KR100926722B1 - 반도체 기판상의 실록산 중합체막 및 그 제조방법 - Google Patents
반도체 기판상의 실록산 중합체막 및 그 제조방법 Download PDFInfo
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- KR100926722B1 KR100926722B1 KR1020020018752A KR20020018752A KR100926722B1 KR 100926722 B1 KR100926722 B1 KR 100926722B1 KR 1020020018752 A KR1020020018752 A KR 1020020018752A KR 20020018752 A KR20020018752 A KR 20020018752A KR 100926722 B1 KR100926722 B1 KR 100926722B1
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- siloxane polymer
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- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 229920006254 polymer film Polymers 0.000 title claims abstract description 8
- 239000000758 substrate Substances 0.000 title claims description 45
- 239000004065 semiconductor Substances 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title description 7
- 239000007789 gas Substances 0.000 claims abstract description 125
- 238000006243 chemical reaction Methods 0.000 claims abstract description 60
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 40
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 37
- 239000010703 silicon Substances 0.000 claims abstract description 36
- 229920000642 polymer Polymers 0.000 claims abstract description 27
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims abstract description 22
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 21
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 18
- 230000001590 oxidative effect Effects 0.000 claims abstract description 18
- 230000008016 vaporization Effects 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 46
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 21
- 239000000126 substance Substances 0.000 claims description 20
- 239000000654 additive Substances 0.000 claims description 18
- 230000000996 additive effect Effects 0.000 claims description 18
- 229910052786 argon Inorganic materials 0.000 claims description 12
- 125000004432 carbon atom Chemical group C* 0.000 claims description 12
- 229910052734 helium Inorganic materials 0.000 claims description 10
- 239000001307 helium Substances 0.000 claims description 9
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 9
- 238000006116 polymerization reaction Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 6
- 230000003213 activating effect Effects 0.000 claims description 2
- 238000009832 plasma treatment Methods 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 abstract description 12
- 239000007800 oxidant agent Substances 0.000 abstract description 12
- 239000000376 reactant Substances 0.000 abstract description 3
- 239000012495 reaction gas Substances 0.000 description 27
- 238000005530 etching Methods 0.000 description 23
- 229910052760 oxygen Inorganic materials 0.000 description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 16
- 239000001301 oxygen Substances 0.000 description 16
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 10
- 239000012528 membrane Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 239000012071 phase Substances 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 238000005755 formation reaction Methods 0.000 description 6
- 229920005597 polymer membrane Polymers 0.000 description 6
- 229910018557 Si O Inorganic materials 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000009834 vaporization Methods 0.000 description 5
- 125000003545 alkoxy group Chemical group 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000006200 vaporizer Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 125000000962 organic group Chemical group 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- -1 siloxane structures Chemical group 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 101100275461 Artemia franciscana COIII gene Proteins 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 244000145841 kine Species 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 208000027765 speech disease Diseases 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
- H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
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- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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Abstract
Description
막 타입 (FILM TYPE) | 막 상 구조 (STRUCTURE IN THE FILM) | 에칭 가스 (ETCHING GAS) | 분해 가스 (DISSOCIATION GAS) | 반응 (REACTION) |
레지스트 CHx | C | CF4 | CF4 | Ⅰ |
O2 | CO 또는 CO2 | Ⅱ | ||
low-k SiOCH | Si-O | CF4 | SiF4, CO2, CO | Ⅲ |
C | CF4 | CF4 | Ⅳ | |
O(막에 함유됨) | CO, CO2 | Ⅴ | ||
O2 | CO, CO2 | Ⅵ | ||
산화된 SiO 막 | Si-O | CF4 | SiF4, CO2, CO | Ⅶ |
상기에서, 상기 잔류 시간은 상기 반응 챔버 내에서 가스 분자들이 머무는 시간의 평균 기간을 의미한다. 잔류 시간(Rt)은 Rt= αV/S로 계산될 수 있으며, 여기서 V는 챔버의 용량(cc), S는 반응 가스의 부피(cc/s), 그리고 α는 반응 챔버의 형태 및 가스의 유입구와 배출을 위한 배출구 사이의 위치적 연관성에 의해 결정되는 계수이다. 반응 챔버내에서 반응을 위한 공간은 기판의 표면( πr2) 및 상부 전극과 하부 전극 사이의 공간에 의해 정의된다. 반응을 위한 공간을 통하는 가스 흐름을 고려한다면, α는 1/2로 추산될 수 있다. 상기 공식에서, α는 1/2이다.
기상에서 반응을 조절하기 위해서, 반응챔버에 소량의 비활성 가스, 산화제, 또는 환원제를 첨가하는 것이 효과적이다. 헬륨(He) 및 아르곤(Ar)은 비활성 가스이고 24.56eV 및 15.76eV로 각각의 상이한 1차 이온화 에너지를 갖는다. 이에 헬륨 또는 아르곤 중 어느 하나 또는 이들 조합을 소정의 양으로 첨가함으로써, 기상에서 물질가스의 반응이 조절될 수 있다. 반응가스의 분자는 기상에서 중합되어 올리머를 형성한다. 올리고머는 1:1의 비율을 갖는 O:Si를 포함하는 것으로 예측된다. 그러나, 올리고머가 기판 상에 막을 형성할 때, 상기 올리고머는 더 중합되어 결과적으로 더 높은 산화율을 초래한다. 기판 상에 형성된 막의 유전율 또는 다른 특성에 따라서 비율은 변화한다. (후술되는 실시예5에서 비율은 3:2 이다.)
본 발명의 또 다른 측면, 특징 및 장점은 후술하는 바람직한 실시예의 상세한 설명으로 명확해 질 것이다.
