KR100909700B1 - 탐침위치 제어장치 및 방법 - Google Patents

탐침위치 제어장치 및 방법 Download PDF

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Publication number
KR100909700B1
KR100909700B1 KR1020070050792A KR20070050792A KR100909700B1 KR 100909700 B1 KR100909700 B1 KR 100909700B1 KR 1020070050792 A KR1020070050792 A KR 1020070050792A KR 20070050792 A KR20070050792 A KR 20070050792A KR 100909700 B1 KR100909700 B1 KR 100909700B1
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KR
South Korea
Prior art keywords
probe
sample
sample surface
speed
atomic
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Expired - Fee Related
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KR1020070050792A
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English (en)
Korean (ko)
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KR20070114033A (ko
Inventor
마사유키 아베
마사히로 오타
요시아키 스기모토
겐이치 모리타
노리아키 오야부
세조 모리타
쿠스탄스 오스카
Original Assignee
가부시키가이샤 시마쓰세사쿠쇼
고꾸리쯔 다이가꾸 호우징 오사까 다이가꾸
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Publication of KR20070114033A publication Critical patent/KR20070114033A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
KR1020070050792A 2006-05-25 2007-05-25 탐침위치 제어장치 및 방법 Expired - Fee Related KR100909700B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00145881 2006-05-25
JP2006145881A JP4873460B2 (ja) 2006-05-25 2006-05-25 探針位置制御装置

Publications (2)

Publication Number Publication Date
KR20070114033A KR20070114033A (ko) 2007-11-29
KR100909700B1 true KR100909700B1 (ko) 2009-07-29

Family

ID=38748276

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070050792A Expired - Fee Related KR100909700B1 (ko) 2006-05-25 2007-05-25 탐침위치 제어장치 및 방법

Country Status (4)

