KR0132437B1 - 압전, 전왜소자를 사용한 충격력에 의한 미소 이동장치 - Google Patents

압전, 전왜소자를 사용한 충격력에 의한 미소 이동장치

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Publication number
KR0132437B1
KR0132437B1 KR1019880006322A KR880006322A KR0132437B1 KR 0132437 B1 KR0132437 B1 KR 0132437B1 KR 1019880006322 A KR1019880006322 A KR 1019880006322A KR 880006322 A KR880006322 A KR 880006322A KR 0132437 B1 KR0132437 B1 KR 0132437B1
Authority
KR
South Korea
Prior art keywords
piezoelectric
micro
impact force
moving
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019880006322A
Other languages
English (en)
Korean (ko)
Other versions
KR880014709A (ko
Inventor
도시로 히구찌
마사히로 와따나베
Original Assignee
아까바 노부히사
신기쥬쓰 가이히쓰 지교오단
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Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=15054829&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR0132437(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 아까바 노부히사, 신기쥬쓰 가이히쓰 지교오단 filed Critical 아까바 노부히사
Publication of KR880014709A publication Critical patent/KR880014709A/ko
Application granted granted Critical
Publication of KR0132437B1 publication Critical patent/KR0132437B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR1019880006322A 1987-05-29 1988-05-28 압전, 전왜소자를 사용한 충격력에 의한 미소 이동장치 Expired - Fee Related KR0132437B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62131304A JPS63299785A (ja) 1987-05-29 1987-05-29 圧電・電歪素子を用いた衝撃力による微小移動装置
JP62-131304 1987-05-29

Publications (2)

Publication Number Publication Date
KR880014709A KR880014709A (ko) 1988-12-24
KR0132437B1 true KR0132437B1 (ko) 1998-04-20

Family

ID=15054829

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880006322A Expired - Fee Related KR0132437B1 (ko) 1987-05-29 1988-05-28 압전, 전왜소자를 사용한 충격력에 의한 미소 이동장치

Country Status (5)

Country Link
US (1) US4894579A (enExample)
EP (1) EP0292989B1 (enExample)
JP (1) JPS63299785A (enExample)
KR (1) KR0132437B1 (enExample)
DE (1) DE3886260T2 (enExample)

