KR100721090B1 - 클로로실란류 중의 붕소 화합물의 분리 방법 및클로로실란류 증발용 조성물 - Google Patents

클로로실란류 중의 붕소 화합물의 분리 방법 및클로로실란류 증발용 조성물 Download PDF

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Publication number
KR100721090B1
KR100721090B1 KR1020000033126A KR20000033126A KR100721090B1 KR 100721090 B1 KR100721090 B1 KR 100721090B1 KR 1020000033126 A KR1020000033126 A KR 1020000033126A KR 20000033126 A KR20000033126 A KR 20000033126A KR 100721090 B1 KR100721090 B1 KR 100721090B1
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KR
South Korea
Prior art keywords
chlorosilanes
boron
ppb
naf
fluorine element
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KR1020000033126A
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English (en)
Korean (ko)
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KR20010049557A (ko
Inventor
슈이찌 미야오
두나오 와따나베
Original Assignee
신에쓰 가가꾸 고교 가부시끼가이샤
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Publication of KR20010049557A publication Critical patent/KR20010049557A/ko
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Publication of KR100721090B1 publication Critical patent/KR100721090B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification
    • C01B33/10784—Purification by adsorption

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
KR1020000033126A 1999-06-17 2000-06-16 클로로실란류 중의 붕소 화합물의 분리 방법 및클로로실란류 증발용 조성물 KR100721090B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP99-170817 1999-06-17
JP17081799A JP3734009B2 (ja) 1999-06-17 1999-06-17 クロロシラン類中のボロン化合物の分離方法及びクロロシラン類蒸発用組成物

Publications (2)

Publication Number Publication Date
KR20010049557A KR20010049557A (ko) 2001-06-15
KR100721090B1 true KR100721090B1 (ko) 2007-05-23

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Application Number Title Priority Date Filing Date
KR1020000033126A KR100721090B1 (ko) 1999-06-17 2000-06-16 클로로실란류 중의 붕소 화합물의 분리 방법 및클로로실란류 증발용 조성물

Country Status (3)

Country Link
JP (1) JP3734009B2 (zh)
KR (1) KR100721090B1 (zh)
TW (1) TW572848B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4588396B2 (ja) * 2003-09-25 2010-12-01 昭和電工株式会社 テトラフルオロシランの製造方法
JP4328303B2 (ja) * 2004-09-16 2009-09-09 株式会社サンリック 太陽光発電用多結晶シリコン原料および太陽光発電用シリコンウェーハ
JP4659798B2 (ja) 2007-09-05 2011-03-30 信越化学工業株式会社 トリクロロシランの製造方法
JP4714197B2 (ja) 2007-09-05 2011-06-29 信越化学工業株式会社 トリクロロシランの製造方法および多結晶シリコンの製造方法
JP4714196B2 (ja) 2007-09-05 2011-06-29 信越化学工業株式会社 トリクロロシランの製造方法および多結晶シリコンの製造方法
JP4714198B2 (ja) 2007-09-05 2011-06-29 信越化学工業株式会社 クロロシラン類の精製方法
JP5542026B2 (ja) 2010-10-27 2014-07-09 信越化学工業株式会社 クロロシラン類の精製方法
DE102014013250B4 (de) * 2014-09-08 2021-11-25 Christian Bauch Verfahren zur Aufreinigung halogenierter Oligosilane

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4224040A (en) 1977-12-05 1980-09-23 Smiel S.P.A. Process for the purification of chlorosilanes
US4755370A (en) 1982-03-18 1988-07-05 General Electric Company Purification of silicon halides
JPH0437602A (ja) * 1990-05-30 1992-02-07 Kawasaki Steel Corp シリコンの精製方法
JPH04300206A (ja) * 1991-03-28 1992-10-23 Osaka Titanium Co Ltd シリコン塩化物の精製方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4224040A (en) 1977-12-05 1980-09-23 Smiel S.P.A. Process for the purification of chlorosilanes
US4755370A (en) 1982-03-18 1988-07-05 General Electric Company Purification of silicon halides
JPH0437602A (ja) * 1990-05-30 1992-02-07 Kawasaki Steel Corp シリコンの精製方法
JPH04300206A (ja) * 1991-03-28 1992-10-23 Osaka Titanium Co Ltd シリコン塩化物の精製方法

Also Published As

Publication number Publication date
JP2001002407A (ja) 2001-01-09
TW572848B (en) 2004-01-21
JP3734009B2 (ja) 2006-01-11
KR20010049557A (ko) 2001-06-15

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