SG50395A1 - Sealable container - Google Patents

Sealable container

Info

Publication number
SG50395A1
SG50395A1 SG1996000059A SG1996000059A SG50395A1 SG 50395 A1 SG50395 A1 SG 50395A1 SG 1996000059 A SG1996000059 A SG 1996000059A SG 1996000059 A SG1996000059 A SG 1996000059A SG 50395 A1 SG50395 A1 SG 50395A1
Authority
SG
Singapore
Prior art keywords
sealable container
sealable
container
Prior art date
Application number
SG1996000059A
Other languages
English (en)
Inventor
Masanao Murata
Tsuyoshi Tanaka
Teruya Morita
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Publication of SG50395A1 publication Critical patent/SG50395A1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems
SG1996000059A 1995-01-09 1996-01-05 Sealable container SG50395A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1846495A JP3180600B2 (ja) 1995-01-09 1995-01-09 密閉コンテナ

Publications (1)

Publication Number Publication Date
SG50395A1 true SG50395A1 (en) 1998-07-20

Family

ID=11972366

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996000059A SG50395A1 (en) 1995-01-09 1996-01-05 Sealable container

Country Status (7)

Country Link
US (1) US5743424A (enExample)
EP (1) EP0721207B1 (enExample)
JP (1) JP3180600B2 (enExample)
KR (1) KR100374255B1 (enExample)
DE (1) DE69610126T2 (enExample)
SG (1) SG50395A1 (enExample)
TW (1) TW372325B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11154699A (ja) * 1997-11-21 1999-06-08 Shin Etsu Polymer Co Ltd 容器の封止構造
JPH11214479A (ja) 1998-01-23 1999-08-06 Tokyo Electron Ltd 基板処理装置及びその方法並びに基板搬送装置
US8083272B1 (en) * 1998-06-29 2011-12-27 Industrial Technology Research Institute Mechanically actuated air tight device for wafer carrier
US6354601B1 (en) 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
JP2000289795A (ja) * 1999-04-06 2000-10-17 Kakizaki Mamufacuturing Co Ltd 薄板収納・輸送容器
US6379731B1 (en) * 2000-02-18 2002-04-30 Fresh Express, Inc. Methods for vacuum gas flush treatment of fresh produce
US20040118849A1 (en) * 2002-12-24 2004-06-24 Rosaen Borje O. Lever system cover and method of use
JP4027837B2 (ja) 2003-04-28 2007-12-26 Ｔｄｋ株式会社 パージ装置およびパージ方法
JP4012190B2 (ja) 2004-10-26 2007-11-21 Ｔｄｋ株式会社 密閉容器の蓋開閉システム及び開閉方法
JP2009088437A (ja) * 2007-10-03 2009-04-23 Tokyo Electron Ltd 被処理体の導入ポート機構及び処理システム
TWI416655B (zh) * 2008-09-08 2013-11-21 Gallant Prec Machining Co Ltd Carrying plate holding device and sorting system
JP5715898B2 (ja) 2011-07-06 2015-05-13 ミライアル株式会社 基板収納容器
US9514973B2 (en) 2012-06-14 2016-12-06 Murata Machinery, Ltd. Lid-opening/closing device
JP5854136B2 (ja) 2012-06-14 2016-02-09 村田機械株式会社 蓋開閉装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249903B2 (enExample) * 1974-02-27 1977-12-20
JPS604455U (ja) * 1983-06-22 1985-01-12 株式会社東海理化電機製作所 燃料タンクのキヤツプ
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
US5000339A (en) * 1989-10-02 1991-03-19 Richard Wheat Flip-top gas cap
JP3084828B2 (ja) * 1991-09-20 2000-09-04 神鋼電機株式会社 機械式インターフェース装置
US5255783A (en) * 1991-12-20 1993-10-26 Fluoroware, Inc. Evacuated wafer container
DE9213054U1 (de) * 1992-09-28 1994-02-03 Siemens AG, 80333 München Transportbehälter für Halbleiterprodukte in Reinraum-Fertigungen
US5520300A (en) * 1993-10-18 1996-05-28 Stant Manufacturing Inc. Lockable pressure relief fuel cap

Also Published As

Publication number Publication date
TW372325B (en) 1999-10-21
KR100374255B1 (ko) 2003-05-09
JPH08191100A (ja) 1996-07-23
EP0721207B1 (en) 2000-09-06
KR960030362A (ko) 1996-08-17
US5743424A (en) 1998-04-28
EP0721207A3 (enExample) 1996-08-21
JP3180600B2 (ja) 2001-06-25
DE69610126D1 (de) 2000-10-12
DE69610126T2 (de) 2001-05-10
EP0721207A2 (en) 1996-07-10

Similar Documents

Publication Publication Date Title
AU127959S (en) Container
AU128369S (en) Container
AU129090S (en) Container
AU127962S (en) Container
AU130504S (en) Container
AU127757S (en) Container
SG50395A1 (en) Sealable container
GB2302533B (en) Sealable container
EP0757012A4 (en) CONTAINER
AU131152S (en) Container
EP0764589A3 (en) Container
AU129040S (en) Container
GB9512236D0 (en) Improved container
GB9519695D0 (en) Sealable container
CA75558S (en) Container
AU129091S (en) Container
GB2306161B (en) Improved container
CA76628S (en) Container
CA76797S (en) Container
CA77535S (en) Container
CA76099S (en) Container
CA76629S (en) Container
CA76887S (en) Container
CA75484S (en) Container
CA76882S (en) Container