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US5629577A (en) * 1994-07-15 1997-05-13 Micro Medical Devices Miniature linear motion actuator
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JPH0843872A (ja) * 1994-08-03 1996-02-16 Minolta Co Ltd 電気−機械変換素子を使用したレンズ駆動装置
JPH0866064A (ja) * 1994-08-24 1996-03-08 Nikon Corp 圧電アクチュエータ
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US5675444A (en) * 1995-07-27 1997-10-07 Minolta Co., Ltd. Lens barrel having a piezoelectric actuator for moving optical elements
JPH09191665A (ja) * 1996-01-04 1997-07-22 Minolta Co Ltd 電気−機械変換素子を使用した直線駆動機構
JP3358418B2 (ja) * 1996-01-04 2002-12-16 ミノルタ株式会社 電気−機械変換素子を使用した駆動機構
DE19627927C2 (de) * 1996-07-11 1999-10-14 Egon Illig Bewegungseinrichtung und Verfahren zur Bewegung
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US5986826A (en) * 1996-12-17 1999-11-16 Minolta Co., Ltd. Drive device using electromechanical conversion element
US6051909A (en) * 1996-12-27 2000-04-18 Minolta Co., Ltd. Drive device using electromechanical transducer
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JPH1144899A (ja) * 1997-07-25 1999-02-16 Minolta Co Ltd 電気機械変換素子を使用した駆動装置
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KR100486702B1 (ko) * 2000-07-25 2005-05-03 삼성전자주식회사 마이크로 로봇
US6661575B1 (en) 2000-10-31 2003-12-09 Sergey A. Yakovenko Methods and apparata for micromanipulation of micro-and nanoparticles
US6936951B1 (en) 2000-11-27 2005-08-30 Grq Instruments, Inc. Smart sonic bearings and method for frictional force reduction and switching
SE520097C2 (sv) * 2000-12-05 2003-05-27 Nanofactory Instruments Ab Mikropositioneringsanordning
JP4537591B2 (ja) * 2001-02-02 2010-09-01 株式会社ナノコントロール 光軸合わせ装置および光軸合わせ方法
US7131891B2 (en) * 2003-04-28 2006-11-07 Micron Technology, Inc. Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
JP2006197216A (ja) * 2005-01-13 2006-07-27 Olympus Imaging Corp ブレ補正機能付き撮影装置及びブレ補正方法
DE102005026708B4 (de) 2005-06-09 2007-05-03 Attocube Systems Ag Positionierer mit Festkörpergelenk
JP4652906B2 (ja) 2005-06-30 2011-03-16 富士夫 宮脇 振動型マイクロインジェクション装置
JP4907923B2 (ja) * 2005-08-25 2012-04-04 公立大学法人首都大学東京 微小物品搬送装置
US7180221B1 (en) 2005-09-17 2007-02-20 Felix Torres Piezo-electric assembly
KR20090108696A (ko) * 2007-02-09 2009-10-16 코니카 미놀타 옵토 인코포레이티드 구동장치
FR2913829B1 (fr) 2007-03-14 2014-09-05 Cedrat Technologies Systeme de positionnement fin par moteur inertiel a base d'amplificateur mecanique
US8059346B2 (en) 2007-03-19 2011-11-15 New Scale Technologies Linear drive systems and methods thereof
JP5305380B2 (ja) * 2008-01-08 2013-10-02 Ｎｅｃトーキン株式会社 アクチュエータ、位置決め装置
JP5341554B2 (ja) * 2009-02-26 2013-11-13 太平洋セメント株式会社 位置決め制御ユニット、位置決め制御方法および位置決め制御プログラム
WO2011055427A1 (ja) 2009-11-04 2011-05-12 株式会社 東芝 駆動装置
US9138892B2 (en) * 2009-11-06 2015-09-22 Sensapex Oy Compact micromanipulator
WO2011102365A1 (ja) * 2010-02-16 2011-08-25 パナソニック電工株式会社 駆動装置および該駆動装置を用いた移動機構
JPWO2011102366A1 (ja) * 2010-02-16 2013-06-17 三洋電機株式会社 駆動装置および該駆動装置を用いた移動機構
JP5269009B2 (ja) 2010-07-30 2013-08-21 株式会社東芝 駆動装置
EP2420187B1 (en) * 2010-08-16 2013-02-13 Precision Bioinstrument LLC Individually adjustable multi-channel systems in vivo recording
JP2013020589A (ja) * 2011-07-14 2013-01-31 Sanyo Electric Co Ltd 機器移動システム
DE102013204131B3 (de) * 2013-03-11 2014-02-06 Bruker Biospin Ag NMR-Probenkopf mit einem mittels eines piezoelektrischen Aktors diskret verstellbaren variablen Kondensator im HF-Schwingkreis
JP6406593B2 (ja) 2013-12-28 2018-10-17 株式会社ミクロブ 駆動機構
DE102014109849A1 (de) 2014-07-14 2016-01-14 Piezosystem Jena Gmbh Anordnung und Verfahren zum stoßwellengeführten Bewegen eines Objektes
IT201800003187A1 (it) * 2018-03-01 2019-09-01 Balance Systems Srl Dispositivo di movimentazione di un oggetto, in particolare per un apparato di equilibratura
FR3092454B1 (fr) 2019-02-04 2022-06-10 Cedrat Tech Mecanisme de deplacement nanometrique a vis
CN109905053A (zh) * 2019-04-23 2019-06-18 苏州大学 一种双足式惯性粘滑驱动跨尺度精密运动平台
CN109905052B (zh) * 2019-04-23 2020-04-10 苏州大学 一种基于界面效应的自吸附惯性粘滑跨尺度精密运动平台
CN111181438A (zh) * 2020-01-14 2020-05-19 苏州大学 压电陶瓷致动器的驱动方法和装置

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JPS61246812A (ja) * 1985-03-20 1986-11-04 Res Dev Corp Of Japan 衝撃力を用いた微小移動装置
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Also Published As

Publication number Publication date
KR880014709A (ko) 1988-12-24
DE3886260D1 (de) 1994-01-27
EP0292989A3 (en) 1990-07-18
JPH0452070B2 (enExample) 1992-08-20
DE3886260T2 (de) 1994-07-14
US4894579A (en) 1990-01-16
EP0292989A2 (en) 1988-11-30
JPS63299785A (ja) 1988-12-07
EP0292989B1 (en) 1993-12-15

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