KR100305308B1 - 반도체장치및그제조방법 - Google Patents

반도체장치및그제조방법 Download PDF

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Publication number
KR100305308B1
KR100305308B1 KR1019980048709A KR19980048709A KR100305308B1 KR 100305308 B1 KR100305308 B1 KR 100305308B1 KR 1019980048709 A KR1019980048709 A KR 1019980048709A KR 19980048709 A KR19980048709 A KR 19980048709A KR 100305308 B1 KR100305308 B1 KR 100305308B1
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KR
South Korea
Prior art keywords
layer
region
insulating film
film
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019980048709A
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English (en)
Korean (ko)
Other versions
KR19990087000A (ko
Inventor
유우이찌 히라노
야스오 야마구찌
시게또 마에가와
Original Assignee
다니구찌 이찌로오, 기타오카 다카시
미쓰비시덴키 가부시키가이샤
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Filing date
Publication date
Application filed by 다니구찌 이찌로오, 기타오카 다카시, 미쓰비시덴키 가부시키가이샤 filed Critical 다니구찌 이찌로오, 기타오카 다카시
Publication of KR19990087000A publication Critical patent/KR19990087000A/ko
Application granted granted Critical
Publication of KR100305308B1 publication Critical patent/KR100305308B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H10D30/6744—Monocrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • H10D30/0323—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon comprising monocrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions

Landscapes

  • Thin Film Transistor (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Drying Of Semiconductors (AREA)
KR1019980048709A 1998-05-06 1998-11-13 반도체장치및그제조방법 Expired - Fee Related KR100305308B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10123303A JPH11317527A (ja) 1998-05-06 1998-05-06 半導体装置及びその製造方法
JP98-123303 1998-05-06

Publications (2)

Publication Number Publication Date
KR19990087000A KR19990087000A (ko) 1999-12-15
KR100305308B1 true KR100305308B1 (ko) 2001-09-29

Family

ID=14857211

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980048709A Expired - Fee Related KR100305308B1 (ko) 1998-05-06 1998-11-13 반도체장치및그제조방법

Country Status (6)

Country Link
US (2) US6340829B1 (https=)
JP (1) JPH11317527A (https=)
KR (1) KR100305308B1 (https=)
DE (1) DE19853432A1 (https=)
FR (1) FR2778495B1 (https=)
TW (1) TW390036B (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6875640B1 (en) * 2000-06-08 2005-04-05 Micron Technology, Inc. Stereolithographic methods for forming a protective layer on a semiconductor device substrate and substrates including protective layers so formed
KR100366923B1 (ko) * 2001-02-19 2003-01-06 삼성전자 주식회사 에스오아이 기판 및 이의 제조방법
US6465313B1 (en) * 2001-07-05 2002-10-15 Advanced Micro Devices, Inc. SOI MOSFET with graded source/drain silicide
US20030134486A1 (en) * 2002-01-16 2003-07-17 Zhongze Wang Semiconductor-on-insulator comprising integrated circuitry
JP3539946B2 (ja) 2002-03-28 2004-07-07 沖電気工業株式会社 Ｓｏｉ構造を有する半導体装置の製造方法
JP2004039982A (ja) * 2002-07-05 2004-02-05 Mitsubishi Electric Corp 半導体装置
US6995438B1 (en) * 2003-10-01 2006-02-07 Advanced Micro Devices, Inc. Semiconductor device with fully silicided source/drain and damascence metal gate
US7397073B2 (en) * 2004-11-22 2008-07-08 International Business Machines Corporation Barrier dielectric stack for seam protection
US7244659B2 (en) * 2005-03-10 2007-07-17 Micron Technology, Inc. Integrated circuits and methods of forming a field effect transistor
US7528065B2 (en) * 2006-01-17 2009-05-05 International Business Machines Corporation Structure and method for MOSFET gate electrode landing pad
US7557002B2 (en) * 2006-08-18 2009-07-07 Micron Technology, Inc. Methods of forming transistor devices
US7989322B2 (en) 2007-02-07 2011-08-02 Micron Technology, Inc. Methods of forming transistors

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318779A (ja) 1987-06-22 1988-12-27 Sanyo Electric Co Ltd 半導体装置の製造方法
JPS6420663A (en) 1987-07-15 1989-01-24 Nec Corp Manufacture of semiconductor device
JPH01291467A (ja) * 1988-05-19 1989-11-24 Toshiba Corp 薄膜トランジスタ
US5258645A (en) * 1990-03-09 1993-11-02 Fujitsu Limited Semiconductor device having MOS transistor and a sidewall with a double insulator layer structure
US5151376A (en) * 1990-05-31 1992-09-29 Sgs-Thomson Microelectronics, Inc. Method of making polycrystalline silicon resistors for integrated circuits
US5424570A (en) * 1992-01-31 1995-06-13 Sgs-Thomson Microelectronics, Inc. Contact structure for improving photoresist adhesion on a dielectric layer
US5323047A (en) * 1992-01-31 1994-06-21 Sgs-Thomson Microelectronics, Inc. Structure formed by a method of patterning a submicron semiconductor layer
US5576556A (en) 1993-08-20 1996-11-19 Semiconductor Energy Laboratory Co., Ltd. Thin film semiconductor device with gate metal oxide and sidewall spacer
JPH06338601A (ja) * 1993-05-31 1994-12-06 Toshiba Corp 半導体装置及びその製造方法
US5719065A (en) 1993-10-01 1998-02-17 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device with removable spacers
US5428240A (en) * 1994-07-07 1995-06-27 United Microelectronics Corp. Source/drain structural configuration for MOSFET integrated circuit devices
TW333680B (en) * 1996-12-17 1998-06-11 Mos Electronics Taiwan Inc The processes for improving polysilicon & gate oxide quality inside programmable cell
JPH1168103A (ja) * 1997-08-22 1999-03-09 Mitsubishi Electric Corp 半導体装置の製造方法
US6174756B1 (en) 1997-09-30 2001-01-16 Siemens Aktiengesellschaft Spacers to block deep junction implants and silicide formation in integrated circuits
US5880006A (en) * 1998-05-22 1999-03-09 Vlsi Technology, Inc. Method for fabrication of a semiconductor device

Also Published As

Publication number Publication date
KR19990087000A (ko) 1999-12-15
US20020020876A1 (en) 2002-02-21
FR2778495A1 (fr) 1999-11-12
DE19853432A1 (de) 1999-11-18
TW390036B (en) 2000-05-11
US6699758B2 (en) 2004-03-02
JPH11317527A (ja) 1999-11-16
US6340829B1 (en) 2002-01-22
FR2778495B1 (fr) 2001-10-19

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