Country Link
US (1) US7703314B2 (https=)
JP (1) JP4873460B2 (https=)
KR (1) KR100909700B1 (https=)
CN (1) CN100578679C (https=)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1978348A4 (en) * 2005-12-19 2012-11-28 Univ Kanazawa Nat Univ Corp Scanning probe microscope
US7712354B2 (en) * 2006-06-06 2010-05-11 Jeol Ltd. Method and apparatus for controlling Z-position of probe
JP4960724B2 (ja) * 2007-02-23 2012-06-27 パナソニック株式会社 赤外線センサおよびその製造方法
WO2009101991A1 (ja) * 2008-02-12 2009-08-20 Akita University 表面状態計測装置及び該装置を用いた表面状態計測方法
DE112008003880T5 (de) * 2008-05-27 2011-04-14 Sadik Hafizovic Vorrichtung zur Lock-In-Verstärkung eines Eingangssignals und Verfahren zur Erzeugung eines Referenzsignals für einen Lock-In-Verstärker
US20100100991A1 (en) * 2008-10-20 2010-04-22 Nanochip, Inc. Charge-Amp Based Piezoelectric Charge Microscopy (CPCM) Reading of Ferroelectric Bit Charge Signal
KR101990916B1 (ko) * 2009-12-01 2019-06-19 브루커 나노, 인코퍼레이션. 스캐닝 프로브 현미경을 작동하는 방법 및 장치
KR101891940B1 (ko) * 2010-03-19 2018-08-27 브루커 나노, 인코퍼레이션. 원자력 현미경을 작동시키는 방법
FR2959823B1 (fr) * 2010-05-07 2013-05-17 Centre Nat Rech Scient Microscope a force atomique fonctionnant en mode circulaire, dispositif permettant sa mise en oeuvre et procede de mesure
CN102346202A (zh) * 2010-07-29 2012-02-08 鸿富锦精密工业（深圳）有限公司 机械手
JP5592841B2 (ja) * 2011-06-16 2014-09-17 株式会社日立製作所 磁気力顕微鏡及びそれを用いた磁場観察方法
KR101417209B1 (ko) * 2011-07-07 2014-07-11 한양대학교 산학협력단 주사 탐침 현미경을 이용하여 획득된 데이터 값들에 존재하는 왜곡의 제거 장치 및 방법
US8490211B1 (en) 2012-06-28 2013-07-16 Western Digital Technologies, Inc. Methods for referencing related magnetic head microscopy scans to reduce processing requirements for high resolution imaging
US8989511B1 (en) 2012-06-28 2015-03-24 Western Digital Technologies, Inc. Methods for correcting for thermal drift in microscopy images
JP6185701B2 (ja) * 2012-10-15 2017-08-23 株式会社ミツトヨ 形状測定装置
US8860505B2 (en) 2013-02-04 2014-10-14 Zurich Instruments Ag Lock-in amplifier with phase-synchronous processing
US9075080B2 (en) 2013-03-15 2015-07-07 Bruker Nano, Inc. Method and apparatus for adaptive tracking using a scanning probe microscope
JP6274949B2 (ja) * 2014-04-04 2018-02-07 オリンパス株式会社 光ファイバスキャナ、照明装置および観察装置
KR101710337B1 (ko) * 2015-06-02 2017-02-28 파크시스템스 주식회사 조정 가능한 스캔 속도를 가지는 측정 장치 및 측정 방법
CN107850620B (zh) * 2015-06-25 2020-11-17 布鲁克纳米公司 用于扫描探针显微镜的样本容器保持器
KR101607606B1 (ko) * 2015-08-17 2016-03-31 한국표준과학연구원 원자간력 현미경의 측정 방법
JP6848640B2 (ja) * 2017-04-17 2021-03-24 株式会社島津製作所 走査型プローブ顕微鏡
CN107967693B (zh) * 2017-12-01 2021-07-09 北京奇虎科技有限公司 视频关键点处理方法、装置、计算设备及计算机存储介质
KR102216627B1 (ko) * 2019-09-17 2021-02-17 안동대학교 산학협력단 주사 탐침 현미경
DE102019131421A1 (de) * 2019-11-21 2021-05-27 Bruker Nano Gmbh Messvorrichtung für ein Rastersondenmikroskop und Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe mit einem Rastersondenmikroskop
JP7625971B2 (ja) * 2021-05-27 2025-02-04 株式会社島津製作所 走査型プローブ顕微鏡および制御方法
WO2025216036A1 (ja) * 2024-04-08 2025-10-16 株式会社島津製作所 走査型プローブ顕微鏡およびその制御方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002031592A (ja) 2000-07-18 2002-01-31 Kansai Tlo Kk 表面局在相互作用分光法
KR20050043885A (ko) * 2002-07-04 2005-05-11 유니버시티 오브 브리스톨 주사 탐침 현미경
US7013717B1 (en) 2001-12-06 2006-03-21 Veeco Instruments Inc. Manual control with force-feedback for probe microscopy-based force spectroscopy

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6169281B1 (en) * 1998-07-29 2001-01-02 International Business Machines Corporation Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions
JP4872074B2 (ja) 2005-04-08 2012-02-08 国立大学法人大阪大学 原子位置固定装置、原子位置固定方法、原子操作方法及び原子間力測定方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002031592A (ja) 2000-07-18 2002-01-31 Kansai Tlo Kk 表面局在相互作用分光法
US7013717B1 (en) 2001-12-06 2006-03-21 Veeco Instruments Inc. Manual control with force-feedback for probe microscopy-based force spectroscopy
KR20050043885A (ko) * 2002-07-04 2005-05-11 유니버시티 오브 브리스톨 주사 탐침 현미경

Also Published As

Publication number Publication date
JP4873460B2 (ja) 2012-02-08
KR20070114033A (ko) 2007-11-29
US20070272005A1 (en) 2007-11-29
JP2007315918A (ja) 2007-12-06
US7703314B2 (en) 2010-04-27
CN101083151A (zh) 2007-12-05
CN100578679C (zh) 2010-01-06

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