CN118251839A - 压电振动元件以及压电器件 - Google Patents

压电振动元件以及压电器件 Download PDF

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Publication number
CN118251839A
CN118251839A CN202280075090.3A CN202280075090A CN118251839A CN 118251839 A CN118251839 A CN 118251839A CN 202280075090 A CN202280075090 A CN 202280075090A CN 118251839 A CN118251839 A CN 118251839A
Authority
CN
China
Prior art keywords
edge
edge portion
region
vibration
plan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280075090.3A
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English (en)
Chinese (zh)
Inventor
后藤正彦
村山智纪
内田翔平
石川广幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Publication of CN118251839A publication Critical patent/CN118251839A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202280075090.3A 2021-11-30 2022-11-29 压电振动元件以及压电器件 Pending CN118251839A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-194001 2021-11-30
JP2021194001 2021-11-30
PCT/JP2022/043912 WO2023100851A1 (ja) 2021-11-30 2022-11-29 圧電振動素子及び圧電デバイス

Publications (1)

Publication Number Publication Date
CN118251839A true CN118251839A (zh) 2024-06-25

Family

ID=86612360

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280075090.3A Pending CN118251839A (zh) 2021-11-30 2022-11-29 压电振动元件以及压电器件

Country Status (4)

Country Link
US (1) US20250023549A1 (https=)
JP (1) JP7646029B2 (https=)
CN (1) CN118251839A (https=)
WO (1) WO2023100851A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025075025A1 (ja) * 2023-10-06 2025-04-10 京セラ株式会社 圧電振動素子及び圧電デバイス
WO2025234414A1 (ja) * 2024-05-10 2025-11-13 京セラ株式会社 圧電振動素子及び圧電デバイス

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3767425B2 (ja) 2001-06-13 2006-04-19 セイコーエプソン株式会社 圧電振動片及び圧電デバイス
JP3991304B2 (ja) 2001-06-14 2007-10-17 セイコーエプソン株式会社 圧電振動片および圧電振動子
JP2003060480A (ja) 2001-08-21 2003-02-28 Toyo Commun Equip Co Ltd 超薄板ａｔカット水晶共振素子
JP3888107B2 (ja) 2001-08-31 2007-02-28 株式会社大真空 圧電振動デバイス用圧電振動板のエッチング方法
JP2006140887A (ja) 2004-11-15 2006-06-01 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器
JP2018006901A (ja) 2016-06-29 2018-01-11 株式会社大真空 水晶振動板、および水晶振動デバイス
JP7240250B2 (ja) 2019-05-23 2023-03-15 京セラ株式会社 振動素子用圧電片、圧電振動素子及び圧電デバイス

Also Published As

Publication number Publication date
JPWO2023100851A1 (https=) 2023-06-08
JP7646029B2 (ja) 2025-03-14
WO2023100851A1 (ja) 2023-06-08
US20250023549A1 (en) 2025-01-16

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