KR100832630B1 - 무전해금도금액 - Google Patents
무전해금도금액 Download PDFInfo
- Publication number
- KR100832630B1 KR100832630B1 KR1020077006825A KR20077006825A KR100832630B1 KR 100832630 B1 KR100832630 B1 KR 100832630B1 KR 1020077006825 A KR1020077006825 A KR 1020077006825A KR 20077006825 A KR20077006825 A KR 20077006825A KR 100832630 B1 KR100832630 B1 KR 100832630B1
- Authority
- KR
- South Korea
- Prior art keywords
- compound
- gold
- plating solution
- plating
- hydrogen sulfite
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1635—Composition of the substrate
- C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
- C23C18/1642—Substrates other than metallic, e.g. inorganic or organic or non-conductive semiconductor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1651—Two or more layers only obtained by electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemically Coating (AREA)
Abstract
Description
실 시 예 | |||||
1 | 2 | 3 | 4 | ||
욕조성 | 금화합물 | 아황산금나트륨: 1g/L(금) | 염화금산나트륨: 1g/L(금) | 아황산금나트륨:1g/L(금) | 아황산금나트륨: 1g/L(금) |
첨가제 | 아황산수소나트륨:5g/L | 아황산수소나트륨:20g/L | 아황산수소나트륨:50g/L | 아황산수소나트륨:100g/L | |
첨가제 | 티오황산나트륨: 50mg/L | - | 티오황산나트륨:100mg/L | 티오황산나트륨: 75mg/L | |
안정제 | 아황산나트륨: 10g/L | 아황산나트륨: 20g/L | 아황산나트륨:10g/L | 아황산나트륨: 5g/ L | |
착화제 | 니트릴로3초산: 10g/L | 니트릴로3초산: 10g/L | 에틸렌디아민4초산:10g/L | 에틸렌디아민4초산:5g/L | |
pH완충제 | 인산수소2나트륨: 20g/ L | 인산3나트륨: 20g/L | 인산2수소나트륨:30g/L | 인산2수소나트륨:20g/L | |
도금조건 | pH | 7.5 | 7.5 | 7.5 | 7.5 |
처리온도(℃) | 80 | 80 | 80 | 80 | |
처리시간(min) | 20 | 20 | 20 | 20 | |
평가결과 | 막두께(㎛) | 0.05 | 0.05 | 0.05 | 0.05 |
공식(孔食) | 없음 | 없음 | 없음 | 없음 | |
땜납 밀착강도 | 2211 | 1955 | 2221 | 2248 | |
피막밀착성 | 박리없음 | 박리없음 | 박리없음 | 박리없음 |
실 시 예 | 비 교 예 | |||
5 | 1 | 2 | ||
욕조성 | 금화합물 | 염화금산나트륨:1g/L(금) | 아황산금나트륨:1g/L(금) | 시안화금칼륨:2g/L(금) |
첨가제 | 아황산수소나트륨:200g/L | - | - | |
첨가제 | - | - | - | |
안정제 | 아황산나트륨:10g/L | 아황산나트륨:10g/L | 구연산:30g/L | |
착화제 | 니트릴로3초산:20g/L | 에틸렌디아민4초산: 10g/L | 에틸렌디아민4초산:10g/L | |
pH완충제 | 인산수소2나트륨:30g/ L | 인산2수소나트륨:30g/L | - | |
도금조건 | pH | 7.5 | 7.5 | 5.0 |
처리온도(℃) | 80 | 80 | 90 | |
처리시간(min) | 20 | 20 | 5 | |
평가결과 | 막두께(㎛) | 0.05 | 0.05 | 0.05 |
공식(孔食) | 없음 | 있음 | 있음 | |
땜납 밀착강도 | 1972 | 1609 | 1506 | |
피막밀착성 | 박리없음 | 박리있음 | 박리있음 |
Claims (5)
- 비시안계 수용성 금화합물, 및 아황산 수소화합물을 함유하는 것을 특징으로 하는 치환형 무전해금도금액.
- 제 1 항에 있어서, 티오 황산화합물을 더 함유하는 것을 특징으로 하는 치환형 무전해금도금액.
- 제 1 항 또는 제 2 항에 있어서, 아미노 카르본산화합물을 더 함유하는 것을 특징으로 하는 치환형 무전해금도금액.
- 제 1 항 또는 제 2 항에 기재된 치환형 무전해도금액을 이용하여 제작된 것을 특징으로 하는 금 도금물.
