KR880014709A - 압전.전왜소자를 사용한 충격력에 의한 미소 이동장치 - Google Patents
압전.전왜소자를 사용한 충격력에 의한 미소 이동장치 Download PDFInfo
- Publication number
- KR880014709A KR880014709A KR1019880006322A KR880006322A KR880014709A KR 880014709 A KR880014709 A KR 880014709A KR 1019880006322 A KR1019880006322 A KR 1019880006322A KR 880006322 A KR880006322 A KR 880006322A KR 880014709 A KR880014709 A KR 880014709A
- Authority
- KR
- South Korea
- Prior art keywords
- piezoelectric
- micro
- electrostrictive elements
- impact force
- inertial
- Prior art date
Links
- 238000010586 diagram Methods 0.000 description 2
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/065—Large signal circuits, e.g. final stages
- H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제12도는 그 시스템의 구동앰프의 구성예를 나타낸 회로도, 제13도는 구동 앰프에의 입력파형이 아날로그 회로에 의한 구성예를 나타낸 회로도.
Claims (9)
- (a) 이동체와, (b) 이 이동체에 부착되는 압전·전왜소자와, (c) 이 압전·전왜소자를 구동하는 수단과, (d) 상기 압전·전왜소자의 구동에 의해 상기 이동체에 충격력을 주는 관성체를 포함한 압전·전왜소자를 사용한 충격력에 의한 미소 이동장치.
- 제1항에 있어서, 상기 관성체를 상기 압전·전왜소자에 고정하여 이루어진 압전·전왜소자를 사용한 충격력에 의한 미소 이동장치.
- 제2항에 있어서, 상기 관성체를 상기 이동체 위에 베어링을 개재시켜 지지하여 이루어진 압전·전왜소자를 사용한 충격력에 의한 미소 이동장치.
- 제2항에 있어서, 상기 관성체를 상기 이동체에 대해여 스프링체를 개재시켜 지지하여 이루어진 압전·전왜소자를 사용한 충격력에 의한 미소 이동장치.
- 제1항에 있어서, 상기 압전·전왜소자는 바이모르프형 압전·전왜소자인 것을 특징으로하는 압전·전왜소자를 사용한 충격력에 의한 미소 이동장치.
- 제1항에 있어서, 상기 압전·전왜소자 및 관성체를 복수조 답채하여 복수측 방향의 이동을 하도록 구성한 것을 특징으로 하는 압전,전왜소자를 사용한 충격력에 의한 미소 이동장치
- 제1항에 있어서, 상기 압전·전왜소자 및 관성체를 상기 이동체내에 복수측 방향으로 배설하여 이루어진 압전·전왜소자를 사용한 충격력에 의한 미소 이동장치.
- 제1항에 있어서, 상기 압전·전왜소자 및 관성체를 상기 이동체내에 복수측 방향으로 배설하여 이루어진 압전·전왜소자를 사용한 충격력에 의한 미소 이동장치.
- 상기 소자를 구동하는 수단은 미조정을 행하는 수단을 구비하는 것을 특징으로 하는 압전·전왜소자를 사용한 충격력에 의한 미소 이동장치.※ 참고사항:최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62131304A JPS63299785A (ja) | 1987-05-29 | 1987-05-29 | 圧電・電歪素子を用いた衝撃力による微小移動装置 |
JP62-131304 | 1987-05-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880014709A true KR880014709A (ko) | 1988-12-24 |
KR0132437B1 KR0132437B1 (ko) | 1998-04-20 |
Family
ID=15054829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880006322A KR0132437B1 (ko) | 1987-05-29 | 1988-05-28 | 압전, 전왜소자를 사용한 충격력에 의한 미소 이동장치 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4894579A (ko) |
EP (1) | EP0292989B1 (ko) |
JP (1) | JPS63299785A (ko) |
KR (1) | KR0132437B1 (ko) |
DE (1) | DE3886260T2 (ko) |
Families Citing this family (69)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5317223A (en) * | 1987-01-21 | 1994-05-31 | Dynamotive Corporation | Method and device in magnetostrictive motion systems |
US5049775A (en) * | 1988-09-30 | 1991-09-17 | Boston University | Integrated micromechanical piezoelectric motor |
DE3933296C2 (de) * | 1988-12-28 | 1994-06-01 | Prima Meat Packers Ltd | Mikromanipulator |
JPH0773830B2 (ja) * | 1989-04-06 | 1995-08-09 | プリマハム株式会社 | マイクロマニピュレータ |
JPH03129312A (ja) * | 1989-07-18 | 1991-06-03 | Toshiro Higuchi | 光学実験等のための微動ステージ |
JPH0389875A (ja) * | 1989-08-31 | 1991-04-15 | Brother Ind Ltd | リニア超音波モータ |
JPH0648975B2 (ja) * | 1989-10-02 | 1994-06-29 | 俊郎 樋口 | 微小インジェクション装置及びそのインジェクション制御方法 |
US5105117A (en) * | 1989-10-31 | 1992-04-14 | Brother Kogyo Kabushiki Kaisha | Ultrasonic motor |
