JPWO2020027121A1 - Memsデバイス - Google Patents
Memsデバイス Download PDFInfo
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- JPWO2020027121A1 JPWO2020027121A1 JP2020534666A JP2020534666A JPWO2020027121A1 JP WO2020027121 A1 JPWO2020027121 A1 JP WO2020027121A1 JP 2020534666 A JP2020534666 A JP 2020534666A JP 2020534666 A JP2020534666 A JP 2020534666A JP WO2020027121 A1 JPWO2020027121 A1 JP WO2020027121A1
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 219
- 239000002184 metal Substances 0.000 claims abstract description 219
- 239000000758 substrate Substances 0.000 claims abstract description 66
- 239000006023 eutectic alloy Substances 0.000 claims abstract description 16
- 229910052732 germanium Inorganic materials 0.000 claims description 32
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 32
- 229910052782 aluminium Inorganic materials 0.000 claims description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 13
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 43
- 230000005496 eutectics Effects 0.000 description 24
- 239000010409 thin film Substances 0.000 description 23
- 239000010931 gold Substances 0.000 description 18
- 230000001681 protective effect Effects 0.000 description 17
- 238000012986 modification Methods 0.000 description 13
- 230000004048 modification Effects 0.000 description 13
- 230000003071 parasitic effect Effects 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 9
- 229910052737 gold Inorganic materials 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 239000010949 copper Substances 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- -1 scandium aluminum Chemical compound 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 229910000927 Ge alloy Inorganic materials 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 2
- 238000000550 scanning electron microscopy energy dispersive X-ray spectroscopy Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2468—Tuning fork resonators
- H03H9/2478—Single-Ended Tuning Fork resonators
- H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0006—Interconnects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
- B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
- H03H9/2457—Clamped-free beam resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0271—Resonators; ultrasonic resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/07—Interconnects
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
Abstract
Description
まず、図1及び図2を参照しつつ、本発明の一実施形態に係る共振装置1の概略構成について説明する。図1は、本発明の一実施形態に係る共振装置1の外観を概略的に示す斜視図である。図2は、図1に示した共振装置1の構造を概略的に示す分解斜視図である。
Claims (9)
- 素子と、前記素子に電気的に接続する接続配線とを含む基板と、
前記接続配線に電気的に接続する接続部であって、第1金属と前記基板側に設けられる第2金属との共晶合金で構成される接続部と、を備え、
前記基板の主面を平面視したときに、前記接続配線の幅は前記接続部の幅より小さい、
MEMSデバイス。 - 前記接続配線の幅は、前記接続部の幅の1/2以下である、
請求項1に記載のMEMSデバイス。 - 前記基板は、前記接続配線と前記素子とを電気的に接続させるコンタクト電極をさらに含み、
前記平面視において、前記接続部から前記コンタクト電極までの前記接続配線の長さは、前記接続部と前記コンタクト電極との直線距離の5倍以上である、
請求項1又は2に記載のMEMSデバイス。 - 前記基板は、前記接続配線と前記素子とを電気的に接続させるコンタクト電極をさらに含み、
前記平面視において、前記接続部から前記コンタクト電極までの前記接続配線の長さは、前記接続配線の幅の3倍以上である、
請求項1又は2に記載のMEMSデバイス。 - 前記接続配線は、前記平面視において前記接続部と前記素子との間に形成される電極パッドをさらに含む、
