JPWO2019182913A5 - - Google Patents
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- JPWO2019182913A5 JPWO2019182913A5 JP2020550765A JP2020550765A JPWO2019182913A5 JP WO2019182913 A5 JPWO2019182913 A5 JP WO2019182913A5 JP 2020550765 A JP2020550765 A JP 2020550765A JP 2020550765 A JP2020550765 A JP 2020550765A JP WO2019182913 A5 JPWO2019182913 A5 JP WO2019182913A5
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Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862645685P | 2018-03-20 | 2018-03-20 | |
US62/645,685 | 2018-03-20 | ||
US201962787607P | 2019-01-02 | 2019-01-02 | |
US201962787608P | 2019-01-02 | 2019-01-02 | |
US62/787,607 | 2019-01-02 | ||
US62/787,608 | 2019-01-02 | ||
US201962788195P | 2019-01-04 | 2019-01-04 | |
US62/788,195 | 2019-01-04 | ||
PCT/US2019/022608 WO2019182913A1 (en) | 2018-03-20 | 2019-03-15 | Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021518674A JP2021518674A (ja) | 2021-08-02 |
JPWO2019182913A5 true JPWO2019182913A5 (ko) | 2022-03-23 |
JP7348440B2 JP7348440B2 (ja) | 2023-09-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020550765A Active JP7348440B2 (ja) | 2018-03-20 | 2019-03-15 | 統合的な半導体処理モジュールを組み込んだ自己認識及び補正異種プラットフォーム及びその使用方法 |
Country Status (7)
Country | Link |
---|---|
US (9) | US20200083070A1 (ko) |
JP (1) | JP7348440B2 (ko) |
KR (3) | KR20200123480A (ko) |
CN (1) | CN112074940A (ko) |
SG (1) | SG11202009105YA (ko) |
TW (5) | TW202004993A (ko) |
WO (2) | WO2019182913A1 (ko) |
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2019
- 2019-03-15 JP JP2020550765A patent/JP7348440B2/ja active Active
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- 2019-03-15 CN CN201980029791.1A patent/CN112074940A/zh active Pending
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