JPWO2020255474A5 - - Google Patents
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- Publication number
- JPWO2020255474A5 JPWO2020255474A5 JP2021527343A JP2021527343A JPWO2020255474A5 JP WO2020255474 A5 JPWO2020255474 A5 JP WO2020255474A5 JP 2021527343 A JP2021527343 A JP 2021527343A JP 2021527343 A JP2021527343 A JP 2021527343A JP WO2020255474 A5 JPWO2020255474 A5 JP WO2020255474A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal
- joint portion
- titanium
- main component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 239000010936 titanium Substances 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000005496 eutectics Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019113800 | 2019-06-19 | ||
| JP2019113800 | 2019-06-19 | ||
| PCT/JP2020/004014 WO2020255474A1 (ja) | 2019-06-19 | 2020-02-04 | 共振装置及び共振装置製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2020255474A1 JPWO2020255474A1 (https=) | 2020-12-24 |
| JPWO2020255474A5 true JPWO2020255474A5 (https=) | 2022-01-20 |
| JP7265729B2 JP7265729B2 (ja) | 2023-04-27 |
Family
ID=74039994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021527343A Active JP7265729B2 (ja) | 2019-06-19 | 2020-02-04 | 共振装置及び共振装置製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12252393B2 (https=) |
| JP (1) | JP7265729B2 (https=) |
| CN (1) | CN113632375A (https=) |
| WO (1) | WO2020255474A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11601111B2 (en) * | 2020-06-26 | 2023-03-07 | Xiang Zheng Tu | Piezoelectric MEMS resonators based on porous silicon technologies |
| JP7493709B2 (ja) * | 2020-11-06 | 2024-06-03 | 株式会社村田製作所 | 共振装置及び共振装置製造方法 |
| JP2024002471A (ja) * | 2022-06-24 | 2024-01-11 | セイコーエプソン株式会社 | 振動デバイス |
| IT202200016536A1 (it) * | 2022-08-03 | 2024-02-03 | St Microelectronics Srl | Dispositivo mems con cappuccio perfezionato e relativo processo di fabbricazione |
| US20250197195A1 (en) * | 2023-12-13 | 2025-06-19 | AAC Technologies Pte. Ltd. | Mems device and manufacturing method thereof |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5352914A (en) | 1992-08-03 | 1994-10-04 | Hughes Aircraft Company | Field-effect transistor with structure for suppressing hot-electron effects, and method of fabricating the transistor |
| JPH10242795A (ja) * | 1997-02-26 | 1998-09-11 | Matsushita Electric Ind Co Ltd | 圧電素子とその製造方法 |
| JP2001267875A (ja) * | 2000-03-22 | 2001-09-28 | Seiko Epson Corp | 水晶振動子及びその製造方法 |
| JP2005276978A (ja) * | 2004-03-24 | 2005-10-06 | Nissan Motor Co Ltd | オーミック電極構造体の製造方法、オーミック電極構造体、半導体装置の製造方法および半導体装置 |
| JP4091561B2 (ja) * | 2004-03-29 | 2008-05-28 | 株式会社東芝 | 薄膜圧電共振器及びその製造方法 |
| JP4933866B2 (ja) * | 2006-08-31 | 2012-05-16 | シチズンファインテックミヨタ株式会社 | 圧電振動子の製造方法 |
| JP5122888B2 (ja) * | 2007-08-27 | 2013-01-16 | セイコーインスツル株式会社 | 発振子、発振子の製造方法、及び発振器 |
| JP2013055632A (ja) * | 2011-08-11 | 2013-03-21 | Nippon Dempa Kogyo Co Ltd | 気密封止パッケージ及びこの気密封止パッケージの製造方法 |
| WO2016158056A1 (ja) * | 2015-03-31 | 2016-10-06 | 株式会社村田製作所 | 共振装置 |
| WO2017047663A1 (ja) * | 2015-09-17 | 2017-03-23 | 株式会社村田製作所 | Ｍｅｍｓデバイス、及びその製造方法 |
-
2020
- 2020-02-04 CN CN202080023672.8A patent/CN113632375A/zh active Pending
- 2020-02-04 JP JP2021527343A patent/JP7265729B2/ja active Active
- 2020-02-04 WO PCT/JP2020/004014 patent/WO2020255474A1/ja not_active Ceased
-
2021
- 2021-09-08 US US17/469,561 patent/US12252393B2/en active Active
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