FR2639278B1 - Plateau de polissage - Google Patents

Plateau de polissage

Info

Publication number
FR2639278B1
FR2639278B1 FR8813919A FR8813919A FR2639278B1 FR 2639278 B1 FR2639278 B1 FR 2639278B1 FR 8813919 A FR8813919 A FR 8813919A FR 8813919 A FR8813919 A FR 8813919A FR 2639278 B1 FR2639278 B1 FR 2639278B1
Authority
FR
France
Prior art keywords
disc
polishing
polishing tray
radius
equal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8813919A
Other languages
English (en)
Other versions
FR2639278A1 (fr
Inventor
Georges Broido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Plan SA
Original Assignee
Lam Plan SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9371247&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2639278(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Lam Plan SA filed Critical Lam Plan SA
Priority to FR8813919A priority Critical patent/FR2639278B1/fr
Priority to EP89402889A priority patent/EP0370843B1/fr
Priority to DE8989402889T priority patent/DE68902131T2/de
Priority to AT89402889T priority patent/ATE78205T1/de
Priority to ES198989402889T priority patent/ES2033542T3/es
Priority to HU895835A priority patent/HUT53001A/hu
Priority to US07/434,846 priority patent/US5022191A/en
Priority to JP1299903A priority patent/JPH02262957A/ja
Priority to CA002003381A priority patent/CA2003381C/fr
Priority to DK584189A priority patent/DK169061B1/da
Priority to KR1019890016913A priority patent/KR0150779B1/ko
Priority to IE372889A priority patent/IE62270B1/en
Publication of FR2639278A1 publication Critical patent/FR2639278A1/fr
Publication of FR2639278B1 publication Critical patent/FR2639278B1/fr
Application granted granted Critical
Priority to GR920401951T priority patent/GR3005624T3/el
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • B24D7/063—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental with segments embedded in a matrix which is rubbed away during the grinding process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S451/00—Abrading
    • Y10S451/905—Metal lap

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Prostheses (AREA)
FR8813919A 1988-11-22 1988-11-22 Plateau de polissage Expired - Lifetime FR2639278B1 (fr)

Priority Applications (13)

Application Number Priority Date Filing Date Title
FR8813919A FR2639278B1 (fr) 1988-11-22 1988-11-22 Plateau de polissage
EP89402889A EP0370843B1 (fr) 1988-11-22 1989-10-19 Plateau de polissage
DE8989402889T DE68902131T2 (de) 1988-11-22 1989-10-19 Polierscheibe.
AT89402889T ATE78205T1 (de) 1988-11-22 1989-10-19 Polierscheibe.
ES198989402889T ES2033542T3 (es) 1988-11-22 1989-10-19 Plato de pulido.
HU895835A HUT53001A (en) 1988-11-22 1989-11-08 Glazing wheel
US07/434,846 US5022191A (en) 1988-11-22 1989-11-13 Polishing plate
CA002003381A CA2003381C (fr) 1988-11-22 1989-11-20 Plaque de polissage
JP1299903A JPH02262957A (ja) 1988-11-22 1989-11-20 研磨プレート
DK584189A DK169061B1 (da) 1988-11-22 1989-11-21 Polerskive
KR1019890016913A KR0150779B1 (ko) 1988-11-22 1989-11-21 연마판
IE372889A IE62270B1 (en) 1988-11-22 1989-11-21 Polishing plate
GR920401951T GR3005624T3 (fr) 1988-11-22 1992-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8813919A FR2639278B1 (fr) 1988-11-22 1988-11-22 Plateau de polissage

Publications (2)

Publication Number Publication Date
FR2639278A1 FR2639278A1 (fr) 1990-05-25
FR2639278B1 true FR2639278B1 (fr) 1991-01-11

Family

ID=9371247

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8813919A Expired - Lifetime FR2639278B1 (fr) 1988-11-22 1988-11-22 Plateau de polissage

Country Status (13)

