KR101068755B1 - 기판 처리 장치 및 기판 처리 방법 - Google Patents
기판 처리 장치 및 기판 처리 방법 Download PDFInfo
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- KR101068755B1 KR101068755B1 KR1020090110953A KR20090110953A KR101068755B1 KR 101068755 B1 KR101068755 B1 KR 101068755B1 KR 1020090110953 A KR1020090110953 A KR 1020090110953A KR 20090110953 A KR20090110953 A KR 20090110953A KR 101068755 B1 KR101068755 B1 KR 101068755B1
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- 239000000758 substrate Substances 0.000 title claims abstract description 177
- 238000000034 method Methods 0.000 title claims description 26
- 239000007788 liquid Substances 0.000 claims abstract description 110
- 238000003672 processing method Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 description 63
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 26
- 230000000740 bleeding effect Effects 0.000 description 15
- 238000001035 drying Methods 0.000 description 15
- 230000002093 peripheral effect Effects 0.000 description 12
- 239000007921 spray Substances 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000003595 mist Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000005406 washing Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 4
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- 101100441413 Caenorhabditis elegans cup-15 gene Proteins 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005661 hydrophobic surface Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/0804—Cleaning containers having tubular shape, e.g. casks, barrels, drums
- B08B9/0813—Cleaning containers having tubular shape, e.g. casks, barrels, drums by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
- B08B9/28—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by splash, spray, or jet application, with or without soaking
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Weting (AREA)
Abstract
Description
Claims (6)
- 기판을 회전시키면서 상기 기판의 표면을 처리하는 기판 처리 장치로서,상기 기판의 표면을 처리하는 물리 도구를 갖는 물리 도구 유닛과,상기 기판의 표면에 액체를 공급하는 액 공급 노즐과, 상기 기판의 표면에 가스를 공급하는 가스 공급 노즐을 갖는 노즐 유닛과,상기 물리 도구 유닛을 상기 기판의 표면을 따라 이동시키는 물리 도구 유닛 이동 기구부와,상기 노즐 유닛을 상기 기판의 표면을 따라 이동시키는 노즐 유닛 이동 기구부를 구비하며,상기 물리 도구 유닛 이동 기구부는, 모터와, 상기 모터에 의해 회전되어 상기 물리 도구 유닛을 이동시키는 이송 나사를 갖고 있고,상기 노즐 유닛 이동 기구부는, 모터와, 상기 모터에 의해 회전되고 상기 노즐 유닛을 상기 물리 유닛의 이동과 동기하여 이동시키는 이송 나사를 갖고 있는 것을 특징으로 하는 기판 처리 장치.
- 청구항 1에 있어서,상기 물리 도구 유닛과, 상기 노즐 유닛과, 상기 물리 도구 유닛 이동 기구부와, 그리고 상기 노즐 유닛 이동 기구부를 수용하는 케이스를 구비하는 노즐 헤드 장치와,상기 노즐 헤드 장치를 상기 기판의 표면에 대해서 이동시키는 노즐 헤드 장치의 이동 조작부를 구비하는 것을 특징으로 하는 기판 처리 장치.
- 청구항 2에 있어서,상기 노즐 헤드 장치의 이동 조작부는,상기 노즐 헤드 장치를, 상기 기판의 회전 중심축과 평행한 방향으로 상하 이동시키는 상하 이동부와,상기 노즐 헤드 장치를, 상기 기판 상에 요동시키는 회전 지지부를 갖는 것을 특징으로 하는 기판 처리 장치.
- 삭제
- 청구항 1에 있어서,상기 노즐 유닛 이동 기구부는, 상기 노즐 유닛을, 상기 물리 도구 유닛의 직선 이동 방향과는 반대 방향으로 직선 이동시키는 것을 특징으로 하는 기판 처리 장치.
- 기판을 회전시키면서 상기 기판의 표면을 처리하는 기판 처리 방법으로서,기판의 표면을 처리하는 물리 도구를 갖는 물리 도구 유닛과,상기 기판의 표면에 액체를 공급하는 액 공급 노즐과, 상기 기판의 표면에 가스를 공급하는 가스 공급 노즐을 갖는 노즐 유닛과,상기 물리 도구 유닛을 이동시키는 물리 도구 유닛 이동 기구부와,상기 노즐 유닛을 상기 물리 노즐 유닛의 이동과 동기하여, 이동시키는 노즐 유닛 이동 기구부를 구비하고,상기 물리 도구 유닛 이동 기구부는, 모터와, 상기 모터에 의해 회전되어 상기 물리 도구 유닛을 이동시키는 이송 나사를 갖고,상기 노즐 유닛 이동 기구부는, 모터와, 상기 모터에 의해 회전되고 상기 노즐 유닛을 상기 물리 유닛의 이동과 동기하여 이동시키는 이송 나사를 갖고 있는 기판 처리 장치를 이용하여,상기 기판의 표면을 처리하는 물리 도구를 갖는 물리 도구 유닛을, 물리 도구 유닛 이동 기구부에 의해 상기 기판의 표면을 따라 직선 이동시키고,상기 기판의 표면에 액체를 공급하는 액 공급 노즐과 상기 기판의 표면에 가스를 공급하는 가스 공급 노즐을 갖는 노즐 유닛을, 노즐 유닛 이동 기구부에 의해, 상기 물리 도구 유닛의 직선 이동 방향과는 반대 방향으로 상기 기판의 표면을 따라 직선 이동시키는 것을 특징으로 하는 기판 처리 방법.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008296301 | 2008-11-20 | ||
JPJP-P-2008-296301 | 2008-11-20 | ||
JP2009254548A JP5523062B2 (ja) | 2008-11-20 | 2009-11-06 | 基板処理装置および基板処理方法 |
JPJP-P-2009-254548 | 2009-11-06 |
Publications (2)
