CN100578016C - 药液供给装置 - Google Patents

药液供给装置 Download PDF

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Publication number
CN100578016C
CN100578016C CN200710147595A CN200710147595A CN100578016C CN 100578016 C CN100578016 C CN 100578016C CN 200710147595 A CN200710147595 A CN 200710147595A CN 200710147595 A CN200710147595 A CN 200710147595A CN 100578016 C CN100578016 C CN 100578016C
Authority
CN
China
Prior art keywords
chamber
piston
pump
cylinder
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200710147595A
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English (en)
Chinese (zh)
Other versions
CN101191482A (zh
Inventor
矢岛丈夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
K K KOGANEI
Koganei Corp
Original Assignee
K K KOGANEI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by K K KOGANEI filed Critical K K KOGANEI
Publication of CN101191482A publication Critical patent/CN101191482A/zh
Application granted granted Critical
Publication of CN100578016C publication Critical patent/CN100578016C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/107—Pumps having fluid drive the fluid being actuated directly by a piston
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/12—Preparing bulk and homogeneous wafers
    • H10P90/126—Preparing bulk and homogeneous wafers by chemical etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Reciprocating Pumps (AREA)
CN200710147595A 2006-11-29 2007-08-28 药液供给装置 Expired - Fee Related CN100578016C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006322235A JP4547369B2 (ja) 2006-11-29 2006-11-29 薬液供給装置
JP2006322235 2006-11-29

Publications (2)

Publication Number Publication Date
CN101191482A CN101191482A (zh) 2008-06-04
CN100578016C true CN100578016C (zh) 2010-01-06

Family

ID=39486661

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200710147595A Expired - Fee Related CN100578016C (zh) 2006-11-29 2007-08-28 药液供给装置

Country Status (5)

Country Link
US (1) US7841842B2 (https=)
JP (1) JP4547369B2 (https=)
KR (1) KR100904832B1 (https=)
CN (1) CN100578016C (https=)
TW (1) TW200823367A (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4585563B2 (ja) * 2007-12-03 2010-11-24 株式会社コガネイ 薬液供給装置およびポンプ組立体
US20090317028A1 (en) * 2008-06-24 2009-12-24 Larry Castleman Seal assembly in situ lifetime measurement
US8264347B2 (en) * 2008-06-24 2012-09-11 Trelleborg Sealing Solutions Us, Inc. Seal system in situ lifetime measurement
KR100998602B1 (ko) * 2008-08-29 2010-12-07 씨앤지하이테크 주식회사 약액 이송장치
EP2531729B1 (en) * 2010-02-02 2020-03-04 Dajustco Ip Holdings Inc. Diaphragm pump with hydraulic fluid control system
JP5114527B2 (ja) * 2010-04-20 2013-01-09 株式会社コガネイ 液体供給装置
JP5438611B2 (ja) 2010-07-09 2014-03-12 株式会社コガネイ 薬液供給装置
JP5535155B2 (ja) * 2011-09-05 2014-07-02 株式会社コガネイ 流路切換弁およびそれを用いた流動性材料の吐出制御装置
JP6438784B2 (ja) * 2015-02-03 2018-12-19 東京応化工業株式会社 ポンプおよび塗布装置
TWI626372B (zh) 2015-04-13 2018-06-11 徐郁輝 一種具摺層構造之可浮性儲水袋
KR101732113B1 (ko) * 2015-08-17 2017-05-04 이동민 진공 공정용 아이솔레이션 밸브
KR200483917Y1 (ko) * 2015-09-09 2017-07-11 주식회사 디엠에스 약액토출장치
JP6709795B2 (ja) * 2016-07-05 2020-06-17 株式会社コガネイ チューブポンプ
KR101879177B1 (ko) * 2017-07-31 2018-07-17 (주)포톤 약액 공급 장치
JP7315963B2 (ja) * 2018-08-10 2023-07-27 株式会社フジキン 流体制御機器、流体制御機器の異常検知方法、異常検知装置、及び異常検知システム
US11960308B2 (en) 2018-08-10 2024-04-16 Fujikin, Incorporated Fluid control apparatus, fluid control device, and operation analysis system
KR102781539B1 (ko) * 2020-02-19 2025-03-17 주식회사 나래나노텍 약액 가압 장치, 및 이를 구비한 약액 공급 장치
CN111765061B (zh) * 2020-07-07 2022-03-29 鹏城实验室 压差驱动式吸排机构
CN113303305B (zh) * 2021-05-14 2022-02-11 北京百瑞盛田环保科技发展有限公司 一种施药监控方法、装置及系统
CA3248081A1 (en) 2022-04-14 2023-10-19 Viking Pump, Inc. EXPANDABLE INTERNAL LINING PUMP
CN116594266A (zh) * 2023-05-26 2023-08-15 宁波润华全芯微电子设备有限公司 一种显影液流速控制装置和方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2613607A (en) * 1949-10-27 1952-10-14 Milton Roy Co Bellows pump
US2853015A (en) * 1955-01-11 1958-09-23 Pleuger Friedrich Wilhelm Diaphragm pump
US3318251A (en) * 1965-06-21 1967-05-09 Manton Gaulin Mfg Company Inc Method and apparatus for pumping fluid bodies
JPS4840169Y1 (https=) * 1970-02-26 1973-11-26
DE7303301U (de) * 1973-01-30 1974-04-04 Feluwa Schlesiger & Co Kg Membran-Kolbenpumpe
US4178133A (en) * 1977-04-14 1979-12-11 Binks Manufacturing Company Double-acting flexible tube pump
US4474540A (en) * 1982-09-10 1984-10-02 Pennwalt Corporation Tubular diaphragm pump
JPS63130973A (ja) * 1986-11-21 1988-06-03 Takeshi Hoya 弁装置構造
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
JPH03149371A (ja) * 1989-11-02 1991-06-25 Nippon Fuiidaa Kogyo Kk ダイヤフラムポンプ
US5165869A (en) * 1991-01-16 1992-11-24 Warren Rupp, Inc. Diaphragm pump
JP3554115B2 (ja) * 1996-08-26 2004-08-18 株式会社コガネイ 薬液供給装置
JPH1122648A (ja) * 1997-07-04 1999-01-26 Nissan Motor Co Ltd 燃料ポンプ
JP3461725B2 (ja) 1998-06-26 2003-10-27 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法
JP2002089503A (ja) 2000-09-18 2002-03-27 Koganei Corp アクチュエータ
JP2002242842A (ja) * 2001-02-19 2002-08-28 Nikkiso Co Ltd ダイアフラムポンプ
JP4197107B2 (ja) 2002-07-18 2008-12-17 大日本印刷株式会社 塗工装置
JP4790311B2 (ja) * 2005-02-28 2011-10-12 株式会社鷺宮製作所 定量送液ポンプ
JP4603925B2 (ja) * 2005-04-13 2010-12-22 株式会社コガネイ 薬液供給装置
JP5060766B2 (ja) 2006-06-19 2012-10-31 株式会社コガネイ 薬液供給装置
JP4916793B2 (ja) * 2006-06-30 2012-04-18 株式会社鷺宮製作所 定量送液ポンプおよびそれを用いた薬液塗布装置

Also Published As

Publication number Publication date
KR100904832B1 (ko) 2009-06-25
TW200823367A (en) 2008-06-01
JP4547369B2 (ja) 2010-09-22
KR20080048913A (ko) 2008-06-03
TWI379946B (https=) 2012-12-21
JP2008133800A (ja) 2008-06-12
US7841842B2 (en) 2010-11-30
CN101191482A (zh) 2008-06-04
US20080138214A1 (en) 2008-06-12

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Granted publication date: 20100106

Termination date: 20150828

EXPY Termination of patent right or utility model