KR100577952B1 - 알칼리 토금속으로 이온교환 및 함침된 제올라이트 4ａ를 이용한 삼불화질소 가스의 정제방법 - Google Patents

알칼리 토금속으로 이온교환 및 함침된 제올라이트 4ａ를 이용한 삼불화질소 가스의 정제방법 Download PDF

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Publication number
KR100577952B1
KR100577952B1 KR1020040053044A KR20040053044A KR100577952B1 KR 100577952 B1 KR100577952 B1 KR 100577952B1 KR 1020040053044 A KR1020040053044 A KR 1020040053044A KR 20040053044 A KR20040053044 A KR 20040053044A KR 100577952 B1 KR100577952 B1 KR 100577952B1
Authority
KR
South Korea
Prior art keywords
nitrogen trifluoride
zeolite
earth metal
alkaline earth
gas
Prior art date
Application number
KR1020040053044A
Other languages
English (en)
Korean (ko)
Other versions
KR20060004067A (ko
Inventor
이장원
정우식
박용철
권익현
Original Assignee
주식회사 효성
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 효성 filed Critical 주식회사 효성
Priority to KR1020040053044A priority Critical patent/KR100577952B1/ko
Priority to EP05765888A priority patent/EP1778387B1/en
Priority to JP2007520233A priority patent/JP2008505831A/ja
Priority to US11/631,658 priority patent/US7637986B2/en
Priority to CNB2005800300503A priority patent/CN100503004C/zh
Priority to PCT/KR2005/002179 priority patent/WO2006006792A1/en
Priority to ES05765888T priority patent/ES2392979T3/es
Priority to TW094123240A priority patent/TWI295665B/zh
Publication of KR20060004067A publication Critical patent/KR20060004067A/ko
Application granted granted Critical
Publication of KR100577952B1 publication Critical patent/KR100577952B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0423—Beds in columns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
    • B01J20/16—Alumino-silicates
    • B01J20/18—Synthetic zeolitic molecular sieves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/102—Nitrogen

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Silicates, Zeolites, And Molecular Sieves (AREA)
KR1020040053044A 2004-07-08 2004-07-08 알칼리 토금속으로 이온교환 및 함침된 제올라이트 4ａ를 이용한 삼불화질소 가스의 정제방법 KR100577952B1 (ko)

Priority Applications (8)

Application Number Priority Date Filing Date Title
KR1020040053044A KR100577952B1 (ko) 2004-07-08 2004-07-08 알칼리 토금속으로 이온교환 및 함침된 제올라이트 4ａ를 이용한 삼불화질소 가스의 정제방법
EP05765888A EP1778387B1 (en) 2004-07-08 2005-07-07 Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite
JP2007520233A JP2008505831A (ja) 2004-07-08 2005-07-07 アルカリ土類金属でイオン交換および含浸されたゼオライトを用いた三フッ化窒素ガスの精製方法
US11/631,658 US7637986B2 (en) 2004-07-08 2005-07-07 Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite
CNB2005800300503A CN100503004C (zh) 2004-07-08 2005-07-07 使用碱土金属交换和浸渍的沸石精制三氟化氮气体的方法
PCT/KR2005/002179 WO2006006792A1 (en) 2004-07-08 2005-07-07 Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite
ES05765888T ES2392979T3 (es) 2004-07-08 2005-07-07 Procedimiento para refinar gas trifluoruro de nitrogeno usando zeolita sometida a intercambio iónico e impregnada con un metal alcalinotérreo
TW094123240A TWI295665B (en) 2004-07-08 2005-07-08 Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020040053044A KR100577952B1 (ko) 2004-07-08 2004-07-08 알칼리 토금속으로 이온교환 및 함침된 제올라이트 4ａ를 이용한 삼불화질소 가스의 정제방법

Publications (2)

Publication Number Publication Date
KR20060004067A KR20060004067A (ko) 2006-01-12
KR100577952B1 true KR100577952B1 (ko) 2006-05-10

Family

ID=37116405

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040053044A KR100577952B1 (ko) 2004-07-08 2004-07-08 알칼리 토금속으로 이온교환 및 함침된 제올라이트 4ａ를 이용한 삼불화질소 가스의 정제방법

Country Status (2)

Country Link
KR (1) KR100577952B1 (zh)
CN (1) CN100503004C (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9302214B2 (en) * 2014-08-22 2016-04-05 Air Products And Chemicals, Inc. Purification of nitrogen trifluoride by pressure swing absorption
CN106276828B (zh) * 2016-07-19 2018-07-31 浙江博瑞电子科技有限公司 一种吸附提纯三氟化氮的方法
CN110639470B (zh) * 2019-08-20 2022-08-05 中船(邯郸)派瑞特种气体股份有限公司 一种去除三氟化氮中二氟二氮、四氟二氮的吸附剂
CN110639233B (zh) * 2019-08-20 2021-12-07 中船重工（邯郸）派瑞特种气体有限公司 一种去除三氟化氮中二氟二氮、四氟二氮的方法
CN117138497A (zh) * 2023-06-12 2023-12-01 福建德尔科技股份有限公司 用于三氟化氮制备的热裂解装置及安全制备系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0798648B2 (ja) * 1990-01-10 1995-10-25 セントラル硝子株式会社 Ｎｆ３ガスの精製方法
US5976222A (en) * 1998-03-23 1999-11-02 Air Products And Chemicals, Inc. Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series
US6187077B1 (en) * 1998-04-17 2001-02-13 American Air Liquide Inc. Separation of CF4 and C2F6 from a perfluorocompound mixture
RU2206499C1 (ru) * 2002-02-26 2003-06-20 Игумнов Сергей Михайлович Способ очистки газообразного трифторида азота

Also Published As

Publication number Publication date
CN101014399A (zh) 2007-08-08
CN100503004C (zh) 2009-06-24
KR20060004067A (ko) 2006-01-12

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