JPH0698584B2 (ja) * | 1989-11-24 | 1994-12-07 | 俊郎 樋口 | マイクロマニピュレータの微小移動装置 |
JPH0430989A (ja) * | 1990-05-24 | 1992-02-03 | Fuji Electric Co Ltd | 位置決めアクチュエータ装置 |
US5225941A (en) * | 1990-07-03 | 1993-07-06 | Canon Kabushiki Kaisha | Driving device |
JP2797146B2 (ja) * | 1990-10-09 | 1998-09-17 | 株式会社ゼクセル | 物体移動用電磁アクチュエータ |
US5490015A (en) * | 1993-03-04 | 1996-02-06 | Olympus Optical Co., Ltd. | Actuator apparatus |
JPH06312384A (ja) * | 1993-04-27 | 1994-11-08 | Olympus Optical Co Ltd | 自走装置 |
JP3269703B2 (ja) * | 1993-06-21 | 2002-04-02 | オリンパス光学工業株式会社 | 処置具の駆動機構 |
US5589723A (en) * | 1994-03-29 | 1996-12-31 | Minolta Co., Ltd. | Driving apparatus using transducer |
JPH0821946A (ja) * | 1994-07-08 | 1996-01-23 | Minolta Co Ltd | 電気−機械変換素子を使用したレンズ装置駆動機構 |
US5587846A (en) * | 1994-07-15 | 1996-12-24 | Minolta Co., Ltd. | Lens moving apparatus |
US5629577A (en) * | 1994-07-15 | 1997-05-13 | Micro Medical Devices | Miniature linear motion actuator |
JPH0837784A (ja) * | 1994-07-25 | 1996-02-06 | Nikon Corp | 移動装置及び移動装置の制御方法 |
JPH0843872A (ja) * | 1994-08-03 | 1996-02-16 | Minolta Co Ltd | 電気−機械変換素子を使用したレンズ駆動装置 |
JPH0866064A (ja) * | 1994-08-24 | 1996-03-08 | Nikon Corp | 圧電アクチュエータ |
US5668432A (en) * | 1995-03-24 | 1997-09-16 | Nippondenso Co., Ltd. | Articulation device |
US5786654A (en) * | 1995-06-08 | 1998-07-28 | Minolta Co., Ltd. | Movable stage utilizing electromechanical transducer |
US5600239A (en) * | 1995-06-16 | 1997-02-04 | The United States Of America As Represented By The Secretary Of The Navy | Strain sensing system including a magnetostrictive material having a piezomagnetic property selected for maximizing electrical impedance to current applied to a predetermined skin depth |
US5675444A (en) * | 1995-07-27 | 1997-10-07 | Minolta Co., Ltd. | Lens barrel having a piezoelectric actuator for moving optical elements |
JP3358418B2 (ja) * | 1996-01-04 | 2002-12-16 | ミノルタ株式会社 | 電気−機械変換素子を使用した駆動機構 |
JPH09191665A (ja) * | 1996-01-04 | 1997-07-22 | Minolta Co Ltd | 電気−機械変換素子を使用した直線駆動機構 |
DE19627927C2 (de) * | 1996-07-11 | 1999-10-14 | Egon Illig | Bewegungseinrichtung und Verfahren zur Bewegung |
GB2316222B (en) * | 1996-08-05 | 1998-07-01 | Karrai Haines Gbr | Inertial positioner |
US5986826A (en) * | 1996-12-17 | 1999-11-16 | Minolta Co., Ltd. | Drive device using electromechanical conversion element |
US6051909A (en) * | 1996-12-27 | 2000-04-18 | Minolta Co., Ltd. | Drive device using electromechanical transducer |
JP3184117B2 (ja) * | 1997-05-23 | 2001-07-09 | セイコーインスツルメンツ株式会社 | 超音波モータ及び超音波モータ付き電子機器 |
JPH1144899A (ja) * | 1997-07-25 | 1999-02-16 | Minolta Co Ltd | 電気機械変換素子を使用した駆動装置 |
DE19927129C1 (de) * | 1999-06-15 | 2001-01-04 | Wolf Gmbh Richard | Fokussier- und Brennweiteneinstellvorrichtung für eine Videokamera |
US6251658B1 (en) | 1999-06-18 | 2001-06-26 | Burleigh Instruments, Inc | Inertial impact drill for cytological applications |
DE10012751B4 (de) * | 2000-03-16 | 2004-05-27 | Carl Zeiss Jena Gmbh | Verstellvorrichtung zum Verschieben einzelner Elemente von optischen Systemen oder von Meßsystemen |
EP1270506A4 (en) * | 2000-03-17 | 2008-06-25 | Japan Science & Tech Agency | MICRO-ACTOR AND METHOD FOR THE PRODUCTION THEREOF |
