KR100883131B1 - 구리-주석 합금 도금용 피로인산욕 - Google Patents
구리-주석 합금 도금용 피로인산욕 Download PDFInfo
- Publication number
- KR100883131B1 KR100883131B1 KR1020047020975A KR20047020975A KR100883131B1 KR 100883131 B1 KR100883131 B1 KR 100883131B1 KR 1020047020975 A KR1020047020975 A KR 1020047020975A KR 20047020975 A KR20047020975 A KR 20047020975A KR 100883131 B1 KR100883131 B1 KR 100883131B1
- Authority
- KR
- South Korea
- Prior art keywords
- plating
- copper
- bath
- tin alloy
- cyanogen
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/58—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of copper
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12708—Sn-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12708—Sn-base component
- Y10T428/12715—Next to Group IB metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12708—Sn-base component
- Y10T428/12722—Next to Group VIII metal-base component
Abstract
Description
No | 피페라진 | 에피클로로히드린 | 에틸렌글리콜 디실리시딜 에테르 | |||
mol | g | mol | g | mol | g | |
A-1 | 1.0 | 86.1 | 1.0 | 92.5 | 1.0 | 150.2 |
A-2 | 1.0 | 86.1 | 0.6 | 55.5 | 1.0 | 150.2 |
A-3 | 1.0 | 86.1 | 0.8 | 74.0 | 1.0 | 150.2 |
A-4 | 1.0 | 86.1 | 1.2 | 111.0 | 1.0 | 150.2 |
A-5 | 1.0 | 86.1 | 1.8 | 166.5 | 1.0 | 150.2 |
A-6 | 1.0 | 86.1 | 1.0 | 92.5 | 0.2 | 30.0 |
A-7 | 1.0 | 86.1 | 1.0 | 92.5 | 0.3 | 45.1 |
A-8 | 1.0 | 86.1 | 1.0 | 92.5 | 2.5 | 375.4 |
A-9 | 1.0 | 86.1 | 1.0 | 92.5 | 4.0 | 600.7 |
A-10 | 1.0 | 86.1 | 1.0 | 92.5 | - | - |
A-11 | 1.0 | 86.1 | - | - | 1.0 | 150.2 |
A-12 | 1.0 | 86.1 | 1.0 | 92.5 | 5.5 | 825.9 |
A-13 | 1.0 | 86.1 | 2.5 | 231.3 | 1.0 | 150.2 |
No | 첨가제(A) 용액 | 첨가제(B) | 첨가제(C) | 피로인산 칼륨 | 피로인산 구리 | 피로인산 제1주석 | 액 pH | 최적 광택 저류 밀도 | 최소광택전류밀도 | ||
종류 | 농도 (g/L)*1 | 농도 (g/L) | 종류 | 농도 (g/L) | 농도 g/L) | 농도 g/L)*2 | 농도 g/L)*2 | ||||
1 | A-1 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
2 | A-2 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | △ | ○ |
3 | A-3 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ○ | ◎ |
4 | A-4 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
5 | A-5 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
6 | A-6 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ○ | △ |
7 | A-7 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ○ |
8 | A-8 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
9 | A-9 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
10 | A-10 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | △ | × |
11 | A-11 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | × | △ |
12 | A-12 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ○ |
13 | A-13 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ○ | ◎ |
14 | - | - | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | × | × |
15 | A-1 | 0.003 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | △ | △ |
16 | A-1 | 0.007 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ○ | ○ |
17 | A-1 | 1.0 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
18 | A-1 | 3.0 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
