * 2013-07-10 2015-01-15 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithografie
US9721421B2 (en) 2015-05-05 2017-08-01 Mladen Blazevic Electronic gaming system with physical gaming chips and wager display
DE102015220144A1 (de) * 2015-10-16 2017-04-20 Carl Zeiss Smt Gmbh Optisches System und Lithographieanlage
CN106556974B (zh) * 2015-09-30 2019-04-26 中芯国际集成电路制造(上海)有限公司 光刻照明系统以及光刻设备
WO2017144265A1 (en) 2016-02-25 2017-08-31 Asml Netherlands B.V. Beam homogenizer, illumination system and metrology system
CN105739250B (zh) * 2016-05-13 2017-10-27 上海华力微电子有限公司 一种光刻机之照明光瞳均一性补偿装置及其补偿方法
CN108983559A (zh) * 2018-08-08 2018-12-11 中国科学院上海光学精密机械研究所 光刻机光瞳校正器及其使用方法
DE102021120952B3 (de) 2021-08-11 2022-11-10 Carl Zeiss Smt Gmbh Verfahren zur Korrektur eines Telezentriefehlers einer Abbildungsvorrichtung und Maskeninspektionsmikroskop
WO2024227859A1 (en) 2023-05-04 2024-11-07 Carl Zeiss Smt Gmbh Method for adjusting the telecentricity in a projection exposure system for microlithography

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Also Published As

Publication number Publication date
JP2008525828A (ja) 2008-07-17
WO2006066638A1 (en) 2006-06-29
US20110299285A1 (en) 2011-12-08
US20100309450A1 (en) 2010-12-09
JP4700697B2 (ja) 2011-06-15
TWI303325B (https=) 2008-11-21
EP2278403A1 (en) 2011-01-26
CN101088049A (zh) 2007-12-12
KR20070085995A (ko) 2007-08-27
US8480261B2 (en) 2013-07-09
US8636386B2 (en) 2014-01-28
US20080113281A1 (en) 2008-05-15
KR20110094121A (ko) 2011-08-19
TW200622313A (en) 2006-07-01
US8246211B2 (en) 2012-08-21
KR101156369B1 (ko) 2012-06-13
US20120281198A1 (en) 2012-11-08
DE102004063314A1 (de) 2006-07-13
US20130278913A1 (en) 2013-10-24
WO2006066638A8 (en) 2006-08-24
EP1828844A1 (en) 2007-09-05
US8025427B2 (en) 2011-09-27
US7798676B2 (en) 2010-09-21

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