JP2011528508A - 障壁層と多様な液体前駆体から堆積される多孔質低k膜との間の付着を促進するための方法 - Google Patents
障壁層と多様な液体前駆体から堆積される多孔質低k膜との間の付着を促進するための方法 Download PDFInfo
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
Description
Claims (15)
- 基板を処理する方法であって、
前記基板を処理チャンバーの支持部に位置決めするステップと、
第1の有機シリコン前駆体を第1の流量で前記チャンバーに提供するステップと、
第2の有機シリコン前駆体を第2の流量で前記チャンバーに提供するステップと、
炭化水素混合物を第3の流量で前記チャンバーに提供するステップと、
酸化剤を第4の流量で前記チャンバーに提供するステップと、
前記第2の有機シリコン前駆体の前記第2の流量をより高い流量まで一定の比率で増やすステップと、
前記酸化剤の前記流量をより高い流量まで一定の比率で増やすステップと、
前記基板が処理されている時間の少なくとも一部にわたって前記チャンバーを迂回するように前記炭化水素混合物をわきへそらすステップとを含む、方法。 - 前記第1の有機シリコン前駆体は、前記第2の有機シリコン前駆体より低い炭素原子対シリコン原子の比を有する、請求項1に記載の方法。
- 前記炭化水素混合物は、環状基を有する1つまたは複数の化合物を含む、請求項1に記載の方法。
- 前記第2の有機シリコン前駆体の前記第2の流量を一定の比率で変えるステップは、前記酸化剤を一定の比率で変えるために使用されるランプレートより速いランプレートを含む、請求項1に記載の方法。
- 前記第1の有機シリコン前駆体、前記第2の有機シリコン前駆体、前記炭化水素混合物、および前記酸化剤は、前記処理チャンバーで反応混合物を形成し、前記反応混合物中の炭素原子対シリコン原子の比は、前記基板の処理の間に約3:1から約20:1まで増加する、請求項1に記載の方法。
- 基板を処理する方法であって、
シリコン、炭素、酸素、および水素を含む複数のガス混合物を処理チャンバーに提供するステップであって、前記ガス混合物の少なくとも2つはシリコン源であるステップと、
RF電力を前記処理チャンバーに印加することによってプラズマ処理条件を提供するステップと、
前記基板上に膜を堆積させるために前記ガス混合物の少なくとも一部分を反応させるステップと、
RF電力の印加の間に前記処理チャンバー中の炭素原子対シリコン原子の比を調節することによって前記堆積膜の部分の前記炭素含有量を調節するステップとを含む、方法。 - 前記処理チャンバー中の炭素原子対シリコン原子の前記比を調節するステップは、前記チャンバーを迂回するように前記ガス混合物の1つまたは複数をわきへそらすステップを含む、請求項6に記載の方法。
- 前記複数のガス混合物は、−Si−Cx−Si−結合を有する1つまたは複数の有機シリコン化合物を含む第1のガス混合物を含む、請求項6に記載の方法。
- 前記複数のガス混合物はさらに、熱的に不安定な基を有する1つまたは複数の炭化水素化合物を含む第2のガス混合物を含む、請求項8に記載の方法。
- 前記基板を後処理することによって前記堆積膜中に細孔を発生させるステップをさらに含む、請求項6に記載の方法。
- 前記処理チャンバー中の炭素原子対水素原子の前記比を調節するステップは、前記処理チャンバーを迂回するように前記1つまたは複数の炭化水素化合物をわきへそらすステップを含む、請求項9に記載の方法。
- 前記堆積膜の前記炭素含有量を調節するステップは、低い炭素含有量を持つ前記膜の酸化物のような部分を堆積させるステップ、前記膜の移行部分で前記炭素含有量を滑らかに増加させるステップ、および最大炭素含有量を持つ前記膜のオキシ炭化物のような部分を堆積させるステップを含む、請求項6に記載の方法。
- 処理チャンバーに配置される基板上に低k誘電体膜を堆積させる方法であって、
−Si−Cx−Si−または−Si−O−Cx−O−Si−結合を有する1つまたは複数の化合物を含み、約6:1未満の炭素原子対シリコン原子の比を有する第1のガス混合物を前記処理チャンバーに提供するステップと、
前記第1のガス混合物とともに、−Si−Cx−Si−または−Si−O−Cx−O−Si−結合を有する1つまたは複数の化合物を含み、約8:1より大きい炭素原子対シリコン原子の比を有する第2のガス混合物を前記処理チャンバーに提供するステップと、
1つまたは複数の炭化水素化合物を含む第3のガス混合物を前記処理チャンバーに提供するステップであって、前記1つまたは複数の炭化水素化合物の少なくとも1つは、熱的に不安定な基を有するステップと、
酸素源を含む第4のガス混合物を前記処理チャンバーに提供するステップと、
前記基板上に膜を堆積させるためにRF電力を印加し、前記ガス混合物の少なくとも一部分を反応させるステップと、
RF電力を印加している間に、前記膜中の炭素の堆積速度を変化させるために炭素を含有する前記ガス混合物の1つまたは複数の量を調節するステップと、
前記膜の誘電率を下げるために前記堆積膜を後処理するステップとを含む、方法。 - −Si−Cx−Si−または−Si−O−Cx−O−Si−結合を有する前記1つまたは複数の化合物は、ビス(トリエトキシシリル)メタン(C13H32O6Si2)、テトラメチル−1,3−ジシラシクロブタン(C6H16Si2)、テトラメチル−2,5−ジシラ−1−オキサシクロペンタン、テトラメチルジシラフラン(C6H16OSi2)、およびビス(トリメチルシロキシ)エタン(C8H22O2Si2)から成る群から各々選択される、請求項13に記載の方法。
- 前記堆積膜を後処理するステップは、より高い炭素含有量を有する前記膜の部分に細孔を発生させる、請求項13に記載の方法。
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PCT/US2009/049216 WO2010008930A2 (en) | 2008-07-15 | 2009-06-30 | Methods to promote adhesion between barrier layer and porous low-k film deposited from multiple liquid precursors |
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KR20110039556A (ko) | 2011-04-19 |
WO2010008930A2 (en) | 2010-01-21 |
WO2010008930A3 (en) | 2010-04-08 |
CN102099897A (zh) | 2011-06-15 |
US20100015816A1 (en) | 2010-01-21 |
TW201025425A (en) | 2010-07-01 |
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