19 | A-1 | 7.0 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
20 | A-1 | 9.8 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
21 | A-1 | 0.02 | 60 | - | - | 300 | 0.2 | 4.6 | 7.3 | ○ | ◎ |
22 | A-1 | 0.02 | 60 | b | 1.0 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
23 | A-1 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 2.0 | ◎ | △ |
24 | A-1 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 5.0 | ◎ | ○ |
25 | A-1 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 7.0 | ◎ | ◎ |
26 | A-1 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 8.0 | ◎ | ◎ |
27 | A-1 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 8.7 | ○ | ◎ |
28 | A-1 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 9.0 | △ | ◎ |
29 | A-1 | 0.02 | 60 | a | 0.05 | 300 | 0.2 | 4.6 | 10.0 | 도금욕에 침전이생겨 도금이불가능 | |
30 | A-1 | 0.02 | - | a | 0.05 | 300 | 0.2 | 4.6 | 7.3 | ◎ | ◎ |
31 | A-1 | 0.02 | 50 | a | 0.05 | 300 | 0.2 | 6.5 | 7.2 | ◎ | ◎ |
32 | A-1 | 0.02 | 25 | a | 0.05 | 300 | 0.4 | 7.0 | 7.2 | ◎ | ◎ |
33 | A-1 | 0.02 | 75 | a | 0.05 | 300 | 1.0 | 17 | 7.2 | ◎ | ◎ |
34 | A-1 | 0.02 | 90 | a | 0.05 | 300 | 0.4 | 7.0 | 7.2 | ◎ | ◎ |
35 | 일본공개공보 제10-102278호의 실시예 1에 따른 도금욕 | △ | × | ||||||||
36 | 일본공개공보 제 2001-295092호의 실시예 1에 따른 도금욕 | △ | × |
No. | 도금욕*1 | 색조 | 불량률 | 내식성 | 밀착성 | |
실시예 | 1 | 1 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 2 | 2 | 광택, 은백색 | △ | ◎ | ○ |
실시예 | 3 | 3 | 광택, 은백색 | ○ | ◎ | ○ |
실시예 | 4 | 4 | 광택, 은백색 | ◎ | ○ | ○ |
실시예 | 5 | 5 | 광택, 은백색 | ◎ | ○ | △ |
실시예 | 6 | 6 | 광택, 은백색 | △ | ◎ | ○ |
실시예 | 7 | 7 | 광택, 은백색 | ○ | ◎ | ○ |
실시예 | 8 | 8 | 광택, 은백색 | ◎ | ○ | ○ |
실시예 | 9 | 9 | 광택, 은백색 | ◎ | △ | △ |
비교예 | 10 | 10 | 광택, 백색에서 황백색 | × | ◎ | ○ |
비교예 | 11 | 11 | 광택, 백색에서 황백색 | × | ◎ | × |
실시예 | 12 | 12 | 광택, 은백색 | ○ | △ | △ |
실시예 | 13 | 13 | 광택, 은백색 | ○ | △ | △ |
비교예 | 14 | 14 | 무광택, 백색 | × | × | × |
실시예 | 15 | 15 | 광택, 은백색 | △ | ◎ | △ |
실시예 | 16 | 16 | 광택, 은백색 | ○ | ◎ | ○ |
실시예 | 17 | 17 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 18 | 18 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 19 | 19 | 광택, 은백색 | ◎ | ○ | ○ |
실시예 | 20 | 20 | 광택, 은백색 | ◎ | △ | △ |
실시예 | 21 | 21 | 광택, 은백색 | ○ | ◎ | ○ |
실시예 | 22 | 22 | 광택, 은색 | ◎ | ◎ | ○ |
실시예 | 23 | 23 | 광택, 은백색 | △ | ○ | ○ |
실시예 | 24 | 24 | 광택, 은백색 | ○ | ◎ | ○ |
실시예 | 25 | 25 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 26 | 26 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 27 | 27 | 광택, 은백색 | ○ | ◎ | ○ |
실시예 | 28 | 28 | 광택, 은백색 | △ | ○ | △ |
비교예 | 29 | 29 | 도금욕에 침전이 발생하여 도금이 불가능함 | |||
실시예 | 30 | 30 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 31 | 31 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 32 | 32 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 33 | 33 | 광택, 은백색 | ◎ | ◎ | ○ |
실시예 | 34 | 34 | 광택, 은백색 | ◎ | ◎ | ○ |
비교예 | 35 | 35 | 광택, 백색에서 황백색 | × | ◎ | ○ |
비교예 | 36 | 36 | 광택, 백색에서 황백색 | × | ◎ | ○ |
Claims (9)
- 아민 유도체, 에피할로히드린 및 글리시딜 에테르 화합물로 구성된 첨가제(A)를 포함하는 것을 특징으로 하는 무시안(cyanogen-free) 구리-주석 합금 도금용 피로인산욕.
