KR100478883B1 - 반도체장치 - Google Patents

반도체장치 Download PDF

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Publication number
KR100478883B1
KR100478883B1 KR10-2002-0032775A KR20020032775A KR100478883B1 KR 100478883 B1 KR100478883 B1 KR 100478883B1 KR 20020032775 A KR20020032775 A KR 20020032775A KR 100478883 B1 KR100478883 B1 KR 100478883B1
Authority
KR
South Korea
Prior art keywords
semiconductor device
lead frame
metal block
lead
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR10-2002-0032775A
Other languages
English (en)
Korean (ko)
Other versions
KR20030032816A (ko
Inventor
요시하라히로유키
하야시켄이치
카와후지히사시
타지리미쓰구
Original Assignee
미쓰비시덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰비시덴키 가부시키가이샤 filed Critical 미쓰비시덴키 가부시키가이샤
Publication of KR20030032816A publication Critical patent/KR20030032816A/ko
Application granted granted Critical
Publication of KR100478883B1 publication Critical patent/KR100478883B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/70Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
    • H10W40/77Auxiliary members characterised by their shape
    • H10W40/778Auxiliary members characterised by their shape in encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/10Arrangements for heating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/811Multiple chips on leadframes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/531Shapes of wire connectors
    • H10W72/5366Shapes of wire connectors the bond wires having kinks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/541Dispositions of bond wires
    • H10W72/5449Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/541Dispositions of bond wires
    • H10W72/547Dispositions of multiple bond wires
    • H10W72/5473Dispositions of multiple bond wires multiple bond wires connected to a common bond pad
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/541Dispositions of bond wires
    • H10W72/547Dispositions of multiple bond wires
    • H10W72/5475Dispositions of multiple bond wires multiple bond wires connected to common bond pads at both ends of the wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/551Materials of bond wires
    • H10W72/552Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/551Materials of bond wires
    • H10W72/552Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5524Materials of bond wires comprising metals or metalloids, e.g. silver comprising aluminium [Al]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/921Structures or relative sizes of bond pads
    • H10W72/926Multiple bond pads having different sizes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/753Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
KR10-2002-0032775A 2001-10-19 2002-06-12 반도체장치 Expired - Lifetime KR100478883B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001321590A JP2003124437A (ja) 2001-10-19 2001-10-19 半導体装置
JPJP-P-2001-00321590 2001-10-19

Publications (2)

Publication Number Publication Date
KR20030032816A KR20030032816A (ko) 2003-04-26
KR100478883B1 true KR100478883B1 (ko) 2005-03-25

Family

ID=19138779

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2002-0032775A Expired - Lifetime KR100478883B1 (ko) 2001-10-19 2002-06-12 반도체장치

Country Status (3)

