JPWO2022168618A1 - - Google Patents

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Publication number
JPWO2022168618A1
JPWO2022168618A1 JP2022579433A JP2022579433A JPWO2022168618A1 JP WO2022168618 A1 JPWO2022168618 A1 JP WO2022168618A1 JP 2022579433 A JP2022579433 A JP 2022579433A JP 2022579433 A JP2022579433 A JP 2022579433A JP WO2022168618 A1 JPWO2022168618 A1 JP WO2022168618A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022579433A
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Japanese (ja)
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Publication of JPWO2022168618A1 publication Critical patent/JPWO2022168618A1/ja
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/421Shapes or dispositions
    • H10W70/424Cross-sectional shapes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/421Shapes or dispositions
    • H10W70/424Cross-sectional shapes
    • H10W70/427Bent parts
    • H10W70/429Bent parts being the outer leads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/464Additional interconnections in combination with leadframes
    • H10W70/468Circuit boards
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/811Multiple chips on leadframes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00Arrangements for protection of devices
    • H10W42/121Arrangements for protection of devices protecting against mechanical damage
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • H10W72/07351Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
    • H10W72/07355Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/075Connecting or disconnecting of bond wires
    • H10W72/07541Controlling the environment, e.g. atmosphere composition or temperature
    • H10W72/07552Controlling the environment, e.g. atmosphere composition or temperature changes in structures or sizes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/351Materials of die-attach connectors
    • H10W72/352Materials of die-attach connectors comprising metals or metalloids, e.g. solders
    • H10W72/3528Intermetallic compounds
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/521Structures or relative sizes of bond wires
    • H10W72/527Multiple bond wires having different sizes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/541Dispositions of bond wires
    • H10W72/5449Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/551Materials of bond wires
    • H10W72/552Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/59Bond pads specially adapted therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/921Structures or relative sizes of bond pads
    • H10W72/926Multiple bond pads having different sizes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/941Dispositions of bond pads
    • H10W72/944Dispositions of multiple bond pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/951Materials of bond pads
    • H10W72/952Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/753Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/755Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a laterally-adjacent insulating package substrate, interpose or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
JP2022579433A 2021-02-03 2022-01-20 Pending JPWO2022168618A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021015729 2021-02-03
PCT/JP2022/001961 WO2022168618A1 (ja) 2021-02-03 2022-01-20 半導体装置

Publications (1)

Publication Number Publication Date
JPWO2022168618A1 true JPWO2022168618A1 (https=) 2022-08-11

Family

ID=82741446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022579433A Pending JPWO2022168618A1 (https=) 2021-02-03 2022-01-20

Country Status (5)

Country Link
US (1) US20240071875A1 (https=)
JP (1) JPWO2022168618A1 (https=)
CN (1) CN116686086A (https=)
DE (1) DE112022000361T5 (https=)
WO (1) WO2022168618A1 (https=)

Citations (15)

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JPH05304239A (ja) * 1992-04-27 1993-11-16 Kyocera Corp 半導体素子収納用パッケージ
JPH09312368A (ja) * 1996-05-22 1997-12-02 Hitachi Ltd 半導体装置の製造方法およびそれに使用されるリードフレーム
JP2002314030A (ja) * 2001-04-12 2002-10-25 Mitsubishi Electric Corp 半導体装置
JP2004146577A (ja) * 2002-10-24 2004-05-20 Renesas Technology Corp 半導体装置およびその製造方法
JP2004349397A (ja) * 2003-05-21 2004-12-09 Sharp Corp 半導体装置およびそれに用いられるリードフレーム
JP2007305671A (ja) * 2006-05-09 2007-11-22 Matsushita Electric Ind Co Ltd リードフレーム及びそれを用いた半導体装置
JP3146231U (ja) * 2008-08-28 2008-11-06 サンケン電気株式会社 リードフレームおよび半導体装置
JP2014207430A (ja) * 2013-03-21 2014-10-30 ローム株式会社 半導体装置
JP2014216459A (ja) * 2013-04-25 2014-11-17 三菱電機株式会社 半導体装置
JP2015106609A (ja) * 2013-11-29 2015-06-08 サンケン電気株式会社 半導体装置
JP2016072417A (ja) * 2014-09-30 2016-05-09 ルネサスエレクトロニクス株式会社 半導体装置
JP2018116995A (ja) * 2017-01-17 2018-07-26 三菱マテリアル株式会社 パワーモジュールの製造方法
WO2019167284A1 (ja) * 2018-03-02 2019-09-06 新電元工業株式会社 樹脂封止型半導体装置
WO2020012957A1 (ja) * 2018-07-12 2020-01-16 ローム株式会社 半導体装置
JP2020102523A (ja) * 2018-12-21 2020-07-02 トヨタ自動車株式会社 半導体モジュール製造方法

