TWI379946B - - Google Patents

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Publication number
TWI379946B
TWI379946B TW096129958A TW96129958A TWI379946B TW I379946 B TWI379946 B TW I379946B TW 096129958 A TW096129958 A TW 096129958A TW 96129958 A TW96129958 A TW 96129958A TW I379946 B TWI379946 B TW I379946B
Authority
TW
Taiwan
Prior art keywords
chamber
piston
diameter
pump
cylinder
Prior art date
Application number
TW096129958A
Other languages
English (en)
Chinese (zh)
Other versions
TW200823367A (en
Inventor
Takeo Yajima
Original Assignee
Koganei Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Ltd filed Critical Koganei Ltd
Publication of TW200823367A publication Critical patent/TW200823367A/zh
Application granted granted Critical
Publication of TWI379946B publication Critical patent/TWI379946B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/107—Pumps having fluid drive the fluid being actuated directly by a piston
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/12—Preparing bulk and homogeneous wafers
    • H10P90/126—Preparing bulk and homogeneous wafers by chemical etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Reciprocating Pumps (AREA)
TW096129958A 2006-11-29 2007-08-14 Drug liquid supply device TW200823367A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006322235A JP4547369B2 (ja) 2006-11-29 2006-11-29 薬液供給装置

Publications (2)

Publication Number Publication Date
TW200823367A TW200823367A (en) 2008-06-01
TWI379946B true TWI379946B (https=) 2012-12-21

Family

ID=39486661

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096129958A TW200823367A (en) 2006-11-29 2007-08-14 Drug liquid supply device

Country Status (5)

Country Link
US (1) US7841842B2 (https=)
JP (1) JP4547369B2 (https=)
KR (1) KR100904832B1 (https=)
CN (1) CN100578016C (https=)
TW (1) TW200823367A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI685613B (zh) * 2015-02-03 2020-02-21 日商東京應化工業股份有限公司 泵浦及塗佈裝置

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4585563B2 (ja) * 2007-12-03 2010-11-24 株式会社コガネイ 薬液供給装置およびポンプ組立体
US20090317028A1 (en) * 2008-06-24 2009-12-24 Larry Castleman Seal assembly in situ lifetime measurement
US8264347B2 (en) * 2008-06-24 2012-09-11 Trelleborg Sealing Solutions Us, Inc. Seal system in situ lifetime measurement
KR100998602B1 (ko) * 2008-08-29 2010-12-07 씨앤지하이테크 주식회사 약액 이송장치
EP2531729B1 (en) * 2010-02-02 2020-03-04 Dajustco Ip Holdings Inc. Diaphragm pump with hydraulic fluid control system
JP5114527B2 (ja) * 2010-04-20 2013-01-09 株式会社コガネイ 液体供給装置
JP5438611B2 (ja) 2010-07-09 2014-03-12 株式会社コガネイ 薬液供給装置
JP5535155B2 (ja) * 2011-09-05 2014-07-02 株式会社コガネイ 流路切換弁およびそれを用いた流動性材料の吐出制御装置
TWI626372B (zh) 2015-04-13 2018-06-11 徐郁輝 一種具摺層構造之可浮性儲水袋
KR101732113B1 (ko) * 2015-08-17 2017-05-04 이동민 진공 공정용 아이솔레이션 밸브
KR200483917Y1 (ko) * 2015-09-09 2017-07-11 주식회사 디엠에스 약액토출장치
JP6709795B2 (ja) * 2016-07-05 2020-06-17 株式会社コガネイ チューブポンプ
KR101879177B1 (ko) * 2017-07-31 2018-07-17 (주)포톤 약액 공급 장치
JP7315963B2 (ja) * 2018-08-10 2023-07-27 株式会社フジキン 流体制御機器、流体制御機器の異常検知方法、異常検知装置、及び異常検知システム
US11960308B2 (en) 2018-08-10 2024-04-16 Fujikin, Incorporated Fluid control apparatus, fluid control device, and operation analysis system
KR102781539B1 (ko) * 2020-02-19 2025-03-17 주식회사 나래나노텍 약액 가압 장치, 및 이를 구비한 약액 공급 장치
CN111765061B (zh) * 2020-07-07 2022-03-29 鹏城实验室 压差驱动式吸排机构
CN113303305B (zh) * 2021-05-14 2022-02-11 北京百瑞盛田环保科技发展有限公司 一种施药监控方法、装置及系统
CA3248081A1 (en) 2022-04-14 2023-10-19 Viking Pump, Inc. EXPANDABLE INTERNAL LINING PUMP
CN116594266A (zh) * 2023-05-26 2023-08-15 宁波润华全芯微电子设备有限公司 一种显影液流速控制装置和方法

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US2613607A (en) * 1949-10-27 1952-10-14 Milton Roy Co Bellows pump
US2853015A (en) * 1955-01-11 1958-09-23 Pleuger Friedrich Wilhelm Diaphragm pump
US3318251A (en) * 1965-06-21 1967-05-09 Manton Gaulin Mfg Company Inc Method and apparatus for pumping fluid bodies
JPS4840169Y1 (https=) * 1970-02-26 1973-11-26
DE7303301U (de) * 1973-01-30 1974-04-04 Feluwa Schlesiger & Co Kg Membran-Kolbenpumpe
US4178133A (en) * 1977-04-14 1979-12-11 Binks Manufacturing Company Double-acting flexible tube pump
US4474540A (en) * 1982-09-10 1984-10-02 Pennwalt Corporation Tubular diaphragm pump
JPS63130973A (ja) * 1986-11-21 1988-06-03 Takeshi Hoya 弁装置構造
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
JPH03149371A (ja) * 1989-11-02 1991-06-25 Nippon Fuiidaa Kogyo Kk ダイヤフラムポンプ
US5165869A (en) * 1991-01-16 1992-11-24 Warren Rupp, Inc. Diaphragm pump
JP3554115B2 (ja) * 1996-08-26 2004-08-18 株式会社コガネイ 薬液供給装置
JPH1122648A (ja) * 1997-07-04 1999-01-26 Nissan Motor Co Ltd 燃料ポンプ
JP3461725B2 (ja) 1998-06-26 2003-10-27 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法
JP2002089503A (ja) 2000-09-18 2002-03-27 Koganei Corp アクチュエータ
JP2002242842A (ja) * 2001-02-19 2002-08-28 Nikkiso Co Ltd ダイアフラムポンプ
JP4197107B2 (ja) 2002-07-18 2008-12-17 大日本印刷株式会社 塗工装置
JP4790311B2 (ja) * 2005-02-28 2011-10-12 株式会社鷺宮製作所 定量送液ポンプ
JP4603925B2 (ja) * 2005-04-13 2010-12-22 株式会社コガネイ 薬液供給装置
JP5060766B2 (ja) 2006-06-19 2012-10-31 株式会社コガネイ 薬液供給装置
JP4916793B2 (ja) * 2006-06-30 2012-04-18 株式会社鷺宮製作所 定量送液ポンプおよびそれを用いた薬液塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI685613B (zh) * 2015-02-03 2020-02-21 日商東京應化工業股份有限公司 泵浦及塗佈裝置

Also Published As

Publication number Publication date
KR100904832B1 (ko) 2009-06-25
TW200823367A (en) 2008-06-01
JP4547369B2 (ja) 2010-09-22
CN100578016C (zh) 2010-01-06
KR20080048913A (ko) 2008-06-03
JP2008133800A (ja) 2008-06-12
US7841842B2 (en) 2010-11-30
CN101191482A (zh) 2008-06-04
US20080138214A1 (en) 2008-06-12

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees