JPWO2024166181A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2024166181A5
JPWO2024166181A5 JP2023574237A JP2023574237A JPWO2024166181A5 JP WO2024166181 A5 JPWO2024166181 A5 JP WO2024166181A5 JP 2023574237 A JP2023574237 A JP 2023574237A JP 2023574237 A JP2023574237 A JP 2023574237A JP WO2024166181 A5 JPWO2024166181 A5 JP WO2024166181A5
Authority
JP
Japan
Prior art keywords
ceramic plate
circle
diameter
shape
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023574237A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024166181A1 (https=
JP7667880B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/003830 external-priority patent/WO2024166181A1/ja
Publication of JPWO2024166181A1 publication Critical patent/JPWO2024166181A1/ja
Publication of JPWO2024166181A5 publication Critical patent/JPWO2024166181A5/ja
Application granted granted Critical
Publication of JP7667880B2 publication Critical patent/JP7667880B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2023574237A 2023-02-06 2023-02-06 サセプタ Active JP7667880B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/003830 WO2024166181A1 (ja) 2023-02-06 2023-02-06 サセプタ

Publications (3)

Publication Number Publication Date
JPWO2024166181A1 JPWO2024166181A1 (https=) 2024-08-15
JPWO2024166181A5 true JPWO2024166181A5 (https=) 2025-01-15
JP7667880B2 JP7667880B2 (ja) 2025-04-23

Family

ID=92120080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023574237A Active JP7667880B2 (ja) 2023-02-06 2023-02-06 サセプタ

Country Status (6)

Country Link
US (1) US20240266208A1 (https=)
JP (1) JP7667880B2 (https=)
KR (1) KR102810844B1 (https=)
CN (1) CN120584400A (https=)
TW (1) TW202435356A (https=)
WO (1) WO2024166181A1 (https=)

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1485623A (en) * 1973-11-05 1977-09-14 Foseco Int Treatment of droplet dispersions
US5968379A (en) * 1995-07-14 1999-10-19 Applied Materials, Inc. High temperature ceramic heater assembly with RF capability and related methods
US5873781A (en) * 1996-11-14 1999-02-23 Bally Gaming International, Inc. Gaming machine having truly random results
US6120608A (en) * 1997-03-12 2000-09-19 Applied Materials, Inc. Workpiece support platen for semiconductor process chamber
US6494955B1 (en) * 2000-02-15 2002-12-17 Applied Materials, Inc. Ceramic substrate support
WO2004112123A1 (ja) * 2003-06-17 2004-12-23 Creative Technology Corporation 双極型静電チャック
JP4413667B2 (ja) 2004-03-19 2010-02-10 日本特殊陶業株式会社 静電チャック
JP5984504B2 (ja) * 2012-05-21 2016-09-06 新光電気工業株式会社 静電チャック、静電チャックの製造方法
US10770270B2 (en) * 2016-06-07 2020-09-08 Applied Materials, Inc. High power electrostatic chuck with aperture-reducing plug in a gas hole
JP2019029384A (ja) * 2017-07-25 2019-02-21 新光電気工業株式会社 セラミックス混合物、多孔質体及びその製造方法、静電チャック及びその製造方法、基板固定装置
WO2019082875A1 (ja) * 2017-10-26 2019-05-02 京セラ株式会社 試料保持具
CN111448647B (zh) * 2018-03-26 2023-08-01 日本碍子株式会社 静电卡盘加热器
US11367597B2 (en) * 2018-07-05 2022-06-21 Samsung Electronics Co., Ltd. Electrostatic chuck and plasma processing apparatus including the same
US11626310B2 (en) * 2018-10-30 2023-04-11 Toto Ltd. Electrostatic chuck
JP7402411B2 (ja) 2018-10-30 2023-12-21 Toto株式会社 静電チャック
CN111668148B (zh) * 2019-03-05 2024-09-03 Toto株式会社 静电吸盘及处理装置
JP7441404B2 (ja) * 2019-03-05 2024-03-01 Toto株式会社 静電チャック、および処理装置
JP7291046B2 (ja) 2019-09-18 2023-06-14 新光電気工業株式会社 基板固定装置
JP7429208B2 (ja) * 2021-08-17 2024-02-07 日本碍子株式会社 ウエハ載置台
JP7715464B2 (ja) * 2021-09-02 2025-07-30 東京エレクトロン株式会社 基板処理装置
US12341048B2 (en) * 2021-11-29 2025-06-24 Applied Materials, Inc. Porous plug for electrostatic chuck gas delivery
JP7514817B2 (ja) * 2021-12-27 2024-07-11 日本碍子株式会社 半導体製造装置用部材
CN120513512A (zh) * 2023-01-26 2025-08-19 日本碍子株式会社 晶片载放台

Similar Documents

Publication Publication Date Title
JPH10242255A (ja) 真空吸着装置
TWD228948S (zh) 基座
JP2019027944A5 (https=)
JP4096636B2 (ja) ウエハ支持治具およびそれを用いた半導体素子製造方法
TWD209150S (zh) 基座軸
JPWO2024166181A5 (https=)
TWD221438S (zh) 固態硬碟儲存裝置
TWI636337B (zh) 基板保持裝置、基板保持構件及基板保持方法
JPWO2021065738A5 (https=)
JPWO2022004046A5 (https=)
JP2018095959A5 (https=)
JP2022160428A5 (https=)
JP2005534326A5 (https=)
US2662804A (en) Recording disk clamping device
JP2004001409A5 (https=)
TWD223194S (zh) 固態硬碟儲存裝置
CN111180294A (zh) 一种吸气剂薄膜的加工衬底和加工工艺
JP2019533309A (ja) 熱接触が制御された加熱装置
JP2022020424A5 (https=)
JPS63140085A (ja) 成膜装置
CN108950487B (zh) 一种半导体芯片电子束蒸发装置及其安装方法
JP2020031093A (ja) 半導体基板の製造方法
JP3853453B2 (ja) 気相成長用縦型サセプター
TWI829418B (zh) 晶圓磁吸定位機構以及包含其的晶圓磁吸定位治具
CN115734818A (zh) 检测芯片、检测装置及制备和操作检测芯片的方法