KR100890986B1 - 변위계 및 변위 측정 방법 - Google Patents

변위계 및 변위 측정 방법 Download PDF

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Publication number
KR100890986B1
KR100890986B1 KR1020040019095A KR20040019095A KR100890986B1 KR 100890986 B1 KR100890986 B1 KR 100890986B1 KR 1020040019095 A KR1020040019095 A KR 1020040019095A KR 20040019095 A KR20040019095 A KR 20040019095A KR 100890986 B1 KR100890986 B1 KR 100890986B1
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South Korea
Prior art keywords
objective lens
displacement
unit
light
measurement
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KR1020040019095A
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English (en)
Korean (ko)
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KR20040083012A (ko
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아키시바유지
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가부시키가이샤 키엔스
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
KR1020040019095A 2003-03-20 2004-03-20 변위계 및 변위 측정 방법 Expired - Fee Related KR100890986B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00079122 2003-03-20
JP2003079122A JP4209709B2 (ja) 2003-03-20 2003-03-20 変位計

Publications (2)

Publication Number Publication Date
KR20040083012A KR20040083012A (ko) 2004-09-30
KR100890986B1 true KR100890986B1 (ko) 2009-03-27

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KR1020040019095A Expired - Fee Related KR100890986B1 (ko) 2003-03-20 2004-03-20 변위계 및 변위 측정 방법

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Country Link
US (1) US7242485B2 (https=)
JP (1) JP4209709B2 (https=)
KR (1) KR100890986B1 (https=)
CN (1) CN100401013C (https=)
TW (1) TW200506316A (https=)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5154134B2 (ja) * 2006-10-05 2013-02-27 株式会社キーエンス 光学式変位計、光学式変位測定方法、光学式変位測定プログラム
JP5314239B2 (ja) * 2006-10-05 2013-10-16 株式会社キーエンス 光学式変位計、光学式変位測定方法、光学式変位測定プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器
RU2009119425A (ru) * 2006-10-24 2010-11-27 Конинклейке Филипс Электроникс Н.В. (Nl) Система для формирования изображения объекта
US7990545B2 (en) * 2006-12-27 2011-08-02 Cambridge Research & Instrumentation, Inc. Surface measurement of in-vivo subjects using spot projector
JP5307459B2 (ja) * 2008-06-30 2013-10-02 株式会社 デクシス 透明容器内粉末中の異物検査方法及び異物検査装置
HUP0800433A2 (en) * 2008-07-15 2010-03-01 Femtonics Kft Laser scanning microscope for scanning along a 3d trajectory
JP2010216880A (ja) 2009-03-13 2010-09-30 Omron Corp 変位センサ
TWI404921B (zh) * 2009-07-29 2013-08-11 Metal Ind Res & Dev Ct A tuning fork contact sensing device and its sensing method
DE102010007729A1 (de) * 2010-02-12 2011-08-18 Leica Microsystems CMS GmbH, 35578 Vorrichtung zum Scannen eines Objekts, Verfahren zum Betreiben der Vorrichtung und Scanmikroskop
JP5637836B2 (ja) * 2010-12-17 2014-12-10 株式会社キーエンス 光学式変位計
TWI452296B (zh) * 2011-07-28 2014-09-11 Chroma Ate Inc The Operation System and Operation Method of LED Grain Scanning and Spotting
CN102324395B (zh) * 2011-08-09 2013-06-19 致茂电子(苏州)有限公司 Led晶粒扫描与点测的运作系统及运作方法
EP2865003A1 (en) * 2012-06-26 2015-04-29 Kla-Tencor Corporation Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
JP5674050B2 (ja) * 2012-08-28 2015-02-18 横河電機株式会社 光学式変位計
CN103592454B (zh) * 2013-11-20 2016-07-06 沈阳工业大学 光栅速度测量方法及装置
JP6335495B2 (ja) * 2013-12-09 2018-05-30 パナソニック デバイスＳｕｎｘ株式会社 変位センサ
JP2015125177A (ja) 2013-12-25 2015-07-06 ソニー株式会社 顕微鏡システムおよびその画像データ転送方法
US9689892B2 (en) * 2014-03-20 2017-06-27 Shimadzu Corporation Scanning probe microscope
CN103940334B (zh) * 2014-04-08 2016-09-21 天津大学 动态二维光电显微镜
KR101692152B1 (ko) * 2015-05-22 2017-01-04 안동대학교 산학협력단 비점수차를 이용한 변위 센서 및 그 변위 측정방법
TWI563240B (en) * 2015-08-06 2016-12-21 Optical inspection apparatus
JP6588278B2 (ja) * 2015-09-01 2019-10-09 株式会社日立ハイテクサイエンス 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法
WO2017110837A1 (ja) * 2015-12-25 2017-06-29 株式会社キーエンス 共焦点変位計
US10341550B2 (en) 2016-11-28 2019-07-02 Anritsu Corporation End face inspection apparatus and focused image data acquisition method
JP6600292B2 (ja) * 2016-11-28 2019-10-30 アンリツ株式会社 端面検査装置とその合焦画像データ取得方法
JP6829992B2 (ja) 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
JP6829993B2 (ja) 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
JP7143057B2 (ja) 2016-12-28 2022-09-28 株式会社キーエンス 三次元測定装置
JP6859098B2 (ja) * 2016-12-28 2021-04-14 株式会社キーエンス 光走査高さ測定装置
CN108663353B (zh) 2017-03-31 2020-10-30 苏州星帆华镭光电科技有限公司 振动光路组件及具有该组件的激光诱导击穿光谱仪
JP6380622B2 (ja) * 2017-07-05 2018-08-29 ソニー株式会社 制御装置および制御方法
CN109211130B (zh) * 2018-09-18 2020-03-31 昆明北方红外技术股份有限公司 透镜中心厚度及透镜间隔的测量装置及方法
JP7219059B2 (ja) * 2018-11-09 2023-02-07 株式会社キーエンス 変位測定装置
JP7219057B2 (ja) * 2018-11-09 2023-02-07 株式会社キーエンス 変位測定装置
JP7219058B2 (ja) * 2018-11-09 2023-02-07 株式会社キーエンス 変位測定装置
CN109974832B (zh) * 2019-04-03 2021-04-02 浙江华章科技有限公司 一种高速摇振系统振幅的算法
JP7799983B2 (ja) * 2021-02-17 2026-01-16 株式会社島津製作所 フーリエ変換赤外分光光度計

