KR100765376B1 - 와이어 본딩 방법 - Google Patents
와이어 본딩 방법 Download PDFInfo
- Publication number
- KR100765376B1 KR100765376B1 KR1020050121554A KR20050121554A KR100765376B1 KR 100765376 B1 KR100765376 B1 KR 100765376B1 KR 1020050121554 A KR1020050121554 A KR 1020050121554A KR 20050121554 A KR20050121554 A KR 20050121554A KR 100765376 B1 KR100765376 B1 KR 100765376B1
- Authority
- KR
- South Korea
- Prior art keywords
- bonding
- wire
- capillary
- bump
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005031701A JP4298665B2 (ja) | 2005-02-08 | 2005-02-08 | ワイヤボンディング方法 |
| JPJP-P-2005-00031701 | 2005-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20060090567A KR20060090567A (ko) | 2006-08-14 |
| KR100765376B1 true KR100765376B1 (ko) | 2007-10-10 |
Family
ID=36778943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020050121554A Expired - Fee Related KR100765376B1 (ko) | 2005-02-08 | 2005-12-12 | 와이어 본딩 방법 |
Country Status (4)
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005159267A (ja) * | 2003-10-30 | 2005-06-16 | Shinkawa Ltd | 半導体装置及びワイヤボンディング方法 |
| US7347352B2 (en) * | 2003-11-26 | 2008-03-25 | Kulicke And Soffa Industries, Inc. | Low loop height ball bonding method and apparatus |
| JP4509043B2 (ja) * | 2006-02-14 | 2010-07-21 | 株式会社新川 | スタッドバンプの形成方法 |
| JP4679427B2 (ja) * | 2006-04-24 | 2011-04-27 | 株式会社新川 | ボンディング装置のテールワイヤ切断方法及びプログラム |
| KR100833187B1 (ko) * | 2006-11-02 | 2008-05-28 | 삼성전자주식회사 | 반도체 패키지의 와이어 본딩방법 |
| JP4397408B2 (ja) * | 2007-09-21 | 2010-01-13 | 株式会社新川 | 半導体装置及びワイヤボンディング方法 |
| US8048720B2 (en) * | 2008-01-30 | 2011-11-01 | Kulicke And Soffa Industries, Inc. | Wire loop and method of forming the wire loop |
| JP4625858B2 (ja) * | 2008-09-10 | 2011-02-02 | 株式会社カイジョー | ワイヤボンディング方法、ワイヤボンディング装置及びワイヤボンディング制御プログラム |
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| MY181180A (en) * | 2011-09-09 | 2020-12-21 | Carsem M Sdn Bhd | Low loop wire bonding |
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| TWI543284B (zh) * | 2014-02-10 | 2016-07-21 | 新川股份有限公司 | 半導體裝置的製造方法以及打線裝置 |
| JP2014140074A (ja) * | 2014-04-17 | 2014-07-31 | Toshiba Corp | 半導体装置 |
| DE102014116956A1 (de) | 2014-11-19 | 2016-05-19 | Infineon Technologies Ag | Verfahren zum Bilden eines Bondpads und Bondpad |
| US10600756B1 (en) | 2017-02-15 | 2020-03-24 | United States Of America, As Represented By The Secretary Of The Navy | Wire bonding technique for integrated circuit board connections |
| WO2019232718A1 (en) | 2018-06-06 | 2019-12-12 | Texas Instruments Incorporated | Ball bond attachment for semiconductor die |
| US11145620B2 (en) * | 2019-03-05 | 2021-10-12 | Asm Technology Singapore Pte Ltd | Formation of bonding wire vertical interconnects |
| US12417997B2 (en) * | 2019-05-27 | 2025-09-16 | Shinkawa Ltd. | Wire bonding apparatus, method for manufacture of semiconductor device, and semiconductor device |
| WO2022013955A1 (ja) * | 2020-07-15 | 2022-01-20 | 株式会社新川 | ワイヤボンディング装置及び半導体装置の製造方法 |
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| US12374653B2 (en) * | 2021-06-07 | 2025-07-29 | Shinkawa Ltd. | Manufacturing method of semiconductor device and wire bonding apparatus |
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- 2005-11-30 TW TW094142037A patent/TW200629447A/zh not_active IP Right Cessation
- 2005-12-12 KR KR1020050121554A patent/KR100765376B1/ko not_active Expired - Fee Related
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2006
- 2006-02-03 US US11/347,479 patent/US20060175383A1/en not_active Abandoned
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| KR20040074912A (ko) * | 2003-02-17 | 2004-08-26 | 가부시키가이샤 신가와 | 범프 형성 방법 및 와이어본딩 방법 |
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Also Published As
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|---|---|
| TWI358096B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2012-02-11 |
| TW200629447A (en) | 2006-08-16 |
| KR20060090567A (ko) | 2006-08-14 |
| US20090194577A1 (en) | 2009-08-06 |
| US7934634B2 (en) | 2011-05-03 |
| JP4298665B2 (ja) | 2009-07-22 |
| JP2006222128A (ja) | 2006-08-24 |
| US20060175383A1 (en) | 2006-08-10 |
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