WO2006051637A1 - 無電解金めっき液 - Google Patents
無電解金めっき液 Download PDFInfo
- Publication number
- WO2006051637A1 WO2006051637A1 PCT/JP2005/015229 JP2005015229W WO2006051637A1 WO 2006051637 A1 WO2006051637 A1 WO 2006051637A1 JP 2005015229 W JP2005015229 W JP 2005015229W WO 2006051637 A1 WO2006051637 A1 WO 2006051637A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plating solution
- compound
- gold plating
- electroless gold
- gold
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1635—Composition of the substrate
- C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
- C23C18/1642—Substrates other than metallic, e.g. inorganic or organic or non-conductive semiconductor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1651—Two or more layers only obtained by electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
Definitions
- the present invention relates to a plating technique, and particularly to a non-cyan substitutional electroless gold plating solution.
- Substitution-type electroless gold plating solutions are used as intermediate layers for the purpose of improving solder adhesion of printed circuit boards, terminals, etc., and reduction-type gold plating.
- Most of the gold plating liquids used for this purpose use cyanide compounds of poisons as gold compounds, but non-cyan gold plating liquids that do not use poisons are considered because of environmental and workability considerations. It has been demanded.
- Non-cyanide substitution-type electroless gold plating solutions using gold sulfite compounds see, for example, Patent Document 1 and Patent Document 2
- those using gold sulfite or chloroaurate for example, Patents such as those using gold sulfite, gold chloride, gold thiosulfate, or gold mercaptocarbonate (see, for example, Patent Document 4)
- Patents such as those using gold sulfite, gold chloride, gold thiosulfate, or gold mercaptocarbonate
- the electroless gold plating solutions described in these documents are non-cyanide, they can be used near neutrality with low toxicity, but have a problem that solder adhesion and film adhesion are poor.
- the film adhesion refers to the adhesion between the substitutional electroless gold plating film and the underlayer, and when the substitutional electroless gold plating film is used as an intermediate layer, the adhesion between the underlayer and the substrate. This is shown.
- Patent Document 1 Japanese Patent No. 3030113
- Patent Document 2 Japanese Patent Laid-Open No. 2003-13249
- Patent Document 3 JP-A-8-291389
- Patent Document 4 Japanese Patent Laid-Open No. 10-317157
- the present invention can be used in the vicinity of neutrality with low toxicity.
- Another object of the present invention is to provide a non-cyanide substitution type electroless gold plating solution having good film adhesion.
- the present invention is as follows.
- a substitutional electroless gold plating solution characterized by containing a non-cyan water-soluble gold compound and a bisulfite compound.
- the non-cyan water-soluble gold compound used in the plating solution of the present invention is not particularly limited as long as it is non-cyan and water-soluble, and is characterized by containing a bisulfite compound as an additive. Yes.
- non-cyanide substitution type electroless gold plating solution that can be used near neutrality with low toxicity and has good solder adhesion and coating adhesion.
- Non-cyanide substitution type that can improve the adhesion strength with lead-free solder, especially with low adhesion strength
- An electroless gold plating solution can be provided.
- substitutional electroless gold plating solution of the present invention is described in detail below.
- the electroless gold plating solution of the present invention is an aqueous solution of a non-cyan water-soluble gold compound and a hydrogen sulfite compound.
- the non-cyan water-soluble gold compound is not particularly limited as long as it is a non-cyan gold compound, but it is preferably gold sulfite, gold thiosulfate, gold thiocyanate, chloroauric acid, or theirs. A salt can be used.
- the electroless gold plating solution of the present invention contains these gold compounds.
- the gold concentration in the plating solution is preferably 0.1 to LOOgZL, more preferably 0.5 to 20 gZL. If the gold concentration is less than 0.1 lgZL, the replacement speed of the gold is remarkably slow.
- bisulfite compound bisulfite, for example, alkali metal salt, alkaline earth metal salt, ammonium salt, and the like can be used.
- Sodium bisulfite, hydrogen bisulfite, ammonium bisulfite ammonium are preferred.
- the bisulfite compound is preferably contained in an amount of 0.1 to 400 g / L, more preferably 5 to 200 g / L. If the concentration of bisulfite is less than 0.1 lgZL, the effect of preventing uneven corrosion of the underlying nickel is low. Even if it exceeds 400 gZL, the effect is saturated and there is no merit.
- the electroless gold plating solution of the present invention preferably further contains a thiosulfuric acid compound.
- the solder adhesion of the obtained plating film is improved.
- the thiosulfuric acid compound alkali metal salt, alkaline earth metal salt, ammonium salt, etc. of thiosulfuric acid can be used, such as sodium thiosulfate, potassium thiosulfate, ammonium thiosulfate, etc. Is preferred.
- the gold plating solution of the present invention preferably further contains an aminocarboxylic acid compound as a complexing agent.