KR100486702B1 (ko) * | 2000-07-25 | 2005-05-03 | 삼성전자주식회사 | 마이크로 로봇 |
US6661575B1 (en) | 2000-10-31 | 2003-12-09 | Sergey A. Yakovenko | Methods and apparata for micromanipulation of micro-and nanoparticles |
US6936951B1 (en) | 2000-11-27 | 2005-08-30 | Grq Instruments, Inc. | Smart sonic bearings and method for frictional force reduction and switching |
SE520097C2 (sv) * | 2000-12-05 | 2003-05-27 | Nanofactory Instruments Ab | Mikropositioneringsanordning |
JP4537591B2 (ja) * | 2001-02-02 | 2010-09-01 | 株式会社ナノコントロール | 光軸合わせ装置および光軸合わせ方法 |
US7131891B2 (en) * | 2003-04-28 | 2006-11-07 | Micron Technology, Inc. | Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces |
JP2006197216A (ja) * | 2005-01-13 | 2006-07-27 | Olympus Imaging Corp | ブレ補正機能付き撮影装置及びブレ補正方法 |
DE102005026708B4 (de) * | 2005-06-09 | 2007-05-03 | Attocube Systems Ag | Positionierer mit Festkörpergelenk |
JP4652906B2 (ja) | 2005-06-30 | 2011-03-16 | 富士夫 宮脇 | 振動型マイクロインジェクション装置 |
JP4907923B2 (ja) * | 2005-08-25 | 2012-04-04 | 公立大学法人首都大学東京 | 微小物品搬送装置 |
US7180221B1 (en) | 2005-09-17 | 2007-02-20 | Felix Torres | Piezo-electric assembly |
WO2008096554A1 (ja) * | 2007-02-09 | 2008-08-14 | Konica Minolta Opto, Inc. | 駆動装置 |
FR2913829B1 (fr) | 2007-03-14 | 2014-09-05 | Cedrat Technologies | Systeme de positionnement fin par moteur inertiel a base d'amplificateur mecanique |
US8059346B2 (en) | 2007-03-19 | 2011-11-15 | New Scale Technologies | Linear drive systems and methods thereof |
JP5305380B2 (ja) * | 2008-01-08 | 2013-10-02 | Necトーキン株式会社 | アクチュエータ、位置決め装置 |
JP5341554B2 (ja) * | 2009-02-26 | 2013-11-13 | 太平洋セメント株式会社 | 位置決め制御ユニット、位置決め制御方法および位置決め制御プログラム |
JP5490132B2 (ja) | 2009-11-04 | 2014-05-14 | 株式会社東芝 | 駆動装置 |
EP2496388B1 (en) * | 2009-11-06 | 2022-01-05 | Sensapex Oy | Compact micromanipulator |
JPWO2011102366A1 (ja) * | 2010-02-16 | 2013-06-17 | 三洋電機株式会社 | 駆動装置および該駆動装置を用いた移動機構 |
WO2011102365A1 (ja) * | 2010-02-16 | 2011-08-25 | パナソニック電工株式会社 | 駆動装置および該駆動装置を用いた移動機構 |
JP5269009B2 (ja) | 2010-07-30 | 2013-08-21 | 株式会社東芝 | 駆動装置 |
EP2420187B1 (en) * | 2010-08-16 | 2013-02-13 | Precision Bioinstrument LLC | Individually adjustable multi-channel systems in vivo recording |
JP2013020589A (ja) * | 2011-07-14 | 2013-01-31 | Sanyo Electric Co Ltd | 機器移動システム |
DE102013204131B3 (de) | 2013-03-11 | 2014-02-06 | Bruker Biospin Ag | NMR-Probenkopf mit einem mittels eines piezoelektrischen Aktors diskret verstellbaren variablen Kondensator im HF-Schwingkreis |
JP6406593B2 (ja) | 2013-12-28 | 2018-10-17 | 株式会社ミクロブ | 駆動機構 |
DE102014109849A1 (de) | 2014-07-14 | 2016-01-14 | Piezosystem Jena Gmbh | Anordnung und Verfahren zum stoßwellengeführten Bewegen eines Objektes |
IT201800003187A1 (it) * | 2018-03-01 | 2019-09-01 | Balance Systems Srl | Dispositivo di movimentazione di un oggetto, in particolare per un apparato di equilibratura |
FR3092454B1 (fr) | 2019-02-04 | 2022-06-10 | Cedrat Tech | Mecanisme de deplacement nanometrique a vis |
CN109905052B (zh) * | 2019-04-23 | 2020-04-10 | 苏州大学 | 一种基于界面效应的自吸附惯性粘滑跨尺度精密运动平台 |
CN109905053A (zh) * | 2019-04-23 | 2019-06-18 | 苏州大学 | 一种双足式惯性粘滑驱动跨尺度精密运动平台 |