Publication Number | Publication Date |
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KR20100056975A KR20100056975A (ko) | 2010-05-28 |
KR101068755B1 true KR101068755B1 (ko) | 2011-09-28 |
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Application Number | Title | Priority Date | Filing Date |
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KR1020090110953A KR101068755B1 (ko) | 2008-11-20 | 2009-11-17 | 기판 처리 장치 및 기판 처리 방법 |
Country Status (4)
Country | Link |
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US (1) | US9202724B2 (ko) |
JP (1) | JP5523062B2 (ko) |
KR (1) | KR101068755B1 (ko) |
TW (1) | TWI415207B (ko) |
Families Citing this family (14)
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JP5523062B2 (ja) * | 2008-11-20 | 2014-06-18 | 芝浦メカトロニクス株式会社 | 基板処理装置および基板処理方法 |
US9646858B2 (en) * | 2011-06-23 | 2017-05-09 | Brooks Automation, Inc. | Semiconductor cleaner systems and methods |
US9623449B2 (en) | 2012-04-09 | 2017-04-18 | Lam Research Corporation | Dielectric window cleaning apparatuses |
JP6250924B2 (ja) | 2012-10-02 | 2017-12-20 | 株式会社荏原製作所 | 基板洗浄装置および研磨装置 |
JP6148475B2 (ja) * | 2013-01-25 | 2017-06-14 | 株式会社東芝 | 半導体製造装置および半導体装置の製造方法 |
US9870933B2 (en) * | 2013-02-08 | 2018-01-16 | Lam Research Ag | Process and apparatus for treating surfaces of wafer-shaped articles |
JP2015023138A (ja) * | 2013-07-18 | 2015-02-02 | 株式会社ディスコ | スピンナ洗浄装置 |
TWI597770B (zh) * | 2013-09-27 | 2017-09-01 | 斯克林集團公司 | 基板處理裝置及基板處理方法 |
CN104607430B (zh) * | 2013-11-01 | 2016-08-17 | 沈阳芯源微电子设备有限公司 | 一种胶杯自动清洗的方法 |
CN109478501B (zh) * | 2016-07-27 | 2023-06-06 | 东京毅力科创株式会社 | 涂敷膜形成方法、涂敷膜形成装置和计算机可读取的存储介质 |
US10509321B2 (en) * | 2018-01-30 | 2019-12-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Temperature controlling apparatus and method for forming coating layer |
CN111286886A (zh) * | 2018-12-08 | 2020-06-16 | 泰兴市佰银服饰有限公司 | 一种纺织纺织布料加湿器 |
CN111359954A (zh) * | 2020-03-12 | 2020-07-03 | 李义飞 | 一种用于新能源汽车铝合金轮毂智能清洗器 |
KR20220029906A (ko) * | 2020-09-02 | 2022-03-10 | 에스케이하이닉스 주식회사 | 기판의 평탄화 장치 및 방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05299400A (ja) * | 1992-04-23 | 1993-11-12 | Oki Electric Ind Co Ltd | 半導体ウエハの洗浄装置及び洗浄方法 |
JP2007036180A (ja) * | 2005-06-23 | 2007-02-08 | Tokyo Electron Ltd | 基板処理方法及び基板処理装置 |
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KR100488753B1 (ko) * | 2001-07-23 | 2005-05-11 | 다이닛뽕스크린 세이조오 가부시키가이샤 | 기판처리방법 및 그 장치 |
JP4481576B2 (ja) * | 2003-02-28 | 2010-06-16 | 芝浦メカトロニクス株式会社 | ペースト塗布装置 |
JP4759359B2 (ja) * | 2005-10-07 | 2011-08-31 | 芝浦メカトロニクス株式会社 | 基板の処理装置 |
JP4986566B2 (ja) * | 2005-10-14 | 2012-07-25 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
JP5523062B2 (ja) * | 2008-11-20 | 2014-06-18 | 芝浦メカトロニクス株式会社 | 基板処理装置および基板処理方法 |
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2009
- 2009-11-06 JP JP2009254548A patent/JP5523062B2/ja active Active
- 2009-11-12 TW TW098138471A patent/TWI415207B/zh active
- 2009-11-17 KR KR1020090110953A patent/KR101068755B1/ko active IP Right Grant
- 2009-11-19 US US12/621,663 patent/US9202724B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05299400A (ja) * | 1992-04-23 | 1993-11-12 | Oki Electric Ind Co Ltd | 半導体ウエハの洗浄装置及び洗浄方法 |
JP2007036180A (ja) * | 2005-06-23 | 2007-02-08 | Tokyo Electron Ltd | 基板処理方法及び基板処理装置 |
Also Published As
Publication number | Publication date |
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KR20100056975A (ko) | 2010-05-28 |
TW201023287A (en) | 2010-06-16 |
JP2010153807A (ja) | 2010-07-08 |
US20100122772A1 (en) | 2010-05-20 |
US9202724B2 (en) | 2015-12-01 |
TWI415207B (zh) | 2013-11-11 |
JP5523062B2 (ja) | 2014-06-18 |
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