- aminocarboxylic acid compounds include ethylene diamine tetraacetic acid and hydroxy. Pandiamin tetraacetic acid, diethylenetriaminepentaacetic acid, triethylenetetraminehexaacetic acid, dalysin, glycylglycine, glycylglycylglycine, dihydroxyethinoreglicin, iminodiacetic acid, hydroxyethyliminodiacetic acid, utilloiloacetic acid Examples thereof include tripropionic acid, or alkali metal salts, alkaline earth metal salts, and ammonium salts thereof.
- the concentration of the aminocarboxylic acid compound in the plating solution is preferably 0.1 to 200 gZL, more preferably 1 to LOOgZL. If the concentration of the aminocarboxylic acid compound is less than 0.1 lgZL, the effect as a complexing agent is insufficient.
- the electroless gold plating solution of the present invention preferably contains a sulfite compound as a stabilizer.
- a sulfite compound as the sulfite compound, sulfite, an alkali metal salt thereof, or an alkaline earth metal salt thereof is preferable. , Ammonium salt and the like.
- the concentration of the sulfurous acid compound in the plating solution is preferably 0.1 to 200 gZL, more preferably 1 to LOOgZL. If it is less than 0 lgZL, the effect as a stabilizer does not appear, and if it exceeds 200 gZL, the effect is saturated and there is no merit.
- the electroless gold plating solution of the present invention may be added with a phosphoric acid compound as a pH buffering agent, if necessary.
- the phosphoric acid compound phosphoric acid, pyrophosphoric acid, or an alkali metal salt, alkaline earth metal salt, ammonium salt, alkali metal dihydrogen phosphate, alkaline earth metal dihydrogen phosphate, diphosphoric acid phosphate
- alkali metal dihydrogen phosphate alkaline earth metal dihydrogen phosphate
- diphosphoric acid phosphate examples thereof include hydrogen ammonium, hydrogen alkali metal phosphate, metal alkali phosphate earth, metal hydrogen phosphate, and the like.
- the concentration of the phosphoric acid compound in the plating solution is preferably 0.1 to 200 gZL, more preferably 1 to LOOgZL.
- the gold plating solution of the present invention is preferably used at a bath temperature of 10 to 95 ° C, more preferably 50 to 85 ° C.
- the plating film plated with the gold plating solution of the present invention after performing the base nickel plating of the printed wiring board is not unevenly replaced with the base nickel plating film. It becomes a gold-coated film with good adhesion and film adhesion. Uneven corrosion mark is not seen on the nickel coating after the gold plating is removed.
- a plating solution of each composition shown in Table 1 was constructed as a substitutional electroless gold plating solution.
- As the covering material a copper-plated printed wiring board with a resist opening of 0.6 mm ⁇ was used for plating according to the following process.
- solder adhesion strength was measured using a 0.6mm ⁇ Sn—3.OAg-O.5Cu lead-free solder ball after a substitution-type electroless gold plating process, and a peak temperature of 250 ° C in a reflow oven. After heat-bonding with, use a heated bond-pull method with a bond tester 4000 manufactured by Digi Corporation.
- the plating film thickness was measured with a fluorescent X-ray film thickness meter SFT-3200 manufactured by Seiko Denshi Kogyo Co., Ltd. 7 pieces.
- Table 1 shows the evaluation results.
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemically Coating (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006544784A JP3945814B2 (ja) | 2004-11-15 | 2005-08-22 | 無電解金めっき液 |
CN2005800260775A CN1993499B (zh) | 2004-11-15 | 2005-08-22 | 无电解镀金液 |
US11/632,815 US7396394B2 (en) | 2004-11-15 | 2005-08-22 | Electroless gold plating solution |
EP05780518.6A EP1813696B1 (en) | 2004-11-15 | 2005-08-22 | Electroless gold plating solution |
HK07110030.4A HK1104934A1 (en) | 2004-11-15 | 2007-09-14 | Electroless gold plating solution |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-330036 | 2004-11-15 | ||
JP2004330036 | 2004-11-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006051637A1 true WO2006051637A1 (ja) | 2006-05-18 |
