KR0150779B1 - 연마판 - Google Patents
연마판 Download PDFInfo
- Publication number
- KR0150779B1 KR0150779B1 KR1019890016913A KR890016913A KR0150779B1 KR 0150779 B1 KR0150779 B1 KR 0150779B1 KR 1019890016913 A KR1019890016913 A KR 1019890016913A KR 890016913 A KR890016913 A KR 890016913A KR 0150779 B1 KR0150779 B1 KR 0150779B1
- Authority
- KR
- South Korea
- Prior art keywords
- length
- hard
- soft
- abrasive plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
- B24D7/063—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental with segments embedded in a matrix which is rubbed away during the grinding process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S451/00—Abrading
- Y10S451/905—Metal lap
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Prostheses (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR88-13919 | 1988-11-22 | ||
| FR8813919A FR2639278B1 (fr) | 1988-11-22 | 1988-11-22 | Plateau de polissage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR900007550A KR900007550A (ko) | 1990-06-01 |
| KR0150779B1 true KR0150779B1 (ko) | 1998-10-15 |
Family
ID=9371247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019890016913A Expired - Fee Related KR0150779B1 (ko) | 1988-11-22 | 1989-11-21 | 연마판 |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US5022191A (OSRAM) |
| EP (1) | EP0370843B1 (OSRAM) |
| JP (1) | JPH02262957A (OSRAM) |
| KR (1) | KR0150779B1 (OSRAM) |
| AT (1) | ATE78205T1 (OSRAM) |
| CA (1) | CA2003381C (OSRAM) |
| DE (1) | DE68902131T2 (OSRAM) |
| DK (1) | DK169061B1 (OSRAM) |
| ES (1) | ES2033542T3 (OSRAM) |
| FR (1) | FR2639278B1 (OSRAM) |
| GR (1) | GR3005624T3 (OSRAM) |
| HU (1) | HUT53001A (OSRAM) |
| IE (1) | IE62270B1 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100810205B1 (ko) * | 1999-04-23 | 2008-03-06 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 유리 그라인딩 방법 |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2985490B2 (ja) * | 1992-02-28 | 1999-11-29 | 信越半導体株式会社 | 研磨機の除熱方法 |
| FR2740716B1 (fr) * | 1995-11-08 | 1998-01-02 | Lam Plan Sa | Rodoir et son procede de fabrication |
| TW349896B (en) * | 1996-05-02 | 1999-01-11 | Applied Materials Inc | Apparatus and chemical mechanical polishing system for polishing a substrate |
| JP4151799B2 (ja) * | 1997-05-09 | 2008-09-17 | ローム アンド ハース エレクトロニック マテリアルズ シーエムピー ホウルディングス インコーポレイテッド | モザイク研磨パッド及びこれに関連する方法 |
| JP3056714B2 (ja) * | 1997-10-06 | 2000-06-26 | 松下電子工業株式会社 | 半導体基板の研磨方法 |
| FR2786118B1 (fr) * | 1998-11-19 | 2000-12-22 | Lam Plan Sa | Dispositif de rodage ou polissage |
| US6616513B1 (en) * | 2000-04-07 | 2003-09-09 | Applied Materials, Inc. | Grid relief in CMP polishing pad to accurately measure pad wear, pad profile and pad wear profile |
| USD502378S1 (en) * | 2002-11-18 | 2005-03-01 | Ehwa Diamond Industrial Co., Ltd. | Pad for grinding stone |
| USD538312S1 (en) * | 2005-09-16 | 2007-03-13 | 3M Innovative Properties Company | Abrasive article with holes |
| USD536714S1 (en) | 2005-09-16 | 2007-02-13 | 3M Innovative Properties Company | Abrasive article with holes |
| USD538313S1 (en) | 2005-09-16 | 2007-03-13 | 3M Innovative Properties Company | Abrasive article with holes |
| USD541317S1 (en) | 2006-02-01 | 2007-04-24 | 3M Innovative Properties Company | Abrasive article with holes |
| USD533200S1 (en) * | 2006-02-01 | 2006-12-05 | 3M Innovative Properties Company | Abrasive article with holes |
| USD532800S1 (en) * | 2006-02-01 | 2006-11-28 | 3M Innovative Properties Company | Abrasive article with holes |
| USD543562S1 (en) | 2006-02-01 | 2007-05-29 | 3M Innovative Properties Company | Abrasive article with holes |
| USD645065S1 (en) | 2008-05-22 | 2011-09-13 | 3M Innovative Properties Company | Abrasive article with holes |
| WO2017033280A1 (ja) * | 2015-08-25 | 2017-03-02 | 株式会社クリスタル光学 | 研磨工具及び研磨工具の製造方法 |