- 제 1항에 있어서, 상기 아민 유도체는 암모니아(ammonia), 에틸렌디아민(ethylenediamine), 디에틸렌트리아민(diethylenetriamine), 피페라진(piperazine), n-프로필아민(n-propylamine), 1,2-프로판디아민(1, 2-propanediamine), 1,3-프로판디아민(1,3-propanediamine), 1-(2-아미노에틸)피페라진(1-(2-aminoethyl)piperazine), 3-디에틸아미노프로필아민(3-diethylaminopropylamine), 디메틸아민(dimethylamine), 헥사메틸렌테트라아민(hexamethylenetetramine), 테트라에틸렌펜타민(tetraethylenepentamine), 트리에탄올아민(triethanolamine), 헥사메틸렌디아민(hexamethylenediamine) 및 이소프로판올아민(isopropanolamine)으로 이루어진 군으로부터 선택된 하나 또는 둘 이상을 포함하는 것을 특징으로 하는 무시안(cyanogen-free) 구리-주석 합금 도금용 피로인산욕.
- 제 1항에 있어서, 상기 아민 유도체는 피페라진 또는 1-(2-아미노에틸)피페라진인 것을 특징으로 하는 무시안(cyanogen-free) 구리-주석 합금 도금용 피로인산욕.
- 제 1항에 있어서, 상기 첨가제(A)의 에피할로히드린과 글리시딜 에테르의 비는 상기 아민 유도체 1몰당 각각 에피할로히드린이 0.5 몰 내지 2 몰이고 글리시딜 에테르 화합물이 0.1 몰 내지 5 몰인 것을 특징으로 하는 무시안(cyanogen-free) 구리-주석 합금 도금용 피로인산욕.
- 제 1항에 있어서, 상기 첨가제(A) 내의 글리시딜 에테르 화합물은 둘 이상의 관능기를 갖는 다관능 글리시딜 에테르 화합물인 것을 특징으로 하는 무시안(cyanogen-free) 구리-주석 합금 도금용 피로인산욕.
- 제 1항에 있어서, 유기 술폰산, 유기술폰산염, 또는 유기술폰산 및 유기술폰산염으로 구성된 첨가제(B)를 추가로 포함하는 것을 특징으로 하는 무시안(cyanogen-free) 구리-주석 합금 도금용 피로인산욕.
- 제 1항에 있어서, 상기 도금욕은 pH가 3 내지 9인 것을 특징으로 하는 무시안(cyanogen-free) 구리-주석 합금 도금용 피로인산욕.