Country Link
US (1) US5022191A (fr)
EP (1) EP0370843B1 (fr)
JP (1) JPH02262957A (fr)
KR (1) KR0150779B1 (fr)
AT (1) ATE78205T1 (fr)
CA (1) CA2003381C (fr)
DE (1) DE68902131T2 (fr)
DK (1) DK169061B1 (fr)
ES (1) ES2033542T3 (fr)
FR (1) FR2639278B1 (fr)
GR (1) GR3005624T3 (fr)
HU (1) HUT53001A (fr)
IE (1) IE62270B1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2985490B2 (ja) * 1992-02-28 1999-11-29 信越半導体株式会社 研磨機の除熱方法
FR2740716B1 (fr) * 1995-11-08 1998-01-02 Lam Plan Sa Rodoir et son procede de fabrication
TW349896B (en) * 1996-05-02 1999-01-11 Applied Materials Inc Apparatus and chemical mechanical polishing system for polishing a substrate
WO1998050201A1 (fr) * 1997-05-09 1998-11-12 Rodel Holdings, Inc. Tampons a polir mosaiques et procedes afferents
JP3056714B2 (ja) * 1997-10-06 2000-06-26 松下電子工業株式会社 半導体基板の研磨方法
FR2786118B1 (fr) * 1998-11-19 2000-12-22 Lam Plan Sa Dispositif de rodage ou polissage
US6634929B1 (en) * 1999-04-23 2003-10-21 3M Innovative Properties Company Method for grinding glass
US6616513B1 (en) * 2000-04-07 2003-09-09 Applied Materials, Inc. Grid relief in CMP polishing pad to accurately measure pad wear, pad profile and pad wear profile
WO2017033280A1 (fr) * 2015-08-25 2017-03-02 株式会社クリスタル光学 Outil de meulage et son procédé de fabrication
CN108188945B (zh) * 2018-03-12 2023-08-01 桂林创源金刚石有限公司 一种薄片齿拼合式金刚石砂轮及制作方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US342943A (en) * 1886-06-01 Process of and apparatus for making felt boots
US1622942A (en) * 1923-01-17 1927-03-29 Elroy A Chase Buffing wheel
US1926321A (en) * 1930-10-10 1933-09-12 Turek Johann Grinding wheel
FR1104941A (fr) * 1954-05-19 1955-11-25 Perfectionnement aux meules notamment aux meules diamant
FR2203301A5 (fr) * 1972-10-18 1974-05-10 Lam Plan Sa
USRE27962E (en) * 1973-03-05 1974-04-02 Abrasive disc
US3921342A (en) * 1973-12-17 1975-11-25 Spitfire Tool & Machine Co Inc Lap plate
JPS6013789B2 (ja) * 1975-07-01 1985-04-09 イプレツツ エス．エイ． 複合板状つや出し工具
US4037367A (en) * 1975-12-22 1977-07-26 Kruse James A Grinding tool
JPS5894965A (ja) * 1981-11-30 1983-06-06 Yoshiaki Hagiuda 複合ラツプ工具
US4581853A (en) * 1982-02-01 1986-04-15 Marcus Ralph S Apparatus for internal finishing of metal parts

Also Published As

Publication number Publication date
KR0150779B1 (ko) 1998-10-15
US5022191A (en) 1991-06-11
IE62270B1 (en) 1995-01-11
DE68902131D1 (de) 1992-08-20
GR3005624T3 (fr) 1993-06-07
KR900007550A (ko) 1990-06-01
DK584189A (da) 1990-05-23
CA2003381A1 (fr) 1990-05-22
ES2033542T3 (es) 1993-03-16
HU895835D0 (en) 1990-01-28
JPH02262957A (ja) 1990-10-25
HUT53001A (en) 1990-09-28
EP0370843B1 (fr) 1992-07-15
FR2639278A1 (fr) 1990-05-25
CA2003381C (fr) 1999-07-13
ATE78205T1 (de) 1992-08-15
EP0370843A1 (fr) 1990-05-30
IE893728L (en) 1990-05-22
DE68902131T2 (de) 1993-01-14
DK584189D0 (da) 1989-11-21
DK169061B1 (da) 1994-08-08

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Legal Events

Date Code Title Description
ST Notification of lapse
RC Opposition against decision of lapse
DA Annulment of decision of lapse
ST Notification of lapse