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07294250A (ja) * 1994-04-28 1995-11-10 Keyence Corp 変位計
JPH1090606A (ja) * 1996-05-31 1998-04-10 Kovex Corp 走査形の共焦点顕微鏡

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2116872A5 (fr) * 1970-12-10 1972-07-21 Compteurs Comp D Perfectionnements aux dispositifs palpeurs optiques
US3847485A (en) * 1972-05-25 1974-11-12 Zygo Corp Optical noncontacting surface sensor for measuring distance and angle of a test surface
US3768910A (en) * 1972-05-25 1973-10-30 Zygo Corp Detecting the position of a surface by focus modulating the illuminating beam
US4359282A (en) * 1980-11-17 1982-11-16 Ampex Corporation Optical measuring method and apparatus
US4596444A (en) * 1983-07-05 1986-06-24 Alps Electric Co., Ltd. Double cantilever support construction for optical systems
US4732485A (en) * 1985-04-17 1988-03-22 Olympus Optical Co., Ltd. Optical surface profile measuring device
DE3806686A1 (de) * 1988-03-02 1989-09-14 Wegu Messtechnik Mehrkoordinatenmess- und -pruefeinrichtung
JP2511391B2 (ja) * 1991-12-04 1996-06-26 シーメンス アクチエンゲゼルシヤフト 光学式間隔センサ
JP3300803B2 (ja) 1993-10-14 2002-07-08 株式会社キーエンス 変位計及び変位測定方法、厚み計
JP3416740B2 (ja) 1994-04-28 2003-06-16 株式会社キーエンス 変位計
US5836869A (en) * 1994-12-13 1998-11-17 Olympus Optical Co., Ltd. Image tracking endoscope system
JP3840619B2 (ja) 1995-05-25 2006-11-01 株式会社キーエンス 変位計
JPH09304403A (ja) 1996-05-20 1997-11-28 Olympus Optical Co Ltd 走査型プローブ顕微鏡
US6590670B1 (en) * 1997-03-13 2003-07-08 Tsukuba Seiko Ltd. Method and apparatus for measuring heights of test parts of object to be measured
JP3564958B2 (ja) * 1997-08-07 2004-09-15 株式会社日立製作所 電子ビームを用いた検査方法及び検査装置
JP4410335B2 (ja) * 1999-04-21 2010-02-03 株式会社キーエンス 共焦点顕微鏡
DE10220824B4 (de) * 2001-05-14 2010-08-05 Robert Bosch Gmbh Optische Messvorrichtung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07294250A (ja) * 1994-04-28 1995-11-10 Keyence Corp 変位計
JPH1090606A (ja) * 1996-05-31 1998-04-10 Kovex Corp 走査形の共焦点顕微鏡

Also Published As

Publication number Publication date
CN100401013C (zh) 2008-07-09
CN1550754A (zh) 2004-12-01
JP4209709B2 (ja) 2009-01-14
TW200506316A (en) 2005-02-16
US20050030553A1 (en) 2005-02-10
TWI292814B (https=) 2008-01-21
US7242485B2 (en) 2007-07-10
KR20040083012A (ko) 2004-09-30
JP2004286598A (ja) 2004-10-14

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