부가적으로, Si(CH3)3상에 N2O 등과 같은 산화가스를 사용하여 2.7의 유전율을 갖는 저유전율 막을 형성하기 위한 사례는 이미 보고되었다. 이 경우에 막은 20%이상의 C를 함유하는 높은 C 농도를 갖는 SiCOH 막이다.
Rt[s]=9.42×107(Pr·Ts/Ps·Tr)rw 2d/F
물질가스유량 (material gas flow) (sccm) | He(sccm) | O2(sccm) | 가스들의 총유랑 (reation gas total flow) (sccm) | Rt(msec) | |
제1실시예 | 100 | 30 | 70 | 200 | 172 |
비교실시예 | 100 | 30 | 0 | 130 | 265 |
제1실시예 | 비교실시예 | |
증착속도 (nm/min) | 1500 | 500 |
k | 2.45 | 2.70 |
Si:C:O (%) | 31:16:53 | 33:22:45 |
Claims (16)
- 플라즈마 처리에 의해 반도체 기판 상에 실록산 중합체 절연막을 형성하기 위한 방법으로서,실록산 중합체용 물질가스를 생산하기 위해서 SiαOα-1R2α-β+2(OCnH2n+1)β 식을 가지는 (여기서, α는 1-3의 정수, β는 정수 2, n은 1-3의 정수이고, R은 Si에 부착된 C1-6 탄화수소임) 실리콘 함유 탄화수소 화합물을 기화시키는 단계;반도체 기판이 적치되는 플라즈마 CVD 처리용 반응 챔버내로 상기 물질가스를 도입하는 단계;비활성 가스 및 상기 물질가스보다 적은 양으로 사용되는 산화 가스를 포함하는 첨가가스를 도입하는 단계; 및상기 반응 챔버에서 플라즈마 중합 반응을 활성화함으로써, 상기 반도체 기판 상에 반복하는 -SiR2O-의 구조적 단위를 갖는 실록산 중합체 막을 형성하는 단계를 포함하며,상기 첨가가스는 상기 실록산 중합체 막의 C 원자 농도가 20% 보다 크지 않도록 하는 양의 산화가스를 포함하는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 삭제
- 제1항에 있어서,상기 반응챔버 내에서 상기 가스들의 잔류시간(Rt)이 100 msec≤Rt가 되도록 연장시키기 위해 상기 가스들의 총 흐름을 제어하면서, 상기 플라즈마 중합 반응이 활성화되며,Rt[s] = 9.42×107(Pr·Ts/Ps·Tr)rw 2d/F여기에서:Pr : 반응 챔버 압력(Pa)Ps : 표준 대기압(Pa)Tr : 가스들의 평균 온도(K)Ts : 표준 온도(K)rw : 실리콘 기판의 반경(m)d : 실리콘 기판과 상부 전극사이의 간격(m)F : 가스들의 총 유량(sccm)인 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 제3항에 있어서,상기 잔류시간은 상기 잔류시간과 상기 실록산 중합체 절연막의 유전율 사이의 상관관계에 따라 결정되는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 제1항에 있어서,상기 첨가가스는 아르곤(Ar) 및 헬륨 (He) 중 적어도 어느 하나를 포함하는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 제1항에 있어서,상기 가스들의 총 흐름은 상기 실록산 중합체 절연막의 유전율이 3.10 보다 작도록 제어되는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 제3항에 있어서,상기 Rt는 165msec 이상인 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 삭제
- 제1항에 있어서,상기 실리콘 함유 탄화수소 화합물 내에 존재하는 탄화수소는 1 내지 6 개의 탄소원자(n=1-6)를 가지는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 제1항에 있어서,상기 실리콘 함유 탄화수소 화합물은 1 내지 3개의 실리콘 원자를 가지는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 제1항에 있어서,상기 실리콘 함유 탄화수소 화합물은 1 내지 2개의 실리콘 원자(α=1 또는 2)를 갖는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 제1항에 기재된 방법에 의해 반도체 기판 상에 형성되며,3.1 이하의 유전율을 가지며,식 SiαOα-1R2α-β+2(OCnH2n+1)β (여기서, α는 1-3의 정수, β는 정수 2, n은 1-3의 정수이고 R은 Si에 부착된 C1-6 탄화수소)를 갖는 실리콘 함유 탄화수소로부터 플라즈마 중합 반응에 의해 형성되어, 20% 이하의 C 원자농도를 가지고 반복하는 -SiR2O-의 구조적 단위를 포함하는 것을 특징으로 하는 실록산 중합체 절연막.
- 제12항에 있어서,상기 실록산 중합체 절연막은 2.7 이하의 유전율을 갖는 것을 특징으로 하는 실록산 중합체 절연막.
- 제12항에 있어서,반복하는 구조적 단위인 상기 R은 C1 탄화수소인 것을 특징으로 하는 실록산 중합체 절연막.
- 제1항에 있어서,상기 산화 가스는 상기 물질가스의 20 % 내지 80 %의 양으로 사용되는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
- 제11항에 있어서,상기 실리콘 함유 탄화수소 화합물은 1 개의 실리콘 원자(α=1)를 갖는 것을 특징으로 하는 실록산 중합체 절연막의 형성 방법.
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US20040197474A1 (en) * | 2003-04-01 | 2004-10-07 | Vrtis Raymond Nicholas | Method for enhancing deposition rate of chemical vapor deposition films |
JP4854938B2 (ja) | 2004-07-06 | 2012-01-18 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
WO2008020592A1 (fr) | 2006-08-15 | 2008-02-21 | Jsr Corporation | Matériau filmogène, film isolant contenant du silicium et procédé de formation de celui-ci |
JP5170445B2 (ja) | 2007-02-14 | 2013-03-27 | Jsr株式会社 | ケイ素含有膜形成用材料、ならびにケイ素含有絶縁膜およびその形成方法 |
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