JPWO2021234809A5 - - Google Patents

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Publication number
JPWO2021234809A5
JPWO2021234809A5 JP2022523786A JP2022523786A JPWO2021234809A5 JP WO2021234809 A5 JPWO2021234809 A5 JP WO2021234809A5 JP 2022523786 A JP2022523786 A JP 2022523786A JP 2022523786 A JP2022523786 A JP 2022523786A JP WO2021234809 A5 JPWO2021234809 A5 JP WO2021234809A5
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JP
Japan
Prior art keywords
substrate
lid
substrates
closed
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022523786A
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English (en)
Japanese (ja)
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JP7562657B2 (ja
JPWO2021234809A1 (https=
Filing date
Publication date
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Priority claimed from PCT/JP2020/019740 external-priority patent/WO2021234809A1/ja
Publication of JPWO2021234809A1 publication Critical patent/JPWO2021234809A1/ja
Publication of JPWO2021234809A5 publication Critical patent/JPWO2021234809A5/ja
Application granted granted Critical
Publication of JP7562657B2 publication Critical patent/JP7562657B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022523786A 2020-05-19 2020-05-19 基板収納容器 Active JP7562657B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/019740 WO2021234809A1 (ja) 2020-05-19 2020-05-19 基板収納容器

Publications (3)

Publication Number Publication Date
JPWO2021234809A1 JPWO2021234809A1 (https=) 2021-11-25
JPWO2021234809A5 true JPWO2021234809A5 (https=) 2023-02-27
JP7562657B2 JP7562657B2 (ja) 2024-10-07

Family

ID=78708560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022523786A Active JP7562657B2 (ja) 2020-05-19 2020-05-19 基板収納容器

Country Status (4)

Country Link
US (1) US12431377B2 (https=)
JP (1) JP7562657B2 (https=)
TW (1) TWI883193B (https=)
WO (1) WO2021234809A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1067892S1 (en) * 2021-09-06 2025-03-25 Gudeng Precision Industrial Co., Ltd. Box for transporting boards
TWD223990S (zh) * 2022-03-03 2023-03-01 家登精密工業股份有限公司 前開式晶圓載具
TWI848670B (zh) * 2022-06-30 2024-07-11 家登精密工業股份有限公司 保護包裝組件
US20240412994A1 (en) * 2023-06-06 2024-12-12 Entegris, Inc. Substrate container, and door locking mechanism thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11115985A (ja) 1997-10-14 1999-04-27 Kakizaki Seisakusho:Kk 帯電防止型薄板収納容器
JP2011018771A (ja) * 2009-07-09 2011-01-27 Shin Etsu Polymer Co Ltd 基板収納容器
JP6114193B2 (ja) * 2010-10-20 2017-04-12 インテグリス・インコーポレーテッド ドア・ガイドおよびシールを備えたウェーハ容器
WO2013069088A1 (ja) * 2011-11-08 2013-05-16 ミライアル株式会社 ウェーハ収納容器
JP2016048757A (ja) 2014-08-28 2016-04-07 ミライアル株式会社 基板収納容器
SG11201707411QA (en) 2015-04-10 2017-10-30 Shinetsu Polymer Co Substrate storage container
US11309200B2 (en) 2017-02-27 2022-04-19 Miraial Co., Ltd. Substrate storage container

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