KR100374255B1 - 밀폐 콘테이너 - Google Patents

밀폐 콘테이너 Download PDF

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Publication number
KR100374255B1
KR100374255B1 KR1019950043130A KR19950043130A KR100374255B1 KR 100374255 B1 KR100374255 B1 KR 100374255B1 KR 1019950043130 A KR1019950043130 A KR 1019950043130A KR 19950043130 A KR19950043130 A KR 19950043130A KR 100374255 B1 KR100374255 B1 KR 100374255B1
Authority
KR
South Korea
Prior art keywords
lid
opening
container body
lock arm
vent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019950043130A
Other languages
English (en)
Korean (ko)
Other versions
KR960030362A (ko
Inventor
무라타마사나오
다나까쑤요시
모리타테루야
Original Assignee
신코덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신코덴키 가부시키가이샤 filed Critical 신코덴키 가부시키가이샤
Publication of KR960030362A publication Critical patent/KR960030362A/ko
Application granted granted Critical
Publication of KR100374255B1 publication Critical patent/KR100374255B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Packages (AREA)
KR1019950043130A 1995-01-09 1995-11-23 밀폐 콘테이너 Expired - Fee Related KR100374255B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-18464 1995-01-09
JP1846495A JP3180600B2 (ja) 1995-01-09 1995-01-09 密閉コンテナ

Publications (2)

Publication Number Publication Date
KR960030362A KR960030362A (ko) 1996-08-17
KR100374255B1 true KR100374255B1 (ko) 2003-05-09

Family

ID=11972366

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950043130A Expired - Fee Related KR100374255B1 (ko) 1995-01-09 1995-11-23 밀폐 콘테이너

Country Status (7)

Country Link
US (1) US5743424A (enExample)
EP (1) EP0721207B1 (enExample)
JP (1) JP3180600B2 (enExample)
KR (1) KR100374255B1 (enExample)
DE (1) DE69610126T2 (enExample)
SG (1) SG50395A1 (enExample)
TW (1) TW372325B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11154699A (ja) * 1997-11-21 1999-06-08 Shin Etsu Polymer Co Ltd 容器の封止構造
JPH11214479A (ja) 1998-01-23 1999-08-06 Tokyo Electron Ltd 基板処理装置及びその方法並びに基板搬送装置
US8083272B1 (en) * 1998-06-29 2011-12-27 Industrial Technology Research Institute Mechanically actuated air tight device for wafer carrier
US6354601B1 (en) 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
JP2000289795A (ja) * 1999-04-06 2000-10-17 Kakizaki Mamufacuturing Co Ltd 薄板収納・輸送容器
US6379731B1 (en) * 2000-02-18 2002-04-30 Fresh Express, Inc. Methods for vacuum gas flush treatment of fresh produce
US20040118849A1 (en) * 2002-12-24 2004-06-24 Rosaen Borje O. Lever system cover and method of use
JP4027837B2 (ja) 2003-04-28 2007-12-26 Ｔｄｋ株式会社 パージ装置およびパージ方法
JP4012190B2 (ja) 2004-10-26 2007-11-21 Ｔｄｋ株式会社 密閉容器の蓋開閉システム及び開閉方法
JP2009088437A (ja) * 2007-10-03 2009-04-23 Tokyo Electron Ltd 被処理体の導入ポート機構及び処理システム
TWI416655B (zh) * 2008-09-08 2013-11-21 Gallant Prec Machining Co Ltd Carrying plate holding device and sorting system
JP5715898B2 (ja) 2011-07-06 2015-05-13 ミライアル株式会社 基板収納容器
EP2863423B1 (en) 2012-06-14 2019-09-11 Murata Machinery, Ltd. Lid opening/closing device
SG11201408294QA (en) 2012-06-14 2015-01-29 Murata Machinery Ltd Lid-opening/closing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582624A (ja) * 1991-09-20 1993-04-02 Shinko Electric Co Ltd 機械式インターフエース装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249903B2 (enExample) * 1974-02-27 1977-12-20
JPS604455U (ja) * 1983-06-22 1985-01-12 株式会社東海理化電機製作所 燃料タンクのキヤツプ
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
US5000339A (en) * 1989-10-02 1991-03-19 Richard Wheat Flip-top gas cap
US5255783A (en) * 1991-12-20 1993-10-26 Fluoroware, Inc. Evacuated wafer container
DE9213054U1 (de) * 1992-09-28 1994-02-03 Siemens AG, 80333 München Transportbehälter für Halbleiterprodukte in Reinraum-Fertigungen
US5520300A (en) * 1993-10-18 1996-05-28 Stant Manufacturing Inc. Lockable pressure relief fuel cap

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582624A (ja) * 1991-09-20 1993-04-02 Shinko Electric Co Ltd 機械式インターフエース装置

Also Published As

Publication number Publication date
DE69610126T2 (de) 2001-05-10
JP3180600B2 (ja) 2001-06-25
EP0721207B1 (en) 2000-09-06
JPH08191100A (ja) 1996-07-23
DE69610126D1 (de) 2000-10-12
SG50395A1 (en) 1998-07-20
US5743424A (en) 1998-04-28
EP0721207A3 (enExample) 1996-08-21
KR960030362A (ko) 1996-08-17
TW372325B (en) 1999-10-21
EP0721207A2 (en) 1996-07-10

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