CN111181438A (zh) * | 2020-01-14 | 2020-05-19 | 苏州大学 | 压电陶瓷致动器的驱动方法和装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3808488A (en) * | 1972-07-14 | 1974-04-30 | Dynamics Corp Massa Div | Means for making precision microadjustments in the position of a movable element |
JPS5427116B2 (ko) * | 1973-01-31 | 1979-09-07 | ||
US4195243A (en) * | 1978-11-06 | 1980-03-25 | Sperry Corporation | Piezoelectric wafer mover |
JPS6060582A (ja) * | 1983-09-13 | 1985-04-08 | 新技術事業団 | 衝撃力を用いた微小移動方法及び装置 |
US4523120A (en) * | 1984-06-04 | 1985-06-11 | The United States Of America As Represented By The Secretary Of The Navy | Precise bearing support ditherer with piezoelectric drive means |
US4686440A (en) * | 1985-03-11 | 1987-08-11 | Yotaro Hatamura | Fine positioning device |
JPS61246812A (ja) * | 1985-03-20 | 1986-11-04 | Res Dev Corp Of Japan | 衝撃力を用いた微小移動装置 |
US4678955A (en) * | 1986-04-18 | 1987-07-07 | Rca Corporation | Piezoelectric positioning device |
-
1987
- 1987-05-29 JP JP62131304A patent/JPS63299785A/ja active Granted
-
1988
- 1988-05-23 US US07/197,254 patent/US4894579A/en not_active Expired - Lifetime
- 1988-05-27 EP EP88108499A patent/EP0292989B1/en not_active Revoked
- 1988-05-27 DE DE3886260T patent/DE3886260T2/de not_active Revoked
- 1988-05-28 KR KR1019880006322A patent/KR0132437B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPS63299785A (ja) | 1988-12-07 |
EP0292989A2 (en) | 1988-11-30 |
JPH0452070B2 (ko) | 1992-08-20 |
DE3886260D1 (de) | 1994-01-27 |
EP0292989A3 (en) | 1990-07-18 |
US4894579A (en) | 1990-01-16 |
DE3886260T2 (de) | 1994-07-14 |
KR0132437B1 (ko) | 1998-04-20 |
EP0292989B1 (en) | 1993-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR880014709A (ko) | 압전.전왜소자를 사용한 충격력에 의한 미소 이동장치 | |
RU1823806C (ru) | Микроманипул тор | |
KR890015250A (ko) | 리니어 액세스 기구와 자기디스크장치 | |
JPS6473781A (en) | Electrostrictive driving device | |
CA2161412A1 (en) | Low Voltage Bender Piezo-Actuators | |
EP0637042A3 (en) | Device for affecting an input signal | |
ATE252288T1 (de) | Piezoelektrischer aktuator oder motor, verfahren hierzu und herstellungsverfahren | |
DE68915940T2 (de) | Sondeneinheit, Betriebsverfahren und Rastervorrichtung zur Feststellung eines Tunnelstromes mit dieser Sonde. | |
CA2057619A1 (en) | Cantilever probe and apparatus using the same | |
KR830004830A (ko) | 초음파 진단 장치 | |
JPH0440951B2 (ko) | ||
ATE235122T1 (de) | Elektrostatischer microantrieb, dreidimensionaler aktive mikrokatheter und verfahren zur herstellung | |
KR900700974A (ko) | 디스플레이의 이동표지마크를 제어하는 장치 | |
GB1498635A (en) | Electromechanical control device | |
JPS61159349A (ja) | 微小変位移動装置 | |
KR870009406A (ko) | 원자로 연료 교체 기계 시뮬례이터 | |
JPH04207982A (ja) | 圧電素子を用いた衝撃力による微小移動装置及び微小移動方法 | |
JPS62292445A (ja) | インパクトプリンタヘツド | |
KR100254394B1 (ko) | 초소형 마이크로 로봇 및 그 구동방법 | |
JPH059195U (ja) | 圧電式微小送り装置 | |
SU859715A1 (ru) | Виброгас ща опора | |
SE8802426L (sv) | Anordning foer avtryckning av paa en summatypsbaerare anordnade skrivtecken | |
JPS56165938A (en) | Optical scanner | |
JPH0720754B2 (ja) | 記録芯の上下移動機構 | |
JPH08294288A (ja) | インパクト型移動装置の駆動回路 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20061010 Year of fee payment: 10 |
|
LAPS | Lapse due to unpaid annual fee |