KR100876257B1 - 광학적 측정 방법 및 그 장치 - Google Patents

광학적 측정 방법 및 그 장치 Download PDF

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Publication number
KR100876257B1
KR100876257B1 KR1020057000344A KR20057000344A KR100876257B1 KR 100876257 B1 KR100876257 B1 KR 100876257B1 KR 1020057000344 A KR1020057000344 A KR 1020057000344A KR 20057000344 A KR20057000344 A KR 20057000344A KR 100876257 B1 KR100876257 B1 KR 100876257B1
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South Korea
Prior art keywords
light
measurement object
transparent
back surface
optical system
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Expired - Lifetime
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KR1020057000344A
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English (en)
Korean (ko)
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KR20050035243A (ko
Inventor
마츠무라쥰이치
하야시마츠미
Original Assignee
도레 엔지니아린구 가부시키가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8908—Strip illuminator, e.g. light tube

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020057000344A 2002-07-08 2003-07-08 광학적 측정 방법 및 그 장치 Expired - Lifetime KR100876257B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002198074A JP4104924B2 (ja) 2002-07-08 2002-07-08 光学的測定方法およびその装置
JPJP-P-2002-00198074 2002-07-08
PCT/JP2003/008675 WO2004005902A1 (ja) 2002-07-08 2003-07-08 光学的測定方法およびその装置

Publications (2)

Publication Number Publication Date
KR20050035243A KR20050035243A (ko) 2005-04-15
KR100876257B1 true KR100876257B1 (ko) 2008-12-26

Family

ID=30112417

Family Applications (1)

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KR1020057000344A Expired - Lifetime KR100876257B1 (ko) 2002-07-08 2003-07-08 광학적 측정 방법 및 그 장치

Country Status (5)

Country Link
JP (1) JP4104924B2 (https=)
KR (1) KR100876257B1 (https=)
CN (1) CN100570342C (https=)
TW (1) TW200409912A (https=)
WO (1) WO2004005902A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7200190B2 (en) * 2003-06-30 2007-04-03 Motorola, Inc. Unbiased signal to interference ratio in wireless communications devices and methods therefor
JP4417205B2 (ja) * 2004-08-27 2010-02-17 大日本スクリーン製造株式会社 基板処理装置
JP5082552B2 (ja) * 2007-04-05 2012-11-28 コニカミノルタホールディングス株式会社 光学的測定装置及び光学的測定方法
KR101209857B1 (ko) * 2009-02-20 2012-12-10 삼성코닝정밀소재 주식회사 유리 표면 이물 검사 장치 및 방법
US7929129B2 (en) 2009-05-22 2011-04-19 Corning Incorporated Inspection systems for glass sheets
TWI485392B (zh) * 2010-02-08 2015-05-21 Ygk Corp Foreign body inspection device and inspection method
KR101685703B1 (ko) * 2010-02-25 2016-12-12 가부시끼가이샤 야마나시 기쥬쯔 고오보오 이물질 검사 장치 및 검사 방법
DE102011103003A1 (de) * 2011-05-24 2012-11-29 Lufthansa Technik Ag Verfahren und Vorrichtung zur Rissprüfung eines Flugzeug- oder Gasturbinen-Bauteils
JP2013140061A (ja) * 2012-01-02 2013-07-18 Yamanashi Gijutsu Kobo:Kk 透明平板基板の表裏異物の検出方法及びその方法を用いた異物検査装置
KR20150056713A (ko) 2013-11-15 2015-05-27 삼성전자주식회사 영상표시장치의 비파괴 검사 시스템 및 방법과 이를 위한 비파괴 검사 장치
EP3158284B1 (en) 2014-06-17 2022-03-16 Heraeus Quartz North America LLC Apparatus and method for heating and measuring of transparent cylindrical articles
JP7183155B2 (ja) * 2016-11-02 2022-12-05 コーニング インコーポレイテッド 透明基板上の欠陥部検査方法および装置
JP2018128326A (ja) * 2017-02-07 2018-08-16 大塚電子株式会社 光学スペクトル測定装置および光学スペクトル測定方法
CN107764841B (zh) * 2017-11-17 2024-03-01 仝人智能科技(江苏)有限公司 一种检测并区分透明玻璃盖板上下表面缺陷的装置及方法
KR102580487B1 (ko) * 2018-06-18 2023-09-21 주식회사 케이씨텍 패드 모니터링 장치 및 이를 포함하는 패드 모니터링 시스템, 패드 모니터링 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09258197A (ja) * 1996-03-18 1997-10-03 Hitachi Electron Eng Co Ltd ガラス基板の表裏欠陥識別方法
JPH1048144A (ja) * 1996-07-31 1998-02-20 Dainippon Printing Co Ltd ガラス基板検査装置
JP2000074849A (ja) * 1998-08-31 2000-03-14 Toshiba Corp 異物検出方法およびその装置
JP2001208702A (ja) * 2000-01-31 2001-08-03 Nippon Sheet Glass Co Ltd 欠点検査方法及び欠点検査装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130381A (en) * 1976-04-26 1977-11-01 Hitachi Ltd Device for detecting faulty part on plate surface
CN1008003B (zh) * 1985-04-01 1990-05-16 欧文斯-伊利诺衣公司 透明物体中折光缺陷的检测系统
JPH06281418A (ja) * 1993-03-24 1994-10-07 Asahi Glass Co Ltd 凹凸を有する板状透明体の光学的厚さ測定方法
US6396039B1 (en) * 1999-03-11 2002-05-28 Corning Incorporated Focusing filament for autofocus system
JP4599507B2 (ja) * 2000-08-23 2010-12-15 旭硝子株式会社 ガラス板の形状測定方法及び形状測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09258197A (ja) * 1996-03-18 1997-10-03 Hitachi Electron Eng Co Ltd ガラス基板の表裏欠陥識別方法
JPH1048144A (ja) * 1996-07-31 1998-02-20 Dainippon Printing Co Ltd ガラス基板検査装置
JP2000074849A (ja) * 1998-08-31 2000-03-14 Toshiba Corp 異物検出方法およびその装置
JP2001208702A (ja) * 2000-01-31 2001-08-03 Nippon Sheet Glass Co Ltd 欠点検査方法及び欠点検査装置

Also Published As

Publication number Publication date
JP2004037400A (ja) 2004-02-05
JP4104924B2 (ja) 2008-06-18
TW200409912A (en) 2004-06-16
KR20050035243A (ko) 2005-04-15
TWI320099B (https=) 2010-02-01
CN100570342C (zh) 2009-12-16
WO2004005902A1 (ja) 2004-01-15
CN1666100A (zh) 2005-09-07

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