JPWO2018055883A1 - 天井搬送システム、及び天井搬送車 - Google Patents
天井搬送システム、及び天井搬送車 Download PDFInfo
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- JPWO2018055883A1 JPWO2018055883A1 JP2018540651A JP2018540651A JPWO2018055883A1 JP WO2018055883 A1 JPWO2018055883 A1 JP WO2018055883A1 JP 2018540651 A JP2018540651 A JP 2018540651A JP 2018540651 A JP2018540651 A JP 2018540651A JP WO2018055883 A1 JPWO2018055883 A1 JP WO2018055883A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
- B66C1/10—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means
- B66C1/22—Rigid members, e.g. L-shaped members, with parts engaging the under surface of the loads; Crane hooks
- B66C1/28—Duplicate, e.g. pivoted, members engaging the loads from two sides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
図1及び図2は、第1実施形態に係る天井搬送システム100の一例を示す図である。図1は正面図であり、図2は側面図である。天井搬送システム100は、天井搬送車3と、第1載置部21と、第2載置部22と、第3載置部23と、を備える。天井搬送システム100は、例えば、半導体デバイスの製造工場に設置される。天井搬送システム100は、天井搬送車3により物品2を保持して搬送可能であり、また、天井搬送車3により物品2を第1載置部21、第2載置部22、及び第3載置部23に載置して、物品2を保管可能である。なお、本実施形態において、第3載置部23を設けるか否かは任意であるため、図1において一点鎖線で表している。
図5は、第2実施形態に係る天井搬送システム200の一例を示す図である。第2実施形態では、第1載置部21と第2載置部22とで高さ位置(Z方向の位置)が同一である点で第1実施形態とは異なっている。他の構成については、第1実施形態と同様であり、同一の符号を付してその説明を省略または簡略化する。以下、第1実施形態との相違点を中心に説明する。
R1・・・第1突出量
R2・・・第2突出量
2・・・物品
3・・・天井搬送車
5・・・走行駆動部
6・・・走行レール
11・・・横出し機構
12・・・昇降駆動部
13・・・物品保持部
16・・・カバー
18・・・天井
21・・・第1載置部
22・・・第2載置部
23・・・第3載置部
31・・・第1フレーム(フレーム)
32・・・第2フレーム(フレーム)
131・・・フレーム
100、100A、100B、100C、200・・・天井搬送システム
Claims (10)
- 天井または天井近傍に敷設された軌道と、
前記軌道に沿って走行し、物品を保持する物品保持部と、前記物品保持部を昇降させる昇降駆動部と、前記物品保持部及び前記昇降駆動部を前記軌道の側方に突出可能な横出し機構と、を備える天井搬送車と、
前記軌道の下方かつ側方に配置され、前記横出し機構により前記物品保持部及び前記昇降駆動部を第1突出量まで突出した状態で前記物品保持部に保持した物品を載置可能であり、かつ、物品を載置した状態で前記物品保持部に物品を保持したまま前記横出し機構により前記物品保持部及び前記昇降駆動部を前記第1突出量より大きな第2突出量まで突出可能であって突出時に物品どうしが干渉しない高さに設定される第1載置部と、
前記軌道の下方かつ側方であって前記第1載置部の外側に配置され、前記横出し機構により前記物品保持部及び前記昇降駆動部を前記第2突出量まで突出した状態で前記物品保持部に保持した物品を載置可能な第2載置部と、を備える天井搬送システム。 - 前記第1載置部は、前記第1突出量まで前記軌道の側方に突出している際の前記物品保持部を基準として前記物品2個分の高さ寸法よりも下方に配置される、請求項1に記載の天井搬送システム。
- 前記第1載置部は、前記軌道の側方に向けて複数配置される、請求項1または請求項2に記載の天井搬送システム。
- 前記第2載置部は、前記第1載置部より上方に配置される、請求項1から請求項3のいずれか1項に記載の天井搬送システム。
- 前記第2載置部は、前記第1載置部に載置された物品の上端より上方に配置される、請求項4に記載の天井搬送システム。
- 前記第2載置部は、前記軌道に沿った方向において、前記第1載置部と同じ位置に配置される、請求項1から請求項5のいずれか1項に記載の天井搬送システム。
- 前記第1載置部及び前記第2載置部は、天井から吊り下げられて設置されるフレームにそれぞれ設けられる、請求項1から請求項6のいずれか1項に記載の天井搬送システム。
- 前記軌道の下方に配置され、前記物品保持部に保持した物品を載置可能な第3載置部を備える、請求項1から請求項7のいずれか1項に記載の天井搬送システム。
- 前記第3載置部は、前記第1載置部より下方に配置される、請求項8に記載の天井搬送システム。
- 請求項1から請求項9のいずれか1項に記載の天井搬送システムに用いられる、天井搬送車。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016186750 | 2016-09-26 | ||
JP2016186750 | 2016-09-26 | ||
PCT/JP2017/025902 WO2018055883A1 (ja) | 2016-09-26 | 2017-07-18 | 天井搬送システム、及び天井搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018055883A1 true JPWO2018055883A1 (ja) | 2019-10-03 |
JP6760386B2 JP6760386B2 (ja) | 2020-09-23 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018540651A Active JP6760386B2 (ja) | 2016-09-26 | 2017-07-18 | 天井搬送システム、及び天井搬送車 |
Country Status (5)
Country | Link |
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US (1) | US11052926B2 (ja) |
JP (1) | JP6760386B2 (ja) |
