JP5441309B2 - 揺動体装置、及び光偏向装置 - Google Patents

揺動体装置、及び光偏向装置 Download PDF

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Publication number
JP5441309B2
JP5441309B2 JP2007023881A JP2007023881A JP5441309B2 JP 5441309 B2 JP5441309 B2 JP 5441309B2 JP 2007023881 A JP2007023881 A JP 2007023881A JP 2007023881 A JP2007023881 A JP 2007023881A JP 5441309 B2 JP5441309 B2 JP 5441309B2
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JP
Japan
Prior art keywords
time
oscillator
vibration
drive
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007023881A
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English (en)
Japanese (ja)
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JP2008040460A5 (enExample
JP2008040460A (ja
Inventor
一成 藤井
貴弘 秋山
達也 補伽
龍平 庄司
総一郎 鈴木
紳一郎 飯村
幸生 古川
信平 松尾
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Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2007023881A priority Critical patent/JP5441309B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to US12/160,209 priority patent/US8400698B2/en
Priority to KR1020087019740A priority patent/KR100979346B1/ko
Priority to EP07714436A priority patent/EP1987388A1/en
Priority to CN2007800053558A priority patent/CN101384942B/zh
Priority to PCT/JP2007/052909 priority patent/WO2007094489A1/en
Publication of JP2008040460A publication Critical patent/JP2008040460A/ja
Publication of JP2008040460A5 publication Critical patent/JP2008040460A5/ja
Application granted granted Critical
Publication of JP5441309B2 publication Critical patent/JP5441309B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP2007023881A 2006-02-13 2007-02-02 揺動体装置、及び光偏向装置 Expired - Fee Related JP5441309B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2007023881A JP5441309B2 (ja) 2006-02-13 2007-02-02 揺動体装置、及び光偏向装置
KR1020087019740A KR100979346B1 (ko) 2006-02-13 2007-02-13 요동체 장치, 광 편향기 및 이를 제어하는 방법
EP07714436A EP1987388A1 (en) 2006-02-13 2007-02-13 Oscillator device, optical deflecting device and method of controlling the same
CN2007800053558A CN101384942B (zh) 2006-02-13 2007-02-13 振荡器装置、光学偏转装置及图像形成设备
US12/160,209 US8400698B2 (en) 2006-02-13 2007-02-13 Oscillator device, optical deflecting device and method of controlling the same
PCT/JP2007/052909 WO2007094489A1 (en) 2006-02-13 2007-02-13 Oscillator device, optical deflecting device and method of controlling the same

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2006035491 2006-02-13
JP2006035491 2006-02-13
JP2006189947 2006-07-11
JP2006189947 2006-07-11
JP2007023881A JP5441309B2 (ja) 2006-02-13 2007-02-02 揺動体装置、及び光偏向装置

Publications (3)

Publication Number Publication Date
JP2008040460A JP2008040460A (ja) 2008-02-21
JP2008040460A5 JP2008040460A5 (enExample) 2010-03-18
JP5441309B2 true JP5441309B2 (ja) 2014-03-12

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ID=37986072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007023881A Expired - Fee Related JP5441309B2 (ja) 2006-02-13 2007-02-02 揺動体装置、及び光偏向装置

Country Status (6)

Country Link
US (1) US8400698B2 (enExample)
EP (1) EP1987388A1 (enExample)
JP (1) JP5441309B2 (enExample)
KR (1) KR100979346B1 (enExample)
CN (1) CN101384942B (enExample)
WO (1) WO2007094489A1 (enExample)