Country Link
US (1) US6734551B2 (cg-RX-API-DMAC7.html)
JP (1) JP2003124437A (cg-RX-API-DMAC7.html)
KR (1) KR100478883B1 (cg-RX-API-DMAC7.html)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3634735B2 (ja) * 2000-10-05 2005-03-30 三洋電機株式会社 半導体装置および半導体モジュール
US7145254B2 (en) * 2001-07-26 2006-12-05 Denso Corporation Transfer-molded power device and method for manufacturing transfer-molded power device
JP2003100986A (ja) * 2001-09-26 2003-04-04 Toshiba Corp 半導体装置
US7042730B2 (en) * 2002-07-31 2006-05-09 International Rectifier Corporation Non-isolated heatsink(s) for power modules
US7250672B2 (en) * 2003-11-13 2007-07-31 International Rectifier Corporation Dual semiconductor die package with reverse lead form
US7394158B2 (en) * 2004-10-21 2008-07-01 Siliconix Technology C.V. Solderable top metal for SiC device
US7812441B2 (en) * 2004-10-21 2010-10-12 Siliconix Technology C.V. Schottky diode with improved surge capability
JP4533152B2 (ja) * 2005-01-06 2010-09-01 三菱電機株式会社 半導体装置
US7834376B2 (en) 2005-03-04 2010-11-16 Siliconix Technology C. V. Power semiconductor switch
US9419092B2 (en) 2005-03-04 2016-08-16 Vishay-Siliconix Termination for SiC trench devices
US8368165B2 (en) 2005-10-20 2013-02-05 Siliconix Technology C. V. Silicon carbide Schottky diode
JP4227987B2 (ja) * 2005-12-01 2009-02-18 三菱電機株式会社 回転電機及びその製造方法
JP2007312560A (ja) * 2006-05-22 2007-11-29 Toyota Motor Corp インシュレータおよび回転電機
WO2008016619A1 (en) 2006-07-31 2008-02-07 Vishay-Siliconix Molybdenum barrier metal for sic schottky diode and process of manufacture
US8048714B2 (en) * 2006-08-11 2011-11-01 Vishay General Semiconductor Llc Semiconductor device and method for manufacturing a semiconductor device having improved heat dissipation capabilities
US8269338B2 (en) * 2006-08-10 2012-09-18 Vishay General Semiconductor Llc Semiconductor device having improved heat dissipation capabilities
JP5163055B2 (ja) * 2007-10-30 2013-03-13 三菱電機株式会社 電力半導体モジュール
JP5125758B2 (ja) * 2008-05-19 2013-01-23 三菱電機株式会社 樹脂封止型半導体装置及びその製造方法
US9054077B2 (en) * 2010-03-10 2015-06-09 Altera Corporation Package having spaced apart heat sink
DE102010044709B4 (de) * 2010-09-08 2015-07-02 Vincotech Holdings S.à.r.l. Leistungshalbleitermodul mit Metallsinterverbindungen sowie Herstellungsverfahren
US8802553B2 (en) * 2011-02-10 2014-08-12 Infineon Technologies Ag Method for mounting a semiconductor chip on a carrier
EP2677539B1 (en) * 2011-02-15 2017-07-05 Panasonic Intellectual Property Management Co., Ltd. Process for manufacture of a semiconductor device
KR101237566B1 (ko) * 2011-07-20 2013-02-26 삼성전기주식회사 전력 모듈 패키지 및 그 제조방법
JP2013070026A (ja) 2011-09-08 2013-04-18 Rohm Co Ltd 半導体装置、半導体装置の製造方法、半導体装置の実装構造、およびパワー用半導体装置
JP5354058B2 (ja) * 2012-05-15 2013-11-27 三菱電機株式会社 樹脂封止型半導体装置
JP2014099547A (ja) * 2012-11-15 2014-05-29 Mitsubishi Electric Corp 電力半導体モジュールおよびその製造方法
JP6261309B2 (ja) 2013-12-02 2018-01-17 三菱電機株式会社 パワーモジュール
JPWO2016117015A1 (ja) * 2015-01-20 2017-05-18 三菱電機株式会社 パワーモジュール
US10483178B2 (en) * 2017-01-03 2019-11-19 Infineon Technologies Ag Semiconductor device including an encapsulation material defining notches
US9978672B1 (en) 2017-05-24 2018-05-22 Infineon Technologies Ag Transistor package with terminals coupled via chip carrier
US10622274B2 (en) 2017-10-06 2020-04-14 Industrial Technology Research Institute Chip package
JP6939392B2 (ja) * 2017-10-17 2021-09-22 三菱電機株式会社 パワーモジュール
WO2022264982A1 (ja) * 2021-06-14 2022-12-22 ローム株式会社 絶縁モジュール
JP7603571B2 (ja) * 2021-11-29 2024-12-20 三菱電機株式会社 半導体装置
JP7615015B2 (ja) * 2021-12-07 2025-01-16 三菱電機株式会社 半導体装置
JP2023105499A (ja) * 2022-01-19 2023-07-31 三菱電機株式会社 半導体装置
JP7822300B2 (ja) * 2022-10-25 2026-03-02 三菱電機株式会社 電力用半導体装置

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JPS6153752A (ja) * 1984-08-24 1986-03-17 Hitachi Ltd リ−ドフレ−ム
JPH09129822A (ja) * 1995-10-26 1997-05-16 Mitsubishi Electric Corp 半導体装置
KR19990072605A (ko) * 1998-02-12 1999-09-27 가나이 쓰도무 반도체장치및그제법과그것을사용한전기기기
JP2000049184A (ja) * 1998-05-27 2000-02-18 Hitachi Ltd 半導体装置およびその製造方法
JP2002164492A (ja) * 2000-11-10 2002-06-07 Fairchild Korea Semiconductor Kk インテリジェントパワーモジュールパッケージ

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US5430331A (en) * 1993-06-23 1995-07-04 Vlsi Technology, Inc. Plastic encapsulated integrated circuit package having an embedded thermal dissipator
JP3516789B2 (ja) * 1995-11-15 2004-04-05 三菱電機株式会社 半導体パワーモジュール
WO1998024122A1 (en) * 1996-11-28 1998-06-04 Mitsubishi Denki Kabushiki Kaisha Semiconductor device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153752A (ja) * 1984-08-24 1986-03-17 Hitachi Ltd リ−ドフレ−ム
JPH09129822A (ja) * 1995-10-26 1997-05-16 Mitsubishi Electric Corp 半導体装置
KR19990072605A (ko) * 1998-02-12 1999-09-27 가나이 쓰도무 반도체장치및그제법과그것을사용한전기기기
JP2000049184A (ja) * 1998-05-27 2000-02-18 Hitachi Ltd 半導体装置およびその製造方法
JP2002164492A (ja) * 2000-11-10 2002-06-07 Fairchild Korea Semiconductor Kk インテリジェントパワーモジュールパッケージ

Also Published As

Publication number Publication date
US20030075783A1 (en) 2003-04-24
US6734551B2 (en) 2004-05-11
JP2003124437A (ja) 2003-04-25
KR20030032816A (ko) 2003-04-26

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