KR100979346B1 - 요동체 장치, 광 편향기 및 이를 제어하는 방법 - Google Patents

요동체 장치, 광 편향기 및 이를 제어하는 방법 Download PDF

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Publication number
KR100979346B1
KR100979346B1 KR1020087019740A KR20087019740A KR100979346B1 KR 100979346 B1 KR100979346 B1 KR 100979346B1 KR 1020087019740 A KR1020087019740 A KR 1020087019740A KR 20087019740 A KR20087019740 A KR 20087019740A KR 100979346 B1 KR100979346 B1 KR 100979346B1
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South Korea
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oscillator
time
light
signal
driving
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Expired - Fee Related
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Korean (ko)
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KR20080094045A (ko
Inventor
가즈나리 후지이
유끼오 후루까와
다까히로 아끼야마
류헤이 쇼지
소이찌로 스즈끼
심뻬이 마쯔오
다쯔야 호또기
신이찌로 이이무라
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Micromachines (AREA)
KR1020087019740A 2006-02-13 2007-02-13 요동체 장치, 광 편향기 및 이를 제어하는 방법 Expired - Fee Related KR100979346B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00035491 2006-02-13
JP2006035491 2006-02-13
JPJP-P-2006-00189947 2006-07-11
JP2006189947 2006-07-11
JP2007023881A JP5441309B2 (ja) 2006-02-13 2007-02-02 揺動体装置、及び光偏向装置
JPJP-P-2007-00023881 2007-02-02

Publications (2)

Publication Number Publication Date
KR20080094045A KR20080094045A (ko) 2008-10-22
KR100979346B1 true KR100979346B1 (ko) 2010-08-31

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KR1020087019740A Expired - Fee Related KR100979346B1 (ko) 2006-02-13 2007-02-13 요동체 장치, 광 편향기 및 이를 제어하는 방법

Country Status (6)

Country Link
US (1) US8400698B2 (enExample)
EP (1) EP1987388A1 (enExample)
JP (1) JP5441309B2 (enExample)
KR (1) KR100979346B1 (enExample)
CN (1) CN101384942B (enExample)
WO (1) WO2007094489A1 (enExample)

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* Cited by examiner, † Cited by third party
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JP5065116B2 (ja) * 2007-06-14 2012-10-31 キヤノン株式会社 揺動体装置、光偏向装置、及びその制御方法
JP2009058616A (ja) 2007-08-30 2009-03-19 Canon Inc 揺動体装置、光偏向装置、及びそれを用いた画像形成装置
JP2009069392A (ja) 2007-09-12 2009-04-02 Canon Inc 揺動体装置、揺動体装置によって構成される光偏向器及び画像形成装置
JP2009122383A (ja) 2007-11-14 2009-06-04 Canon Inc 揺動体装置の製造方法、該製造方法により製造された揺動体装置によって構成される光偏向器及び光学機器
US7920313B2 (en) 2008-03-12 2011-04-05 Canon Kabushiki Kaisha Oscillator device, optical deflector and image forming apparatus using the optical deflector
JP5408887B2 (ja) * 2008-03-12 2014-02-05 キヤノン株式会社 揺動体装置、揺動体装置を用いた画像形成装置
JP5283966B2 (ja) * 2008-05-14 2013-09-04 キヤノン株式会社 光偏向装置、及び画像形成装置
JP5296428B2 (ja) * 2008-06-20 2013-09-25 キヤノン電子株式会社 光走査装置及び該光走査装置を用いた画像形成装置、及び画像読み取り装置とディスプレイ
JP5264337B2 (ja) * 2008-07-15 2013-08-14 キヤノン株式会社 光学走査装置及びそれを備える画像形成装置
KR101279441B1 (ko) * 2008-08-21 2013-07-05 삼성전자주식회사 멤스 미러, 미러 스캐너, 광주사 유닛 및 광주사 유닛을 채용한 화상형성장치
JP5424995B2 (ja) 2010-06-24 2014-02-26 キヤノン株式会社 光走査装置及び画像形成装置
JP5450496B2 (ja) * 2011-03-29 2014-03-26 京セラドキュメントソリューションズ株式会社 光走査装置及びこれを備えた画像形成装置
WO2013125233A1 (ja) * 2012-02-22 2013-08-29 京セラドキュメントソリューションズ株式会社 光走査装置及び画像形成装置
JP6077938B2 (ja) * 2012-05-31 2017-02-08 日本電産サンキョー株式会社 振れ補正機能付き光学ユニット
EP2977811A1 (de) 2014-07-25 2016-01-27 Trumpf Laser Marking Systems AG System mit einem piezoresistiven Positionssensor
JP6587430B2 (ja) * 2015-06-23 2019-10-09 キヤノン株式会社 画像生成装置及び画像生成方法
JP2017126056A (ja) * 2016-01-07 2017-07-20 シャープ株式会社 光走査装置、画像形成装置、及び光走査制御方法
JP6389846B2 (ja) 2016-07-25 2018-09-12 キヤノン株式会社 画像形成装置およびコントローラ
EP3521894B1 (en) 2018-02-06 2023-11-08 Murata Manufacturing Co., Ltd. Mems reflector system with trajectory control
JP2019200376A (ja) 2018-05-18 2019-11-21 キヤノン株式会社 走査装置及び画像形成装置
DE102018114388A1 (de) * 2018-06-15 2019-12-19 Valeo Schalter Und Sensoren Gmbh Verfahren zur Steuerung einer Antriebseinrichtung eines Mikroschwingspiegels, Steuervorrichtung und Umlenkspiegeleinrichtung
WO2020032274A1 (ja) * 2018-08-10 2020-02-13 浜松ホトニクス株式会社 アクチュエータ装置、及びアクチュエータ装置の製造方法
CN109557661B (zh) * 2018-10-15 2021-02-26 武汉光迅科技股份有限公司 驱动光学转镜转动的方法及用于驱动光学转镜转动的装置
US11270418B1 (en) * 2020-11-19 2022-03-08 VPIX Medical Incorporation Method and system for correcting phase of image reconstruction signal