CN (1) | CN109791906B (ja) |
TW (1) | TWI724239B (ja) |
WO (1) | WO2018055883A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110520371B (zh) * | 2017-04-20 | 2022-05-03 | 美商美国大福公司 | 高密度储料器 |
WO2020017137A1 (ja) * | 2018-07-20 | 2020-01-23 | 村田機械株式会社 | 保管棚及び保管棚の設置方法 |
JP7099245B2 (ja) * | 2018-10-19 | 2022-07-12 | 株式会社ダイフク | 物品搬送車 |
KR102531956B1 (ko) * | 2019-01-25 | 2023-05-12 | 무라다기카이가부시끼가이샤 | 보관 시스템 |
CN113348140B (zh) * | 2019-01-25 | 2023-08-29 | 村田机械株式会社 | 保管系统 |
JP2021046273A (ja) * | 2019-09-17 | 2021-03-25 | 株式会社ダイフク | 物品搬送装置 |
KR102661744B1 (ko) * | 2020-11-05 | 2024-04-26 | 세메스 주식회사 | 컨테이너 반송 장치 및 이를 구비하는 컨테이너 저장 시스템 |
KR102534256B1 (ko) * | 2020-12-18 | 2023-05-17 | 세메스 주식회사 | 물품의 진동을 억제하기 위한 반송 차량 및 이를 포함하는 제조 공장의 물품 반송 시스템 |
KR20230033188A (ko) * | 2021-08-30 | 2023-03-08 | 삼성전자주식회사 | 웨이퍼 보관 시스템 |
CN113830473A (zh) * | 2021-09-17 | 2021-12-24 | 重庆鸿濛科技有限公司 | 放射源智能仓储系统 |
WO2023218757A1 (ja) * | 2022-05-10 | 2023-11-16 | 村田機械株式会社 | 天井搬送車 |
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JP2006282382A (ja) * | 2005-04-05 | 2006-10-19 | Murata Mach Ltd | 天井走行車システム |
JP2006282303A (ja) * | 2005-03-31 | 2006-10-19 | Murata Mach Ltd | 天井走行車システム |
JP2008127200A (ja) * | 2006-11-27 | 2008-06-05 | Murata Mach Ltd | 天井走行車 |
WO2012014561A1 (ja) * | 2010-07-27 | 2012-02-02 | ムラテックオートメーション株式会社 | 搬送システム |
JP2012114406A (ja) * | 2010-11-04 | 2012-06-14 | Muratec Automation Co Ltd | 搬送システム及び搬送方法 |
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JP4378655B2 (ja) * | 2007-03-07 | 2009-12-09 | 株式会社ダイフク | 物品処理設備 |
JP2011029550A (ja) | 2009-07-29 | 2011-02-10 | Muratec Automation Co Ltd | 搬送システム及びその設定方法 |
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JP5636849B2 (ja) * | 2010-09-30 | 2014-12-10 | 村田機械株式会社 | 移載システム |
JP5729415B2 (ja) | 2010-11-04 | 2015-06-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
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2017
- 2017-07-18 US US16/335,849 patent/US11052926B2/en active Active
- 2017-07-18 WO PCT/JP2017/025902 patent/WO2018055883A1/ja active Application Filing
- 2017-07-18 JP JP2018540651A patent/JP6760386B2/ja active Active
- 2017-07-18 CN CN201780057903.5A patent/CN109791906B/zh active Active
- 2017-09-19 TW TW106132113A patent/TWI724239B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006282303A (ja) * | 2005-03-31 | 2006-10-19 | Murata Mach Ltd | 天井走行車システム |
JP2006282382A (ja) * | 2005-04-05 | 2006-10-19 | Murata Mach Ltd | 天井走行車システム |
JP2008127200A (ja) * | 2006-11-27 | 2008-06-05 | Murata Mach Ltd | 天井走行車 |
WO2012014561A1 (ja) * | 2010-07-27 | 2012-02-02 | ムラテックオートメーション株式会社 | 搬送システム |
JP2012114406A (ja) * | 2010-11-04 | 2012-06-14 | Muratec Automation Co Ltd | 搬送システム及び搬送方法 |
Also Published As
Publication number | Publication date |
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US20190217873A1 (en) | 2019-07-18 |
WO2018055883A1 (ja) | 2018-03-29 |
CN109791906B (zh) | 2023-11-24 |
CN109791906A (zh) | 2019-05-21 |
US11052926B2 (en) | 2021-07-06 |
TW201814817A (zh) | 2018-04-16 |
JP6760386B2 (ja) | 2020-09-23 |
TWI724239B (zh) | 2021-04-11 |
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