JPWO2023203894A5 - - Google Patents

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Publication number
JPWO2023203894A5
JPWO2023203894A5 JP2024516119A JP2024516119A JPWO2023203894A5 JP WO2023203894 A5 JPWO2023203894 A5 JP WO2023203894A5 JP 2024516119 A JP2024516119 A JP 2024516119A JP 2024516119 A JP2024516119 A JP 2024516119A JP WO2023203894 A5 JPWO2023203894 A5 JP WO2023203894A5
Authority
JP
Japan
Prior art keywords
trench
floating
protection
insulating layer
outer periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024516119A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023203894A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/008033 external-priority patent/WO2023203894A1/ja
Publication of JPWO2023203894A1 publication Critical patent/JPWO2023203894A1/ja
Publication of JPWO2023203894A5 publication Critical patent/JPWO2023203894A5/ja
Pending legal-status Critical Current

Links

JP2024516119A 2022-04-21 2023-03-03 Pending JPWO2023203894A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022070179 2022-04-21
PCT/JP2023/008033 WO2023203894A1 (ja) 2022-04-21 2023-03-03 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2023203894A1 JPWO2023203894A1 (https=) 2023-10-26
JPWO2023203894A5 true JPWO2023203894A5 (https=) 2025-01-07

Family

ID=88419774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024516119A Pending JPWO2023203894A1 (https=) 2022-04-21 2023-03-03

Country Status (4)

Country Link
US (1) US20250040223A1 (https=)
JP (1) JPWO2023203894A1 (https=)
CN (1) CN119054085A (https=)
WO (1) WO2023203894A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025173150A1 (ja) * 2024-02-15 2025-08-21 三菱電機株式会社 半導体装置及び半導体装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5422930B2 (ja) * 2008-06-30 2014-02-19 株式会社デンソー 半導体装置
US8519477B2 (en) * 2009-11-20 2013-08-27 Force Mos Technology Co., Ltd. Trench MOSFET with trenched floating gates and trenched channel stop gates in termination
JP2019117867A (ja) * 2017-12-27 2019-07-18 株式会社東芝 半導体装置
JP7223543B2 (ja) * 2018-10-05 2023-02-16 ローム株式会社 半導体装置
US11004969B2 (en) * 2019-10-07 2021-05-11 Nami MOS CO., LTD. Trench MOSFETs having dummy cells for avalanche capability improvement

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