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Publication number Priority date Publication date Assignee Title
JP5065116B2 (ja) * 2007-06-14 2012-10-31 キヤノン株式会社 揺動体装置、光偏向装置、及びその制御方法
JP2009058616A (ja) 2007-08-30 2009-03-19 Canon Inc 揺動体装置、光偏向装置、及びそれを用いた画像形成装置
JP2009069392A (ja) 2007-09-12 2009-04-02 Canon Inc 揺動体装置、揺動体装置によって構成される光偏向器及び画像形成装置
JP2009122383A (ja) 2007-11-14 2009-06-04 Canon Inc 揺動体装置の製造方法、該製造方法により製造された揺動体装置によって構成される光偏向器及び光学機器
US7920313B2 (en) 2008-03-12 2011-04-05 Canon Kabushiki Kaisha Oscillator device, optical deflector and image forming apparatus using the optical deflector
JP5408887B2 (ja) * 2008-03-12 2014-02-05 キヤノン株式会社 揺動体装置、揺動体装置を用いた画像形成装置
JP5283966B2 (ja) * 2008-05-14 2013-09-04 キヤノン株式会社 光偏向装置、及び画像形成装置
JP5296428B2 (ja) * 2008-06-20 2013-09-25 キヤノン電子株式会社 光走査装置及び該光走査装置を用いた画像形成装置、及び画像読み取り装置とディスプレイ
JP5264337B2 (ja) * 2008-07-15 2013-08-14 キヤノン株式会社 光学走査装置及びそれを備える画像形成装置
KR101279441B1 (ko) * 2008-08-21 2013-07-05 삼성전자주식회사 멤스 미러, 미러 스캐너, 광주사 유닛 및 광주사 유닛을 채용한 화상형성장치
JP5424995B2 (ja) 2010-06-24 2014-02-26 キヤノン株式会社 光走査装置及び画像形成装置
JP5450496B2 (ja) * 2011-03-29 2014-03-26 京セラドキュメントソリューションズ株式会社 光走査装置及びこれを備えた画像形成装置
WO2013125233A1 (ja) * 2012-02-22 2013-08-29 京セラドキュメントソリューションズ株式会社 光走査装置及び画像形成装置
JP6077938B2 (ja) * 2012-05-31 2017-02-08 日本電産サンキョー株式会社 振れ補正機能付き光学ユニット
EP2977811A1 (de) 2014-07-25 2016-01-27 Trumpf Laser Marking Systems AG System mit einem piezoresistiven Positionssensor
JP6587430B2 (ja) * 2015-06-23 2019-10-09 キヤノン株式会社 画像生成装置及び画像生成方法
JP2017126056A (ja) * 2016-01-07 2017-07-20 シャープ株式会社 光走査装置、画像形成装置、及び光走査制御方法
JP6389846B2 (ja) 2016-07-25 2018-09-12 キヤノン株式会社 画像形成装置およびコントローラ
EP3521894B1 (en) 2018-02-06 2023-11-08 Murata Manufacturing Co., Ltd. Mems reflector system with trajectory control
JP2019200376A (ja) 2018-05-18 2019-11-21 キヤノン株式会社 走査装置及び画像形成装置
DE102018114388A1 (de) * 2018-06-15 2019-12-19 Valeo Schalter Und Sensoren Gmbh Verfahren zur Steuerung einer Antriebseinrichtung eines Mikroschwingspiegels, Steuervorrichtung und Umlenkspiegeleinrichtung
WO2020032274A1 (ja) * 2018-08-10 2020-02-13 浜松ホトニクス株式会社 アクチュエータ装置、及びアクチュエータ装置の製造方法
CN109557661B (zh) * 2018-10-15 2021-02-26 武汉光迅科技股份有限公司 驱动光学转镜转动的方法及用于驱动光学转镜转动的装置
US11270418B1 (en) * 2020-11-19 2022-03-08 VPIX Medical Incorporation Method and system for correcting phase of image reconstruction signal

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US4859846A (en) * 1988-07-21 1989-08-22 Burrer Gordon J Dual-mode resonant scanning system
DE69030304T2 (de) * 1989-12-27 1997-08-14 Canon Kk Bildaufzeichnungsgerät, welches Lichtstrahlen verwendet
DE69132464T2 (de) * 1990-07-05 2001-05-10 Canon K.K., Tokio/Tokyo Bilderzeugungsgerät und zugehörige Schaltvorrichtung für Konstantstromschaltung
US20040004775A1 (en) * 2002-07-08 2004-01-08 Turner Arthur Monroe Resonant scanning mirror with inertially coupled activation
JP2006525548A (ja) * 2003-04-21 2006-11-09 エロップ エレクトロ−オプティクス インダストリーズ リミテッド スキャニングミラー
JP4492252B2 (ja) * 2003-09-05 2010-06-30 セイコーエプソン株式会社 アクチュエータ
US7659918B2 (en) * 2003-10-08 2010-02-09 Texas Instruments Incorporated Apparatus and methods for adjusting the rotational frequency of a scanning device
JP4323939B2 (ja) * 2003-12-11 2009-09-02 キヤノン株式会社 画像形成装置及び画像形成方法
JP4027359B2 (ja) * 2003-12-25 2007-12-26 キヤノン株式会社 マイクロ揺動体、光偏向器、画像形成装置
JP3793208B2 (ja) * 2004-03-23 2006-07-05 キヤノン株式会社 変調光源、それを有する画像表示装置、および変調光源の駆動方式
JP2005292627A (ja) * 2004-04-02 2005-10-20 Ricoh Co Ltd 光走査装置
JP2005326475A (ja) * 2004-05-12 2005-11-24 Canon Inc 電子写真装置及びプロセスカートリッジ
JP2005326462A (ja) * 2004-05-12 2005-11-24 Canon Inc 光偏向器およびその制御方法
JP2005326746A (ja) * 2004-05-17 2005-11-24 Canon Inc 光偏向装置およびその制御方法
JP4447963B2 (ja) * 2004-05-31 2010-04-07 キヤノン株式会社 光偏向器制御装置
JP5159028B2 (ja) * 2004-06-29 2013-03-06 キヤノン株式会社 揺動体を有する光偏向装置、及びその調整方法
KR100682881B1 (ko) * 2005-01-19 2007-02-15 삼성코닝 주식회사 결정 성장 방법
US7474165B2 (en) * 2005-11-22 2009-01-06 Canon Kabushiki Kaisha Oscillating device, optical deflector and optical instrument using the same
US7436566B2 (en) 2005-11-22 2008-10-14 Canon Kabushiki Kaisha Oscillating device, optical deflector and method of controlling the same
JP5065116B2 (ja) * 2007-06-14 2012-10-31 キヤノン株式会社 揺動体装置、光偏向装置、及びその制御方法

Also Published As

Publication number Publication date
US8400698B2 (en) 2013-03-19
US20090051992A1 (en) 2009-02-26
WO2007094489A1 (en) 2007-08-23
CN101384942A (zh) 2009-03-11
KR20080094045A (ko) 2008-10-22
KR100979346B1 (ko) 2010-08-31
CN101384942B (zh) 2012-05-23
EP1987388A1 (en) 2008-11-05
JP2008040460A (ja) 2008-02-21

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