請求項1から4のいずれか一項に記載のMEMSデバイス。 - 前記基板は、前記主面に形成される圧電膜をさらに含み、
前記接続配線は、前記圧電膜上に形成される、
請求項1から5のいずれか一項に記載のMEMSデバイス。 - 前記平面視において、前記接続配線は、分岐及び合流を有する形状、若しくはミアンダ形状を有する、
請求項1から6のいずれか一項に記載のMEMSデバイス。 - 前記第1金属はゲルマニウムであり、前記第2金属はアルミニウムである、
請求項1から7のいずれか一項に記載のMEMSデバイス。 - 前記接続配線の材料、アルミニウムである、
請求項8に記載のMEMSデバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018146029 | 2018-08-02 | ||
JP2018146029 | 2018-08-02 | ||
PCT/JP2019/029818 WO2020027121A1 (ja) | 2018-08-02 | 2019-07-30 | Memsデバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020027121A1 true JPWO2020027121A1 (ja) | 2021-08-02 |
JP7015484B2 JP7015484B2 (ja) | 2022-02-03 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020534666A Active JP7015484B2 (ja) | 2018-08-02 | 2019-07-30 | Memsデバイス |
Country Status (4)
Country | Link |
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US (1) | US11909379B2 (ja) |
JP (1) | JP7015484B2 (ja) |
CN (1) | CN112335178B (ja) |
WO (1) | WO2020027121A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020049789A1 (ja) * | 2018-09-03 | 2020-03-12 | 株式会社村田製作所 | 共振子及びそれを備えた共振装置 |
US11371133B2 (en) * | 2020-07-17 | 2022-06-28 | Taiwan Semiconductor Manufacturing Company Limited | Undercut-free patterned aluminum nitride structure and methods for forming the same |
CN113063408B (zh) * | 2021-03-15 | 2022-10-28 | 西安交通大学 | 一种基于平面全息换能器的超声悬浮陀螺仪 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016158056A1 (ja) * | 2015-03-31 | 2016-10-06 | 株式会社村田製作所 | 共振装置 |
JP2016201624A (ja) * | 2015-04-08 | 2016-12-01 | 日本電波工業株式会社 | 圧電デバイス |
WO2017047663A1 (ja) * | 2015-09-17 | 2017-03-23 | 株式会社村田製作所 | Memsデバイス、及びその製造方法 |
WO2017208866A1 (ja) * | 2016-05-31 | 2017-12-07 | 株式会社村田製作所 | 水晶振動子及びその製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2994342B1 (ja) * | 1998-07-31 | 1999-12-27 | 福島日本電気株式会社 | 電圧制御発振器 |
JP2012060628A (ja) * | 2010-08-07 | 2012-03-22 | Nippon Dempa Kogyo Co Ltd | 圧電デバイス及びその製造方法 |
JP6017189B2 (ja) * | 2012-06-12 | 2016-10-26 | 日本電波工業株式会社 | 圧電振動片及び圧電デバイス |
JP6119134B2 (ja) * | 2012-07-19 | 2017-04-26 | セイコーエプソン株式会社 | 振動片、振動子、発振器および電子機器 |
WO2014027457A1 (ja) * | 2012-08-15 | 2014-02-20 | 日本電気株式会社 | 電流抑制素子及び電流抑制方法 |
-
2019
- 2019-07-30 WO PCT/JP2019/029818 patent/WO2020027121A1/ja active Application Filing
- 2019-07-30 JP JP2020534666A patent/JP7015484B2/ja active Active
- 2019-07-30 CN CN201980041750.4A patent/CN112335178B/zh active Active
-
2020
- 2020-12-01 US US17/108,007 patent/US11909379B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016158056A1 (ja) * | 2015-03-31 | 2016-10-06 | 株式会社村田製作所 | 共振装置 |
JP2016201624A (ja) * | 2015-04-08 | 2016-12-01 | 日本電波工業株式会社 | 圧電デバイス |
WO2017047663A1 (ja) * | 2015-09-17 | 2017-03-23 | 株式会社村田製作所 | Memsデバイス、及びその製造方法 |
WO2017208866A1 (ja) * | 2016-05-31 | 2017-12-07 | 株式会社村田製作所 | 水晶振動子及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US11909379B2 (en) | 2024-02-20 |
US20210083647A1 (en) | 2021-03-18 |
JP7015484B2 (ja) | 2022-02-03 |
CN112335178B (zh) | 2024-02-13 |
WO2020027121A1 (ja) | 2020-02-06 |
CN112335178A (zh) | 2021-02-05 |
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