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4859846A (en) * 1988-07-21 1989-08-22 Burrer Gordon J Dual-mode resonant scanning system

Family Cites Families (19)

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DE69030304T2 (de) * 1989-12-27 1997-08-14 Canon Kk Bildaufzeichnungsgerät, welches Lichtstrahlen verwendet
DE69132464T2 (de) * 1990-07-05 2001-05-10 Canon K.K., Tokio/Tokyo Bilderzeugungsgerät und zugehörige Schaltvorrichtung für Konstantstromschaltung
US20040004775A1 (en) * 2002-07-08 2004-01-08 Turner Arthur Monroe Resonant scanning mirror with inertially coupled activation
JP2006525548A (ja) * 2003-04-21 2006-11-09 エロップ エレクトロ−オプティクス インダストリーズ リミテッド スキャニングミラー
JP4492252B2 (ja) * 2003-09-05 2010-06-30 セイコーエプソン株式会社 アクチュエータ
US7659918B2 (en) * 2003-10-08 2010-02-09 Texas Instruments Incorporated Apparatus and methods for adjusting the rotational frequency of a scanning device
JP4323939B2 (ja) * 2003-12-11 2009-09-02 キヤノン株式会社 画像形成装置及び画像形成方法
JP4027359B2 (ja) * 2003-12-25 2007-12-26 キヤノン株式会社 マイクロ揺動体、光偏向器、画像形成装置
JP3793208B2 (ja) * 2004-03-23 2006-07-05 キヤノン株式会社 変調光源、それを有する画像表示装置、および変調光源の駆動方式
JP2005292627A (ja) * 2004-04-02 2005-10-20 Ricoh Co Ltd 光走査装置
JP2005326475A (ja) * 2004-05-12 2005-11-24 Canon Inc 電子写真装置及びプロセスカートリッジ
JP2005326462A (ja) * 2004-05-12 2005-11-24 Canon Inc 光偏向器およびその制御方法
JP2005326746A (ja) * 2004-05-17 2005-11-24 Canon Inc 光偏向装置およびその制御方法
JP4447963B2 (ja) * 2004-05-31 2010-04-07 キヤノン株式会社 光偏向器制御装置
JP5159028B2 (ja) * 2004-06-29 2013-03-06 キヤノン株式会社 揺動体を有する光偏向装置、及びその調整方法
KR100682881B1 (ko) * 2005-01-19 2007-02-15 삼성코닝 주식회사 결정 성장 방법
US7474165B2 (en) * 2005-11-22 2009-01-06 Canon Kabushiki Kaisha Oscillating device, optical deflector and optical instrument using the same
US7436566B2 (en) 2005-11-22 2008-10-14 Canon Kabushiki Kaisha Oscillating device, optical deflector and method of controlling the same
JP5065116B2 (ja) * 2007-06-14 2012-10-31 キヤノン株式会社 揺動体装置、光偏向装置、及びその制御方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4859846A (en) * 1988-07-21 1989-08-22 Burrer Gordon J Dual-mode resonant scanning system

Also Published As

Publication number Publication date
US8400698B2 (en) 2013-03-19
US20090051992A1 (en) 2009-02-26
WO2007094489A1 (en) 2007-08-23
CN101384942A (zh) 2009-03-11
JP5441309B2 (ja) 2014-03-12
KR20080094045A (ko) 2008-10-22
CN101384942B (zh) 2012-05-23
EP1987388A1 (en) 2008-11-05
JP2008040460A (ja) 2008-02-21

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