JPWO2023100851A5 - - Google Patents

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Publication number
JPWO2023100851A5
JPWO2023100851A5 JP2023564993A JP2023564993A JPWO2023100851A5 JP WO2023100851 A5 JPWO2023100851 A5 JP WO2023100851A5 JP 2023564993 A JP2023564993 A JP 2023564993A JP 2023564993 A JP2023564993 A JP 2023564993A JP WO2023100851 A5 JPWO2023100851 A5 JP WO2023100851A5
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JP
Japan
Prior art keywords
edge portion
recess
plan
view
vibration
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JP2023564993A
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English (en)
Japanese (ja)
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JPWO2023100851A1 (https=
JP7646029B2 (ja
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Priority claimed from PCT/JP2022/043912 external-priority patent/WO2023100851A1/ja
Publication of JPWO2023100851A1 publication Critical patent/JPWO2023100851A1/ja
Publication of JPWO2023100851A5 publication Critical patent/JPWO2023100851A5/ja
Application granted granted Critical
Publication of JP7646029B2 publication Critical patent/JP7646029B2/ja
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JP2023564993A 2021-11-30 2022-11-29 圧電振動素子及び圧電デバイス Active JP7646029B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021194001 2021-11-30
JP2021194001 2021-11-30
PCT/JP2022/043912 WO2023100851A1 (ja) 2021-11-30 2022-11-29 圧電振動素子及び圧電デバイス

Publications (3)

Publication Number Publication Date
JPWO2023100851A1 JPWO2023100851A1 (https=) 2023-06-08
JPWO2023100851A5 true JPWO2023100851A5 (https=) 2024-07-24
JP7646029B2 JP7646029B2 (ja) 2025-03-14

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ID=86612360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023564993A Active JP7646029B2 (ja) 2021-11-30 2022-11-29 圧電振動素子及び圧電デバイス

Country Status (4)

Country Link
US (1) US20250023549A1 (https=)
JP (1) JP7646029B2 (https=)
CN (1) CN118251839A (https=)
WO (1) WO2023100851A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025075025A1 (ja) * 2023-10-06 2025-04-10 京セラ株式会社 圧電振動素子及び圧電デバイス
WO2025234414A1 (ja) * 2024-05-10 2025-11-13 京セラ株式会社 圧電振動素子及び圧電デバイス

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3767425B2 (ja) 2001-06-13 2006-04-19 セイコーエプソン株式会社 圧電振動片及び圧電デバイス
JP3991304B2 (ja) 2001-06-14 2007-10-17 セイコーエプソン株式会社 圧電振動片および圧電振動子
JP2003060480A (ja) 2001-08-21 2003-02-28 Toyo Commun Equip Co Ltd 超薄板ａｔカット水晶共振素子
JP3888107B2 (ja) 2001-08-31 2007-02-28 株式会社大真空 圧電振動デバイス用圧電振動板のエッチング方法
JP2006140887A (ja) 2004-11-15 2006-06-01 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器
JP2018006901A (ja) 2016-06-29 2018-01-11 株式会社大真空 水晶振動板、および水晶振動デバイス
JP7240250B2 (ja) 2019-05-23 2023-03-15 京セラ株式会社 振動素子用圧電片、圧電振動素子及び圧電デバイス

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