JPWO2023042359A5 - - Google Patents
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- Publication number
- JPWO2023042359A5 JPWO2023042359A5 JP2022522573A JP2022522573A JPWO2023042359A5 JP WO2023042359 A5 JPWO2023042359 A5 JP WO2023042359A5 JP 2022522573 A JP2022522573 A JP 2022522573A JP 2022522573 A JP2022522573 A JP 2022522573A JP WO2023042359 A5 JPWO2023042359 A5 JP WO2023042359A5
- Authority
- JP
- Japan
- Prior art keywords
- length
- source
- semiconductor device
- source region
- lxm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000012535 impurity Substances 0.000 claims description 18
- 210000000746 body region Anatomy 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 230000005669 field effect Effects 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000004904 shortening Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/034220 WO2023042359A1 (ja) | 2021-09-17 | 2021-09-17 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7114824B1 JP7114824B1 (ja) | 2022-08-08 |
| JPWO2023042359A1 JPWO2023042359A1 (https=) | 2023-03-23 |
| JPWO2023042359A5 true JPWO2023042359A5 (https=) | 2023-08-22 |
Family
ID=82748809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022522573A Active JP7114824B1 (ja) | 2021-09-17 | 2021-09-17 | 半導体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11637176B2 (https=) |
| JP (1) | JP7114824B1 (https=) |
| KR (1) | KR102434890B1 (https=) |
| CN (1) | CN115152032B (https=) |
| WO (1) | WO2023042359A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7566609B2 (ja) * | 2020-12-11 | 2024-10-15 | 株式会社東芝 | 半導体装置 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05304297A (ja) | 1992-01-29 | 1993-11-16 | Nec Corp | 電力用半導体装置およびその製造方法 |
| JP4194890B2 (ja) * | 2003-06-24 | 2008-12-10 | 株式会社豊田中央研究所 | 半導体装置とその製造方法 |
| US7372088B2 (en) | 2004-01-27 | 2008-05-13 | Matsushita Electric Industrial Co., Ltd. | Vertical gate semiconductor device and method for fabricating the same |
| JP3999225B2 (ja) | 2004-01-27 | 2007-10-31 | 松下電器産業株式会社 | 半導体装置およびその製造方法 |
| DE102005014743B4 (de) | 2005-03-31 | 2013-12-05 | Infineon Technologies Austria Ag | MOS-Feldplattentrench-Transistoreinrichtung |
| JP5369372B2 (ja) * | 2005-11-28 | 2013-12-18 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
| JP5285242B2 (ja) * | 2007-07-04 | 2013-09-11 | ローム株式会社 | 半導体装置 |
| US20090272982A1 (en) * | 2008-03-03 | 2009-11-05 | Fuji Electric Device Technology Co., Ltd. | Trench gate type semiconductor device and method of producing the same |
| JP4670915B2 (ja) * | 2008-08-08 | 2011-04-13 | ソニー株式会社 | 半導体装置 |
| JP2013197122A (ja) * | 2012-03-15 | 2013-09-30 | Toshiba Corp | 半導体装置 |
| JP2013258333A (ja) * | 2012-06-13 | 2013-12-26 | Toshiba Corp | 電力用半導体装置 |
| US10608104B2 (en) | 2014-03-28 | 2020-03-31 | Infineon Technologies Ag | Trench transistor device |
| JP6871316B2 (ja) * | 2014-04-15 | 2021-05-12 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
| JP6566512B2 (ja) | 2014-04-15 | 2019-08-28 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
| JP6369173B2 (ja) * | 2014-04-17 | 2018-08-08 | 富士電機株式会社 | 縦型半導体装置およびその製造方法 |
| DE102014114832B4 (de) * | 2014-10-13 | 2020-06-18 | Infineon Technologies Austria Ag | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
| JP2016171341A (ja) * | 2016-05-26 | 2016-09-23 | ローム株式会社 | 半導体装置 |
| KR102259185B1 (ko) * | 2016-08-02 | 2021-06-01 | 누보톤 테크놀로지 재팬 가부시키가이샤 | 반도체 장치, 반도체 모듈, 및 반도체 패키지 장치 |
| JP6639365B2 (ja) | 2016-09-16 | 2020-02-05 | 株式会社東芝 | 半導体装置 |
| WO2018123799A1 (ja) * | 2016-12-27 | 2018-07-05 | パナソニックＩｐマネジメント株式会社 | 半導体装置 |
| JP6817116B2 (ja) * | 2017-03-14 | 2021-01-20 | エイブリック株式会社 | 半導体装置 |
| JP6870547B2 (ja) * | 2017-09-18 | 2021-05-12 | 株式会社デンソー | 半導体装置およびその製造方法 |
| JP6631934B1 (ja) * | 2018-06-19 | 2020-01-15 | パナソニックＩｐマネジメント株式会社 | 半導体装置 |
| TWI761740B (zh) * | 2018-12-19 | 2022-04-21 | 日商新唐科技日本股份有限公司 | 半導體裝置 |
| JP7140148B2 (ja) | 2019-02-27 | 2022-09-21 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
-
2021
- 2021-09-17 KR KR1020227022672A patent/KR102434890B1/ko active Active
- 2021-09-17 WO PCT/JP2021/034220 patent/WO2023042359A1/ja not_active Ceased
- 2021-09-17 CN CN202180008223.0A patent/CN115152032B/zh active Active
- 2021-09-17 JP JP2022522573A patent/JP7114824B1/ja active Active
-
2022
- 2022-07-07 US US17/859,799 patent/US11637176B2/en active Active
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