- 제 3 항에 기재된 치환형 무전해도금액을 이용하여 제작된 것을 특징으로 하는 금 도금물.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2004-00330036 | 2004-11-15 | ||
JP2004330036 | 2004-11-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070046195A KR20070046195A (ko) | 2007-05-02 |
KR100832630B1 true KR100832630B1 (ko) | 2008-05-27 |
Family
ID=36336320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020077006825A KR100832630B1 (ko) | 2004-11-15 | 2005-08-22 | 무전해금도금액 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7396394B2 (ko) |
EP (1) | EP1813696B1 (ko) |
JP (1) | JP3945814B2 (ko) |
KR (1) | KR100832630B1 (ko) |
CN (1) | CN1993499B (ko) |
HK (1) | HK1104934A1 (ko) |
TW (1) | TWI306906B (ko) |
WO (1) | WO2006051637A1 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009102681A (ja) * | 2007-10-22 | 2009-05-14 | Ishihara Chem Co Ltd | 置換金メッキ浴及び当該金メッキ方法 |
CN102605359A (zh) * | 2011-01-25 | 2012-07-25 | 台湾上村股份有限公司 | 化学钯金镀膜结构及其制作方法、铜线或钯铜线接合的钯金镀膜封装结构及其封装工艺 |
CN102286736A (zh) * | 2011-08-29 | 2011-12-21 | 深圳市化讯应用材料有限公司 | 一种置换型化学镀金液 |
KR101444687B1 (ko) * | 2014-08-06 | 2014-09-26 | (주)엠케이켐앤텍 | 무전해 금도금액 |
CN108220934A (zh) * | 2018-01-22 | 2018-06-29 | 昆山成功环保科技有限公司 | 一种无氰化学浸金溶液 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010107989A (ko) * | 1999-10-07 | 2001-12-07 | 다나까 세이이찌로 | 금도금액 및 그 금도금액을 이용한 도금방법 |
KR20030002987A (ko) * | 2001-06-29 | 2003-01-09 | 니혼 엘렉트로플레이팅 엔지니어스 가부시키가이샤 | 치환금 도금액 |
JP2004250765A (ja) * | 2003-02-21 | 2004-09-09 | Murata Mfg Co Ltd | 金めっき液、及び電子部品の製造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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US3300328A (en) * | 1963-11-12 | 1967-01-24 | Clevite Corp | Electroless plating of gold |
GB1548887A (en) * | 1975-04-10 | 1979-07-18 | Johnson Matthey Co Ltd | Preparation of gold aompounds and their use in the electroplating of gold |
CN1003524B (zh) * | 1985-10-14 | 1989-03-08 | 株式会社日立制作所 | 无电浸镀金溶液 |
JP3030113B2 (ja) | 1991-04-12 | 2000-04-10 | エヌ・イーケムキャット株式会社 | 置換無電解金めつき液 |
US5232492A (en) * | 1992-01-23 | 1993-08-03 | Applied Electroless Concepts Inc. | Electroless gold plating composition |
DE630991T1 (de) * | 1992-11-25 | 1995-07-13 | Kanto Kagaku | Stromloses goldbeschichtungsbad. |
US5318621A (en) * | 1993-08-11 | 1994-06-07 | Applied Electroless Concepts, Inc. | Plating rate improvement for electroless silver and gold plating |
JPH08291389A (ja) | 1995-04-18 | 1996-11-05 | Hitachi Chem Co Ltd | 非シアン置換金めっき液及びこの液を用いた金めっき方法 |
JP3566498B2 (ja) | 1997-05-14 | 2004-09-15 | 株式会社大和化成研究所 | 置換金めっき浴 |
US5935306A (en) * | 1998-02-10 | 1999-08-10 | Technic Inc. | Electroless gold plating bath |
JP2000357671A (ja) * | 1999-04-13 | 2000-12-26 | Sharp Corp | 金属配線の製造方法 |
JP3994279B2 (ja) * | 2002-10-21 | 2007-10-17 | 奥野製薬工業株式会社 | 無電解金めっき液 |
JP4299300B2 (ja) * | 2003-06-05 | 2009-07-22 | 日鉱金属株式会社 | 無電解金めっき液 |
WO2006006367A1 (ja) * | 2004-07-09 | 2006-01-19 | Nippon Mining & Mrtals Co., Ltd. | 無電解金めっき液 |
-
2005
- 2005-08-22 KR KR1020077006825A patent/KR100832630B1/ko active IP Right Grant
- 2005-08-22 WO PCT/JP2005/015229 patent/WO2006051637A1/ja active Application Filing
- 2005-08-22 JP JP2006544784A patent/JP3945814B2/ja active Active
- 2005-08-22 CN CN2005800260775A patent/CN1993499B/zh active Active
- 2005-08-22 US US11/632,815 patent/US7396394B2/en active Active
- 2005-08-22 EP EP05780518.6A patent/EP1813696B1/en active Active
- 2005-08-31 TW TW094129821A patent/TWI306906B/zh active
-
2007
- 2007-09-14 HK HK07110030.4A patent/HK1104934A1/xx unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010107989A (ko) * | 1999-10-07 | 2001-12-07 | 다나까 세이이찌로 | 금도금액 및 그 금도금액을 이용한 도금방법 |
KR20030002987A (ko) * | 2001-06-29 | 2003-01-09 | 니혼 엘렉트로플레이팅 엔지니어스 가부시키가이샤 | 치환금 도금액 |
JP2004250765A (ja) * | 2003-02-21 | 2004-09-09 | Murata Mfg Co Ltd | 金めっき液、及び電子部品の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200615398A (en) | 2006-05-16 |
EP1813696A4 (en) | 2011-08-24 |
EP1813696B1 (en) | 2018-12-26 |
JP3945814B2 (ja) | 2007-07-18 |
WO2006051637A1 (ja) | 2006-05-18 |
EP1813696A1 (en) | 2007-08-01 |
TWI306906B (en) | 2009-03-01 |
CN1993499A (zh) | 2007-07-04 |
US7396394B2 (en) | 2008-07-08 |
JPWO2006051637A1 (ja) | 2008-05-29 |
US20070209548A1 (en) | 2007-09-13 |
HK1104934A1 (en) | 2008-01-25 |
KR20070046195A (ko) | 2007-05-02 |
CN1993499B (zh) | 2010-09-29 |
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