- 제 1항 내지 제 8항 중 어느 한 항에 기재된 무시안 구리-주석 합금 도금용 피로인산욕을 사용하여, 피도금물을 전기도금하는 것을 특징으로 하는 구리-주석 합금 도금물의 제조방법.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2002-00197597 | 2002-07-05 | ||
JP2002197597A JP4249438B2 (ja) | 2002-07-05 | 2002-07-05 | 銅―錫合金めっき用ピロリン酸浴 |
PCT/JP2003/006262 WO2004005528A2 (en) | 2002-07-05 | 2003-05-20 | Pyrophosphoric acid bath for use in copper-tin alloy plating |
Publications (2)
Publication Number | Publication Date |
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KR20050016622A KR20050016622A (ko) | 2005-02-21 |
KR100883131B1 true KR100883131B1 (ko) | 2009-02-10 |
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KR1020047020975A KR100883131B1 (ko) | 2002-07-05 | 2003-05-20 | 구리-주석 합금 도금용 피로인산욕 |
Country Status (13)
Country | Link |
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US (1) | US7150781B2 (ko) |
EP (1) | EP1540043B1 (ko) |
JP (1) | JP4249438B2 (ko) |
KR (1) | KR100883131B1 (ko) |
CN (1) | CN100480434C (ko) |
AT (1) | ATE499460T1 (ko) |
AU (1) | AU2003237637A1 (ko) |
BR (1) | BR0312416B1 (ko) |
DE (1) | DE60336145D1 (ko) |
ES (1) | ES2363703T3 (ko) |
HK (1) | HK1081239A1 (ko) |
TW (1) | TWI308938B (ko) |
WO (1) | WO2004005528A2 (ko) |
Cited By (1)
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KR20220101895A (ko) | 2021-01-12 | 2022-07-19 | 강원대학교산학협력단 | 항균성 향상을 위한 구리주석 합금 도금액 조성물 |
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TW200613586A (en) * | 2004-07-22 | 2006-05-01 | Rohm & Haas Elect Mat | Leveler compounds |
JP4712439B2 (ja) * | 2005-05-17 | 2011-06-29 | 学校法人早稲田大学 | めっき液、めっき膜及びその作製方法 |
CN100348709C (zh) * | 2005-05-20 | 2007-11-14 | 长兴开发科技股份有限公司 | 用于半导体铜制程的水相清洗组合物 |
EP1741804B1 (en) * | 2005-07-08 | 2016-04-27 | Rohm and Haas Electronic Materials, L.L.C. | Electrolytic copper plating method |
JP4811880B2 (ja) * | 2006-01-06 | 2011-11-09 | エントン インコーポレイテッド | 艶消し金属層を堆積するための電解液および工程 |
ATE453740T1 (de) * | 2007-02-14 | 2010-01-15 | Umicore Galvanotechnik Gmbh | Kupfer-zinn-elektrolyt und verfahren zur abscheidung von bronzeschichten |
JP5317433B2 (ja) * | 2007-06-06 | 2013-10-16 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | 酸性金合金めっき液 |
KR100830870B1 (ko) | 2007-08-22 | 2008-05-22 | (주)디에스이디 | 스크루바식 전착도장용 전착도료액 조성물 |
EP2103717B1 (de) * | 2008-02-29 | 2010-04-21 | ATOTECH Deutschland GmbH | Pyrophosphat-basiertes Bad zur Abscheidung von Zinn-Legierungsschichten |
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- 2003-05-20 AT AT03736007T patent/ATE499460T1/de not_active IP Right Cessation
- 2003-05-20 AU AU2003237637A patent/AU2003237637A1/en not_active Abandoned
- 2003-05-20 KR KR1020047020975A patent/KR100883131B1/ko active IP Right Grant
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- 2003-05-20 EP EP03736007A patent/EP1540043B1/en not_active Expired - Lifetime
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Also Published As
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JP2004035980A (ja) | 2004-02-05 |
HK1081239A1 (en) | 2006-05-12 |
AU2003237637A8 (en) | 2004-01-23 |
EP1540043A2 (en) | 2005-06-15 |
CN100480434C (zh) | 2009-04-22 |
BR0312416A (pt) | 2007-06-19 |
TWI308938B (en) | 2009-04-21 |
JP4249438B2 (ja) | 2009-04-02 |
WO2004005528A3 (en) | 2005-04-14 |
BR0312416B1 (pt) | 2012-09-18 |
US20050166790A1 (en) | 2005-08-04 |
AU2003237637A1 (en) | 2004-01-23 |
CN1665965A (zh) | 2005-09-07 |
US7150781B2 (en) | 2006-12-19 |
EP1540043B1 (en) | 2011-02-23 |
ATE499460T1 (de) | 2011-03-15 |
TW200413577A (en) | 2004-08-01 |
DE60336145D1 (de) | 2011-04-07 |
KR20050016622A (ko) | 2005-02-21 |
ES2363703T3 (es) | 2011-08-12 |
WO2004005528A2 (en) | 2004-01-15 |
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