KR100904832B1 - 약액 공급장치 - Google Patents

약액 공급장치 Download PDF

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Publication number
KR100904832B1
KR100904832B1 KR1020070086566A KR20070086566A KR100904832B1 KR 100904832 B1 KR100904832 B1 KR 100904832B1 KR 1020070086566 A KR1020070086566 A KR 1020070086566A KR 20070086566 A KR20070086566 A KR 20070086566A KR 100904832 B1 KR100904832 B1 KR 100904832B1
Authority
KR
South Korea
Prior art keywords
seal
piston
chamber
cylinder
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070086566A
Other languages
English (en)
Korean (ko)
Other versions
KR20080048913A (ko
Inventor
타케오 야지마
Original Assignee
코가네이 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코가네이 코포레이션 filed Critical 코가네이 코포레이션
Publication of KR20080048913A publication Critical patent/KR20080048913A/ko
Application granted granted Critical
Publication of KR100904832B1 publication Critical patent/KR100904832B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/107—Pumps having fluid drive the fluid being actuated directly by a piston
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/12—Preparing bulk and homogeneous wafers
    • H10P90/126—Preparing bulk and homogeneous wafers by chemical etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Reciprocating Pumps (AREA)
KR1020070086566A 2006-11-29 2007-08-28 약액 공급장치 Expired - Fee Related KR100904832B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006322235A JP4547369B2 (ja) 2006-11-29 2006-11-29 薬液供給装置
JPJP-P-2006-00322235 2006-11-29

Publications (2)

Publication Number Publication Date
KR20080048913A KR20080048913A (ko) 2008-06-03
KR100904832B1 true KR100904832B1 (ko) 2009-06-25

Family

ID=39486661

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070086566A Expired - Fee Related KR100904832B1 (ko) 2006-11-29 2007-08-28 약액 공급장치

Country Status (5)

Country Link
US (1) US7841842B2 (https=)
JP (1) JP4547369B2 (https=)
KR (1) KR100904832B1 (https=)
CN (1) CN100578016C (https=)
TW (1) TW200823367A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101732113B1 (ko) * 2015-08-17 2017-05-04 이동민 진공 공정용 아이솔레이션 밸브