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JP4924411B2 (ja) 2007-12-27 2012-04-25 三菱電機株式会社 電力半導体装置
US8030743B2 (en) * 2008-01-07 2011-10-04 Fairchild Semiconductor Corporation Semiconductor package with an embedded printed circuit board and stacked die
JP4634498B2 (ja) * 2008-11-28 2011-02-16 三菱電機株式会社 電力用半導体モジュール
JP5793995B2 (ja) * 2011-06-28 2015-10-14 トヨタ自動車株式会社 リードフレーム、及び、パワーモジュール
JP2013258387A (ja) * 2012-05-15 2013-12-26 Rohm Co Ltd パワーモジュール半導体装置
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JP2015220429A (ja) * 2014-05-21 2015-12-07 ローム株式会社 半導体装置
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JP7077893B2 (ja) * 2018-09-21 2022-05-31 株式会社デンソー 半導体装置
CN118213346A (zh) * 2018-10-24 2024-06-18 罗姆股份有限公司 半导体装置
JP7045975B2 (ja) * 2018-11-20 2022-04-01 三菱電機株式会社 半導体装置およびその製造方法、ならびに電力変換装置
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JP7170614B2 (ja) * 2019-09-18 2022-11-14 株式会社東芝 半導体装置
JP7358921B2 (ja) * 2019-11-08 2023-10-11 富士電機株式会社 半導体モジュール及び半導体モジュールの製造方法
KR102703392B1 (ko) * 2019-11-25 2024-09-04 현대자동차주식회사 전력모듈 및 전력모듈에 적용되는 기판 구조
JP7729024B2 (ja) * 2020-03-12 2025-08-26 富士電機株式会社 半導体装置の製造方法及び半導体装置
JP7332528B2 (ja) * 2020-04-17 2023-08-23 三菱電機株式会社 半導体装置および半導体装置の製造方法
CN115380378A (zh) * 2020-04-17 2022-11-22 罗姆股份有限公司 半导体装置
CN115552602A (zh) * 2020-04-22 2022-12-30 罗姆股份有限公司 半导体装置

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05304239A (ja) * 1992-04-27 1993-11-16 Kyocera Corp 半導体素子収納用パッケージ
JPH09312368A (ja) * 1996-05-22 1997-12-02 Hitachi Ltd 半導体装置の製造方法およびそれに使用されるリードフレーム
JP2002314030A (ja) * 2001-04-12 2002-10-25 Mitsubishi Electric Corp 半導体装置
JP2004146577A (ja) * 2002-10-24 2004-05-20 Renesas Technology Corp 半導体装置およびその製造方法
JP2004349397A (ja) * 2003-05-21 2004-12-09 Sharp Corp 半導体装置およびそれに用いられるリードフレーム
JP2007305671A (ja) * 2006-05-09 2007-11-22 Matsushita Electric Ind Co Ltd リードフレーム及びそれを用いた半導体装置
JP3146231U (ja) * 2008-08-28 2008-11-06 サンケン電気株式会社 リードフレームおよび半導体装置
JP2014207430A (ja) * 2013-03-21 2014-10-30 ローム株式会社 半導体装置
JP2014216459A (ja) * 2013-04-25 2014-11-17 三菱電機株式会社 半導体装置
JP2015106609A (ja) * 2013-11-29 2015-06-08 サンケン電気株式会社 半導体装置
JP2016072417A (ja) * 2014-09-30 2016-05-09 ルネサスエレクトロニクス株式会社 半導体装置
JP2018116995A (ja) * 2017-01-17 2018-07-26 三菱マテリアル株式会社 パワーモジュールの製造方法
WO2019167284A1 (ja) * 2018-03-02 2019-09-06 新電元工業株式会社 樹脂封止型半導体装置
WO2020012957A1 (ja) * 2018-07-12 2020-01-16 ローム株式会社 半導体装置
JP2020102523A (ja) * 2018-12-21 2020-07-02 トヨタ自動車株式会社 半導体モジュール製造方法

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Publication number Publication date
CN116686086A (zh) 2023-09-01
US20240071875A1 (en) 2024-02-29
DE112022000361T5 (de) 2023-10-12
WO2022168618A1 (ja) 2022-08-11

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