Family
ID=36336320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/015229 WO2006051637A1 (ja) | 2004-11-15 | 2005-08-22 | 無電解金めっき液 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7396394B2 (ja) |
EP (1) | EP1813696B1 (ja) |
JP (1) | JP3945814B2 (ja) |
KR (1) | KR100832630B1 (ja) |
CN (1) | CN1993499B (ja) |
HK (1) | HK1104934A1 (ja) |
TW (1) | TWI306906B (ja) |
WO (1) | WO2006051637A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009102681A (ja) * | 2007-10-22 | 2009-05-14 | Ishihara Chem Co Ltd | 置換金メッキ浴及び当該金メッキ方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102605359A (zh) * | 2011-01-25 | 2012-07-25 | 台湾上村股份有限公司 | 化学钯金镀膜结构及其制作方法、铜线或钯铜线接合的钯金镀膜封装结构及其封装工艺 |
CN102286736A (zh) * | 2011-08-29 | 2011-12-21 | 深圳市化讯应用材料有限公司 | 一种置换型化学镀金液 |
KR101444687B1 (ko) * | 2014-08-06 | 2014-09-26 | (주)엠케이켐앤텍 | 무전해 금도금액 |
CN108220934A (zh) * | 2018-01-22 | 2018-06-29 | 昆山成功环保科技有限公司 | 一种无氰化学浸金溶液 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004137589A (ja) * | 2002-10-21 | 2004-05-13 | Okuno Chem Ind Co Ltd | 無電解金めっき液 |
JP2004250765A (ja) * | 2003-02-21 | 2004-09-09 | Murata Mfg Co Ltd | 金めっき液、及び電子部品の製造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3300328A (en) * | 1963-11-12 | 1967-01-24 | Clevite Corp | Electroless plating of gold |
GB1548887A (en) * | 1975-04-10 | 1979-07-18 | Johnson Matthey Co Ltd | Preparation of gold aompounds and their use in the electroplating of gold |
CN1003524B (zh) * | 1985-10-14 | 1989-03-08 | 株式会社日立制作所 | 无电浸镀金溶液 |
JP3030113B2 (ja) | 1991-04-12 | 2000-04-10 | エヌ・イーケムキャット株式会社 | 置換無電解金めつき液 |
US5232492A (en) * | 1992-01-23 | 1993-08-03 | Applied Electroless Concepts Inc. | Electroless gold plating composition |
US5470381A (en) * | 1992-11-25 | 1995-11-28 | Kanto Kagaku Kabushiki Kaisha | Electroless gold plating solution |
US5318621A (en) * | 1993-08-11 | 1994-06-07 | Applied Electroless Concepts, Inc. | Plating rate improvement for electroless silver and gold plating |
JPH08291389A (ja) | 1995-04-18 | 1996-11-05 | Hitachi Chem Co Ltd | 非シアン置換金めっき液及びこの液を用いた金めっき方法 |
JP3566498B2 (ja) | 1997-05-14 | 2004-09-15 | 株式会社大和化成研究所 | 置換金めっき浴 |
US5935306A (en) * | 1998-02-10 | 1999-08-10 | Technic Inc. | Electroless gold plating bath |
JP2000357671A (ja) * | 1999-04-13 | 2000-12-26 | Sharp Corp | 金属配線の製造方法 |
US6565732B1 (en) * | 1999-10-07 | 2003-05-20 | Tanaka Kikinzoku Kogyo K.K. | Gold plating solution and plating process |
JP3482402B2 (ja) * | 2001-06-29 | 2003-12-22 | 日本エレクトロプレイテイング・エンジニヤース株式会社 | 置換金メッキ液 |
JP4299300B2 (ja) * | 2003-06-05 | 2009-07-22 | 日鉱金属株式会社 | 無電解金めっき液 |
US7390354B2 (en) * | 2004-07-09 | 2008-06-24 | Nikko Materials Co., Ltd. | Electroless gold plating solution |
-
2005
- 2005-08-22 US US11/632,815 patent/US7396394B2/en active Active
- 2005-08-22 KR KR1020077006825A patent/KR100832630B1/ko active IP Right Grant
- 2005-08-22 WO PCT/JP2005/015229 patent/WO2006051637A1/ja active Application Filing
- 2005-08-22 CN CN2005800260775A patent/CN1993499B/zh active Active
- 2005-08-22 JP JP2006544784A patent/JP3945814B2/ja active Active
- 2005-08-22 EP EP05780518.6A patent/EP1813696B1/en active Active
- 2005-08-31 TW TW094129821A patent/TWI306906B/zh active
-
2007
- 2007-09-14 HK HK07110030.4A patent/HK1104934A1/xx unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004137589A (ja) * | 2002-10-21 | 2004-05-13 | Okuno Chem Ind Co Ltd | 無電解金めっき液 |
JP2004250765A (ja) * | 2003-02-21 | 2004-09-09 | Murata Mfg Co Ltd | 金めっき液、及び電子部品の製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009102681A (ja) * | 2007-10-22 | 2009-05-14 | Ishihara Chem Co Ltd | 置換金メッキ浴及び当該金メッキ方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1813696B1 (en) | 2018-12-26 |
KR20070046195A (ko) | 2007-05-02 |
EP1813696A1 (en) | 2007-08-01 |
TWI306906B (en) | 2009-03-01 |
EP1813696A4 (en) | 2011-08-24 |
CN1993499A (zh) | 2007-07-04 |
CN1993499B (zh) | 2010-09-29 |
HK1104934A1 (en) | 2008-01-25 |
JP3945814B2 (ja) | 2007-07-18 |
US7396394B2 (en) | 2008-07-08 |
KR100832630B1 (ko) | 2008-05-27 |
TW200615398A (en) | 2006-05-16 |
JPWO2006051637A1 (ja) | 2008-05-29 |
US20070209548A1 (en) | 2007-09-13 |
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