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4585563B2 (ja) * 2007-12-03 2010-11-24 株式会社コガネイ 薬液供給装置およびポンプ組立体
US20090317028A1 (en) * 2008-06-24 2009-12-24 Larry Castleman Seal assembly in situ lifetime measurement
US8264347B2 (en) * 2008-06-24 2012-09-11 Trelleborg Sealing Solutions Us, Inc. Seal system in situ lifetime measurement
KR100998602B1 (ko) * 2008-08-29 2010-12-07 씨앤지하이테크 주식회사 약액 이송장치
EP2531729B1 (en) * 2010-02-02 2020-03-04 Dajustco Ip Holdings Inc. Diaphragm pump with hydraulic fluid control system
JP5114527B2 (ja) * 2010-04-20 2013-01-09 株式会社コガネイ 液体供給装置
JP5438611B2 (ja) 2010-07-09 2014-03-12 株式会社コガネイ 薬液供給装置
JP5535155B2 (ja) * 2011-09-05 2014-07-02 株式会社コガネイ 流路切換弁およびそれを用いた流動性材料の吐出制御装置
JP6438784B2 (ja) * 2015-02-03 2018-12-19 東京応化工業株式会社 ポンプおよび塗布装置
TWI626372B (zh) 2015-04-13 2018-06-11 徐郁輝 一種具摺層構造之可浮性儲水袋
KR200483917Y1 (ko) * 2015-09-09 2017-07-11 주식회사 디엠에스 약액토출장치
JP6709795B2 (ja) * 2016-07-05 2020-06-17 株式会社コガネイ チューブポンプ
KR101879177B1 (ko) * 2017-07-31 2018-07-17 (주)포톤 약액 공급 장치
JP7315963B2 (ja) * 2018-08-10 2023-07-27 株式会社フジキン 流体制御機器、流体制御機器の異常検知方法、異常検知装置、及び異常検知システム
US11960308B2 (en) 2018-08-10 2024-04-16 Fujikin, Incorporated Fluid control apparatus, fluid control device, and operation analysis system
KR102781539B1 (ko) * 2020-02-19 2025-03-17 주식회사 나래나노텍 약액 가압 장치, 및 이를 구비한 약액 공급 장치
CN111765061B (zh) * 2020-07-07 2022-03-29 鹏城实验室 压差驱动式吸排机构
CN113303305B (zh) * 2021-05-14 2022-02-11 北京百瑞盛田环保科技发展有限公司 一种施药监控方法、装置及系统
CA3248081A1 (en) 2022-04-14 2023-10-19 Viking Pump, Inc. EXPANDABLE INTERNAL LINING PUMP
CN116594266A (zh) * 2023-05-26 2023-08-15 宁波润华全芯微电子设备有限公司 一种显影液流速控制装置和方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
JPH1061558A (ja) * 1996-08-26 1998-03-03 Koganei Corp 薬液供給装置
JP2002089503A (ja) 2000-09-18 2002-03-27 Koganei Corp アクチュエータ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2613607A (en) * 1949-10-27 1952-10-14 Milton Roy Co Bellows pump
US2853015A (en) * 1955-01-11 1958-09-23 Pleuger Friedrich Wilhelm Diaphragm pump
US3318251A (en) * 1965-06-21 1967-05-09 Manton Gaulin Mfg Company Inc Method and apparatus for pumping fluid bodies
JPS4840169Y1 (https=) * 1970-02-26 1973-11-26
DE7303301U (de) * 1973-01-30 1974-04-04 Feluwa Schlesiger & Co Kg Membran-Kolbenpumpe
US4178133A (en) * 1977-04-14 1979-12-11 Binks Manufacturing Company Double-acting flexible tube pump
US4474540A (en) * 1982-09-10 1984-10-02 Pennwalt Corporation Tubular diaphragm pump
JPS63130973A (ja) * 1986-11-21 1988-06-03 Takeshi Hoya 弁装置構造
JPH03149371A (ja) * 1989-11-02 1991-06-25 Nippon Fuiidaa Kogyo Kk ダイヤフラムポンプ
US5165869A (en) * 1991-01-16 1992-11-24 Warren Rupp, Inc. Diaphragm pump
JPH1122648A (ja) * 1997-07-04 1999-01-26 Nissan Motor Co Ltd 燃料ポンプ
JP3461725B2 (ja) 1998-06-26 2003-10-27 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法
JP2002242842A (ja) * 2001-02-19 2002-08-28 Nikkiso Co Ltd ダイアフラムポンプ
JP4197107B2 (ja) 2002-07-18 2008-12-17 大日本印刷株式会社 塗工装置
JP4790311B2 (ja) * 2005-02-28 2011-10-12 株式会社鷺宮製作所 定量送液ポンプ
JP4603925B2 (ja) * 2005-04-13 2010-12-22 株式会社コガネイ 薬液供給装置
JP5060766B2 (ja) 2006-06-19 2012-10-31 株式会社コガネイ 薬液供給装置
JP4916793B2 (ja) * 2006-06-30 2012-04-18 株式会社鷺宮製作所 定量送液ポンプおよびそれを用いた薬液塗布装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
JPH1061558A (ja) * 1996-08-26 1998-03-03 Koganei Corp 薬液供給装置
JP2002089503A (ja) 2000-09-18 2002-03-27 Koganei Corp アクチュエータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101732113B1 (ko) * 2015-08-17 2017-05-04 이동민 진공 공정용 아이솔레이션 밸브

Also Published As

Publication number Publication date
TW200823367A (en) 2008-06-01
JP4547369B2 (ja) 2010-09-22
CN100578016C (zh) 2010-01-06
KR20080048913A (ko) 2008-06-03
TWI379946B (https=) 2012-12-21
JP2008133800A (ja) 2008-06-12
US7841842B2 (en) 2010-11-30
CN101191482A (zh) 2008-06-04
US20080138214A1 (en) 2008-06-12

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