| CN108188945B (zh) * | 2018-03-12 | 2023-08-01 | 桂林创源金刚石有限公司 | 一种薄片齿拼合式金刚石砂轮及制作方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US342943A (en) * | 1886-06-01 | Process of and apparatus for making felt boots | ||
| US1622942A (en) * | 1923-01-17 | 1927-03-29 | Elroy A Chase | Buffing wheel |
| US1926321A (en) * | 1930-10-10 | 1933-09-12 | Turek Johann | Grinding wheel |
| FR1104941A (fr) * | 1954-05-19 | 1955-11-25 | Perfectionnement aux meules notamment aux meules diamant | |
| FR2203301A5 (OSRAM) * | 1972-10-18 | 1974-05-10 | Lam Plan Sa | |
| USRE27962E (en) * | 1973-03-05 | 1974-04-02 | Abrasive disc | |
| US3921342A (en) * | 1973-12-17 | 1975-11-25 | Spitfire Tool & Machine Co Inc | Lap plate |
| JPS6013789B2 (ja) * | 1975-07-01 | 1985-04-09 | イプレツツ エス.エイ. | 複合板状つや出し工具 |
| US4037367A (en) * | 1975-12-22 | 1977-07-26 | Kruse James A | Grinding tool |
| JPS5894965A (ja) * | 1981-11-30 | 1983-06-06 | Yoshiaki Hagiuda | 複合ラツプ工具 |
| US4581853A (en) * | 1982-02-01 | 1986-04-15 | Marcus Ralph S | Apparatus for internal finishing of metal parts |
-
1988
- 1988-11-22 FR FR8813919A patent/FR2639278B1/fr not_active Expired - Lifetime
-
1989
- 1989-10-19 ES ES198989402889T patent/ES2033542T3/es not_active Expired - Lifetime
- 1989-10-19 DE DE8989402889T patent/DE68902131T2/de not_active Expired - Lifetime
- 1989-10-19 AT AT89402889T patent/ATE78205T1/de not_active IP Right Cessation
- 1989-10-19 EP EP89402889A patent/EP0370843B1/fr not_active Expired - Lifetime
- 1989-11-08 HU HU895835A patent/HUT53001A/hu unknown
- 1989-11-13 US US07/434,846 patent/US5022191A/en not_active Expired - Lifetime
- 1989-11-20 CA CA002003381A patent/CA2003381C/en not_active Expired - Fee Related
- 1989-11-20 JP JP1299903A patent/JPH02262957A/ja active Pending
- 1989-11-21 IE IE372889A patent/IE62270B1/en not_active IP Right Cessation
- 1989-11-21 KR KR1019890016913A patent/KR0150779B1/ko not_active Expired - Fee Related
- 1989-11-21 DK DK584189A patent/DK169061B1/da not_active IP Right Cessation
-
1992
- 1992-09-07 GR GR920401951T patent/GR3005624T3/el unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100810205B1 (ko) * | 1999-04-23 | 2008-03-06 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 유리 그라인딩 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2003381A1 (en) | 1990-05-22 |
| GR3005624T3 (OSRAM) | 1993-06-07 |
| EP0370843B1 (fr) | 1992-07-15 |
| FR2639278A1 (fr) | 1990-05-25 |
| ES2033542T3 (es) | 1993-03-16 |
| HUT53001A (en) | 1990-09-28 |
| IE62270B1 (en) | 1995-01-11 |
| FR2639278B1 (fr) | 1991-01-11 |
| DK584189D0 (da) | 1989-11-21 |
| DE68902131T2 (de) | 1993-01-14 |
| DE68902131D1 (de) | 1992-08-20 |
| ATE78205T1 (de) | 1992-08-15 |
| DK169061B1 (da) | 1994-08-08 |
| DK584189A (da) | 1990-05-23 |
| CA2003381C (en) | 1999-07-13 |
| EP0370843A1 (fr) | 1990-05-30 |
| JPH02262957A (ja) | 1990-10-25 |
| IE893728L (en) | 1990-05-22 |
| KR900007550A (ko) | 1990-06-01 |
| US5022191A (en) | 1991-06-11 |
| HU895835D0 (en) | 1990-01-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
St.27 status event code: A-0-1-A10-A12-nap-PA0109 |
|
| R17-X000 | Change to representative recorded |
St.27 status event code: A-3-3-R10-R17-oth-X000 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| A201 | Request for examination | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| R17-X000 | Change to representative recorded |
St.27 status event code: A-3-3-R10-R17-oth-X000 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U11-oth-PR1002 Fee payment year number: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| FPAY | Annual fee payment |
Payment date: 20010615 Year of fee payment: 4 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 4 |
|
| LAPS | Lapse due to unpaid annual fee | ||
| PC1903 | Unpaid annual fee |
St.27 status event code: A-4-4-U10-U13-oth-PC1903 Not in force date: 20020618 Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: N-4-6-H10-H13-oth-PC1903 Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE Not in force date: 20020618 |